Patent | Date |
---|
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20220310594 - Jeong; Youncheol ;   et al. | 2022-09-29 |
Metal structure and method of manufacturing the same and metal wire and semiconductor device and electronic device Grant 11,424,133 - Takai , et al. August 23, 2 | 2022-08-23 |
Semiconductor devices and methods of manufacturing the same Grant 11,411,004 - Lee , et al. August 9, 2 | 2022-08-09 |
Cleaning Liquid Nozzle, Cleaning Apparatus, And Method Of Manufacturing Semiconductor Device Using The Same App 20220165562 - Kim; Ho-Young ;   et al. | 2022-05-26 |
Method Of Manufacturing Semiconductor Device App 20220115379 - Lee; Yanghee ;   et al. | 2022-04-14 |
Semiconductor Devices App 20220069101 - CHOI; Seunghoon ;   et al. | 2022-03-03 |
Semiconductor device and a fabrication method thereof Grant 11,222,897 - Park , et al. January 11, 2 | 2022-01-11 |
Slurry composition and method of manufacturing integrated circuit device by using the same Grant 11,186,749 - Kim , et al. November 30, 2 | 2021-11-30 |
Semiconductor device and a fabrication method thereof Grant 11,183,501 - Park , et al. November 23, 2 | 2021-11-23 |
Semiconductor device including interconnections having different structures and method of fabricating the same Grant 11,094,586 - Choi , et al. August 17, 2 | 2021-08-17 |
Semiconductor Devices And Methods Of Manufacturing The Same App 20210134806 - Lee; Yanghee ;   et al. | 2021-05-06 |
Cleaning Apparatus, Chemical Mechanical Polishing System Including The Same, Cleaning Method After Chemical Mechanical Polishing, And Method Of Manufacturing Semiconductor Device Including The Same App 20210098261 - KIM; Chae Lyoung ;   et al. | 2021-04-01 |
Three-dimensional semiconductor memory device Grant 10,916,554 - Shin , et al. February 9, 2 | 2021-02-09 |
Metal Structure And Method Of Manufacturing The Same And Metal Wire And Semiconductor Device And Electronic Device App 20210028024 - TAKAI; Kenji ;   et al. | 2021-01-28 |
Semiconductor Device And A Fabrication Method Thereof App 20200402982 - PARK; Hyesung ;   et al. | 2020-12-24 |
Slurry Composition And Method Of Manufacturing Integrated Circuit Device By Using The Same App 20200392375 - KIM; Boyun ;   et al. | 2020-12-17 |
Semiconductor Device And Method Of Fabricating The Same App 20200243374 - CHOI; Seung Hoon ;   et al. | 2020-07-30 |
Method of fabricating semiconductor device Grant 10,716,755 - Pyon , et al. | 2020-07-21 |
Semiconductor devices and methods of fabricating the same Grant 10,714,472 - Kwon , et al. | 2020-07-14 |
Three-dimensional Semiconductor Memory Device App 20200185398 - SHIN; Miso ;   et al. | 2020-06-11 |
Three-dimensional semiconductor memory device and method of fabricating the same Grant 10,566,338 - Shin , et al. Feb | 2020-02-18 |
Semiconductor device Grant 10,535,533 - Lee , et al. Ja | 2020-01-14 |
Semiconductor memory devices Grant 10,504,960 - Park , et al. Dec | 2019-12-10 |
Cleaning Liquid Nozzle, Cleaning Apparatus, And Method Of Manufacturing Semiconductor Device Using The Same App 20190348277 - KIM; HO-YOUNG ;   et al. | 2019-11-14 |
Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same Grant 10,388,537 - Kim , et al. A | 2019-08-20 |
Method Of Fabricating Semiconductor Device App 20190157279 - PYON; Youngbeom ;   et al. | 2019-05-23 |
Semiconductor Memory Devices App 20190081102 - Park; Kichul ;   et al. | 2019-03-14 |
Three-dimensional Semiconductor Memory Device And Method Of Fabricating The Same App 20190074282 - SHIN; Miso ;   et al. | 2019-03-07 |
Semiconductor Device App 20190019742 - LEE; Yanghee ;   et al. | 2019-01-17 |
Semiconductor device and method of fabricating the same Grant 10,177,160 - Pyon , et al. J | 2019-01-08 |
Patterning method and a method of fabricating a semiconductor device using the same Grant 10,153,214 - Park , et al. Dec | 2018-12-11 |
Semiconductor devices and methods for manufacturing the same Grant 10,128,336 - Park , et al. November 13, 2 | 2018-11-13 |
Cleaning Apparatus, Chemical Mechanical Polishing System Including The Same, Cleaning Method After Chemical Mechanical Polishing, And Method Of Manufacturing Semiconductor Device Including The Same App 20180315613 - KIM; Chae Lyoung ;   et al. | 2018-11-01 |
Methods of fabricating three-dimensional semiconductor devices Grant 10,096,618 - Kim , et al. October 9, 2 | 2018-10-09 |
Methods Of Manufacturing Semiconductor Devices App 20180166343 - BAE; Ki Ho ;   et al. | 2018-06-14 |
Semiconductor Device And Method Of Fabricating The Same App 20180166454 - PYON; Youngbeom ;   et al. | 2018-06-14 |
Semiconductor Memory Devices And Methods Of Fabricating The Same App 20180166529 - Park; Hyesung ;   et al. | 2018-06-14 |
Methods of manufacturing semiconductor devices Grant 9,997,412 - Bae , et al. June 12, 2 | 2018-06-12 |
Semiconductor devices including an etch stop pattern and a sacrificial pattern with coplanar upper surfaces and a gate and a gap fill pattern with coplanar upper surfaces Grant 9,966,432 - Park , et al. May 8, 2 | 2018-05-08 |
Semiconductor device for manufacturing Grant 9,960,241 - Park , et al. May 1, 2 | 2018-05-01 |
Methods of Fabricating Three-Dimensional Semiconductor Devices App 20180090512 - Kim; Ki-Woong ;   et al. | 2018-03-29 |
Semiconductor Devices And Methods Of Fabricating The Same App 20170345822 - Kwon; Kee Sang ;   et al. | 2017-11-30 |
Semiconductor Device And Method Of Fabricating The Same App 20170301773 - PARK; Sangjine ;   et al. | 2017-10-19 |
Cleaning Apparatus, Chemical Mechanical Polishing System Including The Same, Cleaning Method After Chemical Mechanical Polishing, And Method Of Manufacturing Semiconductor Device Including The Same App 20170301553 - KIM; Chae Lyoung ;   et al. | 2017-10-19 |
Semiconductor devices and methods of fabricating the same Grant 9,748,234 - Kwon , et al. August 29, 2 | 2017-08-29 |
Semiconductor device and method of fabricating the same Grant 9,716,162 - Park , et al. July 25, 2 | 2017-07-25 |
Patterning Method And A Method Of Fabricating A Semiconductor Device Using The Same App 20170207130 - PARK; Se Jung ;   et al. | 2017-07-20 |
Semiconductor Device and Method for Manufacturing the Same App 20160284806 - Park; Sangjine ;   et al. | 2016-09-29 |
Semiconductor Devices And Methods For Manufacturing The Same App 20160163861 - PARK; Sangjine ;   et al. | 2016-06-09 |
Semiconductor Devices And Methods For Manufacturing The Same App 20160163798 - PARK; Sangjine ;   et al. | 2016-06-09 |
Semiconductor Devices And Methods Of Fabricating The Same App 20160064378 - KWON; Kee Sang ;   et al. | 2016-03-03 |
Semiconductor Device And Method Of Fabricating The Same App 20160027901 - PARK; Sangjine ;   et al. | 2016-01-28 |
Semiconductor device having dual metal silicide layers and method of manufacturing the same Grant 9,117,692 - Park , et al. August 25, 2 | 2015-08-25 |
Semiconductor device and method of fabricationg the same Grant 9,006,067 - Kang , et al. April 14, 2 | 2015-04-14 |
Methods of fabricating a semiconductor device including metal gate electrodes Grant 8,946,026 - Choi , et al. February 3, 2 | 2015-02-03 |
Semiconductor Device Having Dual Metal Silicide Layers And Method Of Manufacturing The Same App 20150028423 - Park; Sangjine ;   et al. | 2015-01-29 |
Semiconductor devices having passive element in recessed portion of device isolation pattern and methods of fabricating the same Grant 8,901,663 - Choi , et al. December 2, 2 | 2014-12-02 |
Semiconductor device having dual metal silicide layers and method of manufacturing the same Grant 8,889,552 - Park , et al. November 18, 2 | 2014-11-18 |
Method for manufacturing semiconductor device having dual gate dielectric layer Grant 8,859,371 - Song , et al. October 14, 2 | 2014-10-14 |
Semiconductor device having metal plug and method of manufacturing the same Grant 8,841,769 - Park , et al. September 23, 2 | 2014-09-23 |
Semiconductor Device Having Dual Metal Silicide Layers And Method Of Manufacturing The Same App 20140248761 - Park; Sangjine ;   et al. | 2014-09-04 |
Semiconductor Device And Method Of Fabricationg The Same App 20140227848 - KANG; Bo Kyeong ;   et al. | 2014-08-14 |
Methods of fabricating semiconductor devices and semiconductor devices formed thereby Grant 8,796,127 - Kim , et al. August 5, 2 | 2014-08-05 |
Semiconductor devices having passive element in recessed portion of device isolation pattern and methods of fabricating the same Grant 8,790,988 - Choi , et al. July 29, 2 | 2014-07-29 |
Semiconductor memory devices having variable resistor and methods of fabricating the same Grant 8,766,232 - Choi , et al. July 1, 2 | 2014-07-01 |
Semiconductor devices including compressive stress patterns and methods of fabricating the same Grant 8,735,239 - Park , et al. May 27, 2 | 2014-05-27 |
Semiconductor Devices Having Passive Element In Recessed Portion Of Device Isolation Pattern And Methods Of Fabricating The Same App 20140099768 - Choi; Sukhun ;   et al. | 2014-04-10 |
Semiconductor Device Having Metal Plug And Method Of Manufacturing The Same App 20140048939 - Park; Sangjine ;   et al. | 2014-02-20 |
Methods Of Fabricating A Semiconductor Device App 20140051246 - Kim; Chae Lyoung ;   et al. | 2014-02-20 |
Method For Manufacturing Semiconductor Device Having Dual Gate Dielectric Layer App 20130244414 - Song; Myung Geun ;   et al. | 2013-09-19 |
Methods Of Fabricating Semiconductor Devices And Semiconductor Devices Formed Thereby App 20130237045 - KIM; Jaeseok ;   et al. | 2013-09-12 |
Method for fabricating semiconductor devices Grant 8,268,710 - Kwon , et al. September 18, 2 | 2012-09-18 |
Methods of forming CMOS transistors with high conductivity gate electrodes Grant 8,252,675 - Lee , et al. August 28, 2 | 2012-08-28 |
Wafer test method and wafer test apparatus Grant 8,228,089 - Kim , et al. July 24, 2 | 2012-07-24 |
Methods Of Fabricating A Semiconductor Device Including Metal Gate Electrodes App 20120129331 - Choi; Sukhun ;   et al. | 2012-05-24 |
Semiconductor Memory Devices Having Variable Resistor And Methods Of Fabricating The Same App 20120091422 - Choi; Sukhun ;   et al. | 2012-04-19 |
Semiconductor Devices Including Compressive Stress Patterns and Methods of Fabricating the Same App 20120094459 - Park; Sanjine ;   et al. | 2012-04-19 |
Semiconductor Devices And Methods For Manufacturing The Same App 20120086048 - Park; Sangjine ;   et al. | 2012-04-12 |
Slurry Composition For Chemical Mechanical Polishing Process And Method Of Forming Phase Change Memory Device Using The Same App 20120049107 - PARK; Joonsang ;   et al. | 2012-03-01 |
Semiconductor Devices Having Passive Element In Recessed Portion Of Device Isolation Pattern And Methods Of Fabricating The Same App 20120043614 - Choi; Sukhun ;   et al. | 2012-02-23 |
Non-volatile memory device and method for fabricating non-volatile memory device Grant 8,120,089 - Kim , et al. February 21, 2 | 2012-02-21 |
Methods of Forming Nonvolatile Memory Devices Using Nonselective and Selective Etching Techniques to Define Vertically Stacked Word Lines App 20120003831 - Kang; Daehyuk ;   et al. | 2012-01-05 |
Method of fabricating nonvolatile memory device Grant 8,076,198 - Lee , et al. December 13, 2 | 2011-12-13 |
Methods of Forming CMOS Transistors with High Conductivity Gate Electrodes App 20110136313 - Lee; Jongwon ;   et al. | 2011-06-09 |
Method for Fabricating Semiconductor Devices App 20100216293 - Kwon; ByoungHo ;   et al. | 2010-08-26 |
Chemical Mechanical Polishing Apparatus App 20100216378 - CHOI; Jaekwang ;   et al. | 2010-08-26 |
Wafer Test Method And Wafer Test Apparatus App 20100200431 - Kim; Youngok ;   et al. | 2010-08-12 |
Non-volatile Memory Device And Method For Fabricating Non-volatile Memory Device App 20100181610 - Kim; Young-Hoo ;   et al. | 2010-07-22 |
Method of fabricating nonvolatile memory device App 20100178755 - Lee; Hyosan ;   et al. | 2010-07-15 |