U.S. patent application number 10/828671 was filed with the patent office on 2004-10-07 for timing generator, semiconductor test apparatus, and timing generating method.
Invention is credited to Okayasu, Toshiyuki.
Application Number | 20040196052 10/828671 |
Document ID | / |
Family ID | 19142868 |
Filed Date | 2004-10-07 |
United States Patent
Application |
20040196052 |
Kind Code |
A1 |
Okayasu, Toshiyuki |
October 7, 2004 |
Timing generator, semiconductor test apparatus, and timing
generating method
Abstract
A timing generator includes a reference signal generating unit
for generating a reference signal of a predetermined frequency, a
variable delay circuit unit for outputting the timing signal which
results from delaying the reference signal by a predetermined time,
and a delay amount measuring unit for measuring a delay amount of
the variable delay circuit unit, whereby the timing generator
controls the delay amount of the variable delay circuit unit based
on the delay amount measured by the delay amount measuring unit.
Since the frequency of the reference signal is continuously
modulated within a very small frequency range, the delay amount
measuring unit can measure the delay amount of the variable delay
circuit unit highly accurately. In addition, since the delay amount
of the variable delay circuit unit can be controlled on the basis
of the measured delay amount, it is possible to generate the
accurately delayed timing signal.
Inventors: |
Okayasu, Toshiyuki; (Tokyo,
JP) |
Correspondence
Address: |
Jonathan P. Osha
OSHA & MAY L.L.P.
Suite 2800
1221 McKinney Street
Houston
TX
77010
US
|
Family ID: |
19142868 |
Appl. No.: |
10/828671 |
Filed: |
April 21, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10828671 |
Apr 21, 2004 |
|
|
|
PCT/JP02/11053 |
Oct 24, 2002 |
|
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Current U.S.
Class: |
324/617 |
Current CPC
Class: |
H03L 7/00 20130101; G01R
31/31922 20130101; H03K 2005/00078 20130101; H03K 5/13
20130101 |
Class at
Publication: |
324/617 |
International
Class: |
H03L 007/06; G01R
027/28 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 24, 2001 |
JP |
2001-326500 |
Claims
What is claimed is:
1. A timing generator for generating a timing signal by delaying a
reference signal as much as a predetermined time, comprising: a
reference signal generating unit for generating said reference
signal of a predetermined frequency; a modulating unit for
modulating said frequency of said reference signal generated by
said reference signal generating unit; a variable delay circuit
unit for receiving said reference signal and outputting said timing
signal which results from delaying said reference signal as much as
a predetermined time; and a delay amount measuring unit for
measuring a delay amount of said variable delay circuit unit.
2. A timing generator as claimed in claim 1, wherein said reference
signal generating unit supplies said reference signal to a circuit
comprising said variable delay circuit unit.
3. A timing generator as claimed in claim 1 or 2, wherein said
modulating unit continues modulating said frequency of said
reference signal for a predetermined time.
4. A timing generator as claimed in one of claims 1 to 3 further
comprising: a control unit for controlling said delay amount of
said variable delay circuit unit based on said delay amount
measured by said delay amount measuring unit.
5. A timing generator as claimed in one of claims 1 to 4, wherein
said delay amount measuring unit comprises a signal feedback unit
for feeding back said timing signal to an input of said variable
delay circuit unit, and said delay amount measuring unit measures a
frequency of an oscillating signal oscillated because said signal
feedback unit feeds back said timing signal to said variable delay
circuit unit, and calculates said delay amount of said variable
delay circuit unit based on said measured frequency of said
oscillating signal.
6. A timing generator as claimed in one of claims 1 to 5, wherein
said modulating unit comprises: a phase comparator for receiving
two signals and outputting a phase difference signal of a voltage
value based on a frequency difference between said two signals; an
overlap unit for overlapping a modulation signal on said phase
difference signal; a voltage-controlled variable frequency
oscillator for receiving said phase difference signal overlapped by
said modulation signal and outputting an output signal whose
frequency increases or decreases in proportion to said voltage
value of said phase difference signal; and a frequency divider for
feeding back a period of said output signal multiplied by an
integer to a first input of said phase comparator, and said
reference signal is inputted to a second input of said phase
comparator.
7. A timing generator as claimed in claim 6, wherein said overlap
unit overlaps said modulation signal whose voltage value continues
changing for a predetermined time on said phase difference
signal.
8. A test apparatus for testing a semiconductor device, comprising:
a pattern generating unit for generating a reference signal of a
predetermined frequency and a test signal for a test of said
semiconductor device; a timing generator for receiving said
reference signal and outputting a timing signal which results from
delaying said reference signal as much as a predetermined time; a
waveform adjustor for receiving said test signal and timing signal
and supplying an adjusted signal which results from delaying said
test signal based on said timing signal to said semiconductor
device; and a judging unit for receiving an output signal from said
semiconductor device in response to said adjusted signal and
judging quality of said semiconductor device based on said output
signal, wherein said timing generator comprises: a modulating unit
for modulating said frequency of said reference signal generated by
said pattern generating unit; a variable delay circuit unit for
receiving said reference signal and outputting said timing signal
which results from delaying said reference signal as much as a
predetermined time; and a delay amount measuring unit for measuring
a delay amount of said variable delay circuit unit.
9. A timing generating method for generating a timing signal which
results from delaying a reference signal as much as a predetermined
time, comprising: a modulation step of modulating a frequency of
said reference signal; a delay step of receiving said reference
signal and outputting said timing signal which results from
delaying said reference signal as much as a predetermined time; and
a delay amount measurement step of measuring a delay amount of said
delay step.
10. A timing generating method as claimed in claim 9 further
comprising a control step of controlling said delay amount of said
delay step based on said delay amount measured in said delay amount
measurement step.
11. A timing generating method as claimed in claim 9 or 10, wherein
said delay amount measurement step comprises a signal feedback step
of feeding back said timing signal to an input with regard to said
delay step, and in said delay amount measurement step, a frequency
of an oscillating signal oscillated because said timing signal is
fed back to said input with regard to said delay step in said
signal feedback step is measured, and said delay amount of said
delay step is calculated based on said measured frequency of said
oscillating signal.
Description
[0001] The present application is a continuation application of
PCT/JP02/11053 filed on Oct. 24, 2002, which claims priority from a
Japanese patent application No. 2001-326500 filed on Oct. 24, 2001,
the contents of which are incorporated herein by reference.
FIELD OF THE INVENTION
[0002] The present invention relates to a timing generator for
generating a timing signal which results from delaying a reference
signal by a predetermined time, a semiconductor test apparatus, and
a timing generating method. More particularly, the present
invention relates to a timing generator for measuring the delay
amount of the reference signal with high precision and controlling
the delay amount, a semiconductor test apparatus, and a timing
generating method.
RELATED ART
[0003] FIG. 1 shows a conventional timing generator 100. The timing
generator 100 includes a reference signal generating unit 10, a
selecting unit 12, a variable delay circuit unit 14, a control unit
16, a waveform adjustment circuit 32, and a frequency counter 18.
The timing generator 100 is used in a semiconductor test apparatus
which tests a semiconductor device.
[0004] The reference signal generating unit 10 generates and
supplies a reference signal of a predetermined frequency to the
selecting unit 12 and the control unit 16. And the reference signal
generating unit 10 supplies the reference signal to other parts of
the semiconductor test apparatus, when the timing generator 100 is
being used in the semiconductor test apparatus. The selecting unit
12 selects either of the reference signal supplied from the
reference signal generating unit 12 or the signal outputted by the
waveform adjustment circuit 32, and outputs it to the variable
delay circuit unit 14. The variable delay circuit unit 14 delays
and outputs the signal selected by the selecting unit 12 as much as
a predetermined time. The control unit 16 controls the delay amount
of the variable delay circuit unit 14.
[0005] The timing generator 100 checks whether the first delay
amount of the variable delay circuit unit 14 is a desired delay
amount or not. As shown in FIG. 1, a start pulse is inputted into
the timing generator 100. The selecting unit 12 selects a route B,
and a loop along which the output of the variable delay circuit
unit 14 is fed back to the input of the variable delay circuit unit
14 is formed. The start pulse circulates the loop formed. The start
pulse is delayed as much as a predetermined delay amount by the
variable delay circuit unit 14 whenever it circulates the loop. In
other words, an oscillating signal whose period is approximately
equal to the delay amount of the variable delay circuit unit 14 is
generated.
[0006] The conventional timing generator 100 can calculate the
delay amount of the variable delay circuit unit 14 by measuring the
frequency of the oscillating signal of the loop. The frequency
counter 18 is a counter which measures the number of circulations
of the oscillating signal around the loop. The frequency of the
signal of the feedback loop, i.e. the delay amount of the variable
delay circuit unit 14 is calculated based on the number of
circulations measured by the frequency counter 18. The control unit
16 controls the delay amount of the variable delay circuit unit 14
to be a desired delay amount based on the calculated delay
amount.
[0007] Since it is generally necessary to accurately match the
delay amount of the variable delay circuit unit 14 with the desired
delay amount, the oscillation period of the loop is calculated in
response to a delay setting value of the variable delay circuit
unit 14 while the delay setting value is changed. The control unit
16 controls the delay amount of the variable delay circuit unit 14
in order that an expected value of the delay change amount in
response to the change of the delay setting value matches with the
change amount of the oscillation period. Accordingly, the delay
time which exists as a constant offset, e.g. the delay time by a
circuit except the variable delay circuit unit 14 can be canceled
by calculation. However, for the sake of description, the offset
delay amount of the loop is hereinafter considered zero.
[0008] After the delay amount of the variable delay circuit unit 14
is adjusted, the selecting unit 12 selects a route A, and inputs
the reference signal generated by the reference signal generating
unit 10 to the variable delay circuit unit 14. The variable delay
circuit unit 14 delays and outputs the inputted reference signal as
much as the adjusted delay amount.
[0009] In the conventional timing generator 100, however, the noise
of the reference signal supplied to other parts affects the
oscillating signal of the loop, because when the reference signal
generating unit 10 is being used in the semiconductor test
apparatus, the reference signal is also supplied even to the other
parts. Therefore, it is difficult to measure the frequency of the
oscillating signal of the loop with high precision. For example, if
the period of the reference signal is given by a value close to the
delay amount of the variable delay circuit unit 14, the period of
the signal of the feedback loop of the timing generator 100 becomes
equal to the period of the reference signal. In other words, that
is an absorption phenomenon. Hereinafter, the absorption phenomenon
will be described.
[0010] FIGS. 2A to 2E show the absorption phenomenon. The reference
signal generated by the reference signal generator 10, as shown in
FIG. 2A, is a rectangular wave signal of period T.sub.1. And the
period T.sub.1 is a little smaller than the delay amount T.sub.2 of
the variable delay circuit unit 14. The noise shown in FIG. 2B
caused by the reference signal shown in FIG. 2A is overlapped on
the oscillating signal of the loop.
[0011] The oscillating signal by the start pulse supplied to the
loop, if the effect of the noise is ignored, as shown in FIG. 2C,
has its period approximately equal to the delay amount T.sub.2 of
the variable delay circuit unit 14. That is, measuring the period
of the oscillating signal shown in FIG. 2C makes it possible to
calculate the delay amount T.sub.2 of the variable delay circuit
unit 14. As a matter of fact, however, due to the effect of the
noise shown in FIG. 2B, the period of the loop has a value
different from the delay amount T.sub.2 of the variable delay
circuit unit 14.
[0012] FIG. 2D shows the oscillating signal in the loop shown in
FIG. 2C overlapped by the noise in FIG. 2B. First, the start pulse
shown as the rectangular wave 22c in FIG. 2C is applied to the
timing generator 100. The start pulse is synchronized with one of
the rectangular waves of the reference signal. The rectangular wave
22d results from overlapping the noise and the rectangular wave 22c
by the start pulse. The rectangular wave 22d is adjusted by the
waveform adjustor 32, and inputted to the variable delay circuit
unit 14 via the selecting unit 12. The adjusted rectangular wave
22d is delayed as much as a predetermined time by the variable
delay circuit unit 14, and becomes the rectangular wave 24d
overlapped by the noise in FIG. 2B. If the period of the
rectangular waves 22d and 24d is T.sub.3, the period T.sub.3 should
be equal to the delay amount T.sub.2 of the variable delay circuit
unit 14, but it can't be so due to the overlapped noise. In this
case, since the period T.sub.1 of the noise is a little smaller
than the delay amount of the variable delay circuit unit 14, it
becomes a value close to the period T.sub.1, i.e. T.sub.2-.alpha..
The rectangular wave 24d is adjusted by the waveform adjustor 32,
and becomes the rectangular wave 24e shown in FIG. 2E. FIG. 2E
shows the signal resulting from adjusting the signal shown in FIG.
2D. The rectangular wave 24e is delayed by the variable delay
circuit unit 14, and becomes the rectangular wave 26d on which the
noise is overlapped. The rectangular wave 26d is the signal
resulting from delaying not the rectangular wave 24c but the
rectangular wave 24e by the variable delay circuit unit 14. In
addition, although the rectangular wave 26d is the signal resulting
from delaying the rectangular wave 24e as much as the delay amount
T.sub.2 of the variable delay circuit unit 14, the delay amount
becomes a value far closer to T.sub.1 than T.sub.2-.alpha. due to
the effect of the noise.
[0013] By repeating the above loop, the period of the oscillating
signal becomes close to the period of the reference signal. After
repetition predetermined times, the period of the oscillating
signal reaches an equilibrium state. In other words, if the period
of the reference signal is given by a value close to the delay
amount of the variable delay circuit unit 14 and constant, the
effect of the noise caused by the reference signal on the period of
the oscillating signal is accumulated until the period of the
oscillating signal reaches the equilibrium state. Since the period
of the reference signal and the delay amount of the variable delay
circuit unit 14 are close values, the period of the oscillating
signal having reached the equilibrium state continues receiving the
effect of the noise caused by the reference signal and taking the
same period as that of the reference signal. The period of the
oscillating signal having reached the equilibrium state becomes
approximately equal to the period of the reference signal.
Accordingly, there occurs an error between the period of the
oscillating signal and the delay amount of the variable delay
circuit unit 14, and thus it is difficult to calculate the delay
amount T.sub.2 Of the variable delay circuit unit 14 with high
precision. Therefore, it is difficult to control the delay amount
of the variable delay circuit unit 14 with high precision. In
addition, it is difficult to test a semiconductor device with high
precision when the timing generator 100 is being used in the
semiconductor test apparatus.
SUMMARY OF THE INVENTION
[0014] Accordingly, it is an object of the present invention to
provide a timing generator, a semiconductor test apparatus and a
timing generating method, which is capable of overcoming the above
drawbacks accompanying the conventional art. The above and other
objects can be achieved by combinations described in the
independent claims. The dependent claims define further
advantageous and exemplary combinations of the present
invention.
[0015] In order to solve the problems above, according to the first
aspect of the present invention, a timing generator for generating
a timing signal by delaying a reference signal as much as a
predetermined time includes a reference signal generating unit for
generating the reference signal of a predetermined frequency, a
modulating unit for modulating the frequency of the reference
signal generated by the reference signal generating unit, a
variable delay circuit unit for receiving the reference signal and
outputting the timing signal which results from delaying the
reference signal as much as a predetermined time, and a delay
amount measuring unit for measuring a delay amount of the variable
delay circuit unit.
[0016] The reference signal generating unit may supply the
reference signal to a circuit including the variable delay circuit
unit.
[0017] The modulating unit may continue modulating the frequency of
the reference signal for a predetermined time.
[0018] The timing generator may further include a control unit for
controlling the delay amount of the variable delay circuit unit
based on the delay amount measured by the delay amount measuring
unit.
[0019] The delay amount measuring unit may include a signal
feedback unit for feeding back the timing signal to an input of the
variable delay circuit unit, and the delay amount measuring unit
may measure a frequency of an oscillating signal oscillated because
the signal feedback unit feeds back the timing signal to the
variable delay circuit unit, and calculate the delay amount of the
variable delay circuit unit based on the measured frequency of the
oscillating signal.
[0020] The modulating unit may include a phase comparator for
receiving two signals and outputting a phase difference signal of a
voltage value based on a frequency difference between the two
signals, an overlap unit for overlapping a modulation signal on the
phase difference signal, a voltage-controlled variable frequency
oscillator for receiving the phase difference signal overlapped by
the modulation signal and outputting an output signal whose
frequency increases or decreases in proportion to the voltage value
of the phase difference signal, and a frequency divider for feeding
back a period of the output signal multiplied by an integer to a
first input of the phase comparator, and the reference signal may
be inputted to a second input of the phase comparator.
[0021] The overlap unit may overlap the modulation signal whose
voltage value continues changing for a predetermined time on the
phase difference signal.
[0022] According to the second aspect of the present invention, a
test apparatus for testing a semiconductor device includes a
pattern generating unit for generating a reference signal of a
predetermined frequency and a test signal for a test of the
semiconductor device, a timing generator for receiving the
reference signal and outputting a timing signal which results from
delaying the reference signal as much as a predetermined time, a
waveform adjustor for receiving the test signal and timing signal
and supplying an adjusted signal which results from delaying the
test signal based on the timing signal to the semiconductor device,
and a judging unit for receiving an output signal from the
semiconductor device in response to the adjusted signal and judging
quality of the semiconductor device based on the output signal,
wherein the timing generator includes a modulating unit for
modulating the frequency of the reference signal generated by the
pattern generating unit, a variable delay circuit unit for
receiving the reference signal and outputting the timing signal
which results from delaying the reference signal as much as a
predetermined time, and a delay amount measuring unit for measuring
a delay amount of the variable delay circuit unit.
[0023] According to the third aspect of the present invention, a
timing generating method for generating a timing signal which
results from delaying a reference signal as much as a predetermined
time including a modulation step of modulating a frequency of the
reference signal, a delay step of receiving the reference signal
and outputting the timing signal which results from delaying the
reference signal as much as a predetermined time, and a delay
amount measurement step of measuring a delay amount of the delay
step.
[0024] The timing generating method may further include a control
step of controlling the delay amount of the delay step based on the
delay amount measured in the delay amount measurement step.
[0025] The delay amount measurement step may include a signal
feedback step of feeding back the timing signal to an input with
regard to the delay step, and in the delay amount measurement step,
a frequency of an oscillating signal oscillated because the timing
signal is fed back to the input with regard to the delay step in
the signal feedback step may be measured, and the delay amount of
the delay step may be calculated based on the measured frequency of
the oscillating signal.
[0026] The summary of the invention does not necessarily describe
all necessary features of the present invention. The present
invention may also be a sub-combination of the features described
above.
BRIEF DESCRIPTION OF DRAWINGS
[0027] FIG. 1 shows an example of the configuration of a
conventional timing generator 100.
[0028] FIG. 2 shows the absorption phenomenon in the conventional
timing generator 100. FIG. 2A shows an example of a reference
signal. FIG. 2B shows an example of a noise.
[0029] FIG. 2C shows an example of an oscillating signal with the
effect of the noise being ignored. FIG. 2D shows an example of the
oscillating signal affected by the noise. FIG. 2E shows an example
of an adjusted oscillating signal.
[0030] FIG. 3 shows an example of the configuration of a timing
generator 200 in this invention.
[0031] FIG. 4 shows an example of the period of an oscillating
signal generated by the timing generator 200. FIG. 4A shows an
example of a reference signal. FIG. 4B shows an example of a noise.
FIG. 4C shows an example of an oscillating signal with the effect
of the noise being ignored. FIG. 4D shows an example of the
oscillating signal affected by the noise. FIG. 4E shows an example
of an adjusted oscillating signal.
[0032] FIG. 5 shows an example of the configuration of a modulating
unit 30.
[0033] FIG. 6 shows an example of the configuration of a
semiconductor test apparatus 300.
[0034] FIG. 7 shows a flowchart of a timing generating method in
this invention.
DETAILED DESCRIPTION OF THE INVENTION
[0035] The invention will now be described based on the preferred
embodiments, which do not intend to limit the scope of the present
invention, but exemplify the invention. All of the features and the
combinations thereof described in the embodiment are not
necessarily essential to the invention.
[0036] FIG. 3 shows an example of the configuration of a timing
generator 200 of the present invention. The timing generator 200
includes a reference signal generating unit 10, a modulating unit
30, a control unit 16, a selecting unit 12, a variable delay
circuit unit 14, and a delay amount measuring unit 40. The
reference signal generating unit 10 generates the reference signal
of a predetermined frequency. The reference signal is inputted to
the selecting unit 12 and the control unit 16 via the modulating
unit 30. The modulating unit 30 modulates the frequency of the
reference signal generated by the reference signal generating unit
10. The modulating unit 30 preferably continues modulating the
frequency of the reference signal for a predetermined time. The
modulating unit 30 supplies the reference signal of modulated
frequency to the control unit 16 and the selecting unit 12. In
addition, when the timing generator 200 is being used in the
semiconductor test apparatus, the reference signal generating unit
10 may supply the reference signal to other circuits (not shown)
which include the variable delay circuit unit 14 via the modulating
unit 30. For example, when the timing generator 100 is being used
in the semiconductor test apparatus, the reference signal
generating unit 10 supplies the reference signal of modulated
frequency to other apparatuses of the semiconductor test apparatus
as well. The selecting unit 12 selects either of the supplied
reference signal or the signal outputted by the waveform adjustment
circuit 32, and supplied it to the variable delay circuit unit 14.
The control unit 16 controls the delay amount of the variable delay
circuit unit 14 at the timing based on the supplied reference
signal. The variable delay circuit unit 14 outputs the timing
signal which results from delaying the supplied reference signal by
a predetermined time. And the control unit 16 controls the variable
delay circuit unit 14 to generate a predetermined delay amount in
response to the received signal.
[0037] The delay amount measuring unit 40 measures the delay amount
generated by the variable delay circuit unit 14. The delay amount
measuring unit 40 includes a frequency counter 18 and a signal
feedback unit 50. The signal feedback unit 50 includes a waveform
adjustment circuit 32. When the delay amount measuring unit 40
measures the delay amount of the variable delay circuit unit 14,
the selecting unit 12 selects the route B, and a loop is formed by
the variable delay circuit unit 14 and the signal feedback unit 50.
The signal feedback unit 50 is inputted with a start pulse. The
start pulse is a signal of one pulse. The start pulse inputted by
the signal feedback unit 50 is inputted to the variable delay
circuit unit 14 via the waveform adjustment circuit and the
selecting unit 12. The variable delay circuit unit 14 delays the
inputted start pulse by a predetermined time and outputs it to the
signal feedback unit 50. The outputted start pulse is fed back to
the input of the variable delay circuit unit 14 via the signal
feedback unit 50 and the selecting unit 12. By repeating this
feedback, the oscillating signal which circulates the loop
including the variable delay circuit unit 14 and the signal
feedback unit 50 is generated.
[0038] The frequency counter 18 counts the number of circulations
of the oscillating signal around the loop including the variable
delay circuit unit 14 and the signal feedback unit 50 for a
predetermined time. The delay amount of the variable delay circuit
unit 14 is calculated on the basis of the number of circulations of
the oscillating signal which is measured. Since the timing
generator 200 of this invention prevents the effect of the noise
caused by the reference signal from accumulating by modulating the
frequency of the reference signal, it is possible to calculate the
delay amount generated by the variable delay circuit unit 14 with
high precision. For the entire oscillating signal, the effect of
the noise caused by the reference signal can be eliminated.
Hereinafter, the period of the oscillating signal when the
frequency of the reference signal is modulated will be described by
way of examples.
[0039] FIGS. 4A to 4E show an example of the period of the
oscillating signal when the frequency of the reference signal is
modulated. FIG. 4A shows the reference signal supplied by the
reference signal generating unit 10 via the modulating unit 30. The
reference signal generating unit 10 generates a rectangular wave
signal of a period T.sub.4, and the modulating unit 30 modulates
and outputs the frequency of the rectangular wave signal generated
by the reference signal generating unit 10. In this embodiment, the
period of the reference signal generated by the reference signal
generating unit 10 is T.sub.4 plus or minus a very short time.
[0040] FIG. 4B shows an example of the noise caused by the
reference signal. The period of the noise is equal to that of the
reference signal. FIG. 4C shows the oscillating signal caused by
the start pulse if the effect of the noise is ignored. The
rectangular wave 44c is the rectangular wave caused by the start
pulse. The rectangular wave 44c is supposed to be synchronized with
one of the rectangular waves of the reference signal. The period of
the oscillating signal shown in FIG. 4C is approximately equal to
the delay amount T.sub.5 of the variable delay circuit unit 14.
[0041] FIG. 4D shows a signal which results from overlapping the
noise shown in FIG. 4B onto the oscillating signal shown in FIG.
4C. The rectangular wave 44d is delayed by the variable delay
circuit unit 14, and becomes the rectangular wave 46d. The period
of the rectangular waves 44d and 46d becomes a value which results
from shifting the delay amount T.sub.5 a little to the period
T.sub.4 of the reference signal due to the effect of the noise. The
rectangular wave 46d is adjusted by the waveform adjustment circuit
32, and becomes the rectangular wave 46e shown in FIG. 4E. FIG. 4E
shows the signal which results from adjusting the signal shown in
FIG. 4D. The rectangular wave 46e is delayed by the variable delay
circuit unit 14, and becomes the rectangular wave 48d. Since the
timing generator 200 of this embodiment modulates the frequency of
the reference signal, the timing of the rectangular wave 48d and
the timing of the noise caused by the reference signal can be
shifted. Accordingly, the period of the rectangular waves 46d and
48d receives the effect of the noise caused by the reference
signal, and becomes equal to the delay amount T.sub.5 of the
variable delay circuit unit 14. Further, that is the same for the
rectangular wave 48d or later. In other words, although any
rectangular wave receives the effect of the noise and then its
period becomes different from T.sub.5, the next rectangular wave is
not affected by the noise, and its period becomes equal to the
delay amount T.sub.5 of the variable delay circuit unit 14. In
addition, even if a plurality of rectangular waves receive the
effect of the noise and the period between them becomes different
from T.sub.5, the period of the noise is modulated to be generated
at the timing, so that it cannot affect the oscillating signal, and
thus the period of the oscillating signal is adjusted to become the
delay amount T.sub.5 of the variable delay circuit unit 14.
Accordingly, the period of the entire oscillating signals becomes
equal to the delay amount T.sub.5 of the variable delay circuit
unit 14.
[0042] In the conventional timing generator, since the period of
the reference signal is constant, if the period of the reference
signal is close to the delay amount of the variable delay circuit
unit 14, once the oscillating signal receives the effect of the
noise, the period of the oscillating signal is absorbed to the
period of the reference signal. In the timing generator 200
described in connection with FIGS. 3 and 4, however, since it
modulates the period of the reference signal and the period of the
noise caused by the reference signal, it changes the timing at
which the noise affects the oscillating signal. Therefore, it is
possible to prevent the period of the oscillating signal from being
absorbed to the period of the reference signal.
[0043] Although it is the noise caused by the reference signal
generated by the reference signal generating unit 10 that has been
described, alternatively the timing generator 200 may include a
modulating unit for modulating the frequency of the noise due to
other causes.
[0044] FIG. 5 shows an example of the configuration of the
modulating unit 30. The modulating unit 30 includes a frequency
divider 32, a frequency divider 34, a phase comparator 36, an
amplifier 38, an overlap unit 40, and a voltage-controlled variable
frequency oscillator 42.
[0045] The frequency divider 44 multiplies the frequency of the
reference signal inputted from the reference signal generating unit
10 (cf. FIG. 3) by 1/M (M is a natural number), and supplies it to
the phase comparator 36. The phase comparator 36 receives two
inputted signals, and outputs a phase difference signal of a
voltage value based on the phase difference between the two
signals. The amplifier 38 receives the phase difference signal
outputted by the phase comparator 36, and supplies a signal which
results from amplifying the phase difference signal in a
predetermined proportion to the overlap unit 40. The overlap unit
40 overlaps a predetermined modulation signal onto the received
signal from the amplifier 38, and supplied it to the
voltage-controlled variable frequency oscillator 42. The overlap
unit 40 preferably overlaps the modulation signal whose voltage
value continues changing for a predetermined time onto the phase
difference signal. The voltage-controlled variable frequency
oscillator 42 outputs an output signal of a frequency based on the
voltage value of the signal received from the overlap unit 40. The
frequency divider 34 receives the output signal outputted by the
voltage-controlled variable frequency oscillator 42, and feeds back
the signal which results from multiplying the frequency of the
output signal by 1/N (N is a natural number) to the input of the
phase comparator 36.
[0046] According to the modulating unit 30 described in this
embodiment, the signal which results from modulating the frequency
of the inputted reference signal can be outputted. The modulation
signal to be overlapped by the overlap unit may be a sine wave, a
white noise, etc. The frequency of the output signal outputted from
the modulating unit 30 is modulated within a very narrow frequency
range with the frequency of the reference signal inputted to the
modulating unit 30 multiplied by N/M being considered as a
reference. The signal outputted from the modulating unit 30 is not
only supplied to the timing generator 200 but also to other
apparatuses, so it is preferable that the frequency range within
which the signal outputted by the modulating unit 30 is modulated
should not affect the operation of the other apparatuses. For
example, the period in response to the frequency range within which
the modulating unit 30 performs frequency modulation may be a few
picoseconds to a few tens of picoseconds. According to the timing
generator of this invention, since the frequency of the signal is
modulated to be a few picoseconds to a few tens of picoseconds, it
is possible to prevent the absorption phenomenon described in
connection with FIGS. 1 and 2 while the operation of other
apparatuses except the timing generator 200 is hardly affected by
the noise. In addition, the modulating unit 30 may modulate the
frequency of the reference signal only when the delay amount
measuring unit 40 measures the delay amount of the variable delay
circuit unit 14.
[0047] FIG. 6 shows an example of the configuration of the
semiconductor test apparatus 300 for judging the quality of a
semiconductor device. The semiconductor test apparatus 300 includes
a pattern generator 60, a waveform adjustor 62, a signal
input-output unit 66, a judging unit 68 and a timing generator 200.
The pattern generator 60 generates a reference signal of a
predetermined frequency and a test signal for the test of the
semiconductor device 64. The pattern generator 60 supplies the
reference signal of a predetermined frequency to the timing
generator 200, and the test signal to the waveform adjustor 62. The
timing generator 200 may have the same function and configuration
as those of the timing generator 200 described in connection with
FIGS. 3 to 5. In this case, the reference signal generating unit 10
of the timing generator 200 described in connection with FIGS. 3 to
5 supplies the reference signal received from the pattern generator
60 to the modulating unit 30 as it is.
[0048] The timing generator 200 delays the received reference
signal by a predetermined time, and supplies the delayed timing
signal to the waveform adjustor 62, the signal input-output unit
66, and the judging unit 68. The timing signals supplied to the
waveform adjustor 62, the signal input-output unit 66, and the
judging unit 68 may be different from each other. The waveform
adjustor 62 adjusts the received test signal, and supplies it to
the signal input-output unit 66 at the timing based on the received
timing signal. The signal input-output unit 66 inputs the test
signal received from the waveform adjustor 62 to the semiconductor
device 64 at the timing based on the received timing signal. And
the signal input-output unit 66 receives the signal outputted by
the semiconductor device 64 based on the inputted test signal, and
outputs it to the judging unit 68. The judging unit 68 judges the
quality of the semiconductor device 64 based on the signal received
from the signal input-output unit 66. The judging unit 68 may
compare an expected value based on the test signal generated by the
pattern generator 60 with the signal received from the signal
input-output unit 66 to judge the quality of the semiconductor
device 64. In addition, the pattern generator 60 may supply the
expected value based on the generated test signal to the judging
unit 68.
[0049] According to the semiconductor test apparatus 300 described
in this embodiment, the timing signal can be highly accurately
generated, so that the test of the semiconductor device 64 can be
performed highly accurately because the test is based on the timing
signal.
[0050] FIG. 7 shows a flowchart of a timing generating method in
this invention. The timing generating method is to delay a
reference signal by a predetermined time in order to generate a
timing signal. In a reference signal generation step, the reference
signal of a predetermined frequency is generated (S100). The
reference signal may be generated by using the reference signal
generating unit 10 described in connection with FIGS. 3 to 5. In a
delay step, the reference signal is inputted, and the timing signal
which results from delaying the reference signal by a predetermined
time is outputted (S102). The reference signal maybe delayed as
much as a predetermined time by the variable delay circuit unit 14
described in connection with FIGS. 3 to 5. In addition, S100 and
S102 may be performed by one apparatus such as a quartz
oscillator.
[0051] In a delay amount measurement step, the delay amount of the
delay step is measured (S104). The delay amount of the delay step
may be measured by the delay amount measuring unit 40 described in
connection with FIGS. 3 to 5. In a control step, the delay amount
of the delay step is controlled based on the delay amount measured
in the delay amount measurement step (S106). The delay amount of
the delay step may be controlled by the control unit 16 described
in connection with FIGS. 3 to 5.
[0052] And the delay amount measurement step may include a signal
feedback step of feeding back the timing signal to the input with
regard to the delay step. In the delay amount measurement step, the
frequency of the oscillating signal oscillated by feeding back the
timing signal to the delay step in the signal feedback step is
measured, and the delay amount of the delay step is calculated on
the basis of the measured frequency of the oscillating signal. The
timing signal may be fed back to the delay step by the signal
feedback unit 50 described in connection with FIGS. 3 to 5.
[0053] According to the timing generating method described above,
like the timing generator described in connection with FIGS. 3 to
5, the delay amount of the reference signal in the delay step can
be highly accurately measured, and the delay amount of the delay
step can be highly accurately controlled.
[0054] Although the present invention has been described by way of
exemplary embodiments, it should be understood that those skilled
in the art might make many changes and substitutions without
departing from the spirit and the scope of the present invention,
which is defined only by the appended claims.
[0055] As obvious from the description above, according to the
present invention, the timing of the generated timing signal can be
highly accurately controlled. In addition, since the semiconductor
test apparatus 300 can control the timing of the generated timing
signal highly accurately, it is possible to judge the quality of
the semiconductor device highly accurately.
* * * * *