U.S. patent application number 10/826386 was filed with the patent office on 2004-10-07 for vacuum processing apparatus and semiconductor manufacturing line using the same.
Invention is credited to Kawasaki, Yoshinao, Soraoka, Minoru, Yoshioka, Ken.
Application Number | 20040197169 10/826386 |
Document ID | / |
Family ID | 16126714 |
Filed Date | 2004-10-07 |
United States Patent
Application |
20040197169 |
Kind Code |
A1 |
Soraoka, Minoru ; et
al. |
October 7, 2004 |
Vacuum processing apparatus and semiconductor manufacturing line
using the same
Abstract
A vacuum processing apparatus is composed of a cassette block
and a vacuum processing block. The cassette block has a cassette
table for mounting a plurality of cassettes containing a sample and
an atmospheric transfer means. The vacuum processing block has a
plurality of processing chambers for performing vacuum processing
to the sample and a vacuum transfer means for transferring the
sample. Both of the plan views of the cassette block and the vacuum
processing block are nearly rectangular, and the width of the
cassette block is designed larger than the width of the vacuum
processing block, and the plan view of the vacuum processing
apparatus is formed in an L-shape or a T-shape.
Inventors: |
Soraoka, Minoru;
(Kumage-gun, JP) ; Yoshioka, Ken; (Hikari-shi,
JP) ; Kawasaki, Yoshinao; (Kumage-gun, JP) |
Correspondence
Address: |
ANTONELLI, TERRY, STOUT & KRAUS, LLP
1300 NORTH SEVENTEENTH STREET
SUITE 1800
ARLINGTON
VA
22209-9889
US
|
Family ID: |
16126714 |
Appl. No.: |
10/826386 |
Filed: |
April 19, 2004 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
10826386 |
Apr 19, 2004 |
|
|
|
09956135 |
Sep 20, 2001 |
|
|
|
6752579 |
|
|
|
|
Current U.S.
Class: |
414/217 |
Current CPC
Class: |
Y10S 414/14 20130101;
Y10S 414/135 20130101; H01L 21/67161 20130101; Y10S 414/139
20130101; Y10S 134/902 20130101; H01L 21/6719 20130101; H01L
21/67727 20130101; H01L 21/67196 20130101; H01L 21/67167 20130101;
Y10S 414/137 20130101; H01L 21/67173 20130101; Y10T 70/5801
20150401; Y10T 70/5805 20150401; H01L 21/67778 20130101 |
Class at
Publication: |
414/217 |
International
Class: |
B65G 001/00 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 19, 1995 |
JP |
7-182921 |
Claims
1. A vacuum processing apparatus comprising: a cassette table for
mounting at least one cassette on a plane, each cassette capable of
storing at least a dummy sample in the atmosphere; a load lock
chamber for storing said dummy sample and changing-over from the
atmosphere to the vacuum condition, or from the vacuum condition to
the atmosphere; a first transferring device having an extensible
arm capable of vertical operation and rotatable operation and a
scooping device for taking out said dummy sample from any one of a
plurality of cassettes, and transferring it to said load lock
chamber or transferring it from said load lock chamber to said one
cassette; a transferring chamber for transferring said dummy sample
in a vacuum condition; a plurality of vacuum processing chambers
connected to said transferring chamber through a gate valve and
into which said dummy sample may be provided one by one in a vacuum
condition; a second transferring device arranged in said
transferring chamber, having an extensible arm capable of rotatable
operation, for transferring said dummy sample between said load
lock chamber and said plurality of vacuum processing chambers; a
first support member arranged in said load lock chamber so as to
support said dummy sample one by one; a second support member
arranged in each of said plurality of processing chambers so as to
support said dummy sample one by one; a first sample lifting
mechanism capable of moving up or moving down said first supporting
member so as to transfer said dummy sample to said second
transferring device, and a second sample lifting mechanism arranged
at said second support member in each of said processing chambers;
and a controller for controlling (a) receiving of said dummy sample
on said scooping-up device of said first transferring device by
inserting said scooping-up device of said first transferring device
under a bottom surface of said dummy sample to be taken out of said
one cassette and by lifting said scooping-up device, (b)
transferring of said dummy sample received on said scooping-up
device of said first transferring device to said first support
member by said first transferring device, (c) transferring of said
dummy sample to said second transferring device by operating said
first sample lifting mechanism, and (d) transferring of said dummy
sample by said second transferring device to said second support
member in any one of said processing chambers and transferring of
said dummy sample to said second support member by operating the
second sample lifting mechanisms.
2. The vacuum processing apparatus according to claim 1, wherein
the apparatus comprises a detecting device for detecting a position
of said dummy sample and said controller controls each of said
controlling operations (a)-(d) under application of an output from
said detecting device.
3. The vacuum processing apparatus according to claim 1, wherein
said load lock chamber comprises a load side load lock chamber for
transferring said dummy sample from the atmosphere to the vacuum,
and an unload side load lock chamber for transferring said dummy
sample from the vacuum to the atmosphere, wherein a plurality of
said first support members is provided, and each of said plurality
of first support members is arranged in each of said load side load
lock chamber and unload side load lock chamber.
4. The vacuum processing apparatus according to claim 1, wherein
said dummy sample is used for checking for a number of foreign
particles.
5. The vacuum processing apparatus according to claim 1, wherein
said dummy sample is used for a cleaning process of said processing
chamber.
6. The vacuum processing apparatus according to claim 1, wherein
said cassette table enables mounting of a plurality of cassettes on
a plane.
7. A method for using a dummy sample with a vacuum processing
apparatus, wherein said vacuum processing apparatus includes a
cassette table for mounting, in the atmosphere, a plurality of
cassettes, each cassette capable of storing at least a dummy
sample; a first transferring device having an extensible arm
capable of vertical operation and rotatable operation and a
scooping device for taking out said dummy sample from any one of a
plurality of cassettes, and transferring it to said load lock
chamber or transferring it from said load lock chamber to said one
cassette; a load lock chamber having a first support member for
storing said dummy sample and changing over from the atmosphere to
vacuum condition or from the vacuum condition to the atmosphere; a
first sample lifting mechanism provided in said load lock chamber
enabling said first support member to be moved up or down for
transferring said dummy sample between said first support member
supporting said dummy sample one by one and said second
transferring device; a transferring chamber for transferring said
dummy sample under a vacuum condition; a second transferring device
arranged in said transferring chamber; a plurality of processing
chambers connected to said transferring chamber through a gate
valve and into which said dummy sample may be provided one by one
in vacuum; a second support member for supporting said dummy sample
one by one and a second sample lifting mechanism arranged at said
second support member installed within each of said processing
chambers; and a controller, wherein said method comprises steps of:
(a) receiving said dummy sample on said scooping-up device by
inserting said scooping-up device of said first transferring device
under a bottom surface of said dummy sample to be taken out of any
one of said plurality of said cassettes, and by lifting said
scooping device, (b) transferring said dummy sample received on
said scooping-up device of said first transferring device to said
first support member by said first transferring device, (c)
transferring said dummy sample to said second transferring device
by operating said first sample lifting mechanism, and (d)
transferring said dummy sample to said second support member in any
one of said processing chambers by said second transferring device
and transferring said dummy sample to said second support member by
operating the second sample lifting mechanisms.
8. The method for using a dummy sample with a vacuum processing
apparatus according to claim 7, wherein the apparatus comprises a
detecting device for detecting a position of said dummy sample and
each of said steps (a)-(d) is carried out under application of an
output of said detecting device.
9. The method for using a dummy sample with a vacuum processing
apparatus according to claims 7, said load lock chamber comprises a
load side load lock chamber for transferring said dummy sample from
the atmosphere to the vacuum, and an unload side load lock chamber
for transferring said dummy sample from the vacuum to the
atmosphere, wherein a plurality of said first support members is
provided, and each of said plurality of first support members is
arranged in each of said load side load lock chamber and unload
side load lock chamber.
10. The method for using a dummy sample with a vacuum processing
apparatus according to claim 7, further comprising using said dummy
sample is used for checking for a number of foreign particles.
11. The method for using a dummy sample with a vacuum processing
apparatus according to claim 7, further comprising using said dummy
sample is used for a cleaning process of said processing
chamber.
12. A vacuum processing apparatus comprising: a cassette table for
mounting at least one cassette on a plane, each a cassette capable
of storing at least a dummy sample in the atmosphere; a load lock
chamber for storing said dummy sample and changing-over from the
atmosphere to the vacuum condition, or from the vacuum condition to
the atmosphere; a first transferring device having an extensible
arm capable of vertical operation and rotatable operation and a
scooping device for taking out said dummy sample from any one of a
plurality of cassettes, and transferring it to said load lock
chamber or transferring it from said load lock chamber to said one
cassette; a transferring chamber for transferring said dummy sample
in a vacuum condition; a plurality of vacuum processing chambers
connected to said transferring chamber through a gate valve and
into which said dummy sample may be provided one by one in a vacuum
condition; a second transferring device arranged in said
transferring chamber, having an extensible arm capable of rotatable
operation, for transferring said dummy sample between said load
lock chamber and said plurality of vacuum processing chambers; a
first support member arranged in said load lock chamber so as to
support said dummy sample one by one; a second support member
arranged in each of said plurality of processing chambers so as to
support said dummy sample one by one; a first sample lifting
mechanism capable of effecting relative vertical movement between
said first support member and said second transferring device so as
to transfer said dummy sample between said first support member and
said second transferring device; and a second sample lifting
mechanism capable of effecting relative vertical movement between
said second support member and said second transferring device so
as to transfer said dummy sample between said second support member
and said second transferring device; and a controller for
controlling (a) receiving of said dummy sample on said scooping-up
device of said first transferring device by inserting said
scooping-up device of said first transferring device under a bottom
surface of said dummy sample to be taken out of said one cassette
and by lifting said scooping-up device, (b) transferring of said
dummy sample received on said scooping-up device of said first
transferring device to said first support member by said first
transferring device (c) transferring of said dummy sample to said
second transferring device by operating said first sample lifting
mechanism, and (d) transferring of said dummy sample by said second
transferring device to said second support member in any one of
said processing chambers and transferring of said dummy sample to
said second support member by operating the second sample lifting
mechanism.
13. A method for p using a dummy sample with a vacuum processing
apparatus, wherein said vacuum processing apparatus includes a
cassette table for mounting at least one cassette on a plane, each
a cassette capable of storing at least a dummy sample in the
atmosphere; a load lock chamber for storing said dummy sample and
changing-over from the atmosphere to the vacuum condition, or from
the vacuum condition to the atmosphere; a first transferring device
having an extensible arm capable of vertical operation and
rotatable operation and a scooping device for taking out said dummy
sample from any one of a plurality of cassettes, and transferring
it to said load lock chamber or transferring it from said load lock
chamber to said one cassette; a transferring chamber for
transferring said dummy sample in a vacuum condition; a plurality
of vacuum processing chambers connected to said transferring
chamber through a gate valve and into which said dummy sample may
be provided one by one in a vacuum condition; a second transferring
device arranged in said transferring chamber, having an extensible
arm capable of rotatable operation, for transferring said dummy
sample between said load lock chamber and said plurality of vacuum
processing chambers; a first support member arranged in said load
lock chamber so as to support said dummy sample one by one; a
second support member arranged in each of said plurality of
processing chambers so as to support said dummy sample one by one;
a first sample lifting mechanism capable of effecting relative
vertical movement between said first support member and said second
transferring device so as to transfer said dummy sample between
said first support member and said second transferring device; and
a second sample lifting mechanism capable of effecting relative
vertical movement between said second support member and said
second transferring device so as to transfer said dummy sample
between said second support member and said second transferring
device, wherein said method comprises the steps of: (a) receiving
said dummy sample on said extensible arm of said first transferring
device by inserting said extensible arm of said first transferring
device under a bottom surface of said dummy sample to be taken out
of said at least one cassette, and by lifting said scooping device;
(b) transferring said dummy sample received on said extensible arm
of said first transferring device to said first support member by
said first transferring device, (c) transferring said dummy sample
to said second transferring device by inserting said extensible arm
of said second transferring device under said dummy sample on said
first support and operating said first sample lifting mechanism to
effect relative vertical movement between said first support member
and said second transferring device so as to transfer said dummy
sample from said first support member to said second transferring
device, and (d) transferring said dummy sample to said second
support member in one of said processing chambers by moving said
extensible arm of said second transferring device over said second
support and operating said second sample lifting mechanism to
effect relative vertical movement between said second support
member and said second transferring device so as to transfer said
dummy sample from said second transferring device to said second
support member.
14. A vacuum processing apparatus comprising: a cassette table for
mounting at least one cassette on a plane, each cassette capable of
storing at least a dummy sample in the atmosphere; a load lock
chamber for storing said dummy sample and changing-over from the
atmosphere to the vacuum condition, or from the vacuum condition to
the atmosphere; a first transferring device having an extensible
arm capable of vertical operation and rotatable operation and a
scooping device for taking out said dummy sample from any one of a
plurality of cassettes, and transferring it to said load lock
chamber or transferring it from said load lock chamber to said one
cassette; a plurality of vacuum processing chambers into which said
dummy sample may be provided one by one in a vacuum condition; a
second transferring device having an extensible arm capable of
rotatable operation, for transferring said dummy sample between
said load lock chamber and one of said plurality of vacuum
processing chambers; a first support member arranged in said load
lock chamber so as to support said dummy sample one by one; a
second support member arranged in each of said plurality of
processing chambers so as to support said dummy sample one by one;
a first sample lifting mechanism capable of moving up or moving
down said first support member so as to transfer said dummy sample
to said second transferring device, and a second sample lifting
mechanism arranged at said second support member in each of said
processing chambers; and a controller for controlling (a) receiving
of said dummy sample on said scooping-up device of said first
transferring device by inserting said scooping-up device of said
first transferring device under a bottom surface of said dummy
sample to be taken out of one cassette and by lifting said
scooping-up device, (b) transferring of said dummy sample received
on said scooping-up device of said first transferring device to
said first support member, (c) transferring of said dummy sample to
said second transferring device by operating said first sample
lifting mechanism. (d) transferring of said dummy sample from said
second transferring device to said second support member in one of
said processing chambers by operating the second sample lifting
mechanisms
15. A method for using a dummy sample with a vacuum processing
apparatus, wherein said vacuum processing apparatus includes a
cassette table for mounting at least one cassette on a plane, each
cassette capable of storing at least a dummy sample in the
atmosphere; a load lock chamber for storing said dummy sample and
changing-over from the atmosphere to the vacuum condition, or from
the vacuum condition to the atmosphere; a first transferring device
having an extensible arm capable of vertical operation and
rotatable operation and a scooping device for taking out said dummy
sample from any one of a plurality of cassettes, and transferring
it to said load lock chamber or transferring it from said load lock
chamber to said one cassette; a plurality of vacuum processing
chambers into which said dummy sample may be provided one by one in
a vacuum condition; a second transferring device having an
extensible arm capable of rotatable operation, for transferring
said dummy sample between said load lock chamber and one of said
plurality of vacuum processing chambers; a first support member
arranged in said load lock chamber so as to support said dummy
sample one by one; a second support member arranged in each of said
plurality of processing chambers so as to support said dummy sample
one by one; a first sample lifting mechanism capable of moving up
or moving down said first support member so as to transfer said
dummy sample to said second transferring device, and a second
sample lifting mechanism arranged at said second support member in
each of said processing chambers; and a controller, wherein said
method comprises the steps of: (a) receiving said dummy sample on
said scooping-up device of said first transferring device by
inserting said scooping-up device of said first transferring device
under a bottom surface of said dummy sample to be taken out of one
cassette and lifting said scooping-up device, (b) transferring said
dummy sample received on said scooping-up device of said first
transferring device to said first support member, (c) transferring
said dummy sample to said second transferring device by operating
said first sample lifting mechanism, and (d) transferring said
dummy sample from second transferring device to said second support
member in any-one of said processing chambers by operating the
second sample lifting mechanism.
16. The method for using a dummy sample with a vacuum processing
apparatus according to claim 15, further comprising the step: (e)
effecting processing in said processing chamber while said dummy
sample is provided therein.
17. The method for using a dummy sample with a vacuum processing
apparatus according to claim 16, further comprising using said
dummy sample for checking for a number of foreign particles in a
vacuum processing portion of said vacuum processing apparatus.
18. The method for using a dummy sample with a vacuum processing
apparatus according to claim 16, wherein said dummy sample is used
in step (e) for a cleaning process of said processing chamber.
19. The method for using a dummy sample with a vacuum processing
apparatus according to claim 15, further comprising using said
dummy sample for checking for a number of foreign particles in a
vacuum processing portion of said vacuum processing apparatus.
20. The vacuum processing apparatus according to claim 1, wherein
said controller further controls: (e) processing in said processing
chamber while said dummy sample is provided therein.
21. The vacuum processing apparatus according to claim 20, wherein
said dummy sample is used for checking for a number of foreign
particles in a vacuum processing portion of said vacuum processing
apparatus.
22. The vacuum processing apparatus according to claim 20, wherein
said dummy sample is used for a cleaning process of said processing
chamber.
23. The vacuum processing apparatus according to claim 1, wherein
said dummy sample is used for checking for a number of foreign
particles in a vacuum processing portion of said vacuum processing
apparatus.
24. The vacuum processing apparatus according to claim 12, wherein
said controller further controls: (e) processing in said processing
chamber while said dummy sample is provided therein.
25. The vacuum processing apparatus according to claim 24, wherein
said dummy sample is used for checking for a number of foreign
particles in a vacuum processing portion of said vacuum processing
apparatus.
26. The vacuum processing apparatus according to claim 24, wherein
said dummy sample is used for a cleaning process of said processing
chamber.
27. The vacuum processing apparatus according to claim 12, wherein
said dummy sample is used for checking for a number of foreign
particles in a vacuum processing portion of said vacuum processing
apparatus.
28. The method for processing a dummy sample with a vacuum
processing apparatus according to claim 13, further comprising the
step: (e) effecting processing in said processing chamber while
said dummy sample is provided therein.
29. The method for using a dummy sample with a vacuum processing
apparatus according to claim 28, further comprising using said
dummy sample for checking for a number of foreign particles in a
vacuum processing portion of said vacuum processing apparatus.
30. The method for using a dummy sample with a vacuum processing
apparatus according to claim 28, wherein said dummy sample is used
in step (e) for a cleaning process of said processing chamber.
31. The method for using a dummy sample with a vacuum processing
apparatus according to claim 13, further comprising using said
dummy sample for checking for a number of foreign particles in a
vacuum processing portion of said vacuum processing apparatus.
32. The vacuum processing apparatus according to claim 14, wherein
said controller further controls: (e) processing in said processing
chamber while said dummy sample is provided therein.
33. The vacuum processing apparatus according to claim 32, wherein
said dummy sample is used for checking for a number of foreign
particles in a vacuum processing portion of said vacuum processing
apparatus.
34. The vacuum processing apparatus according to claim 32, wherein
said dummy sample is used for a cleaning process of said processing
chamber.
35. The vacuum processing apparatus according to claim 14, wherein
said dummy sample is used for checking for-a number of foreign
particles in a vacuum processing portion of said vacuum processing
apparatus.
Description
[0001] This is a divisional application of U.S. Ser. No.
09/956,135, filed Sep. 20, 2001, which is copending with U.S. Ser.
No. 09/956,136, filed Sep. 20, 2001, which is copending with U.S.
Ser. No. 09/956,140, filed Sep. 20, 2001, which is copending with
U.S. Ser. No. 09/956,137, filed Sep. 20, 2001, which is copending
with U.S. Ser. No. 09/982,957, filed Oct. 22, 2001, now U.S. Pat.
No. 6,705,828, which is copending with U.S. Ser. No. 10/085,008,
filed Mar. 1, 2002, now abandoned, which is copending with U.S.
Ser. No. 10/084,934, filed Mar. 1, 2002, now abandoned, which is
copending with U.S. Ser. No. 10/085,007, filed Mar. 1, 2002, now
abandoned, which is copending with U.S. Ser. No. 10/689,035, filed
Oct. 21, 2003, which is a divisional application of U.S. Ser. No.
09/769,507, filed Jan. 26, 2001, now U.S. Pat. No. 6,526,330, which
is a now U.S. Pat. No. 6,430,469, which is a divisional application
of U.S. Ser. No. 09/704,614, filed Nov. 3, 2000, now U.S. Pat. No.
6,672,819, which is a divisional application of U.S. Ser. No.
09/487,499, filed Jan. 19, 2000, now U.S. Pat. No. 6,519,504, which
is a divisional of U.S. Ser. No. 09/182,218, filed Oct. 30, 1998,
now U.S. Pat. No. 6,253,117, which is a divisional application of
U.S. Ser. No. 09/158,521, filed Sep. 22, 1998, now abandoned, which
is a divisional application of U.S. Ser. No. 09/151,795, filed Sep.
22, 1998, now U.S. Pat. No. 6,188,935, which is a divisional
application of U.S. Ser. No. 08/677,682, filed Jul. 8, 1996, now
U.S. Pat. No. 5,855,726.
BACKGROUND OF THE INVENTION
[0002] The present invention relates to a vacuum processing
apparatus; and more particularly, the invention relates to a vacuum
processing apparatus which is suitable for performing treatment,
such as etching, chemical vapor deposition (CVD), spattering,
ashing, rinsing or the like, on a sample of a semiconductor
substrate, such as a Si substrate, and to a semiconductor
manufacturing line for manufacturing semiconductor devices using
the vacuum processing apparatus.
[0003] Basically, a vacuum processing apparatus is composed of a
cassette block and a vacuum processing block. The cassette block
has a front facing the bay path of the semiconductor manufacturing
line and extending toward the longitudinal direction of the
semiconductor manufacturing line, an alignment unit for aligning
the orientation of a cassette for a sample or the orientation of a
sample, and a robot operating under an atmospheric pressure
environment. The vacuum block has a load lock chamber in the
loading side, a load lock chamber in the unloading side, a
processing chamber, a post treating chamber, a vacuum pump and a
robot operating under a vacuum environment.
[0004] In the vacuum processing apparatus, a sample extracted from
the cassette in the cassette block is transferred to the load lock
chamber of the vacuum processing block by the atmospheric transfer
robot. The sample is further transferred to the processing chamber
from the load lock chamber by the atmospheric transfer robot and is
set on an electrode structure body to be subjected to processing,
such as plasma treatment. Then, the sample is transferred to the
post treating chamber to be processed, if necessary. The sample
having been processed is transferred to the cassette in the
cassette block by the vacuum transfer robot and the atmospheric
transfer robot.
[0005] Vacuum processing apparatuses for performing plasma etching
on a sample are disclosed, for example, in Japanese Patent
Publication No. 61-8153, Japanese Patent Application Laid-open No.
63-133532, Japanese Patent Publication No. 6-30369, Japanese Patent
Application Laid-Open No. 6-314729, Japanese Patent Application
Laid-Open No. 6-314730, and U.S. Pat. No. 5,314,509.
[0006] In the above-referenced conventional vacuum processing
apparatuses, the processing chambers and the load lock chambers are
concentrically arranged or arranged in rectangular shape. For
example, in the apparatus disclosed in U.S. Pat. No. 5,314,509, a
vacuum transfer robot is arranged near the center of the vacuum
processing block with three processing chambers being
concentrically arranged around the vacuum transfer robot, and a
load lock chamber in the loading side and a load lock chamber in
the unload side are provided between the vacuum transfer robot and
the cassette block. In these apparatuses, there is a problem in
that the required installation area of the whole apparatus is large
since the rotating angles of the transfer arms of the atmospheric
transfer robot and the vacuum transfer robot are large.
[0007] On the other hand, the processing chamber in the vacuum
processing block and the vacuum pump and other various kinds of
piping components of the vacuum processing apparatus require
maintenance, such as scheduled and unscheduled inspection or
repairing. Therefore, in general, there are provided doors around
the vacuum processing block so that inspection and repairing of the
load lock chamber, the un-load lock chamber, the processing
chamber, the vacuum transfer robot and the various kinds of piping
components can be performed by opening the doors.
[0008] In the conventional vacuum processing apparatus, there is a
problem in that the installation area is large even though the
sample to be handled has a diameter d smaller than 8 inches (nearly
200 mm) and the outer size of the cassette C.sub.w, is nearly 250
mm. Further, in the case of handling a large diameter sample having
a diameter d above 12 inches (nearly 300 mm), the size of the
cassette C.sub.w, becomes nearly 350 mm. Accordingly, the width of
the cassette block containing a plurality of cassettes becomes
large. If the width of the vacuum processing block is determined
based on the width of the cassette block, the whole vacuum
processing apparatus requires a large installation area.
Considering a cassette block containing four cassettes as an
example, the width of the cassette block cannot help but increase
at least by nearly 40 cm when the diameter d of a sample increases
from 8 inches to 12 inches.
[0009] On the other hand, in a general semiconductor manufacturing
line order to process a large amount of samples and employ various
kinds of processes, a plurality of vacuum processing apparatuses
performing the same processing are gathered in a bay, and
transmission of samples between bays is performed automatically or
manually. Since such a semiconductor manufacturing line requires a
high cleanness, the whole semiconductor manufacturing line is
installed in a large clean room. An increase in the size of a
vacuum processing apparatus due to an increase in diameter of a
sample to be processed results in an increase in the required
installation area of the clean room, which further increases the
construction cost of the clean room, which by its nature already
has a high construction cost. If vacuum processing apparatuses
requiring a larger installation area are installed in a clean room
having the same area, a reduction in the total number of the vacuum
processing apparatuses or a decrease in the spacing between the
vacuum processing apparatuses becomes inevitable. A reduction in
the total number of the vacuum processing apparatuses in the clean
room having the same area decreases the productivity of the
semiconductor manufacturing line and increases the manufacturing
cost of the semiconductor devices as an inevitable consequence. On
the other hand, a decrease in the spacing between the vacuum
processing apparatuses decreases the maintainability of the vacuum
processing apparatus due to lack of maintenance space for
inspection and repair.
SUMMARY OF THE INVENTION
[0010] An object of the present invention is to provide a vacuum
processing apparatus which is capable of coping with larger
diameter samples while keeping the manufacturing cost to a
minimum.
[0011] Another object of the present invention is to provide a
vacuum processing apparatus which is capable of coping with larger
diameter samples and at the same time having a better
maintainability.
[0012] A further object of the present invention is to provide
semiconductor manufacturing line which is capable of coping with
larger diameter samples while keeping manufacturing cost to a
minimum by keeping the necessary number of vacuum processing
apparatuses, through more economical use of space and at the same
time not decreasing the maintainability.
[0013] In order to attain the above objects, the present invention
provides a vacuum processing apparatus composed of a cassette block
and a vacuum processing block, and the cassette block has a
cassette table for mounting a cassette containing a sample, and the
vacuum processing block has a processing chamber for treating the
sample and a vacuum transfer means for transferring the sample. In
the vacuum processing apparatus, both of the plan views of the
cassette block and the vacuum processing block are nearly
rectangular and the relation W.sub.1-W.sub.2>C.sub.w is
satisfied, where W, is the width of the cassette block, W.sub.2 is
the width of the vacuum processing block, and C.sub.w is the width
of one cassette.
[0014] Another characteristic of the present invention is that the
width of the cassette block is designed to be larger than the width
of the vacuum processing block, and the plan view of the vacuum
processing apparatus is formed in an L-shape or a T-shape.
[0015] A further characteristic of the present invention is that a
semiconductor manufacturing line comprising a plurality of bay
areas having a plurality of vacuum processing apparatuses composed
of a cassette block and a vacuum processing block are arranged in
the order of the manufacturing process, and the cassette block has
a cassette table for mounting a cassette containing a sample, and
the vacuum processing block has a process chamber for performing
vacuum processing on the sample and a vacuum transfer means for
transferring the sample. In the semiconductor manufacturing line,
at least one of the vacuum processing apparatuses is designed so
that the cassette block is capable of containing a sample having a
diameter not less than 300 mm, and the relation
W.sub.1-W.sub.22>C.sub.w is satisfied, where W.sub.1 is the
width of the cassette block, W.sub.2 is the width of the vacuum
processing block, and C.sub.w is the width of one cassette.
[0016] A still further characteristic of the present invention is
that a method of constructing a semiconductor manufacturing line
which comprises a plurality of vacuum processing apparatuses
composed of a cassette block capable of containing a sample having
a diameter not less than 300 mm, and a vacuum processing block for
performing vacuum processing on said sample. In the method of
constructing a semiconductor manufacturing line, at least one of
the vacuum processing apparatuses is designed so that the width of
the cassette block is larger than the width of the vacuum
processing block; the plane view of the vacuum processing apparatus
is formed in an L-shape or a T-shape; and a maintenance space is
provided between the L-shaped or the T-shaped vacuum processing
apparatuses and the adjacent vacuum processing apparatus.
[0017] According to the present invention, the plan view shapes of
the cassette block and the vacuum processing block are rectangular,
and the cassette block and the vacuum processing block are designed
so that the relation W.sub.1>W.sub.2 is satisfied, where W.sub.1
is the width of the cassette block and W.sub.2 is the width of the
vacuum processing block. Thereby, the plan view of the whole of the
vacuum processing apparatus becomes L-shaped or T-shaped. In a case
of arranging many such vacuum processing apparatuses, a sufficient
space can be provided between the vacuum processing blocks
positioned adjacent to each other, even if the interval between the
vacuum processing blocks is made small. For example, when W.sub.1
is 1.5 m and W.sub.2 is 0.8 m, a maintenance space of 0.7 m can be
provided between the vacuum processing apparatuses located adjacent
to each other.
[0018] Therefore, in spite of a larger diameter sample, the number
of vacuum processing apparatuses installed in a clean room, having
the same area as a conventional clean room, does not need to be
reduced. Accordingly, the productivity of the semiconductor
manufacturing line does not decrease. Thus, it is possible to
provide a vacuum processing apparatus which can cope with a larger
diameter sample and, at the same time, can suppress any increase in
the manufacturing cost, and has better maintainability.
[0019] Further, by employing the vacuum processing apparatus
according to the present invention in a semiconductor manufacturing
line, it is possible to provide a semiconductor manufacturing line
which can cope with a larger diameter sample while keeping
manufacturing cost to a minimum by keeping the necessary number of
vacuum processing apparatuses, through more economical use of space
and, at the same time, without decreasing the maintainability.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] FIG. 1 is a perspective view showing an embodiment of a
vacuum processing apparatus in accordance with the present
invention.
[0021] FIG. 2 is a vertical cross-sectional view showing the main
portion of the apparatus of FIG.1.
[0022] FIG. 3 is a section of the vacuum processing apparatus being
taken on the plane of the line III-III of FIG. 2.
[0023] FIG. 4 is a cross-sectional view showing the apparatus being
taken on the plane of the line IV-IV of FIG. 2.
[0024] FIG. 5 is a plan view showing a bay area of a semiconductor
manufacturing line having a vacuum processing apparatus in
accordance with the present invention.
[0025] FIG. 6A is a top plan view showing a part of a sample flow
in a semiconductor manufacturing line, and FIG. 6B is a detail view
of the area 6B in FIG. 6A, in accordance with the present
invention.
[0026] FIG. 7 is a diagrammatic view showing the relationship
between the size of a vacuum processing block and the size of a
cassette block.
[0027] FIG. 8 is a top plane view for explaining how maintenance of
a vacuum block of a vacuum processing apparatus is carried out in
accordance with the present invention.
[0028] FIG. 9 is a plan view showing the construction of an example
of a conventional vacuum processing apparatus.
[0029] FIG. 10 is a plan view showing an example of the relative
relationship of various kinds of elements inside a vacuum
processing apparatus in accordance with the present invention.
[0030] FIG. 11 is a plan view showing another embodiment of a
vacuum processing apparatus in accordance with the present
invention.
[0031] FIG. 12 is a perspective view showing the vacuum processing
apparatus of FIG. 11.
[0032] FIG. 13 is a plan view showing another embodiment of a
vacuum processing apparatus in accordance with the present
invention.
[0033] FIG. 14 is a plan view showing another embodiment of a
vacuum processing apparatus in accordance with the present
invention.
[0034] FIG. 15 is a plan view showing another embodiment of a
vacuum processing apparatus in accordance with the present
invention.
[0035] FIG. 16 is a plan view showing another arrangement of a bay
area in accordance with the present invention.
[0036] FIG. 17 is a plan view showing another arrangement of a bay
area in accordance with the present invention.
[0037] FIG. 18 is a plan view showing a semiconductor manufacturing
line in 1o accordance with the present invention.
[0038] FIG. 19 is a plan view showing a semiconductor manufacturing
line in accordance with the present invention.
[0039] FIG. 20 is a plan view showing a semiconductor manufacturing
line in accordance with the present invention.
[0040] FIG. 21 is a plan view showing another embodiment of a
vacuum processing apparatus in accordance with the present
invention.
[0041] FIG. 22 is a plan view showing another embodiment of a
vacuum processing apparatus in accordance with the present
invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0042] An embodiment of a vacuum processing apparatus in accordance
with the present invention will be described in detail below,
referring to FIG. 1 to FIG. 4. As shown in FIG. 1, each of a pair
of vacuum processing apparatuses 100 is composed of a rectangular
block shaped cassette block 1 and a rectangular block shaped vacuum
processing block 2. Each of the plan shapes of the cassette block 1
and the vacuum processing block 2 is rectangular, and the whole
plan shape formed by both is L-shaped. The cassette block 1 faces a
bay path of a semiconductor manufacturing line and extends in the
lateral direction of the bay path, and in the front side of the
cassette block there are a cassette table 16 for receiving and
transferring a cassette 12 containing a sample from and to the bay
path and an operation panel 14. The vacuum processing block 2
installed in the back side of the cassette block 1 extends in the
direction perpendicular to the cassette block 1 and contains
various kinds of devices for performing vacuum processing, as well
as a transfer device.
[0043] As shown in FIG. 2 to FIG. 4, in the cassette block 1 there
are provided an atmospheric robot 9 for transferring a sample and
cassettes 12 for holding a sample. The sample cassettes 12 are
product sample cassettes 12A, 12B, 12C and a dummy sample cassette
12D. An orientation adjuster for the sample may be provided near
the cassettes 12, if necessary. A cassette 12 contains only product
samples or product and dummy samples. Samples for checking for a
foreign substance and/or for cleaning are contained in the
uppermost stage and/or the lowermost stage of the cassette.
[0044] In the vacuum processing block 2, there are provided a load
side load lock chamber 4, an unload side load lock chamber 5, a
processing chamber 6, a post treating chamber 7, a vacuum pump 8
and a vacuum transfer robot 10. The reference character 13 denotes
a discharging means for etching, and the reference character 14
denotes a discharging means for post treatment (ashing).
[0045] The atmospheric transfer robot 9 is movably installed on a
rail 92 placed parallel to the cassette table 16 inside the
cassette block 1 and operates to transfer a sample 3 from a
cassette 12 to the load lock chamber 4 on the load side and from
the load lock chamber 5 on the unload side. The vacuum transfer
robot transfers the sample 3 from the load lock 4 on the load side
to the processing chamber 6 and also transfers the sample 3 to and
from the processing chamber 6, the load lock chamber 5 on the
unload side and the post treating chamber 7. The present invention
is based on handling of a larger diameter sample having a diameter
d above 12 inches (nearly 300 mm). When the diameter of the sample
is 12 inches, the outer size C.sub.w of the cassette is nearly 350
mm to 360 mm.
[0046] The processing chamber 6 processes the samples 3 one-by-one,
and is, for example, a chamber for performing plasma etching
disposed in the upper left of the vacuum processing block 2. The
load lock chamber 4 on the load side and the load lock chamber 5 on
the unload side are located on the opposite side of the vacuum
transfer robot 10 from the processing chamber 6, that is, they both
are placed in the lower position of the vacuum processing block 2.
The post treating chamber 7 is a chamber for post treating
processed samples 3 one-by-one, and located in the middle position
of the vacuum processing block 2 facing the load lock chamber 5 on
the unload side.
[0047] The atmospheric transfer robot 9 has an extensible arm 91
which is so designed that the locus of the extensible arm extending
and contracting while the robot is moving on the rail 92 includes a
locus containing a cassette 12 in the load lock chamber 4 on the
load side and the load lock chamber 5 on the unload side. The
vacuum transfer robot 10 has an extensible arm 101 which is so
designed that the rotating locus of the extensible arm includes a
locus containing the load lock chamber 4 on the load side and the
processing chamber 6 in the vacuum processing block 2. Therefore,
the extensible arm 101 of the vacuum transfer robot 10 is so
installed that the rotating locus contains the processing chamber
6, the load lock chamber 5 on the unload side and the post treating
chamber 7. The installed position of the atmospheric transfer robot
9 may be in the right side position on the cassette block 1.
[0048] A wafer search mechanism is provided around each of the
cassettes 12 to recognize the samples in each of the cassettes when
a cassette 12 is set. In the load lock chambers 4, 5 and the
processing chamber 6 and the post treating chamber 7, there are
provided sample lifting mechanisms 14A, 14B, respectively, so that
a sample 3 can be transferred to the extensible arm 91 or 101 of
each of the robots. Further, in the processing chamber 6, there are
provided an electrode of an etching discharge means 13 and a sample
mounting table 14C. Inside the etching discharge means 13, there is
provided a sample lifting mechanism 14B. The reference character is
a ring-shaped gate valve.
[0049] An operation for processing a sample inside the processing
chamber 100 will be described below, taking plasma etching as an
example. Initially, the atmospheric transfer robot 9 in the
cassette block 1 is moved on the rail 92 to approach, for example,
the cassette 12A on the load side, and a fork (not shown) is
inserted under a sample 3 inside the cassette by extending the
extensible arm 91 toward the cassette 12A to mount the sample 3 on
the fork. After that, the arm 91 of the atmospheric transfer robot
9 is moved to the load lock chamber 4 while the cover of the load
lock chamber 4 is kept open to transfer the sample 3 therein. At
this time, the atmospheric transfer robot 9 is moved on the rail 92
in such a manner that the stroke of the extensible arm 91 may
easily reach the load lock chamber 4, if necessary.
[0050] Then, the sample lifting mechanism 14A is operated to
support the sample 3 on a support member thereof in the load lock
chamber 4. Further, after evacuating the load lock chamber 4 to a
vacuum, the support member is lowered by operating the sample
lifting mechanism 14A again to transfer the sample to the arm 101
of the vacuum transfer robot 10 and transfer the sample along a
transfer path into the processing chamber 6 in the vacuum
environment. By a reverse operation, the sample is transferred to a
cassette position on the unload side in the cassette block 1.
[0051] In a case requiring post treatment, the sample is
transferred to the post treating chamber 7 using the arm 101 of the
vacuum transfer robot. In the post treating chamber 7, a sample
having been subjected to etching processing is subjected to plasma
post treatment, such as ashing.
[0052] In FIG. 3, the locus of the arm 101 of the vacuum transfer
robot is as follows, taking a case where samples 3 are in the load
lock chamber 4, the processing chamber 6 and the post treating
chamber 7 and no sample is in the load lock chamber 5. The arm 101
of the vacuum transfer robot 10 initially transfers the one sample
3 in the post treating chamber 7 to the load lock chamber 5, and
then the sample 3 in the processing chamber 6 is transferred to the
post treating chamber 7. Next, the sample 3 in the load lock
chamber 4 is transferred to the vacuum chamber 6. After treatment,
the sample 3 in the treating chamber 6 is transferred to the post
treating chamber 7. The arm 101 repeats a trace of the same
locus.
[0053] Since the vacuum transfer robot is placed near the side of
the vacuum processing block 2, a worker can inspect and repair the
vacuum transfer robot with ease, and accordingly maintenance can be
easily performed.
[0054] FIG. 5 is a plan view showing an embodiment of a bay area
200 of a semiconductor manufacturing line made up of a plurality of
vacuum processing apparatuses 100 in accordance with the present
invention. In the figure, many L-shaped vacuum processing
apparatuses 100 are arranged in spaced relationship with a gap G1
within a maintenance space 203, and a partition 120 divides the
room into a high clean level room 201A and low clean level rooms
201B. An automatic transfer machine 202 for supplying and
transferring samples 3 is installed along the front surface of the
cassette blocks 1 down the center of the high clean level room
201A. On the other hand, many vacuum processing blocks 2 are
arranged in the low clean level room 201B, and the interval G2
between them represents a maintenance space to be described
later.
[0055] FIG. 6A is a view showing a part of the flow of a sample 3
in an embodiment of a semiconductor manufacturing line in
accordance with the present invention. At the entrance portion of
each of the bay areas 200, there are provided an inspection
apparatus 206 and a bay stoker 208. The back portion of each of the
bay areas 200 communicates with a maintenance path 210, and there
is provided an air shower 212 in the entrance of the maintenance
path 210. The sample 3 supplied to the bay stoker 208 from the
outside is successively transferred to an in-bay automatic transfer
machine 202 in a certain bay area 200 corresponding to the
manufacturing process using a line automatic transfer machine 204,
as shown by arrows. Further, the sample 3 is transferred from the
in-bay automatic transfer machine 202 to the cassette block of the
vacuum processing apparatus 100. In the vacuum processing apparatus
100, as seen in FIG. 6B, the sample 3 is transferred between the
cassette block 1 and the vacuum processing block 2 by the
atmospheric transfer robot 9 and the vacuum transfer robot 10. The
sample 3 having been processed in the vacuum processing block 2 is
transferred to the in-bay automatic transfer machine 202, and
further is transferred to the line automatic transfer machine 204,
and then is transferred to the next bay area 200.
[0056] In a semiconductor manufacturing line having an in-bay
automatic transfer machine, the in-bay automatic transfer machine
202 supplies a new sample (unprocessed wafer) to the cassette block
1 in each of the vacuum processing apparatuses 100 from the bay
stoker 208 provided in each of the bays 200, and recovers a
cassette containing a processed sample from the cassette block
1.
[0057] In response to a demand signal output from each of the
vacuum processing apparatuses 100, the in-bay automatic transfer
machine 202 receives a cassette containing a new sample
(unprocessed wafer) from the bay stoker 208 provided in each of the
bays 200, and runs up to and stops at a cassette position where the
cassette block 1 of the vacuum processing apparatus outputs the
demand signal.
[0058] As a cassette handling robot installed in the in-bay
automatic transfer machine 202, a robot having a three-axis control
function including a rotating operation (.theta.-axis), vertical
movement (Z-axis) and grip operation (.phi.-axis), or a four-axis
control function including a rotating operation (.theta.-axis),
vertical movement (Z-axis), grip operation (.phi.-axis) and
back-and-forth movement (Y-axis) is used.
[0059] In a case where a processed cassette 12 has existed at
designated position in the cassette block 1, according to the
required content output from each of the vacuum processing
apparatuses 100, the cassette handling robot recovers the cassette
12 from the cassette block 1 and transfers it to an empty cassette
store on the in-bay automatic transfer machine 202, and then
supplies a new cassette 12 transferred from the bay stoker 208 to
the empty position left by the recovering operation.
[0060] After completion of this operation, the in-bay automatic
transfer machine transfers the recovered cassette 12 to the bay
stoker 208, and stops its operation and stands by until the next
demand signal is output from a vacuum processing apparatus 100 in
the bay 200.
[0061] When demand signals are output from plural vacuum processing
apparatuses 100, 100, . . . in the bay 200 within a short time, it
depends on the system design whether the in-bay automatic transfer
machine transfers samples according to the time sequence of the
received signals, or in an order to achieve a higher transfer
efficiency from the stand-by position of the in-bay automatic
transfer machine 202 taking account of the relationship between the
time difference in to demand signals and the positions of signal
output apparatuses.
[0062] Cassette management is performed in such a manner that
information on a received and sent cassette includes a number
specified for each of the cassettes and various kinds of
information used in managing the total manufacturing line, and this
information is transmitted between the vacuum processing apparatus
100 and the in-bay automatic transfer machine 202 via, for example,
an optical communication system.
[0063] The processing flow in the bay area 200 will be described
below, taking a sample in each cassette into consideration.
[0064] In the cassette block 1, three to four cassettes are placed
side by side on a plane in the same level. In each of the
cassettes, a given number of samples, in this case, semiconductor
element substrates (wafers) having a diameter of 300 mm (12") are
contained.
[0065] In the two to three cassettes 12 among the three to four
cassettes, samples to be subjected to certain vacuum processing in
the vacuum processing portion (unprocessed wafers) are contained.
In the remaining one cassette 12D, dummy wafers are contained.
[0066] The dummy wafer is used for checking for the number of
foreign particles in the vacuum processing portion and/or for a
cleaning process of the processing chamber composing the vacuum
processing zone.
[0067] Here, the cassettes 12 containing samples before processing
will be identified as 12A, 12B, 12C. In such a state, the state of
the samples of, for example, the cassette 12A is checked by a wafer
check means (not shown) in this case, the cassette 12A has a
function to store samples in a vertical direction one-by-one.
[0068] As the wafer check means used, there is an arrangement where
a sensor is successively moved so as to correspond to the position
of successive sample containing stages of the cassette 12A, and
another arrangement where plural sensors are provided corresponding
to respective sample containing stages of the cassette 12A. In the
latter arrangement, there is no need to provide a means for moving
a sensor to sample containing stages of the cassette 12A. On the
other hand, it may be possible to fix the sensor for the wafer
check means and move the cassette 12A instead.
[0069] Using the wafer check means, it is determined in which
positions in the vertical direction of the cassette 12A the
unprocessed samples are contained. For example, in a case where the
wafer check means is the type in which a sensor is successively
moved so as to correspond to the position of successive sample
containing stages of the cassette 12A, the sensor detects a sample
containing stage of the cassette 12A and the presence or absence of
a unprocessed sample in the stage while the sensor is moving, for
example, upward from the lower position of the cassette 12A, or
downward from the upper position of the cassette 12A.
[0070] The check results are output from the wafer check means to
be input to and stored in, for example, a host computer (not shown
in the figure) of the semiconductor manufacturing line controller
for managing all of the vacuum processing apparatuses. Otherwise,
the check results may be input to and stored in a personal computer
in a console box on the cassette mounting table or a host computer
for controlling the apparatuses through the personal computer.
[0071] Then, in this embodiment, the atmospheric transfer robot 9
is started to operate. By operation of the atmospheric transfer
robot 9, one of the unprocessed samples in the cassette 12A is
extracted out of the cassette 12A.
[0072] The atmospheric transfer robot 9 has a scooping-up device
for scooping up and holding the surface of a sample opposite
(reverse) to the surface to be processed. The scooping-up devices
used are a device which adheres to and holds the reverse side
surface of the sample, a device having grooves or indented portions
for holding the sample, and a device mechanically gripping the
peripheral portion of the sample. Further, as for a device adhering
to and holding the reverse side surface of the sample, there are
devices operating with the use of vacuum sucking adhesion and
electrostatic attraction.
[0073] In a case of using for device adhering to and holding the
reverse side surface of the sample having a diameter of 300 mm
(12"), it is important to select the arrangement and the dimension
of the adhering portion so as to minimize bending of the sample as
much as possible. For example, the interval between the adhering
portions is set to d/3 to d/2 taking the center of the sample 3 as
the center, where d is the diameter of the sample 3.
[0074] Depending on the amount of bending and the type of bending
of the sample, displacement of the sample occurs when the sample is
transferred between the scooping-up device and another transfer
means, which sometimes causes an undesirable displacement of the
orientation of the sample.
[0075] Further, in a case or using a device for adhering to and
holding the reverse side surface of the sample, the adhering force
is required to have a sufficient strength that the sample is not
detached by the inertia force acting on the sample when the sample
is being transferred, including the high forces encountered during
starting and stopping. If this condition is not satisfied, the
sample may fall from the scooping-up device or a displacement of
the orientation of the sample is likely to occur.
[0076] The scooping-up device is inserted in a position
corresponding to the reverse surface of an unprocessed sample
required to be extracted in the cassette 12A. In a state there the
scooping-up device is inserted, the cassette 12A is lowered by a
given amount or the scooping-up device is lifted by a given amount.
By lowering the cassette 12A or lifting the scooping-up device, the
unprocessed sample is transferred to the scooping-up device while
the sample is kept in a scooped state. The scooping-up device then
extracts the sample out of the cassette 12A. Thus, one of the
unprocessed samples in the cassette 12A is extracted out of the
cassette 12A.
[0077] As described above, for example, the host computer instructs
and controls the atmospheric transfer robot 9 as to which
unprocessed sample in the cassette 12A is to be extracted.
[0078] The information from which stage in the cassette 12A the
unprocessed sample is extracted is successively stored in the host
computer for every 15 extraction of a sample.
[0079] The atmospheric transfer robot 9, having one unprocessed
sample in the scooping-up device, is moved to and stopped at a
position where the sample can be loaded into the load lock chamber
4.
[0080] The load lock chamber 4 is isolated from a vacuum
environment of the vacuum processing portion 2 and is in an
atmospheric pressure state. The unprocessed sample held by the
scooping-up device of the atmospheric transfer robot 9 is loaded
into the load lock chamber 4 in such a state so as to be
transferred to the load lock chamber 4 from the scooping-up
device.
[0081] The atmospheric transfer robot 9 having transferred the
unprocessed sample into the load lock chamber 4 is returned to a
predetermined position for standing by until the next
operation.
[0082] The operation described above is instructed and controlled
by, for example, the host computer.
[0083] The information as to which stage in the cassette 12A an
unprocessed sample loaded in the load lock chamber 4 is extracted
from is successively stored in the host computer for every
extraction of a sample.
[0084] The load lock chamber 4 having received an unprocessed
sample is isolated from atmosphere and evacuated to vacuum. Then,
the isolation from the processing chamber is released and the load
lock chamber 4 is communicated with the processing chamber so as to
be capable of transferring the unprocessed sample. Then, a
predetermined vacuum processing is performed in the vacuum
processing zone.
[0085] The sample having been subjected to vacuum processing
(sample after processed) is transferred from the vacuum processing
zone to the unload lock chamber 5 by a vacuum transfer robot so as
to be loaded into the unload lock chamber 5.
[0086] The vacuum transfer robot has a scooping-up device similar
to that in the atmospheric transfer robot 9. As the scooping-up
device, scooping devices similar to those of the atmospheric
transfer robot 9 may be used, except for the device having a
function of vacuum adhesion.
[0087] After loading the processed sample, the unload lock chamber
5 is isolated from the vacuum processing portion 2 and the pressure
inside the unload lock chamber 5 is adjusted to atmospheric
pressure.
[0088] The unload lock chamber 5 in which the inner pressure
becomes atmospheric pressure is opened to atmosphere. Under such a
state, the scooping-up device of the atmospheric transfer robot 9
is inserted into the unload lock-chamber 5, and the processed
sample is transferred to the scooping-up device.
[0089] The scooping-up device having received the processed sample
transfers the sample out of the unload lock chamber 5. After that,
the unload lock chamber 5 is isolated from atmosphere and evacuated
to a vacuum so as to be prepared for loading of the next processed
sample.
[0090] On the other hand, the atmospheric transfer robot 9 having
the processed sample in the scooping-up device is moved to and
stopped at a 10 position where the processed sample can be returned
to the cassette 12A.
[0091] Then, the scooping-up device having the processed sample is
inserted into the cassette 12A. The host computer controls the
inserting position so that the processed sample is returned to the
position where the processed sample had been originally
located.
[0092] After inserting the scooping-up device having the processed
sample, the cassette 12A is lifted or the scooping-up device is
lowered.
[0093] By doing so, the processed sample is returned to and
contained in the position where the processed sample had been
originally located.
[0094] Such an operation is similarly performed for the remaining
unprocessed samples in the cassette 12A and also for the
unprocessed samples in the cassettes 12B, 12C.
[0095] That is, an unprocessed sample successively extracted from
each of the cassettes one by one is, for example, numbered. The
host computer, for example, stores information indicating that an
unprocessed sample extracted from which stage in which cassette has
what number.
[0096] Based on the information, movement of a sample, extraction
of the sample from a cassette, vacuum processing of the sample and
returning the sample to the cassette after vacuum processing, is
managed and controlled.
[0097] In other words, the movement of a sample from the time it is
extracted to the time it is returned to the original cassette, is
performed according to the following steps in the following
order.
[0098] (1) checking the sample position in a cassette.
[0099] (2) extracting of a sample in the cassette using an
atmospheric transfer robot.
[0100] (3) loading the sample into a load lock chamber using an
atmospheric transfer robot.
[0101] (4) transferring the sample from load lock chamber to a
vacuum processing zone using a vacuum transfer robot.
[0102] (5) performing vacuum processing in the vacuum processing
zone.
[0103] (6) transferring the sample from the vacuum processing zone
to an unload lock chamber using the vacuum transfer robot.
[0104] (7) unloading the sample from the unload lock chamber using
the atmospheric transfer robot.
[0105] (8) returning the sample into the original position in the
cassette using the atmospheric transfer robot.
[0106] In every movement of the sample from steps (1) to (8) as
described above, the host computer successively updates the
information on what designated number sample each of the stations
has. The updating processing is performed for every one of the
samples. By doing so, each of the samples is managed, that is, it
is known what designated number sample exists in which station.
[0107] For example, the successive updating state process by the
host computer may be successively displayed on a vacuum processing
system control CRT screen. In this case, each of the stations and
what designated number sample exists at present at each station are
displayed, so this information is easily recognized by an
operator.
[0108] In a case where orientation adjustment of an unprocessed
sample is performed, this step is performed between the above steps
(2) and (3).
[0109] Such management and control for movement of samples may be
performed in a case where the vacuum processing portion 2 has a
plurality of vacuum processing zones.
[0110] Assuming that the vacuum processing portion 2 has, for
example, two vacuum processing zones. In this case, the sample is
processed in series or processed in parallel depending on the
processing information. Here, series processing refers to a sample
being vacuum processed in one vacuum processing zone and the
processed sample being successively vacuum-processed in the
remaining vacuum processing zone. On the other hand, parallel
processing refers to a sample being vacuum-processed in one vacuum
processing zone and another sample being vacuum-processed in the
remaining vacuum processing zone.
[0111] In a case of series processing, a sample numbered by the
host computer is processed according to a determined order and the
processed sample is returned to the original position in the
cassette.
[0112] In a case of parallel processing, since the host computer
manages and controls in what vacuum processing zone and how a
numbered sample is processed, the processed sample is returned to
the original position in the cassette.
[0113] In a case of parallel processing, the host computer may
manage and control which vacuum processing zone is used depending
on which stage in the cassette the sample is extracted from and
what designated number the sample has.
[0114] In a case where series processing and parallel processing
are mixed, since the host computer manages and controls in what
vacuum processing zone and how a numbered sample is processed, the
processed sample is returned to the original position in the
cassette.
[0115] Examples of the plural vacuum processing zones are a
combination of zones having the same plasma generating method, a
combination of different plasma etching zones, a combination of a
plasma etching zone and a post-processing zone such as ashing, a
combination of an etching zone and a film forming zone and so
on.
[0116] The dummy sample in a cassette is handled in the same manner
as for an unprocessed sample except for performing vacuum
processing, which is performed on the unprocessed sample.
[0117] A detecting means for detecting presence or absence of a
sample is provided in each cassette, in the scooping-up device of
the atmospheric transfer robot, in the orientation adjusting
station, in the station in the load lock chamber, in the
scooping-up device of the vacuum transfer robot, in the station in
the vacuum processing zone, and in the station in the unload lock
chamber.
[0118] A contact type or a non-contact type sensor is properly
selected to be used as the sample detecting means.
[0119] The cassette, the scooping-up device and each of the
stations become checking points for the movement of the sample.
[0120] In such a construction, for example, when the presence of a
sample is detected in the scooping-up device of the vacuum transfer
robot 10 and the presence of a sample is not detected in the
station in the vacuum processing zone, this means that a problem
has occurred in the sample transfer machine between the scooping-up
device of the vacuum transfer robot and the station in the vacuum
processing zone due to some cause, and so recovering from the
trouble can be properly and speedily preformed. Therefore, it is
possible to prevent the through-put of the whole system from being
degraded.
[0121] In a construction where the sample detecting means is not
provided in each of the scooping-up devices of the transfer robots
9, for example, when the presence of a sample is detected in the
station in the load lock chamber and the presence of a sample is
not detected in the station in the vacuum processing zone, this
means that a problem has occurred in the sample transfer machine
between the station in the load lock chamber and the scooping-up
device of the vacuum transfer robot, or in the vacuum transfer
robot, or in the sample transfer machine between the scooping-up
device of the vacuum transfer robot and the station in the vacuum
processing zone due to some cause, and so recovering from the
trouble can be properly and speedily preformed. Therefore, it is
possible to prevent the through-put of the whole system from being
degraded.
[0122] Such an embodiment has the following usefulness.
[0123] (1) Since the stage in the cassette in which an unprocessed
sample is contained is checked and movement of the checked
unprocessed sample is successively monitored and controlled by
numbering the unprocessed sample, the processed sample can be
certainly returned to the original position of the cassette.
[0124] (2) Since the stage in the cassette in which an unprocessed
sample is contained is checked and movement of the checked
unprocessed sample is successively monitored and controlled by
numbering the unprocessed sample even in a case of series
processing, parallel processing or a combination thereof, the
processed sample can be certainly returned to the original position
of the cassette.
[0125] (3) Since the stage in the cassette in which an unprocessed
sample is contained is checked and movement of the checked
unprocessed sample is successively monitored and controlled by
numbering the unprocessed sample, the processing state of the
samples processed in the vacuum processing portion one by one can
be properly checked and managed in detail.
[0126] For example, in a case where a defect occurs in the
processing of a sample, since a processing state for each of the
samples including the processing condition is managed, the
processing state can be identified by the information as to which
stage in what cassette the defective sample is contained in.
Therefore, the cause of the defect can be known in a short time and
accordingly the time required for a countermeasure can be shortened
by the time served in identification of the processing state.
[0127] Although the description in the above embodiment is based on
a sample having a diameter of 300 mm (12"), the usefulness of the
invention is not limited to the diameter of the sample.
[0128] The maintenance of the equipment will be described
below.
[0129] As for maintenance of the vacuum processing apparatus 100 in
accordance with the present invention, most of the maintenance of
the cassette block 1 can be performed from the front side of the
cassette block since the cassette block 1 faces the line of the
in-bay automatic transfer machine 202.
[0130] On the other hand, for maintenance of the vacuum processing
block 2, an operator is required to enter the area of the vacuum
processing block 2 1o from the back side of each bay area through
the maintenance path 203 or through the maintenance path 210.
[0131] FIG. 7 is a view showing the relationship between the size
of the vacuum processing block 2 and the size of the cassette block
1. When the longer side (width) of the vacuum processing block 2 is
designated as W1 and the shorter side is designated as B1, and the
longer side (width) of the cassette block 1 is designated as W2 and
the shorter side is designated by B.sub.2, the relations
W1>B.sub.1, W2>B.sub.2 are satisfied. It is preferable for
the relation W.sub.1-W2.apprxeq.d to be satisfied, where d is the
diameter of the sample.
[0132] When the gap between the cassette blocks of the vacuum
processing apparatuses adjacent to each other is designated as G1
and the gap between the vacuum processing blocks adjacent to each
other is designated as G2 (referring to FIG. 5), it is assumed that
the relation G1<G2 is satisfied. The maintenance space between
the vacuum processing apparatuses 100 adjacent to each other can be
expressed by (W1+G1)-W2=MS. MS is a dimension required for
maintenance work of an operator. In this case, it is preferable for
the relation (W1+G1)-W2.apprxeq.d to be satisfied. Although the
maintenance space 203 is an entrance for the operator, there are
some cases where the space is not provided depending on the layout
of the bay area 200. Even in such a case, an installation clearance
G1 between the vacuum processing apparatuses adjacent to each other
is required at a minimum, but the installation clearance
practically becomes a value near zero. In this case, W1-W2=MS
becomes the maintenance space.
[0133] The side face of the vacuum processing block 2 of the vacuum
processing apparatus 100 in accordance with the present invention
is of the opening type door structure. That is, two pairs of hinged
doors 214, 216 are provided in the side face and the back face of
the vacuum processing block 2. In order to perform maintenance, it
is required that (1) there are spaces from which an operator can
check the devices and the pipes from back and front sides, (2)
there are spaces to which the various kinds of devices and pipes,
for example, the main chamber can be drawn, and (3) there are
spaces in which the doors can be opened. Therefore, the maintenance
space MS is preferably 90 to 120 cm.
[0134] According to the vacuum processing apparatus 100 in
accordance with the present invention, an operator can easily
access to the side face and the back face of the vacuum processing
block 2. Further, by opening the doors 214, the load lock chamber
5, the post treating chamber 7, the vacuum transfer robot 10 and
the various kinds of pipes and devices can be inspected and
repaired. Furthermore, by opening the doors 216, the processing
chamber 6 and the vacuum pump and the various kinds of pipes and
devices can be inspected and repaired.
[0135] Since there is the maintenance space MS between the vacuum
processing blocks 2, there is no obstacle to the operator opening
the doors 214 in the side to perform maintenance work. Further,
there is provided enough space in the back face side of the vacuum
processing block 2 to open the doors 216 and perform maintenance
work.
[0136] The plan shape of the vacuum processing apparatus 100 is
L-shaped, as described before. On the other hand, in the
conventional vacuum 10 processing apparatus 800, the vacuum
processing block and the cassette block are generally constructed
together to form a rectangular shape on the whole, as shown in FIG.
9. The rectangular shape is selected based on the shape of various
kinds of elements installed in the vacuum processing apparatus and
the mutual operational relationship among the various kinds of
elements. In the general conventional vacuum processing apparatus,
when the gap between the cassette blocks adjacent to each other is
designated as G1 and the gap between the vacuum processing blocks
adjacent to each other is designated as by G2, there is the
relation G1.gtoreq.G2.
[0137] Since the conventional vacuum processing apparatus 800 deals
with samples having a diameter d not larger than 8 inches, such a
construction described above can be used. However, in an apparatus
dealing with a sample having a diameter d as large as 12 inches,
the outer dimension of the cassette 12 becomes larger and
consequently the width W1 of the cassette block containing a
plurality of the cassettes 12 becomes larger. Since the width
(W2.apprxeq.W1) of the vacuum processing block is determined
corresponding to the width W1, the whole of the vacuum processing
apparatus 800 requires a larger space. Further, as the widths W1,
W2 of the cassette block and the vacuum processing block become
larger, the doors 214, 216 must be made larger and a large
maintenance space is required in order to provide a space for the
doors 214, 216 to be opened. For example, if a 12-inch sample is
dealt with in the conventional apparatus, W1=W2=150 cm, G1=G2=90 cm
and the maintenance space between the vacuum processing apparatuses
100 adjacent to each other becomes MS=90 cm. This results in an
increase in the effective occupying area of the vacuum processing
apparatus 800 in each of the bay areas. This is not preferable.
[0138] An example of the mutual relationship of the various kinds
of elements in the vacuum processing apparatus in accordance with
the present invention will be described, referring to FIG. 10. As
shown in the figure, the rotational center 01 of the arm of the
vacuum transfer robot 10 is arranged on the right hand side or the
left hand side of the line L-L connecting the middle position of
the load lock chamber 4 and the unload lock chamber 5 and the
center of the processing chamber 6, that is, the rotational center
01 is shifted toward the side of the vacuum processing portion. The
post treating chamber 7 is arranged on the opposite side of the
line L-L. Therefore, the rotating range of the arm of the vacuum
transfer robot is narrow, and the whole plan shape of the vacuum
processing apparatus 100 can be made L-shaped by arranging the
vacuum transfer robot 10 near the side of the vacuum processing
portion. By such a construction, the rotation range of the arm of
the vacuum transfer robot 10 becomes nearly one-half of one round
circle. By limiting the rotating range of the arm of the vacuum
robot 10 for transfer of a wafer to within nearly a semi-circle,
one sample 3 can be transferred to the load lock chamber 4, the
unload lock chamber 5, the processing chamber 6 and the post
treating chamber 7 with nearly a semi-circular movement of the arm.
As described above, since the rotating range of the arm of the
vacuum transfer robot is designed to be within nearly a
semi-circle, the width W2 of the vacuum processing block 2 can be
made narrow.
[0139] As described above, the vacuum processing apparatus 100 in
accordance with the present invention makes available the
aforementioned maintenance space by making the width W2 of the
vacuum processing block 2 as small as possible by taking into
consideration the shape of the various kinds of elements arranged
in the vacuum processing apparatus and the mutual relationship of
the various elements, while providing the width W1 of the cassette
block 1 to cope with a large diameter sample. By doing so, the
effective occupied area of the vacuum processing apparatus 100 can
be increased.
[0140] Since there is the maintenance space MS between the vacuum
processing blocks 2, there is no obstacle to the operator opening
the doors 214 in the side to perform maintenance work. Further,
there is provided enough space in the back side of the vacuum
processing block 2 to open the doors 216 and perform maintenance
work.
[0141] In the vacuum processing apparatus 100 in accordance with
the present invention, the positional relationship between the
vacuum processing block 2 and the cassette block 1 can be changed
along the lateral direction of the cassette block. For example, as
shown in FIG. 11 and FIG. 12, the vacuum processing block 2 and the
cassette block 1 are arranged so that the center line of the vacuum
processing block 2 passes through the center of the cassette block
1 in the lateral direction, in other words, the vacuum processing
block 2 and the cassette block I may be arranged so as to form a
T-shape as seen in a top plan view. In the T-shape arrangement,
since there is a maintenance space MS between the vacuum processing
blocks 2, there is no obstacle to the operator opening the doors
214 in the side to perform maintenance work.
[0142] The plan view shape of the cassette block 1 and the vacuum
processing block 2 in accordance with the present invention need be
not strictly rectangular, that is, it may be nearly rectangular so
long as the relation (W1+G1)-W2=MS can be practically maintained.
The structural elements contained in the cassette block 1 and the
vacuum processing block 2 and the arrangement of the structural
elements may be different from those in the aforementioned
embodiments. For example, in the embodiment shown in FIG. 13, the
atmospheric transfer robot 9 of the cassette block 1 is placed
between the load lock chamber 4 and the unload lock chamber 5 of
the vacuum processing block. In this case, the plan view shape of
the cassette block 1 is strictly a projecting shape and the plan
view shape of the vacuum processing block 2 is strictly a recessed
shape, and the whole of the vacuum processing apparatus 100 is a
combination of two blocks of nearly rectangular shape forming a
T-shape. In this embodiment, the locus of the extensible arm 91 can
be constructed so as to trace the locus containing the cassette 12
and the load lock chamber 4 on the load side and the load lock
chamber 5 on the unload side 5 without moving the atmospheric
transfer robot 9 on the rail by placing the atmospheric transfer
robot 9 of the cassette block 1 between the load lock chamber 4 and
the unload lock chamber 5 of the vacuum processing block and
movably arranging the cassette 12 on the rail 94. In this
embodiment, the aforementioned maintenance space MS between the
vacuum processing blocks 2 can be provided.
[0143] FIG. 14 shows another embodiment of a vacuum processing
apparatus 100 in accordance with the present invention. The vacuum
processing apparatus has a cassette mounting table 130 and a
console box 132 for 1o evaluating and inspecting a sample in
addition to a cassette block 1, an atmospheric transfer robot 9 and
a sample cassette 12.
[0144] FIG. 15 shows a further embodiment of a vacuum processing
apparatus 100 in accordance with the present invention. The vacuum
processing apparatus is a T-shaped vacuum processing apparatus
having a cassette block 1, an atmospheric transfer robot 9 and a
sample orientation adjuster 11.
[0145] FIG. 16 is a plan view showing another embodiment of a bay
area 200 in accordance with the present invention. A pair of
L-shaped vacuum processing apparatuses 100A, 100B are arranged
opposite to each other to form a set, and a console table 130 with
a console box 132 is placed between the sets. There is not the
aforementioned gap G1, but (W1+W3)-W2=MS becomes the maintenance
space when the width of the console box 130 is W3. Since there is
no gap G1, an operator needs to enter the zone 201B in which the
vacuum processing block 2 is located from the back of the bay area
200 through the maintenance path 210 in order to perform
maintenance on the vacuum processing block 2. If it is required to
reduce the access time, a gap G1 may be provided between the
console table 130 and the neighboring cassette block 1. In this
case, (W1+W3+G1)-W2=MS becomes the maintenance space.
[0146] FIG.17 is a plan view showing a bay area having another
arrangement of vacuum processing apparatuses in accordance with the
present invention. In the vacuum processing apparatus 100 in this
embodiment, cassette tables 16A for plural cassette blocks 1 are
formed in a continuous one-piece structure, and a plurality of
atmospheric transfer robots 9 run on a common rail 95 on the
continuous cassette table. An in-bay automatic transfer machine is
placed between the bar stoker and the atmospheric transfer robot 9
to transfer a sample between the vacuum processing blocks 2. In
this case, a cassette block 1 functionally corresponds to each of
the vacuum processing blocks 2 in one by one relationship, and it
can be thought that a plurality of nearly rectangular blocks
corresponding to the respective vacuum processing blocks 2 are
connected together.
[0147] FIG. 18 is a plan view showing the construction of an
embodiment of a manufacturing line in accordance with the present
invention. It can be understood from FIG. 18 that the vacuum
processing apparatus 100 in accordance with the present invention
is L-shaped or T-shaped in plan view shape and a sufficient
maintenance space MS can be maintained between the vacuum
processing blocks 2 even if a gap is provided between the vacuum
processing apparatuses 100.
[0148] On the other hand, if a sufficient maintenance space is
provided in the conventional rectangular vacuum processing
apparatus 800 as shown in FIG. 9 for purpose of comparison, the gap
between the vacuum processing apparatuses must be increased. As
result, the number of vacuum processing apparatuses which can be
arranged in the same length of line is only five for the
conventional rectangular vacuum processing apparatus 800 in
comparison to seven for the vacuum processing apparatus 100 in
accordance with the present invention as shown in the embodiment. A
difference of two vacuum processing apparatuses is large when the
whole semiconductor manufacturing line is considered, and becomes a
large difference in arranging a necessary number of apparatuses in
a clean room having a given space and in a saving footprint. As for
transferring of sample from a bay area having an automatic transfer
machine to a bay area for the next process, when the vacuum
processing apparatus in accordance with the present invention is
employed, an amount of processing corresponding to seven vacuum
processing apparatuses can be performed using one side of the one
bay area. Whereas, when the conventional apparatus is employed, an
amount of processing corresponding to only five vacuum processing
apparatuses can be performed. This difference of two apparatuses
results in a large improvement of the through-put in a
semiconductor manufacturing line.
[0149] There are some cases where the rectangular vacuum processing
apparatus 800 is required to be partially used. Even in such a
case, by arranging the L-shaped or T-shaped vacuum processing
apparatus 100 in accordance with the present invention adjacent to
the rectangular vacuum processing apparatus 800, a proper
maintenance space MS can be maintained between the vacuum
processing blocks.
[0150] FIG. 19 is a plan view showing the whole construction of
another embodiment of a semiconductor manufacturing line in which
the vacuum processing apparatuses in accordance with the present
invention are partially employed. This semiconductor manufacturing
line has a line automatic transfer machine 204 and is of a line
automated type where transferring of a sample between each of the
bay areas 200A to 200N and the line automatic transfer machine 204
is performed by an operator. In this system, the same effects as in
the embodiment of FIG.18 can be attained.
[0151] FIG. 20 is a plan view showing the whole construction of a
further embodiment of a semiconductor manufacturing line in which
the vacuum processing apparatuses in accordance with the present
invention are partially employed. This semiconductor manufacturing
line has in-bay automatic transfer machines 202 and a line
automatic transfer machine 4 and is of a fully automated type where
the transferring of a sample inside each of the bay areas and
between each of the bay areas 200A to 200N and line automatic
transfer machine 204 is performed without an operator. In this
case, by arranging the L-shaped or T-shaped vacuum processing
apparatuses 100 adjacent to each other or by arranging the L-shaped
or T-shaped vacuum processing apparatus 100 in accordance with the
present invention adjacent to a rectangular vacuum processing
apparatus 800, a proper maintenance space MS can be maintained
between the vacuum processing blocks.
[0152] In the aforementioned embodiments, it has been described
that the cassette and the atmospheric transfer robot are placed in
an atmospheric environment and the atmospheric transfer robot is
operated in an atmospheric environment. However, as shown in FIG.
21 and FIG. 22, it is possible for the cassette 12 to be placed in
a vacuum environment and the transfer robot 10 to be operated in
only a vacuum environment. FIG. 21 shows an embodiment where two
cassettes 12 are employed, and FIG. 22 shows an embodiment where
three cassettes 12 are employed. In both cases, the whole vacuum
processing apparatus is of a T-shape.
[0153] In FIG. 21 and FIG. 22, the extraction of a sample in the
cassette 12, the transferring of the extracted sample to the vacuum
processing zone, the transferring of the sample from the vacuum
processing zone and the storing of the sample to the original
position in the cassette are performed under a vacuum environment
using the vacuum transfer robot 10. In these cases, in regard to
the vacuum processing system, there is no need for the load lock
chamber and the unload lock chamber provided in the aforementioned
embodiments, in principle. Therefore, the number of data elements
successively updated by the host computer is reduced by the number
of the data elements used for the load lock chamber and the unload
lock chamber.
[0154] In this case, the state of samples contained in the cassette
is performed by a wafer check means under a vacuum environment.
Further, in an apparatus having an orientation adjusting means for
an unprocessed sample, the orientation adjustment is performed
under a vacuum environment.
[0155] Furthermore, in an apparatus having an intermediate cassette
between the cassette and the vacuum processing zone, there are
provided a robot for transferring the sample between the cassette
and the intermediate cassette and a robot for transferring the
sample between the intermediate cassette and the vacuum processing
zone.
[0156] In such a vacuum processing system, since the intermediate
cassette is added, the number of data elements successively updated
by the host computer is increased by the number of the data
elements used for the intermediate cassette and the robot.
[0157] Still further, in the aforementioned embodiments, the
processed surface of a sample faces up and the sample is held
horizontal in a state when the sample is contained in the cassette,
in a state when the sample is transferred and in a state when the
sample is vacuum-processed. However, another position of the sample
is no problem.
[0158] As described above, according to the present invention, it
is possible to provide a vacuum processing apparatus which is
capable of coping with larger diameter samples and is capable of
suppressing an increase in the manufacturing cost, and at the same
time has a better maintainability.
[0159] Further, it is possible to provide a semiconductor
manufacturing line which is capable of coping with larger diameter
samples and at the same time is capable of suppressing an increase
in manufacturing cost by maintaining a necessary installation
number of vacuum processing apparatuses and not decreasing the
maintainability by employing the vacuum processing apparatuses in
accordance with the present invention in the semiconductor
manufacturing line.
* * * * *