U.S. patent application number 10/283774 was filed with the patent office on 2003-09-18 for methods of forming protective seqments of material, and etch stops.
Invention is credited to Byers, Erik, Cook, Keith, Jost, Mark E..
Application Number | 20030176070 10/283774 |
Document ID | / |
Family ID | 27804292 |
Filed Date | 2003-09-18 |
United States Patent
Application |
20030176070 |
Kind Code |
A1 |
Jost, Mark E. ; et
al. |
September 18, 2003 |
METHODS OF FORMING PROTECTIVE SEQMENTS OF MATERIAL, AND ETCH
STOPS
Abstract
The invention encompasses a method of forming a protective
segment of material. A plurality of at least three conductive lines
are provided over a semiconductor substrate. A material is formed
over the conductive lines, and a patterned masking layer is formed
to cover a segment of the material extending between a pair of the
conductive lines while leaving another segment of the material
uncovered. The uncovered segment of the material is anisotropically
etched to form separated spacers from the uncovered segment. The
separated spacers are along sidewalls of at least two of the
conductive lines. The covered segment of the material remains after
the anisotropic etching, and is a protective segment of the
material over the semiconductor substrate.
Inventors: |
Jost, Mark E.; (Boise,
ID) ; Cook, Keith; (Boise, ID) ; Byers,
Erik; (Boise, ID) |
Correspondence
Address: |
WELLS ST. JOHN P.S.
601 W. FIRST AVENUE, SUITE 1300
SPOKANE
WA
99201
US
|
Family ID: |
27804292 |
Appl. No.: |
10/283774 |
Filed: |
October 29, 2002 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
10283774 |
Oct 29, 2002 |
|
|
|
10098680 |
Mar 12, 2002 |
|
|
|
Current U.S.
Class: |
438/700 ;
257/E21.018; 257/E21.252; 257/E21.507; 257/E21.59; 257/E21.649;
257/E21.658 |
Current CPC
Class: |
H01L 21/31116 20130101;
H01L 21/76897 20130101; H01L 27/10888 20130101; H01L 21/76895
20130101; H01L 28/90 20130101; H01L 27/10855 20130101 |
Class at
Publication: |
438/700 |
International
Class: |
H01L 021/311 |
Claims
1. A method of forming a protective segment of material,
comprising: providing a plurality of at least three conductive
lines over a semiconductor substrate; forming a material over the
conductive lines; forming a patterned masking layer to cover a
segment of the material extending between a pair of the conductive
lines while leaving another segment of the material uncovered; and
anisotropically etching the uncovered segment of the material to
form separated spacers from the uncovered segment, the separated
spacers being along sidewalls of at least two of the conductive
lines; the covered segment of the material remaining after the
anisotropic etching and being a protective segment of the material
over the semiconductor substrate.
2. The method of claim 1 wherein the material is an electrically
insulative material.
3. The method of claim 1 wherein the material comprises silicon
nitride.
4. The method of claim 1 wherein the material comprises silicon
oxynitride.
5. The method of claim 1 wherein the material comprises at least
two separate layers, one of the at least two layers being silicon
nitride and the other being silicon dioxide.
6. The method of claim 5 wherein the silicon dioxide is over the
silicon nitride.
7. The method of claim 1 wherein the material comprises at least
two separate layers, one of the at least two separate layers being
silicon oxynitride and the other being silicon dioxide.
8. The method of claim 7 wherein the silicon dioxide is over the
silicon oxynitride.
9. The method of claim 1 wherein a mass is formed over the material
and patterned to expose the segments of the material prior to
forming the patterned masking layer.
10. The method of claim 9 wherein the mass comprises an
electrically insulative material.
11. The method of claim 9 wherein the mass comprises
borophosphosilicate glass.
12. The method of claim 9 wherein the patterned mass has openings
to the segments, the openings being at least about 2000 .ANG. deep
and no greater than 800 .ANG. in maximum width.
13. The method of claim 12 wherein the patterned masking layer
comprises photoresist formed within the openings.
14. The method of claim 12 wherein the patterned masking layer
comprises positive photoresist formed within the openings.
15. The method of claim 12 wherein the patterned masking layer
comprises negative photoresist formed within the openings.
16. The method of claim 9 wherein the patterned mass has openings
to the segments, the openings being at least about 2000 .ANG. deep
and no greater than 300 .ANG. in maximum width.
17. A method of forming a patterned etch stop, comprising:
providing a plurality of at least three conductive lines over a
semiconductor substrate; the three conductive lines being a first,
second and third conductive line; a first electrical node location
being between the first and second conductive lines, and a second
electrical node location being between the second and third
conductive lines; forming a material over the conductive lines;
anisotropically etching the material to form separated spacers
along sidewalls of the first and second conductive lines, and to
remove the material from over the first electrical node location; a
segment of the material extending from the second conductive line
to the third conductive line after the anisotropic etching, the
segment being over the second electrical node location; forming a
mass over the substrate after the anisotropic etching; and etching
openings through the mass; a first of the openings extending
between the separated spacers and a second of the openings
extending to the segment of material; the etch being selective for
the mass relative to the material, and thus stopping at about an
upper surface of the segment of the material.
18. The method of claim 17 wherein the mass comprises an
electrically insulative material.
19. The method of claim 17 wherein the mass comprises
borophosphosilicate glass.
20. The method of claim 17 wherein the material is an electrically
insulative material.
21. The method of claim 17 wherein the material comprises silicon
nitride.
22. The method of claim 17 wherein the material comprises silicon
oxynitride.
23. The method of claim 17 wherein the material comprises at least
two separate layers, one of the at least two layers being silicon
nitride and the other being silicon dioxide.
24. The method of claim 23 wherein the silicon dioxide is over the
silicon nitride.
25. The method of claim 17 wherein the material comprises at least
two separate layers, one of the at least two separate layers being
silicon oxynitride and the other being silicon dioxide.
26. The method of claim 25 wherein the silicon dioxide is over the
silicon oxynitride.
27. A method of forming a protective segment of material over a
digit line contact, comprising: providing a plurality of at least
four conductive lines over a semiconductor substrate; the four
conductive lines being a first, second, third and fourth conductive
line; a first electrical node location being between the first and
second conductive lines, a second electrical node location being
between the second and third conductive lines, and a third
electrical node location being between the third and fourth
conductive lines; one of the electrical node locations
corresponding to a digit line contact, and the others of the
electrical node locations comprising electrical contacts for
capacitor storage nodes; forming a material over the conductive
lines; forming a patterned masking layer to cover a segment of the
material extending between a pair of the conductive lines while
leaving an other portion of the material uncovered; and
anisotropically etching the uncovered portion of the material to
form separated spacers from the uncovered portion, the separated
spacers being along sidewalls of at least two of the conductive
lines; the covered segment of the material remaining after the
anisotropic etching and being a protective segment of the material
over the digit line contact.
28. The method of claim 27 wherein a mass is formed over the
material and patterned to expose the segment of the material and
portion of the material prior to forming the patterned masking
layer.
29. The method of claim 28 wherein the mass comprises an
electrically insulative material.
30. The method of claim 28 wherein the mass comprises
borophosphosilicate glass.
31. The method of claim 28 wherein the patterned mass has openings
to the segment and portion of the material, the openings being at
least about 2000 .ANG. deep and no greater than 800 .ANG. in
maximum width.
32. The method of claim 31 wherein the patterned masking layer
comprises photoresist formed within the openings.
33. The method of claim 31 wherein the patterned masking layer
comprises positive photoresist formed within the openings.
34. The method of claim 31 wherein the patterned masking layer
comprises negative photoresist formed within the openings.
35. The method of claim 28 wherein the patterned mass has openings
to the segments, the openings being at least about 2000 .ANG. deep
and no greater than 300 .ANG. in maximum width.
36. The method of claim 27 wherein the material is an electrically
insulative material.
37. The method of claim 27 wherein the material comprises silicon
nitride.
38. The method of claim 27 wherein the material comprises silicon
oxynitride.
39. The method of claim 27 wherein the material comprises at least
two separate layers, one of the at least two layers being silicon
nitride and the other being silicon dioxide.
40. The method of claim 39 wherein the silicon dioxide is over the
silicon nitride.
41. The method of claim 27 wherein the material comprises at least
two separate layers, one of the at least two separate layers being
silicon oxynitride and the other being silicon dioxide.
42. The method of claim 41 wherein the silicon dioxide is over the
silicon oxynitride.
43. A method of protecting a digit line contact during etching of
container openings, comprising: providing a plurality of at least
four conductive lines over a semiconductor substrate; the four
conductive lines being a first, second, third and fourth conductive
line; a first electrical node location being between the first and
second conductive lines, a second electrical node location being
between the second and third conductive lines, and a third
electrical node location being between the third and fourth
conductive lines; one of the electrical node locations
corresponding to a digit line contact, and the others of the
electrical node locations comprising electrical contacts for
capacitor storage nodes; forming a material over the conductive
lines; anisotropically etching the material to form separated
spacers along sidewalls of at least two of the conductive lines,
and to remove the material from over the electrical node locations
comprising electrical contacts for capacitor storage nodes; a
segment of the material remaining over the digit line contact after
the anisotropic etching; forming a mass over the substrate after
the anisotropic etching; etching openings through the mass; a first
of the openings extending to one of the electrical node locations
comprising electrical contacts for capacitor storage nodes and a
second of the openings extending to the other of the electrical
node locations comprising electrical contacts for capacitor storage
nodes, the first and second openings being container openings for
capacitor storage nodes; a third of the openings extending to the
segment of the material remaining over the digit line contact; the
etch being selective for the mass relative to the material, and
thus stopping at about an upper surface of the segment of the
material; and forming conductive capacitor storage node material
within the first and second openings, and forming capacitor
dielectric material and capacitor second electrode material
operatively adjacent the capacitor storage node material to form
first and second capacitor constructions within the first and
second openings, respectively.
44. The method of claim 43 wherein the mass comprises an
electrically insulative material.
45. The method of claim 43 wherein the mass comprises
borophosphosilicate glass.
46. The method of claim 43 wherein the material is an electrically
insulative material.
47. The method of claim 43 wherein the material comprises silicon
nitride.
48. The method of claim 43 wherein the material comprises silicon
oxynitride.
49. The method of claim 43 wherein the material comprises at least
two separate layers, one of the at least two layers being silicon
nitride and the other being silicon dioxide.
50. The method of claim 49 wherein the silicon dioxide is over the
silicon nitride.
51. The method of claim 43 wherein the material comprises at least
two separate layers, one of the at least two separate layers being
silicon oxynitride and the other being silicon dioxide.
52. The method of claim 51 wherein the silicon dioxide is over the
silicon oxynitride.
Description
TECHNICAL FIELD
[0001] The invention pertains to methods of forming protective
segments of material, and in particular applications pertains to
methods of forming etch stops. The invention can also pertain to
methods of forming protective segments over digit lines.
BACKGROUND OF THE INVENTION
[0002] It is frequently desired to form protective materials over
circuit constructions during semiconductor device fabrication. The
protective materials protect the covered circuit constructions from
being exposed to conditions which could be detrimental to the
circuit constructions. For instance, it can be desired to form an
etch stop over a circuit construction so that subsequent etching
conditions do not penetrate to the circuit construction.
[0003] A difficulty in forming protective segments over circuit
constructions occurs in trying to avoid excess processing steps.
Specifically, a continuing goal in semiconductor circuit device
fabrication is to reduce fabrication steps in order to increase
throughput of devices through a fabrication process.
SUMMARY OF THE INVENTION
[0004] In one aspect, the invention encompasses a method of forming
a protective segment of material. A plurality of at least three
conductive lines are provided over a semiconductor substrate. A
material is formed over the conductive lines, and a patterned
masking layer is formed to cover a segment of the material
extending between a pair of the conductive lines while leaving
another segment of the material uncovered. The uncovered segment of
the material is anisotropically etched to form separated spacers
from the uncovered segment. The separated spacers are along
sidewalls of at least two of the conductive lines. The covered
segment of the material remains after the anisotropic etching, and
is a protective segment of the material over the semiconductor
substrate.
[0005] In one aspect, the invention encompasses a method of forming
a patterned etch stop.
[0006] In one aspect, the invention encompasses a method of
protecting a digit line contact during etching of container
openings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] Preferred embodiments of the invention are described below
with reference to the following accompanying drawings.
[0008] FIG. 1 is a diagrammatic, cross-sectional view of a
semiconductor wafer fragment at a preliminary processing step in
accordance with an exemplary embodiment of the present
invention.
[0009] FIG. 2 is a view of the FIG. 1 fragment shown at a
processing step subsequent to that of FIG. 1.
[0010] FIG. 3 is a view of the FIG. 1 fragment shown at a
processing step subsequent to that of FIG. 2.
[0011] FIG. 4 is a view of the FIG. 1 fragment shown at a
processing step subsequent to that of FIG. 3.
[0012] FIG. 5 is a diagrammatic, cross-sectional view of a
semiconductor wafer fragment shown at a preliminary step of another
exemplary embodiment of the present invention.
[0013] FIG. 6 is a view of the FIG. 5 fragment shown at a
processing step subsequent to that of FIG. 5.
[0014] FIG. 7 is a view of the FIG. 5 fragment shown at a
processing step subsequent to that of FIG. 6.
[0015] FIG. 8 is a view of the FIG. 5 fragment shown at a
processing step subsequent to that of FIG. 7.
[0016] FIG. 9 is a view of the FIG. 5 fragment shown at a
processing step subsequent to that of FIG. 8.
[0017] FIG. 10 is a view of the FIG. 5 fragment shown at a
processing step subsequent to that of FIG. 9.
[0018] FIG. 11 is a view of the FIG. 5 fragment shown at a
processing step subsequent to that of FIG. 10.
[0019] FIG. 12 is a diagrammatic top view of a semiconductor wafer
fragment illustrated at a processing step of an exemplary third
embodiment of the present invention.
[0020] FIG. 13 is a cross-sectional, fragmentary view along the
line 13-13 of FIG. 12.
[0021] FIG. 14 is a diagrammatic, cross-sectional, fragmentary view
along the line 14-14 of FIG. 12.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0022] In particular aspects, the invention encompasses methods in
which a common material is utilized for forming both
anisotropically etched sidewall spacers and a protective segment
over circuit structures. An exemplary embodiment of the invention
is described with reference to FIGS. 1-4.
[0023] Referring initially to FIG. 1, a fragment 10 of a
semiconductor wafer construction is illustrated. Fragment 10
comprises a substrate 12 which can include, for example,
monocrystalline silicon lightly doped with a background p-dopant.
To aid in interpretation of the claims that follow, the terms
"semiconductive substrate" and "semiconductor substrate" are
defined to mean any construction comprising semiconductive
material, including, but not limited to, bulk semiconductive
materials such as a semiconductive wafer (either alone or in
assemblies comprising other materials thereon), and semiconductive
material layers (either alone or in assemblies comprising other
materials). The term "substrate" refers to any supporting
structure, including, but not limited to, the semiconductive
substrates described above.
[0024] An electrical node location 14 is supported by substrate 12,
and a node 16 is illustrated within location 14. Node 16 can
comprise, for example, a conductive plug, such as, for example, a
plug comprising one or more of metal, metal silicide, metal
nitride, or conductively-doped silicon. Alternatively, node 16 can
comprise a conductively-doped diffusion region within a
semiconductive material substrate 12. In particular embodiments,
node 16 can comprise a simple-electrical interconnect, and in other
applications node 16 can comprise at least a portion of a circuit
device.
[0025] Substrate 12 has an upper surface 15, and a plurality of
conductive lines 18, 20, 22, and 24 are formed across such upper
surface. Lines 18, 20, 22, and 24 can comprise various conductive
materials, including, for example, metal, metal silicide, metal
nitride, or conductively-doped silicon. In particular applications,
the lines can be wordline constructions, and accordingly can
comprise a stack which includes silicon dioxide, conductively-doped
silicon, metal, and an insulative material cap (with such stack
being known to persons of ordinary skill in the art, and not shown
in the diagrammatic illustration of FIG. 1).
[0026] Although the shown construction comprises four conductive
lines, it is to be understood that such is an exemplary
application, and that other numbers of conductive lines can be
provided over a semiconductor substrate in various aspects of the
invention. For instance, at least three conductive lines can be
provided over a semiconductor substrate in particular aspects of
the invention, and in other particular aspects at least four
conductive lines can be provided over a semiconductor
substrate.
[0027] Conductive lines 18, 20, 22 and 24 are spaced from one
another by gaps 19, 21 and 23. Accordingly, conductive lines 18,
20, 22 and 24 can be referred to as adjacent, spaced conductive
lines.
[0028] A material 26 is formed over lines 18, 20, 22 and 24, as
well as over upper surface 15 of substrate 12. Material 26 can
comprise a single layer, or a stack of separate layers. Material 26
can comprise an electrically insulative material, and in particular
applications comprises silicon nitride. In the illustration of FIG.
1, material 26 is illustrated as a single homogenous material for
diagrammatic purposes, but it is to be understood that the material
26 can, in particular applications, comprise a stack of different
materials. In specific applications, material 26 comprises a pair
of layers, with the underlying layer being silicon nitride and the
uppermost layer being silicon dioxide.
[0029] A patterned masking layer 30 is formed over a segment of
material 26. Masking layer 30 can comprise, for example,
photoresist, and can be formed utilizing photolithographic
patterning methods.
[0030] The segment of material 26 covered by material 30 is
illustrated generally with a label 32, and includes an expanse of
material 26 extending within gap 21 and between lines 20 and 22.
The segment 32 further includes portions of material 26 that are
over lines 20 and 22. Patterned masking layer 30 leaves various
portions 34 and 36 of material 26 not covered, and the portions 34
and 36 can be referred to together as an uncovered segment of
material 26.
[0031] Referring to FIG. 2, the uncovered segment of material 26
(specifically the segment encompassing portions 34 and 36 of FIG.
1) is anisotropically etched, while segment 32 of material 26 is
protected by masking layer 30 (FIG. 1). The anisotropic etching
forms spacers 38 along sidewalls of line 18, a spacer 40 along a
sidewall of line 20, a spacer 42 along a sidewall of line 22, and
spacers 44 along sidewalls of line 24. The spacers are spaced from
one another, and accordingly can be referred to as separated
spacers.
[0032] The adjacent spacers proximate gaps 19 and 23 are spaced
from one another to expose upper surface 15 of substrate 12 within
the gaps 19 and 23. Specifically, spacer 38 is separated from
spacer 40, to leave gap 19 extending to upper surface 15 of
substrate 12; and spacer 42 is separated from spacer 44 to leave
upper surface 15 of substrate 12 exposed within gap 23.
[0033] Masking layer 30 (FIG. 1 is removed) to leave segment 32 as
the only protective material extending across gap 21. Segment 32
extends from over conductive line 20 to over conductive line 22,
and thus extends over a section of upper surface 15 of substrate 12
within gap 21. Segment 32 covers the electrical node 16 within
location 14.
[0034] Referring to FIG. 3, a mass 50 is formed over lines 18, 20,
22 and 24, as well as over segment 32. Mass 50 can comprise, for
example, an insulative material, and in particular applications can
comprise borophosphosilicate glass (BPSG).
[0035] A patterned masking layer 52 is formed over mass 50. Masking
layer 52 can comprise, for example, photoresist and can be
patterned utilizing photolithographic processing. Layer 52
comprises a series of blocks, separated by gaps 53, 55 and 57. Each
of gaps 53, 55 and 57 is approximately over the gaps 19, 21 and 23,
respectively.
[0036] Referring to FIG. 4, gaps 53, 55 and 57 are extended
downwardly through material 50 with a suitable etch. Preferably,
the etch is selective for the material of mass 50 relative to the
material of segment 32, and accordingly segment 32 can function as
an etch stop during the removal of portions of mass 50.
Accordingly, the shown opening 55 stops on segment 32, rather than
extending to electrical component 16. In embodiments in which
segment 26 comprises silicon nitride and mass 50 comprises BPSG,
various etch chemistries can be chosen which are selective for mass
50 relative to segment 32.
[0037] Openings 53 and 57 extend to an upper surface 15 of
substrate 12. In particular applications, the regions of substrate
12 beneath openings 53 and 57 can be considered as node locations
60 and 62. Conductive materials can be provided within such node
locations either after formation of openings 53 and 57, or prior to
formation of such openings. Capacitor constructions can then be
formed within the openings and in electrical contact with
conductive materials provided at node locations 60 and 62. Openings
53 and 57 can thus be considered as containers for retaining
capacitor constructions.
[0038] Masking layer 52 would typically be removed prior to
formation of capacitor constructions within the openings. In
particular applications, electrical component 16 is a digit line
connection (or contact), and a pair of capacitor constructions are
formed within openings 53 and 57 to form DRAM cells comprising the
capacitor constructions and digit line contact. It should be
understood that in such applications the DRAM cells formed with the
construction of FIG. 4 can be part of a large array, and
accordingly adjacent DRAM cells can be formed at locations which
are either in or out of the page relative to the shown view of
fragment 10. Such adjacent DRAM cells can have capacitor containers
which extend into opening 55, and accordingly capacitor structures
can be formed within opening 55. Such structures can be
electrically isolated from electrical component 16 by protective
segment 32.
[0039] In applications in which capacitor structures are formed
within openings 53, 55 and 57, it can be advantageous to have
relatively deep/narrow openings. Accordingly, the openings can be
at least about 2000 Angstroms deep, and from about 300 Angstroms to
about 800 Angstroms in maximum width.
[0040] The embodiment of FIGS. 1-4 comprises patterning of a
material (26) to simultaneously form spacers (38, 40, 42 and 44)
and a protective segment (32). Such patterning occurs prior to
formation of a mass (50) over the material. Another exemplary
application of the invention is described with reference to FIGS.
5-11, and such application illustrates processing in which a mass
is formed over a material prior to formation of spacers and a
protective segment from the material. In referring to FIGS. 5-11,
similar numbering will be utilized as was used above in describing
FIGS. 1-4, where appropriate.
[0041] Referring initially to FIG. 5, a fragment 100 of a
semiconductor construction is illustrated at a preliminary stage of
a semiconductor device fabrication process. Fragment 100 comprises
a substrate 12 having a node location 14 defined therein, and an
electrical component 16 within node location 14. Substrate 12 also
has electrical node locations 60 and 62 defined therein, and in the
shown exemplary embodiment conductive components are not present in
locations 60 and 62 at the processing step of FIG. 5. It is to be
understood, however, that the invention encompasses other
applications in which conductive components are present in
locations 60 and 62 at the processing step of FIG. 5. Such
components can comprise conductively-doped diffusion regions, or
conductive plugs comprising one or more of metal, metal silicide,
metal nitride, and conductively-doped silicon.
[0042] Substrate 12 has an upper surface 15, and conductive lines
18, 20, 22 and 24 are formed across such upper surface. A material
26 extends over lines 18, 20, 22 and 24, as well as over substrate
12. In the shown embodiment, material 26 comprises two distinct
layers 102 and 104. Layer 102 can comprise, for example, silicon
nitride or silicon oxynitride; and layer 104 can comprise, for
example, silicon dioxide. In particular applications, layer 102
will consist of, or consist essentially of, silicon nitride and/or
silicon oxynitride; and layer 104 will consist of, or consist
essentially of silicon dioxide. Layer 102 can be formed by, for
example, low pressure chemical vapor deposition of nitride, and can
be formed to a thickness of about 300 Angstroms. Layer 104 can be
formed by, for example, chemical vapor deposition from tetraethyl
orthosilicate (TEOS), and can be formed to a thickness of about 50
Angstroms. It can be advantageous to have the shown silicon dioxide
layer 104 over a nitride layer 102 in that subsequent processing
can form a photoresist in contact with material 26, and the silicon
dioxide layer 104 can alleviate or prevent diffusion of nitrogen
from a nitrogen-comprising layer 102 into the photoresist.
Diffusion of nitrogen into photoresist can be problematic, in that
it can disrupt subsequent development of the photoresist.
[0043] A mass 50 is formed over material 26. Mass 50 can comprise
an insulative material, such as, for example, BPSG. Mass 50 has an
upper surface 51, and such upper surface can be planarized. The
planarization can be accomplished by, for example,
chemical-mechanical planarization. Mass 50 can comprise a thickness
of at least about 2,000 Angstroms between lowermost surfaces of
material 26 and planarized surface 51.
[0044] A patterned masking layer 52 is formed over surface 51 of
mass 50. Masking layer 52 can comprise, for example, photoresist,
and can be patterned by a photolithographic processing.
[0045] Gaps 53, 55 and 57 extend between blocks of patterned
masking layer 52.
[0046] Referring to FIG. 6, openings 53, 55 and 57 are extended
through mass 50 and to a surface of material 26; and subsequently
masking layer 52 (FIG. 5) is removed. Openings 53, 55 and 57 can be
extended with an etch selective for the material of mass 50
relative to the material of layer 104, and/or with a timed etch. In
particular applications, openings 53, 55 and 57 will comprise
relatively high critical dimensions, with exemplary openings having
a depth of at least about 2000 Angstroms, and a maximum width of no
greater than 800 Angstroms. In specific applications, the openings
can have a depth of at least about 2000 Angstroms, and a maximum
width of no greater than about 300 Angstroms.
[0047] Referring to FIGS. 7 and 8, a masking layer 110 is formed
within openings 53, 55 and 57; and subsequently developed to remove
the masking layer from within openings 53 and 57, while leaving the
layer within opening 55.
[0048] Masking layer 110 can comprise, for example, photoresist;
and can comprise either positive or negative photoresist in
particular applications.
[0049] If openings 53, 55 and 57 are narrow and deep, the
processing of FIGS. 7 and 8 can be accomplished in multiple steps.
If masking layer 110 comprises a positive photoresist, and if a
reticle is utilized in which underdosing is desired to obtain a
correct blocking layer size, a double develop can be utilized. The
double develop can be followed by a O.sub.2/N.sub.2 reactive ion
etch selective for organic material to inorganic oxide material to
clear some portions of the resist. Suitable reactive ion etches
are, for example, descum etches.
[0050] In particular applications, openings 53, 55 and 57 will have
widths which are from about 300 Angstroms to about 800 Angstroms,
and the light utilized for developing photoresist within the
openings will have a wavelength greater than a width of the
openings (i.e. a wavelength of for example, 1,980 .ANG. or 2,480
.ANG.). Accordingly, penetration of the light into the openings
will be poor. In such applications, it can be preferred to use a
negative photoresist as masking layer 110.
[0051] As discussed above, material 26 can comprise a layer 102 of
silicon nitride (or silicon oxynitride) and an overlying layer 104
of silicon dioxide. The silicon dioxide can alleviate or prevent
diffusion of nitrogen from the nitrogen-containing layer 102 into
photoresist during the processing of FIGS. 7 and 8. In other
processing, an organic material can be utilized either in addition
to, or in place of, silicon dioxide material 104. Such organic
material can comprise, for example, a deep UV antireflective
coating, such as a bottom antireflective coating (BARC) material.
However, a difficulty in utilizing a BARC is that it can ultimately
be difficult to remove BARC from within openings 53, 55 and 57
during subsequent processing.
[0052] Referring to FIG. 9, material 26 (layers 102 and 104) is
subjected to anisotropic etching to form spacers 38, 40, 42 and 44
comprising the material. Masking layer 110 protects a segment 32 of
material 26 during the anisotropic etching.
[0053] Referring to FIG. 10, masking layer 110 (FIG. 9) is removed
to leave segment 32 exposed within opening 55. Openings 53, 55 and
57 can be considered to comprise portions of containers for
retaining capacitors. Segment 32 can protect conductive component
16 from being electrically connected with capacitor constructions
subsequently formed with opening 55.
[0054] FIG. 11 illustrates exemplary capacitor constructions which
can be formed within openings 53, 55 and 57. The individual
capacitor constructions are labeled as 120, 122 and 124,
respectively; and each comprises a conductive first electrode (or
storage node) 130, an insulative dielectric material 132, and a
conductive second electrode 134. The conductive second electrode,
dielectric material and conductive first electrode are arranged
relative to one another to operatively form at least portions of
the capacitor constructions.
[0055] The first electrode materials 130 of capacitors 120 and 124
can be electrically connected with conductive materials (not shown)
at node locations 60 and 62, respectively; with such conductive
materials being contacts for capacitor storage nodes. The
conductive materials at node locations 60 and 62 can form
source/drain regions associated with transistors of wordlines 20
and 22 to encompass portions of DRAM cells. Further, conductive
material 16 can be associated with a shared source/drain region of
transistor devices of lines 20 and 22, and can correspond to a
digit line contact. The conductive material 16 is electrically
isolated from capacitor electrode material formed within opening 55
by the protective segment 32 of layers 102 and 104. The capacitor
material formed within opening 55 can be associated with a
container that extends into and out of the page relative to the
shown construction 100.
[0056] FIGS. 12-14 illustrate an exemplary construction that can be
formed utilizing methodology of the present invention. FIG. 12 is a
top view of a fragment 200, and FIGS. 13 and 14 are cross-sectional
views along the lines 1313 and 14-14 of FIG. 12, respectively.
[0057] Fragment 200 comprises a mass 202 extending over a plurality
of wordlines 204, 206, 208, 210, 212 and 214 (shown in FIGS. 12 and
13, with only wordlines 206, 208, 210 and 212 being shown in FIG.
13). The wordlines comprise layers 220, 222, 224 and 226 which can
be, for example, silicon dioxide, conductively-doped silicon,
metal, and an insulative cap, respectively. Each of the wordlines
also has insulative spacers 230 formed along sidewalls thereof. The
wordlines are formed over a substrate 250 which can comprise, for
example, monocrystalline silicon. Isolation regions 252 are shown
within substrate 250, and beneath wordlines 206 and 212. The
wordlines are illustrated in dashed-line view in FIG. 12 to aid in
distinguishing the wordlines from bitlines that are also shown in
FIG. 12.
[0058] Conductive plugs 254, 256 and 258 are shown extending
between wordlines 206, 208, 210 and 212, respectively.
[0059] An insulative material 260 is shown formed over wordlines
206, 208, 210 and 212; and separating plugs 254, 256 and 258 from
one another. Insulative material 260 can comprise for example,
silicon dioxide.
[0060] An etch stop 26 is shown formed over plug 256. Etch stop 26
can comprise a segment of silicon nitride, silicon oxynitride
material and/or silicon dioxide; and can be formed by, for example,
the processing described with reference to FIGS. 1-11 for forming
segments 32 of material 26. Openings 264 and 266 extend through
mass 202. Material 26 protects plug 256 from being exposed during
formation of openings 264 and 266. It is noted that the shown
construction is formed utilizing an etch which is relatively
non-selective for material 202 relative to material 260, and
accordingly exposed regions of material 260 have been etched during
formation of openings 264 and 266. In particular embodiments, mass
202 can comprise BPSG and insulative material 260 can comprise
silicon dioxide.
[0061] Fragment 200 comprises buried digit lines 300, 302, 304 and
306 (shown primarily in FIGS. 12 and 14). The digit line 300 is
shown in phantom in FIG. 13 to emphasize that the digit line is
behind the illustrated view of the wordlines.
[0062] The digit lines are within mass 202, and over a substrate
310 which encompasses substrate 250 (FIG. 13) and wordlines 206,
208, 210 and 212. The relative elevational orientation of the
bitlines to the wordlines can be understood with reference to FIG.
13.
[0063] The digit lines are shown comprising a pair of layers 312
and 314. Such layers can comprise a conductive material and an
insulative cap, respectively. The conductive material can comprise,
for example, metal, metal nitride and/or conductively-doped
silicon; and the insulative cap can comprise one or more of silicon
nitride and silicon dioxide. Bitlines 300 and 304 are shown
electrically isolated from substrate 310 by an insulative material
320. Material 320 can comprise, for example, silicon dioxide.
[0064] Material 26 is shown forming sidewalls spacers 330 relative
to bitlines 300, 302, 304 and 306; and forming a protective segment
32 extending between bitlines 302 and 304. Material 26 can comprise
the same composition as described relative to FIGS. 1-11, and
segment 32 together with spacers 330 can be formed from material 26
utilizing processing such as that described above with reference to
FIGS. 1-11.
[0065] In the shown embodiment, material 26 has been patterned
prior to formation of mass 202. The patterning utilized for
anisotropic etching of material 26 was relatively non-selective for
material 26 relative to insulative material 314, and accordingly
material 314 is shown having gouges 332 extending therein from the
etch of material 26.
[0066] Mass 202 is shown having openings 266 (also shown in FIG.
13), 352 and 354 extending therein. The etch utilized to form
openings 266, 352 and 354 has extended into portions of substrate
310. Such portions can correspond to an insulative material 356
supporting bitlines 300, 302, 304 and 306. In exemplary
embodiments, insulative material 356 can comprise
borophosphosilicate glass.
[0067] Protective segment 32 extends across a bit contact plug 360
and protects the plug from being etched during the formation of
openings 266, 352 and 354. Plug 360 is shown in electrical contact
with bitline 302.
[0068] In subsequent processing, capacitor structures can be formed
within the openings 264, 266, 352 and 354 to complete DRAM cell
constructions.
[0069] In compliance with the statute, the invention has been
described in language more or less specific as to structural and
methodical features. It is to be understood, however, that the
invention is not limited to the specific features shown and
described, since the means herein disclosed comprise preferred
forms of putting the invention into effect. The invention is,
therefore, claimed in any of its forms or modifications within the
proper scope of the appended claims appropriately interpreted in
accordance with the doctrine of equivalents.
* * * * *