| Patent | Date |
|---|
Substrate processing apparatus, heater and method of manufacturing semiconductor device
Grant 11,359,285 - Murata , et al. June 14, 2 | 2022-06-14 |
Methods And Apparatus For Prevention Of Component Cracking Using Stress Relief Layer
App 20220122871 - WADA; Yuichi ; et al. | 2022-04-21 |
Methods and apparatus for high voltage electrostatic chuck protection
Grant 11,289,357 - Wada , et al. March 29, 2 | 2022-03-29 |
Shutter Disk
App 20220028702 - Kang; Zhang ; et al. | 2022-01-27 |
Shutter disk
Grant 11,171,017 - Kang , et al. November 9, 2 | 2021-11-09 |
Preclean Chamber Upper Shield With Showerhead
App 20210335581 - BABU; Sarath ; et al. | 2021-10-28 |
Methods And Apparatus For Reducing Defects In Preclean Chambers
App 20210335582 - OW; Yueh Sheng ; et al. | 2021-10-28 |
Lower shield for a substrate processing chamber
Grant D931,241 - Babu , et al. September 21, 2 | 2021-09-21 |
Methods and Apparatus for Cleaving of Semiconductor Substrates
App 20210233802 - DENG; Felix ; et al. | 2021-07-29 |
Methods And Apparatus For Cleaving Of Semiconductor Substrates
App 20210217656 - DENG; Felix ; et al. | 2021-07-15 |
Methods And Apparatus For Processing A Substrate
App 20210166953 - HSIUNG; Chien-Kang ; et al. | 2021-06-03 |
Methods And Apparatus For Processing A Substrate
App 20210140029 - OW; YUEH SHENG ; et al. | 2021-05-13 |
Methods and apparatus for cleaving of semiconductor substrates
Grant 10,991,617 - Deng , et al. April 27, 2 | 2021-04-27 |
Inner shield for a substrate processing chamber
Grant D913,979 - Babu , et al. March 23, 2 | 2021-03-23 |
Shutter Disk
App 20210074552 - Kang; Zhang ; et al. | 2021-03-11 |
High Conductance Lower Shield For Process Chamber
App 20210066051 - Babu; Sarath ; et al. | 2021-03-04 |
High Conductance Inner Shield For Process Chamber
App 20210066050 - Babu; Sarath ; et al. | 2021-03-04 |
Methods And Apparatus For High Voltage Electrostatic Chuck Protection
App 20200411353 - WADA; YUICHI ; et al. | 2020-12-31 |
Inline Microwave Batch Degas Chamber
App 20200378006 - GAUTAM; RIBHU ; et al. | 2020-12-03 |
Methods and apparatus for detecting microwave fields in a cavity
Grant 10,677,830 - Jupudi , et al. | 2020-06-09 |
Substrate Processing Apparatus, Heater and Method of Manufacturing Semiconductor Device
App 20200173024 - MURATA; Hitoshi ; et al. | 2020-06-04 |
Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate
Grant 10,604,839 - Inada , et al. | 2020-03-31 |
Substrate processing apparatus, heater and method of manufacturing semiconductor device
Grant 10,597,780 - Murata , et al. | 2020-03-24 |
Methods And Apparatus For Cleaving Of Semiconductor Substrates
App 20190355616 - DENG; FELIX ; et al. | 2019-11-21 |
Storage device, vaporizer and substrate processing apparatus
Grant 10,480,069 - Kitagawa , et al. Nov | 2019-11-19 |
Methods And Apparatus For Detecting Microwave Fields In A Cavity
App 20190018053 - JUPUDI; ANANTHKRISHNA ; et al. | 2019-01-17 |
Storage Device, Vaporizer and Substrate Processing Apparatus
App 20180291502 - KITAGAWA; Naoko ; et al. | 2018-10-11 |
Substrate processing apparatus and heating unit
Grant 9,957,616 - Murata , et al. May 1, 2 | 2018-05-01 |
Substrate Processing Apparatus, Heater and Method of Manufacturing Semiconductor Device
App 20170335458 - MURATA; Hitoshi ; et al. | 2017-11-23 |
Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium
Grant 9,816,182 - Tateno , et al. November 14, 2 | 2017-11-14 |
Heater for semiconductor thermal process
Grant D795,209 - Murata , et al. August 22, 2 | 2017-08-22 |
Heater for semiconductor thermal process
Grant D793,975 - Murata , et al. August 8, 2 | 2017-08-08 |
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
Grant 9,587,313 - Wada , et al. March 7, 2 | 2017-03-07 |
Substrate Processing Apparatus And Heating Unit
App 20160244878 - MURATA; Hitoshi ; et al. | 2016-08-25 |
Method Of Forming Fine Pattern, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Recording Medium
App 20160218012 - SHIMAMOTO; Satoshi ; et al. | 2016-07-28 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device
App 20160211151 - TSUBOTA; Yasutoshi ; et al. | 2016-07-21 |
Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium
Grant 9,365,928 - Saido , et al. June 14, 2 | 2016-06-14 |
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device, And Recording Medium
App 20160155630 - TSUBOTA; Yasutoshi ; et al. | 2016-06-02 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Method Of Processing Substrate
App 20160053373 - INADA; Tetsuaki ; et al. | 2016-02-25 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
App 20160013053 - ASHIHARA; Hiroshi ; et al. | 2016-01-14 |
Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium
Grant 9,190,299 - Wada , et al. November 17, 2 | 2015-11-17 |
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device And Computer-readable Recording Medium
App 20150307988 - SAIDO; Shuhei ; et al. | 2015-10-29 |
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device, And Recording Medium
App 20150140835 - TATENO; Hideto ; et al. | 2015-05-21 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20150132972 - WADA; Yuichi ; et al. | 2015-05-14 |
Substrate Processing Device, Method for Manufacturing Semiconductor Device, and Vaporizer
App 20140302687 - ASHIHARA; Hiroshi ; et al. | 2014-10-09 |
Apparatus for Manufacturing Semiconductor Device, Method of Manufacturing Semiconductor Device, and Recording Medium
App 20140256160 - Wada; Yuichi ; et al. | 2014-09-11 |
Method Of Manufacturing Semiconductor Device, Apparatus For Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20140235068 - ASHIHARA; Hiroshi ; et al. | 2014-08-21 |
Substrate Placement Stage, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
App 20120329290 - Shimada; Toshiya ; et al. | 2012-12-27 |
Manufacturing Method Of Semiconductor Device
App 20110230061 - Ohashi; Naofumi ; et al. | 2011-09-22 |
Print Processing System And Print Processing Program
App 20110164277 - WADA; Yuichi ; et al. | 2011-07-07 |
Manufacturing method of semiconductor device
Grant 7,955,948 - Ohashi , et al. June 7, 2 | 2011-06-07 |
Picture order receiving apparatus and a picture processing system
Grant 7,702,539 - Wada April 20, 2 | 2010-04-20 |
Manufacturing Method Of Semiconductor Device
App 20100055926 - Ohashi; Naofumi ; et al. | 2010-03-04 |
Embedded Waveguide Detectors
App 20090269878 - Leon; Francisco A. ; et al. | 2009-10-29 |
Through-panel fixing device for piping member
Grant 7,464,966 - Miyajima , et al. December 16, 2 | 2008-12-16 |
Embedded waveguide detectors
App 20070018270 - Leon; Francisco A. ; et al. | 2007-01-25 |
Solution to thermal budget
Grant 7,101,725 - Wada , et al. September 5, 2 | 2006-09-05 |
Print processing system and print processing program
App 20060176498 - Wada; Yuichi ; et al. | 2006-08-10 |
Embedded waveguide detectors
Grant 7,075,165 - Leon , et al. July 11, 2 | 2006-07-11 |
Picture order receiving apparatus and a picture processing system
App 20060050323 - Wada; Yuichi | 2006-03-09 |
Maskless fabrication of waveguide mirrors
Grant 7,001,788 - Leon , et al. February 21, 2 | 2006-02-21 |
Through-panel fixing device for piping member
App 20060001261 - Miyajima; Atsuo ; et al. | 2006-01-05 |
Embedded waveguide detectors
App 20050051767 - Leon, Francisco A. ; et al. | 2005-03-10 |
Maskless Fabrication of waveguide mirrors
App 20050054130 - Leon, Francisco A. ; et al. | 2005-03-10 |
Solution to thermal budget
App 20050054131 - Wada, Yuichi ; et al. | 2005-03-10 |
Film deposition method and apparatus
Grant 6,852,626 - Wada , et al. February 8, 2 | 2005-02-08 |
Antistatic protector for resin tube
App 20040169990 - Wada, Yuichi | 2004-09-02 |
Genes for transfection into bony tissues
App 20030108531 - Moriya, Hideshige ; et al. | 2003-06-12 |
Film deposition method and apparatus
Grant 6,488,984 - Wada , et al. December 3, 2 | 2002-12-03 |
Sputtering reactor and method of using an unbalanced magnetron
Grant 6,440,282 - Wada , et al. August 27, 2 | 2002-08-27 |
Treatment apparatus
Grant 5,728,276 - Katsuki , et al. March 17, 1 | 1998-03-17 |
Processing apparatus with collimator exchange device
Grant 5,624,536 - Wada , et al. April 29, 1 | 1997-04-29 |
Substrate processing apparatus
Grant 5,267,607 - Wada December 7, 1 | 1993-12-07 |
Switchgear
Grant 4,786,770 - Hamano , et al. November 22, 1 | 1988-11-22 |
Electromagnetic contactor
Grant 4,616,203 - Kakizoe , et al. October 7, 1 | 1986-10-07 |
Electromagnetic contactor
Grant 4,596,909 - Kakizoe , et al. June 24, 1 | 1986-06-24 |
Switch
Grant 4,539,451 - Mori , et al. September 3, 1 | 1985-09-03 |
Circuit breaker
Grant 4,451,718 - Yamagata , et al. May 29, 1 | 1984-05-29 |
Self-restoring type current limiting device
Grant 3,902,150 - Wada , et al. August 26, 1 | 1975-08-26 |
Self-restoring current limiting device
Grant 3,886,511 - Miyamoto , et al. May 27, 1 | 1975-05-27 |
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