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Color filter array, imagers and systems having same, and methods of fabrication and use thereof Grant 11,404,463 - Ford , et al. August 2, 2 | 2022-08-02 |
Color Filter Array, Imagers And Systems Having Same, And Methods Of Fabrication And Use Thereof App 20200365638 - Ford; Loriston ;   et al. | 2020-11-19 |
Color filter array, imagers and systems having same, and methods of fabrication and use thereof Grant 10,770,497 - Ford , et al. Sep | 2020-09-08 |
Color Filter Array, Imagers And Systems Having Same, And Methods Of Fabrication And Use Thereof App 20190333952 - Ford; Loriston ;   et al. | 2019-10-31 |
Color filter array, imagers and systems having same, and methods of fabrication and use thereof Grant 10,418,401 - Ford , et al. Sept | 2019-09-17 |
Color Filter Array, Imagers And Systems Having Same, And Methods Of Fabrication And Use Thereof App 20180301493 - Ford; Loriston ;   et al. | 2018-10-18 |
Color filter array, imagers and systems having same, and methods of fabrication and use thereof Grant 10,090,346 - Ford , et al. October 2, 2 | 2018-10-02 |
Color Filter Array, Imagers And Systems Having Same, And Methods Of Fabrication And Use Thereof App 20170338266 - Ford; Loriston ;   et al. | 2017-11-23 |
Color filter array, imagers and systems having same, and methods of fabrication and use thereof Grant 9,761,621 - Ford , et al. September 12, 2 | 2017-09-12 |
Method for forming imagers Grant 8,795,559 - Li , et al. August 5, 2 | 2014-08-05 |
Color Filter Array, Imagers And Systems Having Same, And Methods Of Fabrication And Use Thereof App 20140061836 - Ford; Loriston ;   et al. | 2014-03-06 |
Color filter array, imagers and systems having same, and methods of fabrication and use thereof Grant 8,610,806 - Ford , et al. December 17, 2 | 2013-12-17 |
Imaging device having microlens array adhered to wafer-level lens Grant 8,610,815 - Duparre , et al. December 17, 2 | 2013-12-17 |
Micro-lenses for CMOS imagers and method for manufacturing micro-lenses Grant 8,390,931 - Boettiger , et al. March 5, 2 | 2013-03-05 |
Method for Forming Imagers App 20120315720 - Li; Jin ;   et al. | 2012-12-13 |
Imager with tuned color filter Grant 8,105,862 - Hiatt , et al. January 31, 2 | 2012-01-31 |
Method of forming a uniform color filter array Grant 8,071,416 - Liu , et al. December 6, 2 | 2011-12-06 |
Tetraform Microlenses And Method Of Forming The Same App 20110234883 - Li; Jin ;   et al. | 2011-09-29 |
Tetraform microlenses and method of forming the same Grant 7,978,411 - Li , et al. July 12, 2 | 2011-07-12 |
Method and apparatus to improve filter characteristics of optical filters Grant 7,965,444 - Boettiger June 21, 2 | 2011-06-21 |
Methods to make sidewall light shields for color filter array Grant 7,955,764 - Liu , et al. June 7, 2 | 2011-06-07 |
Multiple microlens system for image sensors or display Grant 7,916,204 - Wells , et al. March 29, 2 | 2011-03-29 |
Methods of forming a lens master plate for wafer level lens replication Grant 7,879,249 - Boettiger February 1, 2 | 2011-02-01 |
Configurable pixel array system and method Grant 7,812,869 - Boettiger October 12, 2 | 2010-10-12 |
Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers Grant 7,808,023 - Yang , et al. October 5, 2 | 2010-10-05 |
Structure and method for FPN reduction in imaging devices Grant 7,808,063 - Boettiger , et al. October 5, 2 | 2010-10-05 |
Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces Grant 7,795,649 - Boettiger , et al. September 14, 2 | 2010-09-14 |
Imaging Device Having Microlens Array Adhered To Wafer-level Lens App 20100177235 - Duparre; Jacques ;   et al. | 2010-07-15 |
Wafer Level Lens Replication On Micro-electrical-mechanical Systems App 20100177411 - Hegde; Shashikant ;   et al. | 2010-07-15 |
Method and apparatus for reducing microlens surface reflection Grant 7,733,567 - Li , et al. June 8, 2 | 2010-06-08 |
Method and apparatus providing imager pixel array with grating structure and imager device containing the same Grant 7,714,368 - Yang , et al. May 11, 2 | 2010-05-11 |
Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers Grant 7,696,588 - Boettiger , et al. April 13, 2 | 2010-04-13 |
Process for creating tilted microlens Grant 7,688,514 - Boettiger , et al. March 30, 2 | 2010-03-30 |
Multiple Microlens System For Image Sensors Or Display Units App 20100073540 - Wells; David ;   et al. | 2010-03-25 |
Structure and method for building a light tunnel for use with imaging devices Grant 7,683,407 - Boettiger March 23, 2 | 2010-03-23 |
Uniform color filter arrays in a moat Grant 7,675,080 - Boettiger March 9, 2 | 2010-03-09 |
Controlling lens shape in a microlens array Grant 7,652,821 - Boettiger , et al. January 26, 2 | 2010-01-26 |
Ellipsoidal gapless micro lenses for imagers Grant 7,643,213 - Boettiger , et al. January 5, 2 | 2010-01-05 |
Microelectronic Imagers With Stacked Lens Assemblies And Processes For Wafer-level Packaging Of Microelectronic Imagers App 20090321861 - Oliver; Steven D. ;   et al. | 2009-12-31 |
Method and apparatus for blocking light to peripheral circuitry of an imager device Grant 7,608,875 - Yang , et al. October 27, 2 | 2009-10-27 |
Micro-lenses For Cmos Imagers And Method For Manufacturing Micro-lenses App 20090256228 - Boettiger; Ulrich C. ;   et al. | 2009-10-15 |
Micro-lenses for CMOS imagers and method for manufacturing micro-lenses Grant 7,566,405 - Boettiger , et al. July 28, 2 | 2009-07-28 |
Imager With Tuned Color Filter App 20090142709 - Hiatt; William M. ;   et al. | 2009-06-04 |
Methods of forming openings, and methods of forming container capacitors Grant 7,538,036 - Busch , et al. May 26, 2 | 2009-05-26 |
Process For Creating Titled Microlens App 20090109541 - Boettiger; Ulrich C. ;   et al. | 2009-04-30 |
Deep Recess Color Filter Array and Process of Forming the Same App 20090090850 - Liu; Saijin ;   et al. | 2009-04-09 |
Imager with tuned color filter Grant 7,502,058 - Hiatt , et al. March 10, 2 | 2009-03-10 |
Methods of forming a lens master plate for wafer level lens replication App 20090032987 - Boettiger; Ulrich C. | 2009-02-05 |
Gapless microlens array and method of fabrication Grant 7,476,562 - Boettiger , et al. January 13, 2 | 2009-01-13 |
Process for creating tilted microlens Grant 7,470,556 - Boettiger , et al. December 30, 2 | 2008-12-30 |
Configurable pixel array system and method App 20080278610 - Boettiger; Ulrich C. | 2008-11-13 |
Tetraform Microlenses And Method Of Forming The Same App 20080278820 - Li; Jin ;   et al. | 2008-11-13 |
Microelectronic imagers with curved image sensors and methods for manufacturing microelectronic imagers App 20080237443 - Oliver; Steven D. ;   et al. | 2008-10-02 |
Gapless microlens array and method of fabrication Grant 7,428,103 - Boettiger , et al. September 23, 2 | 2008-09-23 |
Ellipsoidal gapless micro lenses for imagers App 20080192357 - Boettiger; Ulrich C. ;   et al. | 2008-08-14 |
Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers Grant 7,390,687 - Boettiger , et al. June 24, 2 | 2008-06-24 |
Method of forming a uniform color filter array App 20080122960 - Liu; Saijin ;   et al. | 2008-05-29 |
Method and apparatus to improve filter characteristics of optical filters App 20080121781 - Boettiger; Ulrich C. | 2008-05-29 |
Micro-lenses and method for increasing area coverage and controlling shape of micro lenses Grant 7,378,199 - Boettiger May 27, 2 | 2008-05-27 |
Ellipsoidal gapless microlens array and method of fabrication Grant 7,375,892 - Boettiger , et al. May 20, 2 | 2008-05-20 |
Micro-lenses for imagers Grant 7,352,511 - Boettiger , et al. April 1, 2 | 2008-04-01 |
Color filter array and method of fabrication and use App 20080049126 - Ford; Loriston ;   et al. | 2008-02-28 |
Micro-lenses for CMOS imagers Grant 7,333,267 - Boettiger , et al. February 19, 2 | 2008-02-19 |
Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces App 20080017943 - Boettiger; Ulrich C. ;   et al. | 2008-01-24 |
Method and apparatus providing imager pixel array with grating structure and imager device containing the same App 20070298533 - Yang; Zhaohui ;   et al. | 2007-12-27 |
Gapless microlens array and method of fabrication Grant 7,307,788 - Boettiger , et al. December 11, 2 | 2007-12-11 |
Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces Grant 7,303,931 - Boettiger , et al. December 4, 2 | 2007-12-04 |
Method and apparatus for irradiating a microlithographic substrate Grant 7,298,453 - Boettiger , et al. November 20, 2 | 2007-11-20 |
Micro-lenses For Imagers App 20070247719 - Boettiger; Ulrich C. ;   et al. | 2007-10-25 |
Methods to make sidewall light shields for color filter array App 20070237888 - Liu; Saijin ;   et al. | 2007-10-11 |
Method and apparatus defining a color filter array for an image sensor App 20070238035 - Holscher; Richard D. ;   et al. | 2007-10-11 |
Apparatus and method for manufacturing positive or negative microlenses Grant 7,280,278 - Boettiger , et al. October 9, 2 | 2007-10-09 |
Micro-lenses for CMOS imagers and method for manufacturing micro-lenses Grant 7,280,280 - Boettiger , et al. October 9, 2 | 2007-10-09 |
Apparatus and method for manufacturing tilted microlenses Grant 7,280,279 - Boettiger , et al. October 9, 2 | 2007-10-09 |
Method and apparatus providing a uniform color filter in a recessed region of an imager App 20070158772 - Boettiger; Ulrich C. | 2007-07-12 |
Gapless microlens array and method of fabrication App 20070153107 - Boettiger; Ulrich C. ;   et al. | 2007-07-05 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates Grant 7,230,679 - Boettiger , et al. June 12, 2 | 2007-06-12 |
Method and apparatus for balancing color response of imagers Grant 7,227,692 - Li , et al. June 5, 2 | 2007-06-05 |
Method and apparatus for blocking light to peripheral circuitry of an imager device App 20070120162 - Yang; Zhaohui ;   et al. | 2007-05-31 |
Controlling lens shape in a microlens array App 20070121212 - Boettiger; Ulrich C. ;   et al. | 2007-05-31 |
Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers App 20070120212 - Boettiger; Ulrich C. ;   et al. | 2007-05-31 |
Controlling lens shape in a microlens array Grant 7,218,452 - Boettiger , et al. May 15, 2 | 2007-05-15 |
Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers App 20070096235 - Boettiger; Ulrich C. ;   et al. | 2007-05-03 |
Apparatus and method for manufacturing positive or negative microlenses App 20070076299 - Boettiger; Ulrich C. ;   et al. | 2007-04-05 |
Gapless microlens array and method of fabrication Grant 7,199,931 - Boettiger , et al. April 3, 2 | 2007-04-03 |
Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers Grant 7,190,039 - Boettiger , et al. March 13, 2 | 2007-03-13 |
Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers App 20070045685 - Yang; Zhaohui ;   et al. | 2007-03-01 |
Method and apparatus for reducing microlens surface reflection App 20070035844 - Li; Jiutao ;   et al. | 2007-02-15 |
Structure and method for building a light tunnel for use with imaging devices App 20070023799 - Boettiger; Ulrich C. | 2007-02-01 |
Process for creating tilted microlens App 20060289956 - Boettiger; Ulrich C. ;   et al. | 2006-12-28 |
Methods of forming openings, and methods of forming container capacitors Grant 7,153,778 - Busch , et al. December 26, 2 | 2006-12-26 |
Methods for manufacturing microelectronic imagers App 20060275941 - Oliver; Steven D. ;   et al. | 2006-12-07 |
Structure and method for FPN reduction in imaging devices App 20060268143 - Boettiger; Ulrich C. ;   et al. | 2006-11-30 |
Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers App 20060186492 - Boettiger; Ulrich C. ;   et al. | 2006-08-24 |
Micro-lenses for CMOS imagers and method for manufacturing micro-lenses App 20060187554 - Boettiger; Ulrich C. ;   et al. | 2006-08-24 |
Method and apparatus for controlling radiation beam intensity directed to microlithograhic substrates App 20060181692 - Boettiger; Ulrich C. ;   et al. | 2006-08-17 |
Micro-lenses for CMOS imagers and method for manufacturing micro-lenses App 20060175287 - Boettiger; Ulrich C. ;   et al. | 2006-08-10 |
Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces App 20060177959 - Boettiger; Ulrich C. ;   et al. | 2006-08-10 |
Controlling lens shape in a microlens array App 20060176566 - Boettiger; Ulrich C. ;   et al. | 2006-08-10 |
Method and apparatus for irradiating a microlithographic substrate App 20060158631 - Boettiger; Ulrich C. ;   et al. | 2006-07-20 |
Apparatus and method for manufacturing tilted microlenses App 20060152813 - Boettiger; Ulrich C. ;   et al. | 2006-07-13 |
Controlling lens shape in a microlens array Grant 7,068,432 - Boettiger , et al. June 27, 2 | 2006-06-27 |
Gapless microlens array and method of fabrication App 20060119950 - Boettiger; Ulrich C. ;   et al. | 2006-06-08 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates Grant 7,046,340 - Boettiger , et al. May 16, 2 | 2006-05-16 |
Method and apparatus for irradiating a microlithographic substrate Grant 7,038,762 - Boettiger , et al. May 2, 2 | 2006-05-02 |
Apparatus and method for manufacturing tilted microlenses Grant 7,012,754 - Boettiger , et al. March 14, 2 | 2006-03-14 |
Gapless microlens array and method of fabrication App 20060027887 - Boettiger; Ulrich C. ;   et al. | 2006-02-09 |
Micro-lenses and structures for increasing area coverage and controlling shape of micro-lenses Grant 6,995,911 - Boettiger February 7, 2 | 2006-02-07 |
Ellipsoidal gapless microlens array and method of fabrication App 20060023312 - Boettiger; Ulrich C. ;   et al. | 2006-02-02 |
Controlling Lens Shape In A Microlens Array App 20060023314 - Boettiger; Ulrich C. ;   et al. | 2006-02-02 |
Methods of forming openings, and methods of forming container capacitors App 20060009042 - Busch; Brett W. ;   et al. | 2006-01-12 |
Gapless microlens array and method of fabrication App 20050280012 - Boettiger, Ulrich C. ;   et al. | 2005-12-22 |
Apparatus and method for manufacturing positive or negative microlenses App 20050270651 - Boettiger, Ulrich C. ;   et al. | 2005-12-08 |
Apparatus And Method For Manufacturing Tilted Microlenses App 20050270653 - Boettiger, Ulrich C. ;   et al. | 2005-12-08 |
Semiconductor constructions App 20050233588 - Boettiger, Ulrich C. ;   et al. | 2005-10-20 |
Methods of Forming Openings, And Methods of Forming Container Capacitors App 20050186802 - Busch, Brett W. ;   et al. | 2005-08-25 |
Method for balancing color response of imagers App 20050128596 - Li, Jin ;   et al. | 2005-06-16 |
Methods of forming patterned compositions Grant 6,905,975 - Boettiger , et al. June 14, 2 | 2005-06-14 |
Micro-lenses for CMOS imagers and method for manufacturing micro-lenses App 20050110104 - Boettiger, Ulrich C. ;   et al. | 2005-05-26 |
Micro-lenses and method for increasing area coverage and controlling shape of micro lenses App 20050099696 - Boettiger, Ulrich C. | 2005-05-12 |
Method and apparatus for balancing color response of imagers App 20050078377 - Li, Jin ;   et al. | 2005-04-14 |
Method and apparatus for irradiating a microlithographic substrate App 20050041228 - Boettiger, Ulrich C. ;   et al. | 2005-02-24 |
Methods of forming patterned compositions App 20050000936 - Boettiger, Ulrich C. ;   et al. | 2005-01-06 |
Micro-lenses and method for increasing area coverage and controlling shape of micro lenses App 20040263985 - Boettiger, Ulrich C. | 2004-12-30 |
Imager with tuned color filter App 20040246351 - Hiatt, William M. ;   et al. | 2004-12-09 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates App 20040234871 - Boettiger, Ulrich C. ;   et al. | 2004-11-25 |
Multiple microlens system for image sensors or display units App 20040223071 - Wells, David ;   et al. | 2004-11-11 |
Method for controlling radiation beam intensity directed to microlithographic substrates Grant 6,794,100 - Boettiger , et al. September 21, 2 | 2004-09-21 |
Method and apparatus for irradiating a microlithographic substrate Grant 6,784,975 - Boettiger , et al. August 31, 2 | 2004-08-31 |
Method and apparatus for shaping and/or orienting radiation irradiating a microlithographic substrate Grant 6,577,379 - Boettiger , et al. June 10, 2 | 2003-06-10 |
Method and device for improved lithographic critical dimension control Grant 6,545,829 - Boettiger , et al. April 8, 2 | 2003-04-08 |
Method and apparatus for irradiating a microlithographic substrate App 20030044693 - Boettiger, Ulrich C. ;   et al. | 2003-03-06 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates App 20030044701 - Boettiger, Ulrich C. ;   et al. | 2003-03-06 |
Method for improved lithographic critical dimension control Grant 6,465,141 - Boettiger , et al. October 15, 2 | 2002-10-15 |
Method and device for improved lithographic critical dimension control App 20020085297 - Boettiger, Ulrich C. ;   et al. | 2002-07-04 |
Method and device for improved lithographic critical dimension control App 20020041369 - Boettiger, Ulrich C. ;   et al. | 2002-04-11 |
Method for forming a photoresist pattern and apparatus applicable therewith Grant 4,935,334 - Boettiger , et al. June 19, 1 | 1990-06-19 |