| Patent | Date |
|---|
Multi-Step Atomic Layer Deposition Process for Silicon Nitride Film Formation
App 20170107614 - LEE; Sang In ; et al. | 2017-04-20 |
Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation
Grant 9,558,963 - Lee , et al. January 31, 2 | 2017-01-31 |
Spatial deposition of material using short-distance reciprocating motions
Grant 9,556,514 - Yoon , et al. January 31, 2 | 2017-01-31 |
Cleaning of deposition device by injecting cleaning gas into deposition device
Grant 9,546,423 - Lee , et al. January 17, 2 | 2017-01-17 |
Radical Reactor With Inverted Orientation
App 20160340779 - Lee; Daniel Ho ; et al. | 2016-11-24 |
Radical reactor with inverted orientation
Grant 9,435,030 - Lee , et al. September 6, 2 | 2016-09-06 |
Molecular layer deposition using reduction process
Grant 9,376,455 - Lee , et al. June 28, 2 | 2016-06-28 |
Atomic Layer Deposition Method Using Source Precursor Transformed by Hydrogen Radical Exposure
App 20160032452 - Lee; Sang In ; et al. | 2016-02-04 |
Plasma Reactor With Conductive Member In Reaction Chamber For Shielding Substrate From Undesirable Irradiation
App 20160020116 - Lee; Sang In ; et al. | 2016-01-21 |
Enhanced Deposition Of Layer On Substrate Using Radicals
App 20160002783 - Lee; Sang In | 2016-01-07 |
Injection Assembly in Linear Deposition Apparatus with Bulging Ridges Extending along Bottom Openings
App 20150361548 - Pak; Samuel S. ; et al. | 2015-12-17 |
Linear Deposition Apparatus with Modular Assembly
App 20150360242 - Pak; Samuel S. ; et al. | 2015-12-17 |
Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation
Grant 9,177,788 - Lee , et al. November 3, 2 | 2015-11-03 |
Deposition Device With Auxiliary Injectors For Injecting Nucleophile Gas And Separation Gas
App 20150299857 - Lee; Sang In ; et al. | 2015-10-22 |
Enhanced deposition of layer on substrate using radicals
Grant 9,163,310 - Lee October 20, 2 | 2015-10-20 |
Atomic Layer Deposition Using Injector Module Arrays
App 20150275365 - Pak; Samuel S. ; et al. | 2015-10-01 |
Scanning injector assembly module for processing substrate
Grant 9,145,608 - Pak , et al. September 29, 2 | 2015-09-29 |
Cleaning Of Deposition Device By Injecting Cleaning Gas Into Deposition Device
App 20150259793 - Lee; Sang In ; et al. | 2015-09-17 |
Formation of barrier layer on device using atomic layer deposition
Grant 9,129,913 - Lee September 8, 2 | 2015-09-08 |
Spatial Deposition Of Material Using Short-distance Reciprocating Motions
App 20150218698 - Yoon; Jeong Ah ; et al. | 2015-08-06 |
Gas injection plate
Grant D732,092 - Pak , et al. June 16, 2 | 2015-06-16 |
Gas tube assembly
Grant D732,093 - Pak , et al. June 16, 2 | 2015-06-16 |
Deposition Of Non-isostructural Layers For Flexible Substrate
App 20150159271 - Lee; Sang In ; et al. | 2015-06-11 |
Securing of shadow mask and substrate on susceptor of deposition apparatus
Grant 9,051,637 - Lee June 9, 2 | 2015-06-09 |
Molecular Layer Deposition Using Reduction Process
App 20150148557 - Lee; Sang In ; et al. | 2015-05-28 |
Radical Reactor With Inverted Orientation
App 20150125627 - Lee; Daniel Ho ; et al. | 2015-05-07 |
Fast Atomic Layer Deposition Process Using Seed Precursor
App 20150104574 - Lee; Sang In ; et al. | 2015-04-16 |
Printing Of Colored Pattern Using Atomic Layer Deposition
App 20150086716 - Park; Samuel S. ; et al. | 2015-03-26 |
Atomic Layer Deposition Using Radicals Of Gas Mixture
App 20150020737 - Lee; Sang In | 2015-01-22 |
Performing Atomic Layer Deposition on Large Substrate Using Scanning Reactors
App 20140366804 - Pak; Samuel S. ; et al. | 2014-12-18 |
Vapor Deposition Reactor Using Plasma and Method for Forming Thin Film Using the Same
App 20140370204 - Lee; Sang In | 2014-12-18 |
Method for forming thin film using radicals generated by plasma
Grant 8,895,108 - Lee November 25, 2 | 2014-11-25 |
Atomic layer deposition using radicals of gas mixture
Grant 8,877,300 - Lee November 4, 2 | 2014-11-04 |
Thin Film Formation For Device Sensitive To Environment
App 20140319488 - Lee; Sang In | 2014-10-30 |
Electrode structure, device comprising the same and method for forming electrode structure
Grant 8,871,628 - Lee October 28, 2 | 2014-10-28 |
Vapor deposition reactor using plasma and method for forming thin film using the same
Grant 8,851,012 - Lee October 7, 2 | 2014-10-07 |
Combined injection module for sequentially injecting source precursor and reactant precursor
Grant 8,840,958 - Lee September 23, 2 | 2014-09-23 |
Vapor Deposition Reactor And Method For Forming Thin Film
App 20140219905 - Lee; Sang In | 2014-08-07 |
Cascaded Plasma Reactor
App 20140205769 - Lee; Sang In | 2014-07-24 |
Deposition of layer using depositing apparatus with reciprocating susceptor
Grant 8,771,791 - Lee , et al. July 8, 2 | 2014-07-08 |
Electrode for generating plasma and plasma generator
Grant 8,770,142 - Lee July 8, 2 | 2014-07-08 |
Magnetic Field Assisted Deposition
App 20140174358 - Lee; Sang In | 2014-06-26 |
Vapor deposition reactor and method for forming thin film
Grant 8,758,512 - Lee June 24, 2 | 2014-06-24 |
Hydrophobic and Oleophobic Encapsulation Material with Alternating Layers
App 20140141191 - Lee; Sang In | 2014-05-22 |
Growing of gallium-nitrade layer on silicon substrate
Grant 8,722,526 - Lee May 13, 2 | 2014-05-13 |
Magnetic field assisted deposition
Grant 8,697,198 - Lee April 15, 2 | 2014-04-15 |
Vapor deposition reactor for forming thin film
Grant 8,691,669 - Lee April 8, 2 | 2014-04-08 |
Textile Including Fibers Deposited with Material Using Atomic Layer Deposition for Increased Rigidity and Strength
App 20140073212 - Lee; Sang In | 2014-03-13 |
Depositing Thin Layer Of Material On Permeable Substrate
App 20140037853 - Lee; Sang In | 2014-02-06 |
Depositing material on fibrous textiles using atomic layer deposition for increasing rigidity and strength
Grant 08617652 - | 2013-12-31 |
Depositing material on fibrous textiles using atomic layer deposition for increasing rigidity and strength
Grant 8,617,652 - Lee December 31, 2 | 2013-12-31 |
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