| Patent | Date |
|---|
Planar substrate edge contact with open volume equalization pathways and side containment
Grant 11,443,975 - Breiling , et al. September 13, 2 | 2022-09-13 |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
Grant 11,424,119 - Shero , et al. August 23, 2 | 2022-08-23 |
Methods For Depositing A Molybdenum Metal Film Over A Dielectric Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures
App 20220216105 - Zope; Bhushan ; et al. | 2022-07-07 |
Methods For Depositing A Molybdenum Nitride Film On A Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures Including A Molybdenum Nitride Film
App 20220186364 - Stevens; Eric Christopher ; et al. | 2022-06-16 |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
Grant 11,295,980 - Zope , et al. April 5, 2 | 2022-04-05 |
Singularity Recommendation Engine
App 20220101392 - LEE; YU KIT ; et al. | 2022-03-31 |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
Grant 11,286,558 - Stevens , et al. March 29, 2 | 2022-03-29 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20220059348 - Kang; Hu ; et al. | 2022-02-24 |
Vapor Deposition Of Films Comprising Molybdenum
App 20210407809 - Zope; Bhushan ; et al. | 2021-12-30 |
Vapor Deposition Of Tungsten Films
App 20210404060 - Milligan; Robert Brennan ; et al. | 2021-12-30 |
Apparatus And Methods For Performing An In-situ Etch Of Reaction Chambers With Fluorine-based Radicals
App 20210348271 - Mishra; Amit ; et al. | 2021-11-11 |
Fill On Demand Ampoule Refill
App 20210324521 - Nguyen; Tuan ; et al. | 2021-10-21 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 11,133,180 - Kang , et al. September 28, 2 | 2021-09-28 |
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
Grant 11,127,567 - Kang , et al. September 21, 2 | 2021-09-21 |
Systems and methods for UV-based suppression of plasma instability
Grant 11,120,989 - Swaminathan September 14, 2 | 2021-09-14 |
Structure including SiOC layer and method of forming same
Grant 11,114,294 - Sharma , et al. September 7, 2 | 2021-09-07 |
Fill on demand ampoule refill
Grant 11,072,860 - Nguyen , et al. July 27, 2 | 2021-07-27 |
Channeled Lift Pin
App 20210210373 - Singu; Govindarajasekhar ; et al. | 2021-07-08 |
Methods For Depositing A Molybdenum Metal Film Over A Dielectric Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures
App 20210151352 - Zope; Bhushan ; et al. | 2021-05-20 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
Grant 11,011,379 - Arghavani , et al. May 18, 2 | 2021-05-18 |
Semiconductor Processing Device
App 20210087679 - Winkler; Jereld Lee ; et al. | 2021-03-25 |
Methods For Forming A Polycrystalline Molybdenum Film Over A Surface Of A Substrate And Related Structures Including A Polycrystalline Molybdenum Film
App 20210054500 - Zope; Bhushan ; et al. | 2021-02-25 |
Methods For Depositing A Molybdenum Nitride Film On A Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures Including A Molybdenum Nitride Film
App 20210057223 - Stevens; Eric Christopher ; et al. | 2021-02-25 |
Substrate processing chamber including conical surface for reducing recirculation
Grant 10,840,061 - Phillips , et al. November 17, 2 | 2020-11-17 |
Systems And Methods For Suppressing Parasitic Plasma And Reducing Within-wafer Non-uniformity
App 20200335304 - Kang; Hu ; et al. | 2020-10-22 |
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
App 20200283893 - Byun; YoungChol ; et al. | 2020-09-10 |
STRUCTURE INCLUDING SiOC LAYER AND METHOD OF FORMING SAME
App 20200286725 - Sharma; Bed Prasad ; et al. | 2020-09-10 |
Method For Selective Deposition Of Silicon Nitride Layer And Structure Including Selectively-deposited Silicon Nitride Layer
App 20200286726 - Shero; Eric James ; et al. | 2020-09-10 |
Methods for depositing films on sensitive substrates
Grant 10,741,458 - Kang , et al. A | 2020-08-11 |
Low volume showerhead with porous baffle
Grant 10,741,365 - Chandrasekharan , et al. A | 2020-08-11 |
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment
App 20200227304 - Breiling; Patrick ; et al. | 2020-07-16 |
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Pla
App 20200219757 - BREILING; Patrick ; et al. | 2020-07-09 |
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
Grant 10,665,429 - Kang , et al. | 2020-05-26 |
Reducing backside deposition at wafer edge
Grant 10,648,079 - Baldasseroni , et al. | 2020-05-12 |
Doped ALD films for semiconductor patterning applications
Grant 10,629,435 - Swaminathan , et al. | 2020-04-21 |
Planar substrate edge contact with open volume equalization pathways and side containment
Grant 10,622,243 - Breiling , et al. | 2020-04-14 |
Systems and Methods for UV-Based Suppression of Plasma Instability
App 20200111666 - Swaminathan; Shankar | 2020-04-09 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
Grant 10,559,468 - Arghavani , et al. Feb | 2020-02-11 |
Systems and methods for tilting a wafer for achieving deposition uniformity
Grant 10,541,117 - Swaminathan , et al. Ja | 2020-01-21 |
Hardware and process for film uniformity improvement
Grant 10,526,700 - Kumar , et al. J | 2020-01-07 |
Systems and methods for UV-based suppression of plasma instability
Grant 10,529,557 - Swaminathan J | 2020-01-07 |
Substrate Processing Chamber Including Conical Surface For Reducing Recirculation
App 20190385817 - PHILLIPS; Richard ; et al. | 2019-12-19 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors
App 20190385850 - Arghavani; Reza ; et al. | 2019-12-19 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20190311897 - Kang; Hu ; et al. | 2019-10-10 |
Composite dielectric interface layers for interconnect structures
Grant 10,418,236 - Reddy , et al. Sept | 2019-09-17 |
Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system
Grant 10,407,773 - LaVoie , et al. Sept | 2019-09-10 |
Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system
Grant 10,403,474 - Phillips , et al. Sep | 2019-09-03 |
Low volume showerhead with faceplate holes for improved flow uniformity
Grant 10,378,107 - Chandrasekharan , et al. A | 2019-08-13 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 10,361,076 - Kang , et al. | 2019-07-23 |
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
Grant 10,323,323 - Chandrasekharan , et al. | 2019-06-18 |
Asymmetric pedestal/carrier ring arrangement for edge impedance modulation
Grant 10,301,718 - Blaquiere , et al. | 2019-05-28 |
Purge And Pumping Structures Arranged Beneath Substrate Plane To Reduce Defects
App 20190122871 - CHANDRASEKHARAN; Ramesh ; et al. | 2019-04-25 |
Methods For Depositing A Molybdenum Metal Film On A Dielectric Surface Of A Substrate And Related Semiconductor Device Structures
App 20190067003 - Zope; Bhushan ; et al. | 2019-02-28 |
Methods For Depositing A Molybdenum Metal Film Over A Dielectric Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures
App 20190067094 - Zope; Bhushan ; et al. | 2019-02-28 |
Methods For Filling A Gap Feature On A Substrate Surface And Related Semiconductor Device Structures
App 20190067014 - Shrestha; Kiran ; et al. | 2019-02-28 |
Systems and Methods for UV-Based Suppression of Plasma Instability
App 20190057864 - Swaminathan; Shankar | 2019-02-21 |
Hardware And Process For Film Uniformity Improvement
App 20190040528 - Kumar; Purushottam ; et al. | 2019-02-07 |
Soft landing nanolaminates for advanced patterning
Grant 10,192,742 - Pasquale , et al. Ja | 2019-01-29 |
Purge and pumping structures arranged beneath substrate plane to reduce defects
Grant 10,157,755 - Chandrasekharan , et al. Dec | 2018-12-18 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180342389 - Reddy; Kapu Sirish ; et al. | 2018-11-29 |
Method for high modulus ALD SiO2 spacer
Grant 10,134,579 - Baldasseroni , et al. November 20, 2 | 2018-11-20 |
Systems and methods for UV-based suppression of plasma instability
Grant 10,109,478 - Swaminathan October 23, 2 | 2018-10-23 |
Hardware and process for film uniformity improvement
Grant 10,100,407 - Kumar , et al. October 16, 2 | 2018-10-16 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors
App 20180269061 - Arghavani; Reza ; et al. | 2018-09-20 |
High dry etch rate materials for semiconductor patterning applications
Grant 10,074,543 - Mahorowala , et al. September 11, 2 | 2018-09-11 |
Methods For Depositing Films On Sensitive Substrates
App 20180247875 - Kang; Hu ; et al. | 2018-08-30 |
Composite dielectric interface layers for interconnect structures
Grant 10,049,869 - Reddy , et al. August 14, 2 | 2018-08-14 |
Temporally pulsed and kinetically modulated CVD dielectrics for gapfill applications
Grant 10,049,911 - Swaminathan , et al. August 14, 2 | 2018-08-14 |
Plasma activated conformal dielectric film deposition
Grant 10,043,655 - Swaminathan , et al. August 7, 2 | 2018-08-07 |
Plasma assisted atomic layer deposition metal oxide for patterning applications
Grant 10,043,657 - Swaminathan , et al. August 7, 2 | 2018-08-07 |
Methods for depositing films on sensitive substrates
Grant 10,008,428 - Kang , et al. June 26, 2 | 2018-06-26 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
Grant 9,997,357 - Arghavani , et al. June 12, 2 | 2018-06-12 |
Soft Landing Nanolaminates For Advanced Patterning
App 20180158683 - Pasquale; Frank L. ; et al. | 2018-06-07 |
Method For High Modulus Ald Sio2 Spacer
App 20180138036 - Baldasseroni; Chloe ; et al. | 2018-05-17 |
Systems and methods for vapor delivery in a substrate processing system
Grant 9,970,108 - Qian , et al. May 15, 2 | 2018-05-15 |
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment
App 20180122685 - Breiling; Patrick ; et al. | 2018-05-03 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180096886 - Reddy; Kapu Sirish ; et al. | 2018-04-05 |
Temporally Pulsed And Kinetically Modulated Cvd Dielectrics For Gapfill Applications
App 20180082886 - Swaminathan; Shankar ; et al. | 2018-03-22 |
Valve manifold deadleg elimination via reentrant flow path
Grant 9,920,844 - Leeser , et al. March 20, 2 | 2018-03-20 |
Systems and Methods for UV-Based Suppression of Plasma Instability
App 20180076028 - Swaminathan; Shankar | 2018-03-15 |
Systems And Methods For Suppressing Parasitic Plasma And Reducing Within-wafer Non-uniformity
App 20180068833 - Kang; Hu ; et al. | 2018-03-08 |
High Dry Etch Rate Materials For Semiconductor Patterning Applications
App 20180061650 - Mahorowala; Arpan ; et al. | 2018-03-01 |
Soft landing nanolaminates for advanced patterning
Grant 9,905,423 - Pasquale , et al. February 27, 2 | 2018-02-27 |
Plasma assisted atomic layer deposition of multi-layer films for patterning applications
Grant 9,892,917 - Swaminathan , et al. February 13, 2 | 2018-02-13 |
Doped Ald Films For Semiconductor Patterning Applications
App 20180033622 - Swaminathan; Shankar ; et al. | 2018-02-01 |
Collar, Conical Showerheads And/or Top Plates For Reducing Recirculation In A Substrate Processing System
App 20180012733 - Phillips; Richard ; et al. | 2018-01-11 |
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
Grant 9,852,901 - Varadarajan , et al. December 26, 2 | 2017-12-26 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20170323786 - Kang; Hu ; et al. | 2017-11-09 |
Methods For Depositing Films On Sensitive Substrates
App 20170316988 - Kang; Hu ; et al. | 2017-11-02 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 9,793,110 - Kang , et al. October 17, 2 | 2017-10-17 |
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
Grant 9,793,096 - Kang , et al. October 17, 2 | 2017-10-17 |
Methods for depositing films on sensitive substrates
Grant 9,786,570 - Kang , et al. October 10, 2 | 2017-10-10 |
Asymmetric Pedestal/carrier Ring Arrangement For Edge Impedance Modulation
App 20170275756 - Blaquiere; Ryan ; et al. | 2017-09-28 |
Plasma Assisted Atomic Layer Deposition Metal Oxide For Patterning Applications
App 20170263450 - Swaminathan; Shankar ; et al. | 2017-09-14 |
Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
Grant 9,698,042 - Baldasseroni , et al. July 4, 2 | 2017-07-04 |
Systems And Methods Enabling Low Defect Processing Via Controlled Separation And Delivery Of Chemicals During Atomic Layer Deposition
App 20170175269 - Chandrasekharan; Ramesh ; et al. | 2017-06-22 |
Methods And Apparatuses For Showerhead Backside Parasitic Plasma Suppression In A Secondary Purge Enabled Ald System
App 20170167017 - LaVoie; Adrien ; et al. | 2017-06-15 |
Plasma assisted atomic layer deposition titanium oxide for patterning applications
Grant 9,673,041 - Swaminathan , et al. June 6, 2 | 2017-06-06 |
Plasma Activated Conformal Dielectric Film Deposition
App 20170148628 - Swaminathan; Shankar ; et al. | 2017-05-25 |
Systems And Methods For Tilting A Wafer For Achieving Deposition Uniformity
App 20170121819 - Swaminathan; Shankar ; et al. | 2017-05-04 |
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
Grant 9,631,276 - Chandrasekharan , et al. April 25, 2 | 2017-04-25 |
Method for RF compensation in plasma assisted atomic layer deposition
Grant 9,624,578 - Qian , et al. April 18, 2 | 2017-04-18 |
Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system
Grant 9,617,638 - LaVoie , et al. April 11, 2 | 2017-04-11 |
Purge And Pumping Structures Arranged Beneath Substrate Plane To Reduce Defects
App 20170098556 - Chandrasekharan; Ramesh ; et al. | 2017-04-06 |
Multi-Station Chamber Having Symmetric Grounding Plate
App 20170053781 - Lavoie; Adrien ; et al. | 2017-02-23 |
Plasma activated conformal dielectric film deposition
Grant 9,570,274 - Swaminathan , et al. February 14, 2 | 2017-02-14 |
Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications
Grant 9,570,290 - Swaminathan , et al. February 14, 2 | 2017-02-14 |
Systems And Methods Enabling Low Defect Processing Via Controlled Separation And Delivery Of Chemicals During Atomic Layer Deposition
App 20170016115 - Chandrasekharan; Ramesh ; et al. | 2017-01-19 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors
App 20160379826 - Arghavani; Reza ; et al. | 2016-12-29 |
Systems And Methods For Reducing Backside Deposition And Mitigating Thickness Changes At Substrate Edges
App 20160372318 - VARADARAJAN; Sesha ; et al. | 2016-12-22 |
Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors
Grant 9,508,547 - Pasquale , et al. November 29, 2 | 2016-11-29 |
Low Volume Showerhead With Faceplate Holes For Improved Flow Uniformity
App 20160340782 - Chandrasekharan; Ramesh ; et al. | 2016-11-24 |
Plasma Assisted Atomic Layer Deposition Of Multi-layer Films For Patterning Applications
App 20160336178 - Swaminathan; Shankar ; et al. | 2016-11-17 |
Soft Landing Nanolaminates For Advanced Patterning
App 20160293418 - Pasquale; Frank L. ; et al. | 2016-10-06 |
Plasma Assisted Atomic Layer Deposition Titanium Oxide For Patterning Applications
App 20160293838 - Swaminathan; Shankar ; et al. | 2016-10-06 |
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
Grant 9,460,915 - Varadarajan , et al. October 4, 2 | 2016-10-04 |
Soft landing nanolaminates for advanced patterning
Grant 9,390,909 - Pasquale , et al. July 12, 2 | 2016-07-12 |
Hardware And Process For Film Uniformity Improvement
App 20160177443 - Kumar; Purushottam ; et al. | 2016-06-23 |
Reducing Backside Deposition At Wafer Edge
App 20160177444 - Baldasseroni; Chloe ; et al. | 2016-06-23 |
Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications
Grant 9,373,500 - Swaminathan , et al. June 21, 2 | 2016-06-21 |
Plasma Assisted Atomic Layer Deposition Titanium Oxide For Conformal Encapsulation And Gapfill Applications
App 20160163972 - Swaminathan; Shankar ; et al. | 2016-06-09 |
Methods For Depositing Films On Sensitive Substrates
App 20160155676 - Kang; Hu ; et al. | 2016-06-02 |
Conformal film deposition for gapfill
Grant 9,355,886 - Swaminathan , et al. May 31, 2 | 2016-05-31 |
Sub-saturated atomic layer deposition and conformal film deposition
Grant 9,355,839 - Swaminathan , et al. May 31, 2 | 2016-05-31 |
Valve Manifold Deadleg Elimination Via Reentrant Flow Path
App 20160147234 - Leeser; Karl ; et al. | 2016-05-26 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20160118246 - Kang; Hu ; et al. | 2016-04-28 |
Method And Apparatus For Rf Compensation In Plasma Assisted Atomic Layer Deposition
App 20160090650 - Qian; Jun ; et al. | 2016-03-31 |
Systems and Methods for Suppressing Parasitic Plasma and Reducing Within-Wafer Non-Uniformity
App 20160079036 - Kang; Hu ; et al. | 2016-03-17 |
Systems And Methods For Reducing Backside Deposition And Mitigatingthickness Changes At Substrate Edges
App 20160079057 - Varadarajan; Sesha ; et al. | 2016-03-17 |
Methods for depositing films on sensitive substrates
Grant 9,287,113 - Kang , et al. March 15, 2 | 2016-03-15 |
High Growth Rate Process For Conformal Aluminum Nitride
App 20160064211 - Swaminathan; Shankar ; et al. | 2016-03-03 |
Fill On Demand Ampoule
App 20160052651 - Nguyen; Tuan ; et al. | 2016-02-25 |
Fill On Demand Ampoule Refill
App 20160052655 - Nguyen; Tuan ; et al. | 2016-02-25 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 9,257,274 - Kang , et al. February 9, 2 | 2016-02-09 |
Methods And Apparatuses For Showerhead Backside Parasitic Plasma Suppression In A Secondary Purge Enabled Ald System
App 20160035566 - LaVoie; Adrien ; et al. | 2016-02-04 |
Systems And Methods For Vapor Delivery
App 20160032453 - Qian; Jun ; et al. | 2016-02-04 |
Plasma activated conformal film deposition
Grant 9,230,800 - LaVoie , et al. January 5, 2 | 2016-01-05 |
High growth rate process for conformal aluminum nitride
Grant 9,214,334 - Swaminathan , et al. December 15, 2 | 2015-12-15 |
Low Volume Showerhead With Porous Baffle
App 20150315706 - Chandrasekharan; Ramesh ; et al. | 2015-11-05 |
Rf Cycle Purging To Reduce Surface Roughness In Metal Oxide And Metal Nitride Films
App 20150247238 - Pasquale; Frank L. ; et al. | 2015-09-03 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors
App 20150249013 - Arghavani; Reza ; et al. | 2015-09-03 |
Plasma Assisted Atomic Layer Deposition Titanium Oxide For Conformal Encapsulation And Gapfill Applications
App 20150243883 - Swaminathan; Shankar ; et al. | 2015-08-27 |
High Growth Rate Process For Conformal Aluminum Nitride
App 20150235835 - Swaminathan; Shankar ; et al. | 2015-08-20 |
Plasma Activated Conformal Dielectric Film Deposition
App 20150206719 - Swaminathan; Shankar ; et al. | 2015-07-23 |
Soft Landing Nanolaminates For Advanced Patterning
App 20150126042 - Pasquale; Frank L. ; et al. | 2015-05-07 |
Systems For Modulating Step Coverage During Conformal Film Deposition
App 20150107513 - Swaminathan; Shankar ; et al. | 2015-04-23 |
Plasma activated conformal dielectric film deposition
Grant 8,999,859 - Swaminathan , et al. April 7, 2 | 2015-04-07 |
Methods for modulating step coverage during conformal film deposition
Grant 8,956,704 - Swaminathan , et al. February 17, 2 | 2015-02-17 |
Conformal doping via plasma activated atomic layer deposition and conformal film deposition
Grant 8,956,983 - Swaminathan , et al. February 17, 2 | 2015-02-17 |
Plasma Activated Conformal Dielectric Film Deposition
App 20140216337 - Swaminathan; Shankar ; et al. | 2014-08-07 |
Plasma Activated Conformal Film Deposition
App 20140209562 - LaVoie; Adrien ; et al. | 2014-07-31 |
Methods For Depositing Films On Sensitive Substrates
App 20140141542 - Kang; Hu ; et al. | 2014-05-22 |
Plasma activated conformal film deposition
Grant 8,728,956 - LaVoie , et al. May 20, 2 | 2014-05-20 |
Conformal Film Deposition For Gapfill
App 20140134827 - Swaminathan; Shankar ; et al. | 2014-05-15 |
Sub-saturated Atomic Layer Deposition And Conformal Film Deposition
App 20140120737 - Swaminathan; Shankar ; et al. | 2014-05-01 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20140106574 - Kang; Hu ; et al. | 2014-04-17 |
High Pressure, High Power Plasma Activated Conformal Film Deposition
App 20140030444 - Swaminathan; Shankar ; et al. | 2014-01-30 |
Plasma activated conformal dielectric film deposition
Grant 8,637,411 - Swaminathan , et al. January 28, 2 | 2014-01-28 |
Systems And Methods For Modulating Step Coverage During Conformal Film Deposition
App 20130309415 - Swaminathan; Shankar ; et al. | 2013-11-21 |
Conformal Doping Via Plasma Activated Atomic Layer Deposition And Conformal Film Deposition
App 20130040447 - Swaminathan; Shankar ; et al. | 2013-02-14 |
Plasma Activated Conformal Dielectric Film Deposition
App 20120028454 - Swaminathan; Shankar ; et al. | 2012-02-02 |
Plasma Activated Conformal Film Deposition
App 20110256726 - LaVoie; Adrien ; et al. | 2011-10-20 |
Process for the preparation of epothilone analogs
Grant RE39,356 - Li , et al. October 17, 2 | 2006-10-17 |
Process for preparing pyrrolotriazine
Grant 7,102,001 - Swaminathan , et al. September 5, 2 | 2006-09-05 |
Synthetic process
App 20050209454 - Swaminathan, Shankar ; et al. | 2005-09-22 |
Process for the preparation of epothilone analogs
Grant 6,518,421 - Li , et al. February 11, 2 | 2003-02-11 |
Process for the preparation of epothilone analogs
App 20030004338 - Li, Wen Sen ; et al. | 2003-01-02 |
Side chain derivatized 15-oxygenated sterols, methods of using them and a process for preparing them
Grant 5,371,077 - Schroepfer, Jr. , et al. December 6, 1 | 1994-12-06 |
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