U.S. patent application number 09/801896 was filed with the patent office on 2001-09-13 for fluid control apparatus.
This patent application is currently assigned to Tokyo Electron Limited. Invention is credited to Ishii, Ken, Kawano, Yuji, Okabe, Tsuneyuki, Yamaji, Michio.
Application Number | 20010020488 09/801896 |
Document ID | / |
Family ID | 26587150 |
Filed Date | 2001-09-13 |
United States Patent
Application |
20010020488 |
Kind Code |
A1 |
Ishii, Ken ; et al. |
September 13, 2001 |
Fluid control apparatus
Abstract
Lower members of each of lines A, B, C, D, E, P are mounted on a
subbase panel 3 with screws, upper members 11, 12, 13, 14, 15, 16,
17, 18, 19 of each line are mounted on the lower members with
screws, and the subbase panels 3 is mounted on a single main base
panel 2. Channel connecting means 50 is removable upward.
Inventors: |
Ishii, Ken; (Kawasaki-shi,
JP) ; Okabe, Tsuneyuki; (Tsukui-gun, JP) ;
Kawano, Yuji; (Osaka-shi, JP) ; Yamaji, Michio;
(Osaka-shi, JP) |
Correspondence
Address: |
ARMSTRONG,WESTERMAN, HATTORI,
MCLELAND & NAUGHTON, LLP
1725 K STREET, NW, SUITE 1000
WASHINGTON
DC
20006
US
|
Assignee: |
Tokyo Electron Limited
Tokyo
JP
|
Family ID: |
26587150 |
Appl. No.: |
09/801896 |
Filed: |
March 9, 2001 |
Current U.S.
Class: |
137/271 |
Current CPC
Class: |
Y10T 137/87885 20150401;
Y10T 137/5283 20150401; F16K 27/003 20130101 |
Class at
Publication: |
137/271 |
International
Class: |
F17D 001/06 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 10, 2000 |
JP |
2000-65981 |
Mar 10, 2000 |
JP |
2000-65986 |
Claims
What is claimed is:
1. A fluid control apparatus comprising lines (A), (B), (C), (D),
(E), (P) arranged in parallel and each comprising a plurality of
lower members (31), (32), (33), (34) arranged in series and a
plurality of upper members (11), (12), (13), (14), (15), (16),
(17), (18), (19) arranged in series, channels of members of
adjacent lines (A), (B), (C), (D), (E), (P) being interconnected by
channel connecting means (50), (53), (54) at specified locations,
the fluid control apparatus being characterized in that the lower
members (31), (32), (33), (34) of each of the lines (A), (B), (C),
(D), (E), (P) are mounted on a subbase panel (3) with screws, the
upper members (11), (12), (13), (14), (15), (16), (17), (18), (19)
of each line being mounted on the lower members (31), (32), (33),
(34) with screws, the subbase panels (3) being mounted on a single
main base panel (2), the channel connecting means (50), (53), (54)
being removable upward.
2. A fluid control apparatus according to claim 1 wherein one of
the upper members (11), (12), (13), (14), (15), (16), (17), (18),
(19) is a shutoff-opening device (13) comprising a two-port valve
(61) and a three-port valve (62) which are arranged adjacent to
each other.
3. A fluid control apparatus according to claim 2 wherein the
two-port valve (61) comprises a valve body (63) having a first
fluid inflow channel (65) and a first fluid outflow channel (66),
and an actuator (64) for bringing the two channels (65), (66) into
or out of communication with each other, and the three-port valve
(62) comprises a valve body (68) having a first fluid inflow
channel (70), a second fluid inflow channel (71) and an outflow
channel (72) for use with a first fluid and a second fluid in
common, and an actuator (69) for bringing the second fluid inflow
channel (71) into or out of communication with the outflow channel
(72), the first fluid inflow channel (70) of the three-port valve
(62) always communicating with the outflow channel (72) thereof via
a valve chamber (76), the first and second fluid inflow channels
(70), (71) of the three-port valve (62) being opened in an abutting
surface, the outflow channel (72) of the three-port valve (62)
being opened in a lower surface, the first fluid outflow channel
(66) of the two-port valve (61) being in communication with the
first fluid inflow channel (70) of the three-port valve (62), the
valve body (63) of the two-port valve (61) being further provided
with a second fluid inflow channel (67) opened in a lower surface
thereof and communicating with the second fluid inflow channel (71)
of the three-port valve (62).
4. A fluid control apparatus according to claim 3 wherein the first
fluid inflow channel (65) of the two-port valve (61) comprises an
upstream portion (65a) opened in an upper surface of the valve body
(63) and extending obliquely downward from the upper surface of the
valve body (63), and a downstream portion (65b) communicating with
the upstream portion (65a) and extending upward to a valve chamber
(73) of the two-port valve (61), the first fluid inflow channels
(65) of the adjacent lines (A), (B), (C), (D), (E), (P) being
connected to one another by the channel connecting means (50),
(53), (54).
5. A fluid control apparatus according to claim 1 wherein the main
base panel (2) has a space for installing additional lines.
6. A fluid control apparatus according to claim 1 wherein the
channel connecting means (50), (53) comprise a block coupling (51)
mounted in place with screws driven in from above and having an
I-shaped channel (83).
7. A fluid control apparatus according to claim 1 wherein the
channel connecting means (54) comprises a manifold block coupling
mounted in place with screws driven in from above and having a
lateral opening.
Description
BACKGROUND OF THE INVENTION
[0001] The present invention relates to fluid control apparatus for
use in semiconductor manufacturing equipment, and more particularly
to integrated fluid control apparatus which are so assembled that
the fluid control components thereof can be individually removed
upward for maintenance or inspection.
[0002] The term "front" refers to the upper side of FIG. 1, and the
term "rear" to the lower side of the same. The terms "upper" and
"lower" refer respectively to the upper and lower sides of FIG. 2,
and the terms "left" and "right" are used for the apparatus as it
is seen from the rear forward. These terms are used for convenience
sake; the apparatus may be used as reversed With respect to the
longitudinal direction, as laid on its side.
[0003] Fluid control apparatus for use in semiconductor
manufacturing equipment comprise a plurality of rows of various
fluid control devices, and the fluid control devices of adjacent
rows have their fluid channels interconnected by device connecting
means at specified locations. With such fluid control apparatus,
massflow controllers, on-off valves and other components are
connected together for integration without using tubes in recent
years (see, for example, JP-A No. 9-29996 (1997). The integrated
fluid control apparatus is assembled by mounting block couplings
and like lower members on a panel with screws first, then mounting
each of upper members on two of the lower members, and
interconnecting channels of the members of adjacent rows by channel
connecting means at specified locations.
[0004] In the case of the conventional fluid control apparatus
described, the individual upper members can be removed upward for
inspection, repair or replacement, whereas no consideration is
given to modifications such as installation of two additional rows
to four existing lines.
[0005] In adding components to the conventional integrated fluid
control apparatus or in modifying the construction of the
apparatus, there arises a need to make additional screw holes in
the panel for fixing base blocks, while specified accuracy is
required of the screw holes to be thus formed in order to mount
upper members, so that the conventional apparatus has the problem
that difficulty is encountered in manually making the additional
screw holes after the completion of the panel. Further since the
upper members are connected to one another all by the lower
members, branching off the existing lines or joining additional
lines to the existing lines requires removal of upper members,
replacement of lower members by different components and
reinstallation of the upper members, hence the problem of
necessitating an increased number of work steps.
[0006] Because of the above problems, it is practice to mount
required devices anew on a panel and to install the assembly for
replacement when there arises a need for an alteration or
modification of the system, whereas this entails the cessation of
operation of the apparatus for a long period of time and increased
number of work steps to be performed at the site of
installation.
[0007] In view of the situation, it has become important that the
fluid control apparatus of the type described be adapted to readily
fulfill the need to install additional lines or modify the existing
lines.
SUMMARY OF THE INVENTION
[0008] An object of the present invention is to provide an
integrated fluid control apparatus which is readily adapted for the
installation of additional lines or modification of existing
lines.
[0009] The present invention provides a fluid control apparatus
comprising lines arranged in parallel and each comprising a
plurality of lower members arranged in series and a plurality of
upper members arranged in series, channels of members of the
adjacent lines being interconnected by channel connecting means at
specified locations, the fluid control apparatus being
characterized in that the lower members of each of the lines are
mounted on a subbase panel with screws, the upper members of each
line being mounted on the lower members with screws, the subbase
panels being mounted on a single main base panel, the channel
connecting means being removable upward.
[0010] A line can be additionally installed in the fluid control
apparatus of the invention merely by mounting the line to be added
on a subbase panel, and mounting the subbase panel on the main base
panel. Further one of the existing line can be altered merely by
removing the oil line to be altered along with the subbase panel,
mounting a new line on a subbase panel, and mounting the subbase
panel on the main base panel. Thus, additional lines can be
installed or the existing lines can be modified with ease. The
channel connecting means are removed temporarily, followed by the
installation of additional lines or alteration of the existing
lines, and the channels are then connected to one another as
required by the channel connecting means. In this way, additional
lines can be installed or the existing lines can be modified merely
by removing a minimum number of members required.
[0011] One of the upper members can be a shutoff-opening device
comprising a two-port valve and a three-port valve which are
arranged adjacent to each other. In this case, these two valves
preferably have the following constructions. The two-port valve
comprises a valve body having a first fluid inflow channel and a
first fluid outflow channel, and an actuator for bringing the two
channels into or out of communication with each other, and the
three-port valve comprises a valve body having a first fluid inflow
channel, a second fluid inflow channel and an outflow channel for
use with a first fluid and a second fluid in common, and an
actuator for bringing the second fluid inflow channel into or out
of communication with the outflow channel, the first fluid inflow
channel of the three-port valve always communicating with the
outflow channel thereof via a valve chamber, the first and second
fluid inflow channels of the three-port valve being opened in an
abutting surface, the outflow channel of the three-port valve being
opened in a lower surface, the first fluid outflow channel of the
two-port valve being in communication with the first fluid inflow
channel of the three-port valve, the valve body of the two-port
valve being further provided with a second fluid inflow channel
opened in a lower surface thereof and communicating with the second
fluid inflow channel of the three-port valve.
[0012] When a second fluid (e.g., process gas) is to be passed
through the fluid control apparatus having the shutoff-opening
device described above, the actuator of the two-port valve is
closed, while the actuator of the three-port valve is opened to
hold the second fluid inflow channel in communication with the
outflow channel. The second fluid is introduced into the apparatus
through the second fluid inflow channel of the two-port valve. The
second fluid flows through the second fluid inflow channel of the
two-port valve, and the second fluid inflow channel and the outflow
channel of the three-port valve to the massflow controller, etc.
The actuator of the two-port valve is thereafter opened, the
actuator of the three-port valve is closed to shut off the second
fluid inflow channel, and a first fluid (e.g., purge gas) is
introduced into the apparatus through the first fluid inflow
channel of the two-port valve. The first fluid is sent to the
massflow controller, etc. by way of the first fluid inflow channel
and outflow channel of the two-way valve and the first fluid inflow
channel and the outflow channel of the three-port valve. The first
fluid drives away the second fluid remaining in the outflow channel
of the three-port valve with the pressure of its own and flows
toward the massflow controller to rapidly remove the mixture of the
first and second fluids. The first fluid only flows through the
massflow controller, etc. within a short period of time.
[0013] With the shutoff-opening device described, a blocklike
coupling having a channel communicating with the second fluid
inflow channel of the two-port valve is disposed under this valve,
while a blocklike coupling having a channel communicating with the
outflow channel of the three-port valve is disposed under this
valve. The shutoff-opening device can be mounted on both these
blocklike couplings to interconnect the couplings, whereby the
fluid control apparatus can be integrated easily. This also renders
the shutoff-opening device easy to maintain and inspect.
[0014] Preferably, the first fluid inflow channel of the two-port
valve comprises an upstream portion opened in an upper surface of
the valve body and extending obliquely downward from the upper
surface of the valve body, and a downstream portion communicating
with the upstream portion and extending upward to a valve chamber
of the two-port valve, the first fluid inflow channels of the
adjacent lines being connected to one another by the channel
connecting means. The lines, as well as the subbase panels, can
then be made to have the same width. The required line can then be
positioned at a desired position or replaced by an optional line
with ease.
[0015] Preferably, the main base panel has a space for installing
additional lines. When desired, additional lines can then be
installed in the system with extreme ease.
[0016] The channel connecting means may comprise a block coupling
mounted in place with screws from above and having an I-shaped
channel. The channel connecting means may comprise a manifold block
coupling mounted in place with screws from above and having a
lateral opening. This facilitates the work of removing the channel
connecting means temporarily, then installing additional lines or
modifying the existing lines, and thereafter connecting the
channels to one another again by the channel connecting means as
required.
BRIEF DESCRIPTION OF THE DRAWINGS
[0017] FIG. 1 is a plan view showing a first embodiment of fluid
control apparatus of the invention;
[0018] FIG. 2 is a side elevation of A line of FIG. 1;
[0019] FIG. 3 is a plan view showing a second embodiment of fluid
control apparatus of the invention;
[0020] FIG. 4 is a side elevation of B line of FIG. 3;
[0021] FIG. 5 is a side elevation of D line of FIG. 3;
[0022] FIG. 6 is a side elevation of E line of FIG. 3;
[0023] FIG. 7 is a plan view showing a third embodiment of fluid
control apparatus of the invention;
[0024] FIG. 8 is an enlarged view in section of a shutoff-opening
device;
[0025] FIG. 9 includes enlarged views in section of a three-port
valve;
[0026] FIG. 10 is a sectional view of a block coupling;
[0027] FIG. 11 is a sectional view of an inverted V-shaped channel
block; and
[0028] FIG. 12 includes sectional views of a manifold block
coupling.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0029] Embodiments of the present invention will be described below
with reference to the drawings.
[0030] FIGS. 1 and 2 show a first embodiment of fluid control
apparatus of the invention. The apparatus 1 comprises, as arranged
from the left-hand side of FIG. 1 rightward, process gas A line A,
process gas B line B, process gas C line C and purge gas line
P.
[0031] Each of these four lines A, B, C, P comprises fluid control
devices each having a predetermined function and mounted on a
slender subbase panel 3. The subbase panels (four in total number)
3 are mounted on a single main base panel 2. The left half of the
main base panel 2 has a space provided with mount holes so that
similar lines can be installed thereon additionally.
[0032] The process gas A line A consists mainly of a check valve
11, pressure sensor 12, shutoff-opening device 13, massflow
controller 14 and on-off valve 15. The process gas B line B and the
process gas C line C, which are the same in construction, consist
mainly of a check valve 11, pressure regulator 16, pressure sensor
12, shutoff-opening device 13, massflow controller 14, on-off valve
15 and filter 17. The purge gas line P consists mainly of a check
valve 11, pressure regulator 16, pressure sensor 12, massflow
meter, on-off valve 15, massflow controller 14, on-off valve 15 and
filter 17.
[0033] These lines A, B, C, P each comprise lower members 31, 32,
33, 34 mounted on the subbase panel 3 with screws, and upper
members 11, 12, 13, 14, 15, 16, 17, 18, 19 mounted on the lower
members 31, 32, 33, 34 with screws, the subbase panels 3 for all
the line having the same size. The upper members 11, 12, 13, 14,
15, 16, 17, 18, 19 each perform the required function in the line
A, B, C, or P concerned, and the lower members 31, 32, 33, 34, each
have the function of connecting channels in the upper members 11,
12, 13, 14, 15, 16, 17, 18, 19. The shutoff-opening devices 13 of
the process gas lines A, B, C are connected to one another by
channel connecting means 50.
[0034] With reference to the process gas A line A shown in FIG. 2,
arranged as upper members are the check valve 11, pressure sensor
12, inverted V-shaped channel block 19, shutoff-opening device 13,
massflow controller 14 and on-off valve 15. The upper members 11,
12, 13, 14, 15, 19 each have a channel opened downward. Arranged
from the left rightward as lower members are an L-shaped channel
block coupling 32 connected to the check valve 11 and having an
inlet coupling 31 attached thereto, V-shaped channel block coupling
33 holding the check valve 11 in communication with the pressure
sensor 12, V-shaped channel block coupling 33 holding the pressure
sensor 12 in communication with the inverted V-shaped channel block
19, V-shaped channel block coupling 33 holding the inverted
V-shaped channel block 19 in communication with the shutoff-opening
device 13, V-shaped channel block coupling 33 holding the
shutoff-opening device 13 in communication with the massflow
controller 14, V-shaped channel block coupling 33 holding the
massflow controller 14 in communication with the on-off valve 15,
and L-shaped channel block coupling 32 connected to the on-off
valve 15 and having an outlet coupling 34 attached thereto.
[0035] The shutoff-opening device 13 comprises a rear two-port
valve 61 and a front three-port valve 62 adjacent to each
other.
[0036] The two-port valve 61 comprises a rectangular
parallelepipedal valve body 63 and an actuator 64 attached thereto
from above. The valve body 63 is provided with a first fluid inflow
channel 65, and a first fluid outflow channel 66 which is brought
into or out of communication with the channel 65 by the actuator
64, and a second fluid inflow channel 67 positioned under the two
channels 65, 66. The three-port valve 62 also comprises a
rectangular parallelepipedal valve body 68 and an actuator 69
attached thereto from above. The valve body 68 is provided with a
first fluid inflow channel 70, a second fluid inflow channel 71,
and an outflow channel 72 to be used for a first fluid and a second
fluid in common and to be brought into or out of communication with
the channel 71 by the actuator 69.
[0037] FIG. 8 is an enlarged view of the shutoff-opening device 13,
and FIG. 9 includes enlarged fragmentary views of the three-port
valve 62.
[0038] With reference to FIG. 8, the valve body 63 of the two-port
valve 61 has twice the front-to-rear length of the valve body 68 of
the three-port valve 62, and the actuator 64 is mounted on a front
portion thereof. The first fluid inflow channel 65 of the two-port
valve 61 is generally V-shaped and comprises a slanting upstream
portion 65a and a vertical downstream portion 65b. The upstream
portion 65a has an upper end provided with an opening in the upper
surface of rear portion of the valve body 63, and the downstream
portion 65b has an upper end communicating with a valve chamber 73.
The first fluid outflow channel 66 of the two-port valve 61 is
generally L-shaped and has one end provided with an opening in the
front surface of the valve body 63, and the other end communicating
with the valve chamber 73. The second fluid inflow channel 67 of
the two-port valve 61 is generally inverted L-shaped, and has one
end provided with an opening in the lower surface of rear portion
of the valve body 63 and the other end provided with an opening in
the front surface of the valve body 63. The two-port valve 61 is a
diaphragm valve, and has a diaphragm 75 which is moved upward and
downward within the valve chamber 73 with the upward and downward
movement of a valve stem 74 by the operation of the actuator 64,
whereby the opening of the outflow channel 66 is shut off or
opened.
[0039] The first fluid inflow channel 70 of the three-port valve 63
is generally L-shaped, and has one end provided with an opening in
the rear surface of the valve body 68 and communicating with the
outflow channel 66 of the two-port valve 61, and the other end
communicating with a valve chamber 76. The second fluid inflow
channel 71 of the three-port valve 62 is generally L-shaped and has
one end provided with an opening in the rear surface of the valve
body 68 below the first fluid inflow channel 70, and the other end
communicating with the valve chamber 76. The outflow channel 72 of
the three-port valve 62 is for use with the first and second fluids
in common and has one end provided with an opening in the lower
surface of the valve body 68 and the other end communicating with
the valve chamber 76.
[0040] As shown on an enlarged scale in FIG. 9, the three-port
valve 62 is a diaphragm valve and has an annular groove 76a in the
bottom of the valve chamber 76. The upper-end opening of the first
fluid inflow channel 70 communicates with a rear portion of the
annular groove 76a, and the upper-end opening of the outflow
channel 72 communicates with a front portion of the groove. Thus,
the inflow channel 70 is always in communication with the outflow
channel 72 through the annular groove 76a of the valve chamber 76.
The opening of the upper end of the second fluid inflow channel 69
is defined by an annular valve seat 77 provided around the upper
end. The actuator 69 is operated to move a valve stem 78 upward or
downward to thereby move a diaphragm (valve element) 79 within the
valve chamber 76, whereby the inflow channel 71 is opened or shut
off. FIG. 9(a) shows the valve stem 78 as raised, holding the
inflow channel 71 open, with the channel 71 in communication with
the outflow channel 72 via the valve chamber 76. FIG. 9(b) shows
the valve stem 78 as lowered, holding the channel 71 closed. Even
in this case, the first fluid inflow channel 70 is in communication
with the outflow channel 72.
[0041] The valve body 63 of the two-port valve 61 and the valve
body 68 of the three-port valve 62 are connected together with
bolts (not shown) driven in from the right. A seal is provided at
each of the butt joint between the first fluid outflow channel 66
of the two-port valve 61 and the first fluid inflow channel 70 of
the three-port valve 62, and the butt joint-between the second
fluid inflow channel 67 of the two-port valve 61 and like channel
71 of the three-port valve 62.
[0042] Provided beneath the lower surface of rear end portion of
the valve body 63 of the two-port valve 61 is a block coupling 33
having a V-shaped channel 33a for holding the opening of the second
fluid inflow channel 67 in communication with a process gas
introduction line. Also provided beneath the valve body 68 of the
three-port valve 62 is a block coupling 33 having a V-shaped
channel 33a for causing the opening of the outflow channel 72 to
communicate with an inlet channel of the massflow controller 14.
The shutoff-opening device 13 is attached from to both the V-shaped
channel block couplings 33 with screws driven in from above.
Another block coupling 33 having a V-shaped channel 33a is provided
also at the outlet side of the massflow controller 14, and the
massflow controller 14 is attached to both the block couplings 33
with screws driven in from above. Each block coupling 33 is mounted
on the subbase panel 3 with screws driven in from above.
[0043] When the process gas is introduced into the three-port valve
62, with the two-port valve 61 closed and the valve 62 opened, the
process gas has its flow rate adjusted by the massflow controller
14 and sent to a process chamber. When a purge gas is thereafter
supplied to the two-port valve 61 with the valve 61 opened and the
three-port valve 62 closed, the purge gas flows through the valves
61, 62 and the massflow controller 14 to thereby purge the fluid
control apparatus of the process gas.
[0044] When the second fluid (i.e., process gas in this embodiment)
is to be passed through the apparatus, the actuator 64 of the
two-port valve 61 is closed, with the actuator 69 of the three-port
valve 62 opened to hold the second fluid inflow channel 71 thereof
in communication with the outflow channel 72, and the second fluid
is introduced into the second fluid inflow channel 67 of the
two-port valve 61, whereby the second fluid is sent to the massflow
controller 14 via the second fluid inflow channel 67 of the valve
61 and the second fluid inflow channel 71 and the outflow channel
72 of the three-port valve 62. The actuator 64 of the two-port
valve 61 is thereafter opened, the actuator 69 of the three-port
valve 62 is closed to shut off the second fluid inflow channel 71,
and the first fluid (i.e., purge gas in this embodiment) is
introduced into the first fluid inflow channel 65 of the two-port
valve 61. The first fluid is sent to the massflow controller 14 by
way of the first fluid inflow channel 65 and outflow channel 66 of
the two-port valve 61 and the first fluid inflow channel 70 and the
outflow channel 72 of the three-port valve 62. The first fluid
flows toward the massflow controller 14, driving away the second
fluid remaining in the valve chamber 76 and the outflow channel 72
of the three-port valve 62 with its own pressure to rapidly remove
the mixture of first and second fluids, with the result that the
first fluid (purge gas) only flows through the apparatus within a
short period of time.
[0045] The channel connecting means 50 comprises three I-shaped
channel block couplings 51 and tubes 52 for interconnecting the
couplings 51.
[0046] With reference to FIG. 10, the I-shaped channel block
coupling 51 comprises a main body 81 T-shaped in cross section and
having a downwardly open channel 83, and a tube connector 82
screwed on an externally threaded portion at the top of the main
body 81. Disposed in the channel 83 inside the main body 81 is a
valve element 84 biased downward by a compression coil spring 85
for closing the channel when the internal pressure is zero or
opening the channel when the internal pressure is not lower than a
predetermined level. The main body 81 is provided at its opposite
sides with holes 86 for inserting bolts therethrough for mounting
the coupling on the shutoff-opening device 13. The upward opening
of the first fluid inflow channel 65 of the shutoff-opening device
13 is positioned immediately above the center axis of the line. The
block couplings 51, as well as the tubes 52, are all of the same
size.
[0047] FIG. 3 shows a second embodiment of fluid control apparatus
of the present invention. This apparatus is obtained by installing
two additional lines in the first embodiment shown in FIG. 1. With
reference to FIG. 3, process gas D line D and process gas E line E
are installed at the left of four lines having the same functions
as the first embodiment, with some modifications made in the
process gas B line B and process gas C line C.
[0048] The process gas D line D consists mainly of a check valve
11, pressure regulator 16, pressure sensor 12, shutoff-opening
device 13, massflow controller 14 and on-off valve 15. The process
gas E line E consists mainly of a shutoff-opening device 13,
massflow controller 14 and on-off valve 15. Inverted V-shaped
channel block couplings 20 provided at the outlet side of the
process gas B line B and the inlet side and outlet side of the
process gas C line C are so shaped as to be described later.
Furthermore, channel connecting means 53 comprises five I-shaped
channel block couplings 51 and tubes 52 interconnecting these block
couplings 51.
[0049] Arranged as upper members in the process gas B line B shown
in FIG. 4 are a check valve 11, pressure regulator 16, pressure
sensor 12, inverted V-shaped channel block 20, shutoff-opening
device 13, massflow controller 14, on-off valve 15, inverted
V-shaped channel block 20 and filter 17.
[0050] Further arranged from the left rightward as lower members
are an L-shaped channel block coupling 32 connected to the check
valve 11 and having an inlet coupling 31 attached thereto, a
V-shaped channel block coupling 33 for holding the check valve 11
in communication with the pressure regulator 16, a V-shaped channel
block coupling 33 for holding the pressure regulator 16 in
communication with the pressure sensor 12, a V-shaped channel block
coupling 33 for holding the pressure sensor 12 in communication
with the inverted V-shaped channel block 20, a V-shaped channel
block coupling 33 for holding the channel block 20 in communication
with the shutoff-opening device 13, a V-shaped channel block
coupling 33 for holding the shutoff-opening device 13 in
communication with the massflow controller 14, a V-shaped channel
block coupling 33 for holding the controller 14 in communication
with an on-off valve 15, a V-shaped channel block coupling 33 for
holding the valve 15 in communication with the inverted V-shaped
channel block 20, a V-shaped channel block coupling 33 for holding
the block 20 in communication with the filter 17, and an L-shaped
channel block coupling 31 connected to the filter 17 and having an
outlet coupling 34 attached thereto.
[0051] As shown in FIG. 11, the inverted V-shaped channel block 20
has an upward channel 20b for upwardly opening the top portion of
an inverted V-shaped channel 20a.
[0052] With reference to the process gas D line D shown in FIG. 5,
an outlet coupling 36 has an upward opening and is mounted on the
upper surface of a V-shaped channel block coupling 35 connected to
the on-off valve 15. Further the process gas E line E shown in FIG.
6 is provided at its inlet and outlet with couplings 35, 36 of the
same construction as in the line D shown in FIG. 5.
[0053] The outlet coupling 36 of the process gas D line D is
connected to the inverted V-shaped channel block 20 of the process
gas B line B. The outlet coupling 36 of the process gas E line E is
connected to the inverted V-shaped channel block 20 at the outlet
side of the process gas C line C. The inlet coupling 36 of the
process gas E line E is connected to the inverted V-shaped channel
block 20 at the inlet side of the process gas C line C.
[0054] The second embodiment shown in FIG. 3 can be obtained from
the first embodiment shown in FIG. 1 by removing the channel
connecting means 50 interconnecting the shutoff-opening devices 13
first, mounting the process gas D line D and the process gas E line
E as attached to the respective subbase panels 3 on the main base
panel 2, replacing the inverted V-shaped channel blocks in the
process gas B line B and the process gas C line C, finally
attaching channel connecting means 53 comprising five I-shaped
channel block couplings 51 and tubes 52, and further using tubes
for connection as required. The new channel connecting means 53
differs from the original means 53 only in the numbers of I-shaped
channel block couplings 51 and tubes 53 and can therefore be
prepared and attached easily.
[0055] FIG. 7 shows a third embodiment of the invention, which is
obtained by installing two additional lines in the first embodiment
shown in FIG. 1 and which is exactly the same as the second
embodiment in function. Unlike the second embodiment, the two lines
to be added to the first embodiment are not installed merely at the
left of the first embodiment. To render the resulting apparatus
easy to use, process gas D line D is additionally installed between
the process gas A line A and the process gas B line B, and process
gas E line E is additionally provided between the process gas B
line B and the process gas C line C. The inverted V-shaped channel
blocks 20 provided in the line E and line C of the second
embodiment are removed, and a manifold block coupling 53 common to
the two lines E, C is provided.
[0056] The manifold block coupling 54 has channels 54a inverted
V-shaped in section [see FIG. 12(a)] and interconnected at their
top portions by a channel 54b extending transversely of the
apparatus [see FIG. 12 (b)]. The channel 54b has an internally
threaded right end portion 55.
[0057] The third embodiment shown in FIG. 7 can be obtained from
the first embodiment shown in FIG. 1 by removing the channel
connecting means 50 interconnecting the shutoff-opening devices 13
first, removing the process gas A line A and the process gas B line
B as attached to the respective subbase panels 3 from the main base
panel 2, thereafter installing the process gas A line A, process
gas B line B, process gas D line D and process gas E line E as
attached to the respective subbase panels 3 in position on the main
base panel 2, further replacing the inverted V-shaped channel
blocks of the line E and line C by the manifold block coupling, and
finally attaching channel connecting means 53 comprising five
I-shaped channel block couplings 51 and tubes 52. There is no need
to use other tubes for connection.
[0058] According to the third embodiment, some process gas lines
are altered in position, and the manifold block coupling 54 is
used, with the result that the tubes are used only for
interconnecting the shutoff-opening devices. The apparatus is
therefore easy to modify because of diminished weld joints and
further has the advantage of being easy to maintain because of
simplified piping.
* * * * *