Okabe; Tsuneyuki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Okabe; Tsuneyuki.The latest application filed is for "deposition apparatus and deposition method".
Company Profile
4.39.43
- Okabe; Tsuneyuki - Yamanashi JP
- Okabe; Tsuneyuki - Minato-ku JP
- Okabe; Tsuneyuki - Nirasaki JP
- Okabe; Tsuneyuki - Tokyo JP
- Okabe; Tsuneyuki - Oshu JP
- Okabe; Tsuneyuki - Iwate JP
- OKABE; Tsuneyuki - Nirasaki City JP
- OKABE; Tsuneyuki - Oshu-shi JP
- Okabe; Tsuneyuki - Tsukui-gun N/A JP
- Okabe; Tsuneyuki - Kai N/A JP
- Okabe; Tsuneyuki - Hanamaki JP
- Okabe; Tsuneyuki - Tokyo-To JP
- Okabe; Tsuneyuki - Hanamaki-shi JP
- OKABE; Tsuneyuki - Kai-shi JP
- Okabe; Tsuneyuki - Shiroyama-Machi JP
- Okabe, Tsuneyuki - Kanagawa-ken JP
Patent Activity
| Patent | Date |
|---|---|
| Fluid heater, fluid control apparatus, and production method for fluid heater Grant 11,402,124 - Okabe , et al. August 2, 2 | 2022-08-02 |
| Deposition Apparatus And Deposition Method App 20220178029 - OBATA; Yuji ; et al. | 2022-06-09 |
| Gasket for fluid coupling, and fluid coupling Grant 11,255,468 - Ishibashi , et al. February 22, 2 | 2022-02-22 |
| Substrate processing apparatus Grant 11,208,721 - Fukushima , et al. December 28, 2 | 2021-12-28 |
| Shutoff-opening device Grant 10,753,497 - Ishibashi , et al. A | 2020-08-25 |
| Processing apparatus Grant 10,669,632 - Kikuchi , et al. | 2020-06-02 |
| Fluid Heater, Fluid Control Apparatus, And Production Method For Fluid Heater App 20200018519 - OKABE; Tsuneyuki ; et al. | 2020-01-16 |
| Pressure measuring device and exhaust system using the same, and substrate processing apparatus Grant 10,429,263 - Kikuchi , et al. October 1, 2 | 2019-10-01 |
| Substrate processing apparatus, gas supply method, substrate processing method, and film forming method Grant 10,287,682 - Kikuchi , et al. | 2019-05-14 |
| Gasket For Fluid Coupling, And Fluid Coupling App 20180299042 - ISHIBASHI; Keisuke ; et al. | 2018-10-18 |
| Substrate Processing Apparatus App 20180258528 - FUKUSHIMA; Kohei ; et al. | 2018-09-13 |
| Shutoff-opening Device App 20180112788 - Ishibashi; Keisuke ; et al. | 2018-04-26 |
| Substrate Processing Apparatus, Gas Supply Method, Substrate Processing Method, and Film Forming Method App 20170275757 - KIKUCHI; Kazuyuki ; et al. | 2017-09-28 |
| Pressure Measuring Device And Exhaust System Using The Same, And Substrate Processing Apparatus App 20170268952 - KIKUCHI; Satoshi ; et al. | 2017-09-21 |
| Processing Apparatus App 20170137942 - KIKUCHI; Masahiro ; et al. | 2017-05-18 |
| Pipe joint Grant 9,435,470 - Okabe , et al. September 6, 2 | 2016-09-06 |
| Pipe joint Grant 9,371,946 - Okabe , et al. June 21, 2 | 2016-06-21 |
| Semiconductor processing system including vaporizer and method for using same Grant 9,159,548 - Okabe , et al. October 13, 2 | 2015-10-13 |
| Fluid control device Grant 8,973,615 - Hoshi , et al. March 10, 2 | 2015-03-10 |
| Gas supply apparatus for semiconductor manufacturing apparatus Grant 8,944,095 - Okabe February 3, 2 | 2015-02-03 |
| Flow rate controller and processing apparatus Grant 8,893,743 - Okabe , et al. November 25, 2 | 2014-11-25 |
| Joint App 20140333067 - Okabe; Tsuneyuki ; et al. | 2014-11-13 |
| Pipe Joint App 20140312617 - Okabe; Tsuneyuki ; et al. | 2014-10-23 |
| Gas supplying apparatus, cylinder cabinet provided with the same, valve box, and substrate process apparatus Grant 8,851,106 - Okabe October 7, 2 | 2014-10-07 |
| Pipe Joint App 20140110937 - OKABE; Tsuneyuki ; et al. | 2014-04-24 |
| Semiconductor Processing System Including Vaporizer And Method For Using Same App 20140080320 - OKABE; Tsuneyuki ; et al. | 2014-03-20 |
| Flow Rate Controller And Processing Apparatus App 20130092264 - OKABE; Tsuneyuki ; et al. | 2013-04-18 |
| Semiconductor manufacturing plant Grant 8,387,559 - Hiraiwa , et al. March 5, 2 | 2013-03-05 |
| Vaporizer and semiconductor processing system Grant 8,382,903 - Okabe , et al. February 26, 2 | 2013-02-26 |
| Rotary switching valve Grant 8,371,334 - Ozawa , et al. February 12, 2 | 2013-02-12 |
| Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus Grant 8,298,341 - Katoh , et al. October 30, 2 | 2012-10-30 |
| Film Deposition Apparatus App 20120222615 - KATO; Hitoshi ; et al. | 2012-09-06 |
| Gas Supplying Apparatus, Cylinder Cabinet Provided With The Same, Valve Box, And Substrate Process Apparatus App 20120222751 - OKABE; Tsuneyuki | 2012-09-06 |
| Thermal type mass flow meter, and thermal type mass flow control device Grant 8,219,329 - Ebi , et al. July 10, 2 | 2012-07-10 |
| Vaporizer and semiconductor processing system Grant 8,197,600 - Nakao , et al. June 12, 2 | 2012-06-12 |
| Film Deposition Apparatus And Film Deposition Method App 20120094011 - HISHIYA; Katsuyuki ; et al. | 2012-04-19 |
| Gas supply unit and gas supply system Grant 8,104,516 - Moriya , et al. January 31, 2 | 2012-01-31 |
| Gas Supply Apparatus For Semiconductor Manufacturing Apparatus App 20110265895 - OKABE; Tsuneyuki | 2011-11-03 |
| Film formation apparatus for semiconductor process and method for using the same Grant 7,954,452 - Okabe , et al. June 7, 2 | 2011-06-07 |
| Thermal Type Mass Flow Meter, And Thermal Type Mass Flow Control Device App 20110125445 - Ebi; Hiroyuki ; et al. | 2011-05-26 |
| Semiconductor processing system and vaporizer Grant 7,883,076 - Okabe , et al. February 8, 2 | 2011-02-08 |
| Purge gas unit and purge gas supply integrated unit Grant 7,874,316 - Okabe , et al. January 25, 2 | 2011-01-25 |
| Rotary Switching Valve App 20100229984 - OZAWA; Yukio ; et al. | 2010-09-16 |
| Fluid controller Grant 7,726,333 - Hoshi , et al. June 1, 2 | 2010-06-01 |
| Semiconductor fabrication system, and flow rate correction method and program for semiconductor fabrication system Grant 7,682,843 - Moriya , et al. March 23, 2 | 2010-03-23 |
| Semiconductor Manufacturing Plant App 20100064969 - Hiraiwa; Jiro ; et al. | 2010-03-18 |
| Removal Of Metal Contaminant Deposited On Quartz Member Of Vertical Heat Processing Apparatus App 20090293908 - KATOH; Hitoshi ; et al. | 2009-12-03 |
| Semiconductor processing system including vaporizer and method for using same App 20090186479 - Okabe; Tsuneyuki ; et al. | 2009-07-23 |
| Gas Supply Unit and Gas Supply System App 20090165872 - Moriya; Shuji ; et al. | 2009-07-02 |
| Vaporizing apparatus and semiconductor processing system Grant 7,547,003 - Okabe , et al. June 16, 2 | 2009-06-16 |
| Semiconductor production system and semiconductor production process Grant 7,510,884 - Okabe , et al. March 31, 2 | 2009-03-31 |
| Semiconductor Fabrication System, And Flow Rate Correction Method And Program For Semiconductor Fabrication System App 20090061541 - Moriya; Shuji ; et al. | 2009-03-05 |
| Vaporizing apparatus and semiconductor processing system App 20080296791 - Okabe; Tsuneyuki ; et al. | 2008-12-04 |
| Vaporizer Grant 7,452,424 - Okabe , et al. November 18, 2 | 2008-11-18 |
| Vaporizer and semiconductor processing system App 20080245306 - Nakao; Ken ; et al. | 2008-10-09 |
| Gas supply system, gas supply method, method of cleaning thin film forming apparatus, thin film forming method and thin film forming apparatus App 20080105194 - Nakao; Ken ; et al. | 2008-05-08 |
| Film formation apparatus for semiconductor process and method for using the same App 20080076264 - Okabe; Tsuneyuki ; et al. | 2008-03-27 |
| Purge gas unit and purge gas supply integrated unit App 20080069702 - Okabe; Tsuneyuki ; et al. | 2008-03-20 |
| Liquid raw material supply unit for vaporizer Grant 7,343,926 - Okabe , et al. March 18, 2 | 2008-03-18 |
| Substrate Processing Device App 20080017105 - Moriya; Shuji ; et al. | 2008-01-24 |
| Liquid raw material supply unit for vaporizer App 20070295405 - Okabe; Tsuneyuki ; et al. | 2007-12-27 |
| Semiconductor Processing System And Vaporizer App 20070108641 - OKABE; Tsuneyuki ; et al. | 2007-05-17 |
| Vaporizer and semiconductor processing system App 20070079760 - Okabe; Tsuneyuki ; et al. | 2007-04-12 |
| Semiconductor production system and semiconductor production process App 20060172442 - Okabe; Tsuneyuki ; et al. | 2006-08-03 |
| Vaporizer App 20060065254 - Okabe; Tsuneyuki ; et al. | 2006-03-30 |
| Fluid controller App 20050229972 - Hoshi, George ; et al. | 2005-10-20 |
| Semiconductor device fabricating system and semiconductor device fabricating method App 20050087299 - Okabe, Tsuneyuki ; et al. | 2005-04-28 |
| Heat treating method and heat treating device Grant 6,814,572 - Okabe November 9, 2 | 2004-11-09 |
| Heat treating method and heat treating device App 20040115584 - Okabe, Tsuneyuki | 2004-06-17 |
| Fluid control apparatus Grant 6,382,238 - Ishii , et al. May 7, 2 | 2002-05-07 |
| Fluid control device App 20020031417 - Hoshi, George ; et al. | 2002-03-14 |
| Fluid control apparatus App 20010020488 - Ishii, Ken ; et al. | 2001-09-13 |
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