U.S. patent application number 10/431379 was filed with the patent office on 2004-11-11 for multiple microlens system for image sensors or display units.
Invention is credited to Boettiger, Ulrich C., Wells, David.
Application Number | 20040223071 10/431379 |
Document ID | / |
Family ID | 33416440 |
Filed Date | 2004-11-11 |
United States Patent
Application |
20040223071 |
Kind Code |
A1 |
Wells, David ; et
al. |
November 11, 2004 |
Multiple microlens system for image sensors or display units
Abstract
An imager or display system with multiple lenses, which are
formed, patterned and shaped over one or more pixels in an imager
or display array. The multiple lenses provide for an improved
concentration of light being refracted onto a photosensitive area
or light diffused from a display pixel.
Inventors: |
Wells, David; (Boise,
ID) ; Boettiger, Ulrich C.; (Boise, ID) |
Correspondence
Address: |
DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP
2101 L STREET NW
WASHINGTON
DC
20037-1526
US
|
Family ID: |
33416440 |
Appl. No.: |
10/431379 |
Filed: |
May 8, 2003 |
Current U.S.
Class: |
348/340 |
Current CPC
Class: |
G02B 3/0056 20130101;
G02B 3/0018 20130101; G02B 3/0037 20130101; H01L 27/14627
20130101 |
Class at
Publication: |
348/340 |
International
Class: |
H04N 005/225 |
Claims
What is claimed as new and desired to be protected by Letters
Patent of the United States is:
1. A light detecting system comprising: a photosensitive region;
and a lens structure for focusing light onto said photosensitive
region, said lens structure comprising a first lens region and a
second lens region, said first and second lens regions having
different optical properties.
2. A light detecting system of claim 1, comprising a plurality of
said lens structures and a plurality of said photosensitive
regions, wherein each said lens structure is respectively provided
over each of said plurality of said photosensitive regions.
3. A light detecting system as in claim 2, wherein said second lens
region of each of said lens structures is noncontiguous with said
second lens regions of other lens structures.
4. A light detecting system as in claim 2, wherein said first and
second lens region is noncontiguous with other first and second
lens regions in other said lens structures.
5. A light detecting system as in claim 1, wherein said first lens
region is formed over said second lens region.
6. A light detecting system as in claim 1, wherein said first lens
region has a circular shape and is formed over said second lens
region.
7. A light detecting system as in claim 6 further comprising a
plurality of said photosensitive regions arranged in an array, each
photosensitive region having an associated lens structure.
8. A light detecting system as in claim 1, wherein said first lens
region is formed over said second lens region and is aspherically
shaped.
9. A light detecting system as in claim 1, wherein said lens
structure further comprises a third lens region.
10. A light detecting system of claim 9 further comprising a
plurality of said photosensitive regions and a plurality of said
lens structures, wherein each said lens structure is patterned and
formed over a respective one of said plurality of photosensitive
regions.
11. A light detecting system as in claim 9, wherein said third lens
region is formed over said first lens region.
12. A light detecting system as in claim 9, wherein said third lens
region has a circular shape and is formed over said first lens
region.
13. A light detecting system as in claim 9, wherein said third lens
region is formed over said first lens region and is aspherically
shaped.
14. A light detecting system as in claim 9, wherein said first,
second and third lens regions have different refraction
indexes.
15. A light detecting system as in claim 1, wherein said first and
second lens regions have different refraction indexes.
16. A light detecting system as in claim 1, wherein said
photosensitive region is a photodiode.
17. A light detecting system as in claim 1, wherein said second
lens region refracts a portion of the light refracted by said first
lens region.
18. A light detecting system as in claim 1, wherein said first lens
is formed in contact with said second lens region.
19. A light detecting system as in claim 1, wherein said first lens
region has a greater diameter than said second lens region.
20. A light detecting system as in claim 1, wherein said first lens
region is formed and patterned over a larger portion of said
photosensitive region than said second lens region.
21. A light detecting system as in claim 1, wherein one of said
first and second lens regions refracts a portion of incident light
that is not incident to the other of said first and second lens
region.
22. A light detecting system as in claim 1, wherein said first and
second lens regions are formed of respective first and second
materials.
23. A light detecting system as in claim 1, wherein said first and
second lens regions are formed of the same material but have
different geometric shapes.
24. A light detecting system as in claim 1, wherein said first and
second lens regions have a respective first and second optical
focus for incident light.
25. A light detecting system as in claim 1, wherein at least one of
said first and second lens regions is substantially aspherically
shaped.
26. A light detecting system as in claim 1, wherein at least one of
said first and second lens regions is substantially circularly
shaped.
27. A light detecting system as in claim 1, wherein at least one of
said first and second lens regions is substantially lenticularly
shaped.
28. A light detecting system as in claim 1, wherein at least one of
said first and second lens regions is substantially ovoid
shaped.
29. A light detecting system as in claim 1, wherein at least one of
said first and second lens regions is substantially rectangularly
shaped.
30. A light detecting system as in claim 1, wherein at least one of
said first and second lens regions is substantially hexagonally
shaped.
31. A light detecting system as in claim 1, wherein said first lens
region is formed above and in direct contact with a portion of said
second lens regions, and wherein said second lens region has a ring
shaped light refracting area.
32. A light detecting system as in claim 1, wherein a refractive
index of said first lens region is greater than a refractive index
of said second lens region.
33. A light detecting system as in claim 1, wherein said
photosensitive region is part of a CMOS imager.
34. A light detecting system as in claim 1, wherein said
photosensitive region is part of a CCD imager.
35. An imaging device comprising: an imaging array comprising a
plurality of photosensitive regions; and a plurality of lens
structures provided on said imaging array over respective ones of
said photosensitive region, more than one lens structure comprising
a plurality of microlenses, at least one of said microlenses
comprises a plurality of lens regions, at least two of said lens
regions having a different refractive property.
36. An imaging device as in claim 35, wherein at least two lens
regions have a circular shape.
37. An imaging device as in claim 36, wherein each topmost lens
region is not in contact with other topmost lens regions.
38. An imaging device as in claim 35, wherein at least two of said
plurality of lens regions are aspherically shaped.
39. An imaging device as in claim 35, wherein said photosensitive
regions comprise a photodiode.
40. An imaging device as in claim 35, wherein at least one lens
region refracts a portion of the light refracted by at least one
other lens region.
41. An imaging device as in claim 35, wherein at least one lens
region is formed in contact with another lens region.
42. An imaging device as in claim 35, wherein each of said lens
structures is noncontiguous with other of said lens structures.
43. An imaging device as in claim 42, wherein one of said plurality
of lens regions has a greater diameter than another associated lens
region.
44. An imaging device as in claim 35, wherein an upper lens region
of said plurality of lens regions in a lens structure is
noncontiguous with another upper lens region in at least one other
lens structure.
45. An imaging device as in claim 35, wherein one of said plurality
of said lens regions is formed and patterned over a larger portion
of said photosensitive region than another lens region in the same
lens structure.
46. An imaging device as in claim 35, wherein one of said plurality
of lens regions refracts a portion of incident light that is not
incident to another of said plurality of lens regions within the
same lens structure.
47. An imaging device as in claim 35, wherein said plurality of
lens regions are formed of more than one material.
48. An imaging device as in claim 35, wherein said plurality of
lens regions are formed of the same material, but have at least one
different geometric shape.
49. An imaging device as in claim 35, wherein each of said
plurality of lens regions has a first and second optical focus for
incident light.
50. An imaging device as in claim 35, wherein one of said plurality
of lens regions is formed above and in direct contact with a
portion of another lens region.
51. An imaging device as in claim 35, wherein one of said plurality
of lens regions has a ring shaped light refracting area.
52. An imaging device as in claim 35, wherein said photosensitive
regions are part of a CMOS imager.
53. An imaging device as in claim 35, wherein said photosensitive
regions are part of a CCD imager.
54. An imaging device as in claim 35, wherein one of said plurality
of lens regions within a same lens structure is formed above and in
direct contact with another one of said plurality of lens regions
and with a different diameter.
55. An imaging device as in claim 54, wherein at least one of said
lens plurality of lens regions within a same lens structure
comprises a ring shaped light condensing region.
56. An image processing system comprising: a processor coupled to a
memory device via a bus; and an imaging device coupled to said bus,
said device comprising: an imaging array containing a plurality of
photosensitive regions; and a plurality of lens structures provided
on said imaging array over respective ones of said photosensitive
region, at least one of said lens structures comprising a plurality
of microlenses, at least some of said microlenses each comprising a
plurality of lens regions, at least two of each lens regions having
a different refractive property.
57. An image processing system as in claim 56, wherein said
plurality of lens regions have a circular shape.
58. An image processing system as in claim 56, wherein more than
one of said plurality of lens structures are aspherically
shaped.
59. An image processing system as in claim 56, wherein a topmost
lens region of at least one of said lens structures is
noncontiguous with a topmost lens region of another said lens
structure.
60. An image processing system as in claim 56, wherein one of said
plurality of lens regions refracts a portion of incident light that
is not incident to another of said plurality of lens regions.
61. An image processing system as in claim 56, wherein said
plurality of lens regions are formed of more than one material.
62. An image processing system as in claim 56, wherein one of said
plurality of lens region comprises a ring shaped light refracting
area.
63. A CMOS imager comprising: a photosensitive region; and a lens
structure located vertically above the photosensitive region,
wherein the lens structure comprises a first and second materials
having refractive indexes of N1 and N2, respectively, where
N1>N2.
64. A CMOS imager as in claim 63, further comprising a plurality of
said lens structures and a plurality of said photosensitive
regions, wherein each said lens structure is respectively provided
over said plurality of said photosensitive regions.
65. A CMOS imager as in claim 63, wherein said first material is
formed over said second material.
66. A CMOS imager as in claim 64, wherein said first material has a
circular shape and is formed over said second material.
67. A display system comprising a plurality of display structures;
and a lens structure formed above at least one of said plurality of
display structures, said lens structure being adapted to redirect
light from said display structure outwardly of said lens structure,
said lens structure including a first lens region and a second lens
region, said first and second lens regions having different optical
properties from one another.
68. A display system as in claim 67 wherein one said lens structure
is disposed above each of said plurality of display structures.
69. A display system as in claim 67 wherein a plurality of said
lens structures is disposed above at least some of said plurality
of display structures.
70. A display system as in claim 67, comprising a first plurality
of said lens structures and a second plurality of said display
structures, wherein each lens structure of said first plurality is
disposed over a display structure of said second plurality
respectively.
71. A display system as in claim 70, wherein said second lens
region of each of said lens structures is noncontiguous with said
second lens regions of other lens structures.
72. A display system as in claim 70, wherein said first and second
lens region is noncontiguous with other first and second lens
regions in other said lens structures.
73. A display system as in claim 67, wherein said first lens region
is formed over said second lens region.
74. A display system as in claim 67, wherein said first lens region
has a circular shape and is formed over said second lens
region.
75. A display system as in claim 74 wherein said plurality of
display structures is arranged in an array, each display structure
of said plurality having an associated lens structure.
76. A display system as in claim 67, wherein said first lens region
is disposed above said second lens region and is aspherically
shaped.
77. A display system as in claim 67, wherein said lens structure
further comprises a third lens region.
78. A display system as in claim 77, wherein each said lens
structure is patterned and formed over a respective one of said
plurality of display structures.
79. A display system as in claim 77, wherein said third lens region
is disposed above said first lens region, wherein said second lens
region is disposed between said first and said third lens
regions.
80. A display system as in claim 77, wherein said third lens region
has a circular shape and is disposed above said first lens
region.
81. A display system as in claim 77, wherein said third lens region
is disposed above said first lens region and is aspherically
shaped.
82. A display system as in claim 77, wherein said first, second and
third lens regions have differing indices of refraction with
respect to one another.
83. A display system as in claim 67, wherein said first and second
lens regions have different refraction indexes.
84. A display system as in claim 67, wherein said display structure
is a display pixel in an active matrix liquid crystal display.
85. A display system as in claim 67, wherein said second lens
region refracts a portion of the light refracted by said first lens
region.
86. A display system as in claim 67, wherein said first lens is
formed in contact with said second lens region.
87. A display system as in claim 67, wherein said first lens region
has a greater diameter than said second lens region.
88. A display system as in claim 67, wherein said first lens region
is formed and patterned over a larger portion of said display
structure than said second lens region.
89. A display system as in claim 67, wherein one of said first and
second lens regions refracts a portion of incident light that is
not incident to the other of said first and second lens region.
90. A display system as in claim 67, wherein said first and second
lens regions are formed of respective first and second
materials.
91. A display system as in claim 67, wherein said first and second
lens regions are formed of the same material but have different
geometric shapes.
92. A display system as in claim 67, wherein at least one of said
first and second lens regions is substantially aspherically
shaped.
93. A display system as in claim 67, wherein at least one of said
first and second lens regions is substantially circularly
shaped.
94. A display system as in claim 67, wherein at least one of said
first and second lens regions is substantially lenticularly
shaped.
95. A display system as in claim 67, wherein at least one of said
first and second lens regions is substantially ovoid shaped.
96. A display system as in claim 67, wherein at least one of said
first and second lens regions is substantially rectangularly
shaped.
97. A display system as in claim 67, wherein at least one of said
first and second lens regions is substantially hexagonally
shaped.
98. A display system as in claim 67, wherein said first lens region
is formed above and in direct contact with a portion of said second
lens regions, and wherein said second lens region has a ring shaped
light refracting area.
99. A display system as in claim 67, wherein a first and second
plurality of said lens structures are disposed above said plurality
of display structures, said first plurality of said lens structures
having said first lens regions with a first refractive index, said
second plurality of said lens structures having said first lens
regions with a second refractive index.
100. A method of forming a lens structure for an imager, said
method comprising: forming a first plurality of light condensing
regions having a first refractive index over a plurality of
photosensitive regions; and forming a second plurality of light
condensing regions having a second refractive index over said first
plurality of light condensing regions.
101. A method as in claim 100, wherein a refraction index of said
first plurality of light condensing regions is greater than a
refraction index of said second plurality of light condensing
regions.
102. A method as in claim 100 further comprising forming a
plurality of third light condensing regions respectively above said
second plurality of light condensing regions.
103. A method as in claim 100, wherein each of said first and
second plurality of light condensing regions are formed in a
substantially circular shape over said photosensitive regions.
104. A method as in claim 100, wherein said light condensing
regions are formed in a semicircular shape over said photosensitive
regions.
105. A method as in claim 100, wherein said light condensing
regions are formed in a rectangular shape over said photosensitive
regions.
106. A method as in claim 100, wherein said light condensing
regions are formed in a hexagonal shape over said photosensitive
regions.
107. A method as in claim 100, wherein said light condensing
regions are formed in a lenticular shape over said photosensitive
regions.
108. A method as in claim 100, wherein said light condensing
regions are formed in an ovoid shape over said photosensitive
regions.
109. A method as in claim 100, wherein said forming steps include
heat treatment.
110. A method as in claim 100, wherein said forming steps include
baking.
111. A method of forming an imager structure comprising: forming
first and second groups of photosensitive regions on an imager
substrate; forming a first lens region with a first refractive
property over each of said photosensitive regions of said first
group; forming a second lens region with a second refractive
property over each of said first lens regions; and forming at least
one other lens region having a refractive property over each of
said second photosensitive regions of said second group.
112. A method as in claim 111, wherein said first lens regions
refractive index is greater than said second lens regions
refraction index.
113. A method as in claim 111, wherein at least one of said first
and second lens regions is formed in a circular shape over said
photosensitive regions of said first group.
114. A method as in claim 111, wherein said first and second lens
regions are formed in a circular shape over said photosensitive
regions of said first group.
115. A method as in claim 111, wherein said first and second lens
regions are formed in a semicircular shape over said photosensitive
regions of said first group.
116. A method as in claim 111, wherein said first and second lens
regions are formed in a rectangular shape over said photosensitive
regions of said first group.
117. A method as in claim 111, wherein said first and second lens
regions are formed in a hexagonal shape over said photosensitive
regions of said first group.
118. A method as in claim 111, wherein said first and second lens
regions are formed in a lenticular shape over said photosensitive
regions of said first group.
119. A method as in claim 111, wherein said first and second lens
regions are formed in an ovoid shape over said photosensitive
regions of said first group.
120. A method as in claim 111, wherein said forming includes heat
treatment.
Description
FIELD OF THE INVENTION
[0001] The present invention relates generally to improved
semiconductor imaging devices, and in particular to a multiple
microlens system for an imager array or display unit.
BACKGROUND OF THE INVENTION
[0002] Solid state imagers, including charge.coupled devices (CCD)
and CMOS sensors, have been commonly used in photo imaging
applications. A solid state imager circuit includes a focal plane
array of pixel cells, each one of the cells including either a
photogate, photoconductor or a photodiode overlying a doped region
of a substrate for accumulating photo-generated charge in the
underlying portion of the substrate. Microlenses are commonly
placed over imager pixel cells. A microlens is used to focus light
onto the initial charge accumulation region. Conventional
technology uses a single microlens with a polymer coating, which is
patterned into squares or circles provided respectively over the
pixels which are then heated during manufacturing to shape and cure
the microlens.
[0003] Use of microlenses significantly improves the
photosensitivity of the imaging device by collecting light from a
large light collecting area and focusing it on a small
photosensitive area of the sensor. The ratio of the overall light
collecting area to the photosensitive area of the sensor is known
as the pixel's fill factor.
[0004] Microlenses are formed on planarized regions, which are
above the photosensitive area. After passing through the
planarization regions, the light is filtered by color filters. Each
conventional pixel can have a separate color filter. Alternatively,
a pixel's filter regions will be varied by depth in order to filter
out undesirable wavelengths.
[0005] As the size of imager arrays and photosensitive regions of
pixels decreases, it becomes increasingly difficult to provide a
microlens capable of focusing incident light rays onto the
photosensitive regions. This problem is due in part to the
increased difficulty in constructing a smaller micro lens that has
the optimal focal length for the imager device process and that
optimally adjusts for optical aberrations introduced as the light
passes through the various device layers. Also, it is difficult to
correct the distortion created by multiple regions above the
photosensitive area, which results in increased crosstalk between
adjacent pixels. "Crosstalk" results when off-axis light strikes a
microlens at an obtuse angle. The off-axis light passes through
planarization regions and a color filter, misses the intended
photosensitive region and instead strikes an adjacent light
sensitive region. Consequently, smaller imagers with untuned or
nonoptimized microlenses do not achieve optimal color fidelity and
signal/noise ratios.
[0006] Lens structures used with display systems also suffer from a
lack of efficient lens systems. For example, active matrix liquid
crystal display (LCD) systems have a cross polarizer than can open
or block a light path with a voltage signal. The LCD assumes a
parallel or perpendicular state to the polarizer angles in
question. Light comes through a color filter to be viewed by a user
when the light path is open. Current systems do not provide for
good viewing angles in both X and Y directions without expensive or
complex structures that are needed to disperse the light to provide
a good viewing angle.
BRIEF SUMMARY OF THE INVENTION
[0007] The present invention provides a microlens structure for a
pixel array in which the microlens associated with pixel(s) of the
array includes a plurality of lens regions, each region having a
different optical property. The optical properties of the plurality
of lens regions are such that an increased amount of incident light
reaches a light detector pixel or is dispersed from a display
pixel.
[0008] Various exemplary embodiments and methods of their
manufacture are discussed in detail below. These and other features
of the invention are described in more detail below in connection
with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] FIG. 1 shows a cross sectional view of a portion of a
microlens structure constructed in accordance with an exemplary
embodiment of the invention;
[0010] FIG. 1A shows a top view of a portion of the FIG. 1
embodiment;
[0011] FIG. 2 shows a top view of a portion of another exemplary
embodiment of a pixel array constructed in accordance with another
aspect of the invention;
[0012] FIG. 3 shows a cross sectional view of an exemplary
embodiment of the FIG. 1 microlens;
[0013] FIG. 4 shows a cross sectional view of another exemplary
embodiment of a microlens constructed in accordance with another
embodiment of the invention;
[0014] FIG. 5 shows a top view of a microlens constructed in
accordance with an exemplary embodiment of the invention;
[0015] FIG. 6 shows a cross sectional view of the FIG. 5
microlens;
[0016] FIG. 7 shows a block diagram of an imager system constructed
in accordance with an exemplary embodiment of the invention;
[0017] FIG. 8 shows a manufacturing method performed in accordance
with an exemplary embodiment of the invention;
[0018] FIG. 9 shows a manufacturing method performed in accordance
with another exemplary embodiment of the invention;
[0019] FIG. 10 shows a manufacturing method performed in accordance
with another exemplary embodiment of the invention; and
[0020] FIG. 11 shows a cross sectional view of a lens constructed
in accordance with another exemplary embodiment of the
invention.
DETAILED DESCRIPTION OF THE INVENTION
[0021] The invention provides a new microlens structure for use
with optical detectors or display systems. The invention increases
the amount of incident light reaching a photosensitive region of a
pixel in an imager array. The invention can also be used to diffuse
light from a display unit more efficiently. The microlens structure
includes a plurality of lens regions having different optical
properties to refract or divert light incident to a microlens
either to a photosensitive region of a pixel or from a display
structure in a more efficient manner.
[0022] Referring to FIGS. 1 and 1A, a first exemplary embodiment of
an imager array 2 constructed in accordance with the invention is
shown in cross sectional and top view, respectively. A plurality of
microlens structures is provided, each having an upper lens portion
1 and a lower lens portion 3. The structures are provided over
passivation region 6, intervening region 4 (e.g., color filter
array, metallization region, etc) and an array of imaging pixels 5.
Each pixel 5 has a photosensor for converting photons to electrical
charges. The light collection efficiency of each pixel 5 is
increased by creating two or more lens layers 1, 3 in each
microlens to focus light more directly onto a light sensitive
region of pixel 5. The lens layers 1, 3 can be formed into various
symmetrical geometric shapes, such as circles, squares, etc., and
asymmetrical shapes to provide a path for incident light rays to
reach the photo sensitive regions of the pixel 5. FIG. 1A shows the
lens regions 1, 3 as circular and noncontiguous with other lens
structures with lens regions 1, 3; however, it should be understood
that a variety of shapes may be used with the invention, as is
further discussed below.
[0023] FIG. 2 shows a top view of a second embodiment of the
invention in which a microlens array has a first group of
microlenses each having two lens regions 1, 3 and a second group of
microlenses each having a single lens 10. FIG. 2 illustrates that a
microlens array can have different microlens structures
respectively associated with different pixels of a pixel array.
[0024] The construction of each microlens structure is based upon
the determination of desired combined refractive effects of the two
or more lens regions 1, 3. A desired combined refractive effect is
produced by the combined optical properties of regions 1, 3 which
improves the fill factor for a pixel 5.
[0025] Refraction behavior of light that passes through boundary
areas of two mediums is described in Snells equation:
N.sub.1* sin .theta..sub.1=N.sub.2* sin .theta..sub.2 (1)
[0026] which governs simple geometric optics. Refraction is the
bending of the path of a light wave as it passes across the
boundary separating two media. The angle at which a light wave
encounters a boundary is referred to as the angle of incidence
(.theta..sub.1). The angle at which the light wave moves in
relation to the media boundary after passage is referred to as the
angle of refraction (.theta..sub.2). N.sub.1 and N.sub.2 refer to
the index of refraction associated with two materials that form a
boundary between them, which a light wave passes through.
Refraction is caused by the change in speed experienced by a light
wave when the medium it passes through changes.
[0027] Referring to FIG. 3, the relationship
N.sub.1.gtoreq.N.sub.2.gtoreq- .N.sub.0 is an example of a set of
refractive indexes for a microlens having two different regions 1,
3. Regions 1, 3 have dimensions and refractive indexes selected to
steer more light into a detector region than would otherwise occur
using a single microlens or other conventional microlens
structures. N.sub.1 is the refractive index of the first lens
region 1. N.sub.2 is the refractive index of the second lens region
3 and N.sub.0 is the refractive index of a medium outside the first
lens region 1, such as air or other gasses.
[0028] FIG. 3 illustrates an expanded view of the FIG. 1
embodiment. The light collection efficiency of each pixel 5 is
increased by creating more than one lens region 1, 3 in each
microlens to focus light more directly on a photosensitive region
of pixel 5. Lens region materials 1, 3 are positioned to steer, or
direct, incident light 7 to an underlying photosensitive region 5.
Lens regions 1, 3 can be formed into various symmetrical geometric
shapes, such as circles, squares, etc. as well as asymmetrical
shapes to provide a path for incident light rays to reach the
photosensitive region of pixel 5.
[0029] A third embodiment of the invention includes a microlens
having more than two lens regions to better selectively adjust the
refraction of light onto a photosensitive region. FIG. 4 shows
microlens 9 having a first lens region 8 formed over a second lens
region 1 which is in turn formed over a third lens region 3. The
lens regions are formed with different refractive indexes of
N.sub.3, N.sub.2 and N.sub.1. The regions refractive indexes and
lens sizes and shapes are selected to provide, in combination with
other intervening layer refractive properties, a desired fill
factor for photosensitive regions of the pixel 5 below the
exemplary microlens 9. The refractive indexes and shape selections
for each lens' regions 8, 1, 3 may also be chosen based on the
optical properties of the underlying regions, e.g., planarization
layer 6 or other layers 4, which may also affect the fill factor.
In the embodiment depicted in FIG. 4, incident light is refracted
by the multiple regions 8, 1, 3 so that a desired portion of the
light is directed onto the photosensitive region 5. A topmost one
of the lens regions, e.g., 8, may be formed as segmented lens
regions or a single lens region 8 over the entire pixel array. The
microlens 9 may be formed over each of the pixels in an imager
array or a portion of the pixels in the array.
[0030] FIGS. 5 and 6 respectively illustrate a top view and cross
sectional view of a fourth exemplary embodiment of the invention.
In this embodiment, a lower lens ring 13 deflects light from an
outer peripheral portion of a lens region 11 towards a
photosensitive region of a pixel 5. The lens region 13 refracts
only a portion of the light refracted by lens region 11 in order to
selectively adjust the fill factor for a particular photosensitive
region 5. One or more additional lens regions may be provided above
lens region 11 to further direct light towards the photosensitive
region of pixel 5. In this exemplary embodiment, a curved microlens
region 11 is formed above another microlens region 13. However, the
two microlens regions 11, 13 can be reversed; in which case, lens
region 13 will be formed on lens region 11 to selectively refract
light towards the photosensitive region of pixel 5.
[0031] As shown in FIG. 6, light 17 entering lens region 11 is
refracted into the lower lens region 13. Lens region 13 further
refracts the light 17 near the peripheral edge at a sharp angle
onto the photosensitive region of the pixel 5.
[0032] The refractive indexes of the plurality of lens regions can
be chosen based upon consideration of the light refractive
properties of the layers between the microlens region and
photosensitive region to maximize light transmission to the
photosensitive regions of a pixel 5. As mentioned above, a
microlens array in accordance with the invention can include
different microlens structures in different portions of the pixel
array. Light which is incident on pixels at the center of a pixel
array can be very different from light which is incident on pixels
at the outer edges of the pixel array. Accordingly, one microlens
structure can be provided over pixels in the middle of the array
and another different microlens structure can be used for incident
light transmission in other peripheral pixels of the array.
[0033] FIG. 7 shows an image processing system that incorporates a
processor 31, memory 33, an input/output system 35, a storage unit
37 and an imager 39. A bus 30 couples the image processing system
components. The imager 39 contains an array of pixels having an
associated microlens structure in accordance with the
invention.
[0034] Pixel arrays having a microlens constructed in accordance
with the invention, and described with reference to examples in
FIGS. 1-7, may be employed in a CMOS, CCD, or other imagers. The
microlens structures of the invention may be used as a single
microlens for a pixel or as an array of microlenses for respective
pixels.
[0035] FIG. 8 shows one method of manufacturing the microlens
structures illustrated in FIGS. 1, 1A and 3. The method utilizes a
substrate, which contains a pixel array, peripheral circuits,
contacts and wiring. One or more protective layers, e.g., BPSG,
BSG, PSG, silicon dioxide or silicon nitride or other transparent
material, are formed over the pixel array and planarized. A spacing
layer may be formed over the protective layers. Construction of the
microlens structure then begins. At S51, a first lens region, e.g.,
region 3 (FIG. 3), is formed with a material and thickness that
will, in combination with other lens regions, increase incident
light passing onto a photosensitive region of pixel 5. The first
lens region 3 may be applied using a process such as spin coating
and be formed of a transparent or polymeric material. Other lens
forming materials may also be used including optical thermoplastic
such as polymethylmethacrylate, polycarbonate, polyolefin,
cellulose acetate butyrate, or polystyrene, a polymide, a thermoset
resin such as an epoxy resin, a photosensitive gelatin or a
radiation curable resin such as acrylate, methacrylate, urethane
acrylate, epoxy acrylate, or polyester acrylate.
[0036] At S53, the first lens region is patterned to form
individual microlens region 3. Patterning can be accomplished using
standard photolithography equipment and techniques. At S55,
individualized microlens region 3 is shaped into a desired
configuration, such as asymmetric circular, by lens processing such
as baking. At S57, the first lens region 3 is overcoated with a
second lens region 1 and formed with a material and to a thickness
which, in combination with other lens regions through which
incident light travels, increases fill factor, or intensity of
incident light, for photosensitive region of pixel 5. At S59, the
second region 1 is patterned. Next, second lens region 1 is shaped
(e.g., flowed) by baking at S61.
[0037] FIG. 9 shows an exemplary manufacturing method for forming
the microlens structures of FIG. 4. Initially, at S71, a lens
region 3 is formed over pixels of the pixel array. At S73, lens
region 3 is patterned to produce individually shaped microlens
region 3. Region 3 may be patterned into circular, rectangular or
other shapes at processing segment S73. At S75, patterned lens
region 3 is shaped into a light focusing lens configuration by
baking. If desired, another lens region, e.g., 1 (FIG. 4), is
formed above the previous lens region 3 at processing segment S79.
Processing segments S73, S75 are repeated for each new applied
layer. At S77, a determination is made on whether or not to apply
another lens region. If another lens region is not to be applied,
processing terminates. If another lens region is to be formed,
processing segments S79, S73 and S75 are repeated.
[0038] FIG. 10 shows another exemplary manufacturing method for
forming an exemplary microlens array containing multiple lens
regions in accordance with the invention. All microlens layers are
formed over pixels 5 at steps S91-S93. The layers are patterned at
S95 and shaped at S97.
[0039] At S97 the lens regions (e.g., 1, 3) are collectively shaped
by means such as flowing the lens regions by baking. Steps S91-S97
are performed such that the resulting multiple lens regions in an
exemplary microlens provides for maximized light refraction to
respective photosensitive regions (e.g., 5).
[0040] The shape of the patterned individualized microlenses may be
circular, lenticular, ovoid, rectangular, hexagonal or any other
suitable shape. Shaping of lens regions can be accomplished by heat
treatment to form refractive lens regions from the applied and
patterned lens forming regions. The shaping process used to form
the refractive lens regions depends on the material used to form
the lens regions. If the material of the lens forming regions may
be heat treated, then heat treatment processes such as baking may
be used. If the material is extremely photosensitive, then special
light exposure techniques may be used.
[0041] The invention can also be used with light projection systems
as well as light detection systems. The same principles apply if
the light is coming out of the substrate as when the light is going
in. While the structural parameters might change for optimal
performance with display systems as compared with imager systems,
the invention still provides an improved structure for light
distribution.
[0042] Referring to FIG. 11, a lens structure is formed over a
display region 131. The display region 131 can be a display pixel
or a light emitting unit. Multiple lens structures can be formed
over the same display region 131 in a lens ensemble in order to
further increase light dispersion and improve viewing angle from
display region 131. Light is emitted from display region 131 and
enters a layer 129, which can be a top glass or other display layer
(e.g., top glass layer in a LCD system) and then the light enters
polarizer 127 and is refracted according to polarizer operation.
Light then enters the first lens region 125 with refractive index
N.sub.2 where light is refracted into second lens region 123 having
a refractive index N.sub.1. The light is then further refracted by
the second lens region 123 into air where it is refracted again.
The display lens structure of FIG. 11 incorporates regions 123 and
125 are formed in the same manner and of the same material as the
corresponding lens regions in other embodiments of the
invention.
[0043] It should again be noted that although the invention has
been described with specific reference to imaging circuits having a
pixel array, the invention has broader applicability and may be
used in any imaging apparatus as well as in display devices.
Similarly, the process described above is but one method of many
that could be used to form lenses in accordance with the invention.
The above description and drawings illustrate exemplary embodiments
in accordance with the invention. It is not intended that the
present invention be limited to the illustrated embodiments. Any
modification of the present invention which comes within the spirit
and scope of the following claims should be considered part of the
present invention.
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