U.S. patent application number 10/392630 was filed with the patent office on 2004-09-23 for pattern-electroplated lapping plates for reduced loads during single slider lapping and process for their fabrication.
This patent application is currently assigned to Hitachi Global Storage Technologies Netherlands B.V.. Invention is credited to Beaucage, Jacey R., Reiley, Timothy C., Tzeng, Huey-Ming, Wu, Xiao Z..
Application Number | 20040185753 10/392630 |
Document ID | / |
Family ID | 32987943 |
Filed Date | 2004-09-23 |
United States Patent
Application |
20040185753 |
Kind Code |
A1 |
Beaucage, Jacey R. ; et
al. |
September 23, 2004 |
PATTERN-ELECTROPLATED LAPPING PLATES FOR REDUCED LOADS DURING
SINGLE SLIDER LAPPING AND PROCESS FOR THEIR FABRICATION
Abstract
A lapping plate has photolithographically defined patterns that
are electroplated to produce lands with well-defined channels. By
choosing a particular geometry, the retention force is
significantly reduced over prior art options, while still retaining
a high land area fraction. In some versions, the material is
electroplated onto sufficiently thin substrates to allow
conformation to a curved vacuum chuck. This configuration provides
a very large reduction in retraction force when compared to smooth,
flat lapping plates. In addition, the substrate used to form the
lapping plate has reduced thickness, and a vacuum chuck is used to
pull the thin, flat lapping plate against it to define the
curvature. This allows the lapping plate to be charged by a flat
charging ring. The substrate used is typically glass and has been
sputter-metallized on both sides. The resist is then patterned,
leaving an exposed pattern in the metallization on both sides.
Inventors: |
Beaucage, Jacey R.; (San
Jose, CA) ; Reiley, Timothy C.; (Los Gatos, CA)
; Tzeng, Huey-Ming; (San Jose, CA) ; Wu, Xiao
Z.; (San Jose, CA) |
Correspondence
Address: |
BRACEWELL & PATTERSON L.L.P.
P.O. BOX 61389
HOUSTON
TX
77208-1389
US
|
Assignee: |
Hitachi Global Storage Technologies
Netherlands B.V.
|
Family ID: |
32987943 |
Appl. No.: |
10/392630 |
Filed: |
March 20, 2003 |
Current U.S.
Class: |
451/28 |
Current CPC
Class: |
B24D 18/00 20130101;
B24B 37/16 20130101 |
Class at
Publication: |
451/028 |
International
Class: |
B24B 001/00 |
Claims
What is claimed is:
1. A method of forming a lapping plate for use in processing a
workpiece, comprising: (a) providing a substrate having a pair of
lapping surfaces that are located on opposite sides of the
substrate; (b) applying resist to both lapping surfaces of the
substrate; (c) photolithographically preparing a pattern of lands
on each of the lapping surfaces of the substrate, such that the
lands comprise approximately 50% to 90% of a total surface area of
the lapping surfaces of the substrate; (d) plating both lapping
surfaces of the substrate; (e) charging the lands with an abrasive;
(f) protecting one of the lapping surfaces of the substrate with a
protective layer until said one of the lapping sides is ready to be
used in a lapping process; and (g) deforming the substrate into a
curved shape imposed by a vacuum chuck such that the substrate has
an induced crown and camber, and an seed layer with a depression in
a center of the substrate.
2. The method of claim 1 wherein the photolithographing step (c)
comprises electroplating a tin alloy on the substrate to form the
lands.
3. The method of claim 1 wherein the applying step (b) comprises
adding a 15 to 50 .mu.m thick laminated photo resist to each
lapping surface of the substrate.
4. The method of claim 1 wherein the applying step (b) comprises
spinning a 5 to 30 .mu.m layer of photo resist to each lapping
surface of the substrate.
5. The method of claim 1 wherein the substrate is initially flat,
and the charging step (e) comprises charging the lands with a flat
charging ring prior to the deforming step (g).
6. The method of claim 1 wherein the providing step (a) comprises
forming the substrate from glass having a thickness in a range of
approximately 1 to 2 mm.
7. The method of claim 1 wherein the providing step (a) comprises
forming the substrate from tin having a thickness in a range of
approximately 2 to 3 mm.
8. The method of claim 1 wherein the photolithographing step (c)
comprises forming the lands in a substantially square shape having
sides measuring approximately 25 .mu.m, such that adjacent ones of
the lands are spaced apart from each other by a distance measuring
approximately 10 .mu.m to define channels therebetween.
9. The method of claim 1 wherein the photolithographing step (c)
comprises forming the lands in a round shape having diameters
measuring approximately 27 .mu.m, such that adjacent ones of the
lands are spaced apart from each other by a distance measuring
approximately 10 .mu.m to define channels therebetween.
10. The method of claim 1 wherein the photolithographing step (c)
comprises forming the lands in a hexagonal shape, such that
adjacent ones of the lands are spaced apart from each other by a
distance measuring approximately 10 .mu.m to define channels
therebetween.
11. The method of claim 1, further comprising the step of applying
a seed layer to both lapping surfaces of the substrate.
12. The method of claim 11 wherein the plating a seed layer step
comprises sputter metallizing both lapping surfaces with an
adhesion layer such as Cr or Ti, and a plateable layer such as Cu
or Ni.
13. A method of forming a lapping plate for use in processing a
workpiece, comprising: (a) providing a substrate that is initially
flat and has thickness in a range of 1 to 3 mm, and a pair of
lapping surfaces that are located on opposite sides of the
substrate; (b) providing a seed layer on both lapping surfaces of
the substrate for later electroplating; (c) applying resist to both
lapping surfaces of the substrate; (d) electroplating a metal alloy
pattern of square-shaped lands on each of the lapping surfaces of
the substrate, such that the lands are spaced apart from each other
by regular intervals, and the lands comprise approximately 50% to
90% of a total surface area of the lapping surfaces of the
substrate; (e) protecting one of the lapping surfaces of the
substrate with a protective layer until said one of the lapping
sides is ready to be used in a lapping process; (f) charging the
lands with an abrasive with a flat charging ring; and then (g)
deforming the substrate into a curved shape imposed by a vacuum
chuck such that the substrate has an induced crown and camber, and
an associated radius of curvature with a depression in a center of
the substrate.
14. The method of claim 13 wherein the applying step (c) comprises
adding a 15 to 50 .mu.m thick laminated photo resist to each
lapping surface of the substrate.
15. The method of claim 13 wherein the applying step (c) comprises
spinning a 5 to 30 .mu.m layer of photo resist to each lapping
surface of the substrate.
16. The method of claim 13 wherein the providing step (b) comprises
sputter metallizing both lapping surfaces with a 10 nm layer of Cr
or Ti, and then a 90 nm layer of Cu or Ni.
17. The method of claim 13 wherein the providing step (a) comprises
forming the substrate from a material selected from the group
consisting of glass having a thickness of 1 to 2 mm, and tin having
a thickness of 2 to 3 mm.
18. The method of claim 13 wherein the electroplating step (d)
comprises forming the lands with sides measuring approximately 25
.mu.m, such that adjacent ones of the lands are spaced apart from
each other by a distance measuring approximately 10 .mu.m to define
channels therebetween.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Technical Field
[0002] The present invention relates in general to an improved
apparatus and method of processing workpieces, and in particular to
an improved process and apparatus for precision lapping a very
small workpiece such as a single magnetoresistive slider.
[0003] 2. Description of the Related Art
[0004] Magnetic recording is employed for large memory capacity
requirements in high speed data processing systems. For example, in
magnetic disc drive systems, data is read from and written to
magnetic recording media utilizing magnetic transducers commonly
referred to as magnetic heads. Typically, one or more magnetic
recording discs are mounted on a spindle such that the disc can
rotate to permit the magnetic head mounted on a moveable arm in
position closely adjacent to the disc surface to read or write
information thereon.
[0005] During operation of the disc drive system, an actuator
mechanism moves the magnetic transducer to a desired radial
position on the surface of the rotating disc where the head
electromagnetically reads or writes data. Usually the head is
integrally mounted in a carrier or support referred to as a
"slider." A slider generally serves to mechanically support the
head and any electrical connections between the head and the rest
of the disc drive system. The slider is aerodynamically shaped to
slide over moving air and therefore to maintain a uniform distance
from the surface of the rotating disc thereby preventing the head
from undesirably contacting the disc.
[0006] Typically, a slider is formed with essentially planar areas
surrounded by recessed areas etched back from the original surface.
The surface of the planar areas that glide over the disc surface
during operation is known as the air bearing surface. Large numbers
of sliders are fabricated from a single wafer having rows of the
magnetic transducers deposited simultaneously on the wafer surface
using semiconductor-type process methods. After deposition of the
heads is complete, single-row bars are sliced from the wafer, each
bar comprising a row of units which can be further processed into
sliders having one or more magnetic transducers on their end faces.
Each row bar is bonded to a fixture or tool where the bar is
processed and then further diced, i.e., separated into sliders
having one or more magnetic transducers on their end faces. Each
row bar is bonded to a fixture or tool where the bar is processed
and then further diced, i.e., separated into individual sliders
each slider having at least one magnetic head terminating at the
slider air bearing surface.
[0007] The slider head is typically an inductive electromagnetic
device including magnetic pole pieces which read the data from or
write the data onto the recording media surface. In other
applications the magnetic head may include a magneto resistive read
element for separately reading the recorded data with the inductive
heads serving only to write the data. In either application, the
various elements terminate on the air bearing surface and function
to electromagnetically interact with the data contained on the
magnetic recording disc. In order to achieve maximum efficiency
from the magnetic heads, the sensing elements must have precision
dimensional relationships to each other as well as the application
of the slider air bearing surface to the magnetic recording disc.
Each head has a polished air bearing surface (ABS) with flatness
parameters, such as crown, camber, and twist. The ABS allows the
head to "fly" above the surface of its respective spinning disk. In
order to achieve the desired fly height, fly height variance,
take-off speed, and other aerodynamic characteristics, the flatness
parameters of the ABS need to be tightly controlled. During
manufacturing, it is most critical to grind or lap these elements
to very close tolerances of desired thickness in order to achieve
the unimpaired functionality required of sliders.
[0008] Conventional lapping processes utilize either oscillatory or
rotary motion of the workpiece across either a rotating or
oscillating lapping plate to provide a random motion of the
workpiece over the lapping plate and randomize plate imperfections
across the head surface in the course of lapping. During the
lapping process, the motion of abrasive particles carried on the
surface of the lapping plate is typically along, parallel to, or
across the magnetic head elements exposed at the slider air bearing
surface. In magnetic head applications, the electrically active
components exposed at the air bearing surface are made of
relatively softer, ductile materials. These electrically active
components during lapping can scratch and smear into the other
components causing electrical shorts and degraded head performance.
The prior art lapping processes cause different materials exposed
at the slider air bearing surface to lap to different depths,
resulting in recession or protrusion of the critical head elements
relative to the air bearing surface. As a result, poor head
performance because of increased space between the critical
elements and the recording disc can occur.
[0009] Rotating lapping plates having horizontal lapping surfaces
in which abrasive particles such as diamond fragments are embedded
have been used for lapping and polishing purposes in the high
precision lapping of magnetic transducing heads. Generally in these
lapping processes, as abrasive slurry utilizing a liquid carrier
containing diamond fragments or other abrasive particles is applied
to the lapping surface as the lapping plate is rotated relative to
the slider or sliders maintained against the lapping surface.
Common practice is to periodically refurbish the lapping plate with
a lapping abrasion to produce a surface texture suitable for the
embedding and retention of the appropriate size of diamond abrasive
being used with the lapping process. One of several problems
experienced is that the surface is susceptible to rapid change in
smoothness as it is used to lap a workpiece during lapping. A
change in smoothness effects the hydrodynamic bearing film provided
by the liquid component of the abrasive slurry creating a
hydroplaning effect which raises the workpiece from the lapping
surface to diminish the abrasion action of the particles and
substantially increases abrasion time required.
[0010] The general idea of interrupting the lapping surface, for
example, by forming grooves in the lapping plate is known in the
art. Further, material has been used in the troughs so that unspent
abrasive liquid is maintained adjacent to the working surface of
the lapping plate while spent abrasive fluid is centrifugally
removed beyond the lap plate periphery. In other applications, the
grooves are formed between working surface areas in which an
abrasive such as diamond particles are embedded in a metallic
coat.
[0011] Problems exist with grooved plates such as excessive width
and/or depth of the grooves to allow abrasive particles to lose
their effectiveness due to lack of contact with a workpiece.
Grooves that are too wide provide surface discontinuity too severe
for small work pieces. Forming such grooves is costly and time
consuming, even if the grooves can be sized properly. Substantial
segments of the lapping surface remain ungrooved, or alternatively
a prohibitively large number of grooves are required. Surface
uniformity on a micropore scale suitable for lapping smaller pieces
has been achieved only with extreme care. In addition, the
efficiency of the lapping operation is directly related to the
fraction of area at the upper surface since this is the area
causing the lapping to occur.
[0012] Although a number of processing steps are required to
manufacture heads, the ABS flatness parameters are primarily
determined during the final lapping process. The final lapping
process may be performed on the heads after they have been
separated or segmented into individual pieces, or on rows of heads
prior to the segmentation step. This process requires the head or
row to be restrained while an abrasive plate of specified curvature
is rubbed against it. As the plate abrades the surface of the head,
the abrasion process causes material removal on the head ABS and,
in the optimum case, will cause the ABS to conform to the contour
or curvature of the plate. The final lapping process also creates
and defines the proper magnetic read sensor and write element
material heights needed for magnetic recording.
[0013] There are a number of factors that affect the accuracy of
ABS curvature during the final lapping process. These include
diamond size/morphology, lubricant chemistry, lapping surface
velocity, plate material, lapping motion/path on the plate, and
other lapping parameters. In addition to these parameters, three
critical conditions must be satisfied. First, it is essential that
the contour of the abrasive plate be tightly controlled since, in
the best case, the ABS will conform to the curvature of the plate.
In addition, all components of the process, including the head/row,
must be restrained without distortion during lapping. Any variance
in the restraining forces will cause the parts to distort and/or
elastically deform upon removal of the forces. For example, if a
head or row is lapped on an absolutely flat surface while it is
clamped in a fixture, the part will elastically deform to a
non-flat condition when it is released. The amount of deformation
is proportional to the amount of elastic distortion created when
the part was initially clamped.
[0014] The single slider lapping process (SSP) is a recent approach
to improve the dimensional control of one of the key parameters for
the magnetoresistive sensor in disk drives. In this process the
individual slider is placed in a fixture and lapped until the
desired resistance target is achieved. The slider is gripped on two
ends, one of which has the electrical contacts pads which allow
sensing of the desired resistance. It is necessary to apply
sufficient force to the slider to maintain its position during
lapping and to make electrical contact to the pads.
[0015] There is a countering factor opposing the application of
large gripping force which is the need to avoid distorting the
slider during gripping (whose relaxed state after lapping would
retain the opposite distortion.) So there is a rationale to
decrease the gripping force to the minimum. The distortion-causing
load limit will be decreased by about 3.times. as a progression is
made to femto sliders, and further reduction if a progression is
made to a softer substrate material in the future (assuming
crown/camber targets do not get tighter). Consequently, there will
be an ever increasing emphasis on lower gripping forces as the SSP
progresses. Thus, an improved apparatus and method for accurately
defining the curvature of an ABS during the final lapping process
is needed.
SUMMARY OF THE INVENTION
[0016] One embodiment of the present invention
photolithographically defines patterns on a lapping plate which are
electroplated to produce lands with well-defined channels. By
choosing a particular geometry, the retention force is
significantly reduced over prior art options, while still retaining
a high land area fraction. The material may be electroplated onto
sufficiently thin substrates to allow conformation to a curved
vacuum chuck. Before electroplating resist is applied and
patterned, an exposed pattern is left in the underlying
metallization seed layer on both sides. A plasma cleaning step is
used to clean the resist residue from the bottom of the holes, the
plates are electroplated, and then the remaining resist is
removed.
[0017] In one particular embodiment, the lapping plate is formed
from a glass substrate, Cr--Cu sputtered, and has spun resist. Both
sides of the substrate are patterned and plated (i.e., two lapping
surfaces per substrate). The plate has 25 .mu.m square lands with
10 .mu.m spaces between lands, and has a 5 to 30 .mu.m plating of
Sn--Bi. The plate is press flattened or turned on both sides, and
one of the lapping surfaces is initially resist-protected until it
is used, which also isolates the plate electrically. The small land
and space configuration gives rise to reduced hydrodynamic forces
between the plate and workpiece as the workpiece is removed from
the plate.
[0018] Another favorable aspect of the present invention is the
reduced thickness of the substrate used for the lapping plate. It
is desirable to use a vacuum chuck capable of pulling a thin, flat
lapping plate against it to define the curvature. This allows the
lapping plate to be charged with abrasive by a flat charging
ring.
[0019] The foregoing and other objects and advantages of the
present invention will be apparent to those skilled in the art, in
view of the following detailed description of the preferred
embodiment of the present invention, taken in conjunction with the
appended claims and the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] So that the manner in which the features and advantages of
the invention, as well as others which will become apparent, are
attained and can be understood in more detail, more particular
description of the invention briefly summarized above may be had by
reference to the embodiment thereof which is illustrated in the
appended drawings, which drawings form a part of this
specification. It is to be noted, however, that the drawings
illustrate only an embodiment of the invention and therefore are
not to be considered limiting of its scope as the invention may
admit to other equally effective embodiments.
[0021] FIG. 1 is a magnified plan view of a conventional grooved
lapping plate.
[0022] FIG. 2 is a magnified plan view of a conventional
cross-grooved lapping plate.
[0023] FIG. 3 is a side view diagram of the relationship between a
lapping plate and a workpiece.
[0024] FIG. 4 is a plan view diagram of one embodiment of a lapping
plate constructed in accordance with the present invention.
[0025] FIG. 5 is a magnified plan view of a portion of the lapping
plate of FIG. 4 and is constructed in accordance with the present
invention.
[0026] FIG. 6 is a schematic side view of the lapping plate of FIG.
4 and is constructed in accordance with the present invention.
DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT
[0027] Regarding single slider lapping processes (SSP), the
inventors of the present invention have discovered that at least
one important factor in the rationale for larger gripping forces is
related to the hydrodynamic forces applied by the lapping fluid on
the lapping plate as the slider or workpiece is removed after
lapping. This slider unloading/retraction process significantly
affects the overall lapped parameters and should be accomplished
rather quickly to achieve the desired resistance target and to
avoid edge or corner lapping or faceting during lifting of the
slider. As the slider is retracted, the liquid lubricant fills the
space between the lapping plate and the slider. Since this gap is
extremely small (approximately 0.2 .mu.m, depending somewhat on the
diamond size) the shear forces needed to pump the lubricant into
this space produce a pressure drop. This pressure drop is
integrated into a force which acts to dislodge the slider from the
lapping fixture. This is currently an important parameter which
defines the gripping force necessary to avoid leaving the slider
behind on the lapping plate.
[0028] One aspect of the present invention involves a means of
patterning a lapping plate to reduce the hydrodynamic retention
force which would tend to keep the finished slider from being
pulled from the lapping plate. This structure is designed to allow
liquid flow which reduces the pressure drop associated with filling
the spaces between the flat slider and the upper areas (lands) on
the lapping plate. Moreover, a lapping plate constructed in
accordance with the present invention allows a well-defined land
area fraction to be prescribed, which far exceeds conventional
approaches. Furthermore, such a lapping plate can be made
sufficiently thin to conform to a curved vacuum chuck to allow
lapping under controlled crown/camber conditions.
[0029] Conventional lapping plates are typically textured or
somewhat roughened and/or grooved. However, for reasons arising
from the analysis below, flat, textured plates are unacceptable for
minimum retraction force. Grooved plates have depressions which are
cut into the lapping surface. An initial single slider lapping
process (SSP) plan uses a plate 11 (FIG. 1) with an approximately
100 to 125 mm diameter, into which are cut regularly-spaced,
circumferentially-spiral grooves 13. The grooves improve the
removal of lapped material and reduce the retention force. However,
as will be shown, a uni-directional groove pattern is less
functional in reducing the retention force than the present
invention. There are techniques, primarily associated with large
lapping plates (approximately 350 mm in diameter), in which
circular arc grooves are generated randomly upon the lapping
surface.
[0030] A problem associated with the amount of grooving necessary
to generate a fully randomized grooved surface is that much of the
surface area is no longer available to be charged by diamond. This
is true since the charging process impresses diamond into only the
outermost surfaces of the lapping plate. The reduced land area
directly reduces the lapping rate since uncharged areas do not lap.
A good target for land area fraction is about 50% or more, up to
approximately 90%, although this far exceeds most current efforts
for randomly grooved plates, which are typically 10 to 20% for a
plates with a 14-inch diameter. One example of a plate 21 with
random grooves 23 is shown in FIG. 2.
[0031] In contrast, the approach used with the present invention is
to photolithographically define patterns on the lapping plate which
are electroplated to produce lands with well-defined channels
(analogous to grooves). By choosing a particular geometry, the
retention force is significantly reduced over prior art options,
while still retaining a high land area fraction. Furthermore, the
material may be electroplated onto sufficiently thin substrates to
allow conformation to a curved vacuum chuck.
[0032] Fluid Analysis and Retraction Force
[0033] As two flat bodies are separated from each other in the
presence of a liquid, the instantaneous separation rate will be
determined by the rate at which the liquid fills the space. This
analysis assumes no cavitation and that the liquid is
incompressible. As shown in FIG. 3, a rough analogue is the flow of
liquid 31 into a channel 33, for which it is known that the
pressure drop .DELTA.p, over a channel length, L, with a channel
depth, h, is given by: .DELTA.p=12 .mu.Lq/h.sup.3, where q is the
fluid flow rate (m.sup.2/s) and .mu. is the viscosity (Pa-s). For
this case in which the lapping plate is flat, the channel length is
taken as half of the width or length of the slider 37, .DELTA.x,
depending on the flow path. The pressure drop integrated over the
slider area will result in a force, F, which tends to restrain the
motion 35 of the slider in the vertical direction with respect to
the plate 39.
[0034] The key observation from the above expression is the
h.sup.-3 dependence of the pressure drop. If grooves are present in
the lapping plate, the pressure drop along the grooves (e.g., 5 to
10 .mu.m deep) from the edge of the slider to the middle of the
slider (approximately 0.5 mm), is quite small with respect to the
pressure drop from the edge of a land to its center, even for a
land dimension of 50 .mu.m. This assumes a slider/land spacing of
about 0.2 .mu.m. Thus, the overall retention force is dominated by
the delivery of liquid from the edge of the land to the center of
the land and not by the fluid delivery along the grooves. It is
also clear that if liquid can be delivered from all sides (as for
an isolated land), rather than just two sides (as for an elongated
land between two grooves), the pressure drop will be reduced. For
example, the reduction in pressure drop over a square land versus
the pressure drop over the same square area, if it is contained in
the space between two grooves, is 4.times..
[0035] The following analysis calculates retraction forces for
three conditions for the sample case where a pico slider is being
removed from a lapping plate at 50 .mu.m/s. The first case is a
flat lapping plate having no grooves, where all area is assumed to
be land area separated from the slider by 0.2 .mu.m. This
configuration requires an enormous force to remove the slider from
the lapping plate. In the second case, the lapping plate of the
first case is provided with 50 .mu.m grooves cut into the plate
with 50 .mu.m spaces between them. The third case is one embodiment
of the present invention (FIG. 5) wherein a plate 51 has lands 53
which are substantially square with approximately 25 .mu.m sides,
and which are formed with spaces 61 between them that measure
approximately 10 .mu.m. In another embodiment, the lands may be
round, hexagonal, or still other shapes having a major dimension of
approximately 27 .mu.m, such that adjacent ones of the lands are
spaced apart from each other by a distance measuring approximately
10 .mu.m to define channels therebetween. Plate 51 comprises, for
example, a pattern-electroplated tin alloy on a glass substrate.
The configuration of the third case has a 30.times. reduction in
retraction force when compared to the second case, and over three
orders of magnitude reduction over the first case. Much of this
difference arises from the decrease in land size vis-a-vis the
groove width. It would be possible to decrease the groove size and
spacing in principle, however, this would lengthen the groove
cutting time by 2.times., requiring-more groove cutting machines,
more precision cutting bits, more setup, etc.
1 Plate Type Land Area % Calc*. F (N) Flat plate 100 130 Flat plate
w/50 .mu.m grooves 50 0.56 25 .mu.m lands/10 .mu.m spaces 50
0.018
[0036] One impact of the patterned plate is in the refinement and
regularity of land features which can be obtained. For the
lithographically-defined pattern, the limit is not defined by the
mechanical perfection of a cutting bit or its lifetime, it is set
by the minimum land spacing such that delivery of fluid in the
channels between the lands to the center of the slider is not the
high pressure drop component. For example, once the channel width
becomes less than a few multiples of its depth, the channel walls
must be considered in evaluating the pressure drop. Even so,
channel dimensions on the order of 10 .mu.m, with the lands being
25 .mu.m square give relative pressure drops differing by over two
orders of magnitude, with the pressure drop in the channel being
negligible. Thus, the optimum patterned structure is one which
supports the minimum land size and a large fraction of land area,
and is readily manufactured.
[0037] Deformable Lapping Plates
[0038] Another favorable aspect of the present invention is the
reduced thickness of the substrate which may be used for the
lapping plate. It is desirable to use curved lapping plates to
allow a pre-designated crown/camber curvature to be lapped into the
slider. The machining of high quality curved plates to achieve this
is an extra expense. For example, to prepare a plate with a 100 mm
diameter to give a 10 nm crown, normalized to 1 mm, requires a 12.5
m associated radius of curvature on the plate, resulting in a 100
.mu.m depression at the center with respect to the edges of the
plate. Furthermore, the charging of a curved lapping plate becomes
difficult, given that the charging ring or other device must have a
precisely matched curvature. It is desirable to use a vacuum chuck
capable of pulling a thin, flat lapping plate against it to define
the curvature. This allows the lapping plate to be charged by a
flat charging ring. The concept of using a vacuum chuck to produce
curvature in a lapping plate is disclosed in U.S. Pat. No.
5,591,073, to Turgeon, which is incorporated herein by
reference.
[0039] There is a limitation on the ability of a vacuum chuck to
deform a plate. The thickness of the plate, t, having a radius, r,
and Young's modulus, E, can be deformed to an seed layer, R, under
a pressure, p, assuming a Poisson's ratio of 1/3. This relation is
(see A Treatise on the Mathematical Theory of Elasticity, A. E. H.
Love, 1927):
p=3Et.sup.3/(R(r.sup.2-3t.sup.2))
[0040] Note the third power dependence of the pressure on the
thickness of the plate. For a glass substrate (e.g., borosilicate
glass) having a modulus of 65 GPa, and assuming 0.5 atm vacuum
applied, the thickest 100 mm diameter plate which may be deformed
to reach the 10 nm crown target described above is 2.0 mm. A tin
plate could be about 50% thicker at 3 mm, given its lower modulus.
However, to allow for some margin of safety, the tin lapping plate
would have to be somewhat thinner, increasing its fragility to
plastic deformation during handling. The choice of a 1 mm glass
plate, as used in one embodiment of the present invention, allows
even higher levels of crown to be achieved, if desired. The choice
of 1 mm glass substrates is likely to be much cheaper than an
approximately 2.5 mm solid tin substrate, if such thin tin plates
are feasible. It is likely that glass disk technology could be used
to generate cheap, flat, metallized, starting substrates.
[0041] Plate Fabrication
[0042] A range of experiments have been performed on patterned and
unpatterned substrates involving glass, silicon, or Al--Mg, which
were plated with Sn--Bi, Sn--Pb, or Sn. It is likely that a large
number of substrate and plating material combinations will yield
successful lapping plates. One embodiment of the present invention
uses glass substrates which have been sputter-metallized with an
adhesion layer such as Cr or Ti (10 nm), and a plateable layer such
as Cu or Ni (90 nm), on both sides to provide or apply a seed layer
for plate electroplating. In some applications involving a metal
substrate such as alloys of tin or copper or nickel, no adhesion
layer or seed layer may be needed. The resist is applied to both
sides and may comprise, for example, a 15 to 50 .mu.m thick
laminated photo resist or, e.g., a 5 to 30 .mu.m layer of spun
photoresist. The resist is then patterned, leaving an exposed
pattern in the metallization on both sides. A plasma cleaning step
is used to remove the resist residue from the bottom of the holes,
and then the plates are electroplated.
[0043] There are at least two reasons for plating both sides of the
substrates: (i) some intrinsic stress is usually generated in
plated material and would cause some amount of curvature if plating
were done only on one side; (ii) it is likely that both sides of
the finished plate can be used, thereby roughly halving the plate
cost. During the use of one side of the plate 51 (FIG. 6) as a
lapping surface 55, the other side 57 including its lands 53 are
protected by photoresist 59 or some other protective material. This
also allows the vacuum chuck to effectively clamp the lapping plate
in position. It is likely that only a very thin (approximately 5 to
30 .mu.m) electroplated layer is needed. This is primarily
dependent on the thickness uniformity of the material (e.g.,
thicker layers are likely to be less uniform). Therefore, it is
also likely that spun photoresist can be used, which will make the
pattern generation somewhat less expensive. FIG. 4 illustrates the
patterned, laminated photoresist 41 which, in the version shown,
has openings 43 that are 50 .mu.m square. The centers of the
openings 43 are spaced apart by a distance "c," which is 70
.mu.m.
[0044] The electroplated material is a tin alloy having a plating
bath compatible with the photoresist, and having a hardness that is
greater than pure bulk tin. In an initial set of plated parts, the
thickness was large and variable. This was improved with lower
electroplating rates and thicknesses. However, given the
possibility that thickness variation may be an intrinsic problem,
two techniques for achieving the extreme flatness needed for a
lapping plate were demonstrated. In the first technique, the plates
were faced in a standard precision facing machine. The second
approach used a hydraulic press which applied approximately 3 kpsi
stress onto a sandwich comprising the double-side plated glass
disks with mirror-polished SS plates on either side. This pressure
was sufficient to compress most high regions of the soft tin lands
on the plated parts. As shown in FIG. 5, a plate 51 was treated in
this way, has lands 53, and was charged with diamond 55. In this
experiment, the charging level was not high nor very uniform, but
was sufficient to lap sliders. The resulting lapping rate was good
and some of the sliders showed reasonable parameters. Again, one
version of the plate pattern has 25 .mu.m square lands with 10
.mu.m spaces between adjacent lands. See FIG. 5. The retention
force for this structure would be about {fraction (1/30)}.sup.th of
the prior art sample (i.e., the second case, described above, which
had 50 .mu.m grooves, 50 .mu.m spaces).
[0045] The present invention has several advantages. The method of
the present invention photolithographically defines patterns on a
lapping plate which are electroplated to produce lands with
well-defined channels. By choosing a particular geometry, the
retention force is significantly reduced over prior art options,
while still retaining a high land area fraction. The resist is then
patterned, leaving an exposed pattern in the underlying
metallization on both sides. A plasma cleaning step is used to
clean the resist residue from the bottom of the holes, and then the
plates are electroplated. Another favorable aspect is the reduced
thickness of the substrate used for the lapping plate. It is
desirable to use a vacuum chuck capable of pulling a thin, flat
lapping plate against it to define the curvature. This allows the
lapping plate to be charged with abrasive by a flat charging ring.
The lapping plate apparatus of the present invention provides
excellent lap processing of small workpieces such as individual
sliders, while reducing the retraction force relative to the
workpieces by thirty-fold when compared to the reference grooved
lapping plates.
[0046] While the invention has been shown or described in only some
of its forms, it should be apparent to those skilled in the art
that it is not so limited, but is susceptible to various changes
without departing from the scope of the invention.
* * * * *