Patent | Date |
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Methods and apparatus for zone control of RF bias for stress uniformity Grant 11,450,511 - Sun , et al. September 20, 2 | 2022-09-20 |
Polishing Fluid Collection Apparatus And Methods Related Thereto App 20220193863 - SUN; Lizhong ;   et al. | 2022-06-23 |
Methods And Apparatus For Zone Control Of Rf Bias For Stress Uniformity App 20220157563 - SUN; Lizhong ;   et al. | 2022-05-19 |
Tilted Magnetron In A Pvd Sputtering Deposition Chamber App 20210351024 - SUN; Lizhong ;   et al. | 2021-11-11 |
Method and apparatus for depositing a metal containing layer on a substrate Grant 11,170,998 - Sun , et al. November 9, 2 | 2021-11-09 |
Method And Apparatus For Tuning Film Properties During Thin Film Deposition App 20210249587 - SUN; Lizhong ;   et al. | 2021-08-12 |
Pre-conditioned chamber components Grant 11,072,852 - West , et al. July 27, 2 | 2021-07-27 |
Methods Of Forming A Metal Containing Material App 20200335332 - SUN; Lizhong ;   et al. | 2020-10-22 |
Energy storage device having an interlayer between electrode and electrolyte layer Grant 10,547,040 - Park , et al. Ja | 2020-01-28 |
Pre-conditioned Chamber Components App 20200024725 - WEST; Brian T. ;   et al. | 2020-01-23 |
Thermography And Thin Film Battery Manufacturing App 20180131048 - KWAK; Byung-Sung Leo ;   et al. | 2018-05-10 |
Energy Storage Device Having An Interlayer Between Electrode And Electrolyte Layer App 20170301957 - Park; Giback ;   et al. | 2017-10-19 |
Thin Film Device Encapsulation Using Volume Change Accommodating Materials App 20170301897 - Young; Michael Yu-Tak ;   et al. | 2017-10-19 |
Multilayer Thin Film Device Encapsulation Using Soft And Pliable Layer First App 20170301891 - Kwak; Byung-Sung ;   et al. | 2017-10-19 |
Multilayer Thin Film Device Encapsulation Using Soft And Pliable Layer First App 20170301892 - Kwak; Byung-Sung ;   et al. | 2017-10-19 |
Thin Film Battery Device And Method Of Formation App 20170301955 - Kwak; Byung-Sung ;   et al. | 2017-10-19 |
System And Method For Maskless Thin Film Battery Fabrication App 20170301926 - Argyris; Dimitrios ;   et al. | 2017-10-19 |
Multilayer Thin Film Device Encapsulation Using Soft And Pliable Layer First App 20170301894 - Kwak; Byung-Sung ;   et al. | 2017-10-19 |
Thin Film Battery Device And Method Of Formation App 20170301954 - Kwak; Byung-Sung ;   et al. | 2017-10-19 |
SPECIAL LiPON MASK TO INCREASE LiPON IONIC CONDUCTIVITY AND TFB FABRICATION YIELD App 20170279115 - SONG; Daoying ;   et al. | 2017-09-28 |
Electrochemical Device Stacks Including Interlayers For Reducing Interfacial Resistance And Over-potential App 20170279155 - SUN; Lizhong ;   et al. | 2017-09-28 |
Lithium containing composite metallic sputtering targets Grant 9,765,426 - Kwak , et al. September 19, 2 | 2017-09-19 |
Configurations Of Solid State Thin Film Batteries App 20170149093 - Sun; Lizhong ;   et al. | 2017-05-25 |
Deposition Of Solid State Electrolyte On Electrode Layers In Electrochemical Devices App 20160343552 - SUN; Lizhong ;   et al. | 2016-11-24 |
Skin button used for wound healing App 20160249903 - Sun; Lizhong | 2016-09-01 |
Polishing pad conditioning system including suction Grant 9,375,825 - Sun , et al. June 28, 2 | 2016-06-28 |
Pinhole-free solid state electrolytes with high ionic conductivity Grant 9,356,316 - Sun , et al. May 31, 2 | 2016-05-31 |
Polishing Pad Conditioning System Including Suction App 20150314417 - Sun; Lizhong ;   et al. | 2015-11-05 |
Electrochromic devices with Si, Sn, SiO.sub.2 and SnO.sub.2 doped anodes Grant 9,116,409 - Sun , et al. August 25, 2 | 2015-08-25 |
Solid State Electrolyte And Barrier On Lithium Metal And Its Methods App 20150079481 - SUN; Lizhong ;   et al. | 2015-03-19 |
Pinhole-free Solid State Electrolytes With High Ionic Conductivity App 20130280581 - SUN; Lizhong ;   et al. | 2013-10-24 |
Method and apparatus for electrochemical mechanical processing Grant 7,678,245 - Wang , et al. March 16, 2 | 2010-03-16 |
Consistant And Quantitative Method For Tco Delamination Evaluation App 20100052706 - SUN; LIZHONG ;   et al. | 2010-03-04 |
High-speed divider with reduced power consumption Grant 7,551,009 - Garlapati , et al. June 23, 2 | 2009-06-23 |
Blue printing ink for color filter applications Grant 7,544,723 - Sun , et al. June 9, 2 | 2009-06-09 |
Fractional-N baseband frequency synthesizer in bluetooth applications Grant 7,471,123 - Holland , et al. December 30, 2 | 2008-12-30 |
Green printing ink for color filter applications Grant 7,460,267 - Sun , et al. December 2, 2 | 2008-12-02 |
Conductive polishing article for electrochemical mechanical polishing Grant 7,422,516 - Butterfield , et al. September 9, 2 | 2008-09-09 |
High-speed Divider With Reduced Power Consumption App 20080204088 - Garlapati; Akhil K. ;   et al. | 2008-08-28 |
High-speed divider with pulse-width control Grant 7,405,601 - Garlapati , et al. July 29, 2 | 2008-07-29 |
Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP Grant 7,384,534 - Sun , et al. June 10, 2 | 2008-06-10 |
Method and apparatus for chemical mechanical polishing of semiconductor substrates Grant 7,375,023 - Tsai , et al. May 20, 2 | 2008-05-20 |
Dual Reduced Agents For Barrier Removal In Chemical Mechanical Polishing App 20080045021 - Tsai; Stan D. ;   et al. | 2008-02-21 |
Methods And Apparatus For Improved Ink For Inkjet Printing App 20080030562 - Sun; Lizhong | 2008-02-07 |
Conductive Polishing Article For Electrochemical Mechanical Polishing App 20080026681 - BUTTERFIELD; PAUL D. ;   et al. | 2008-01-31 |
Methods and apparatus for purging a substrate during inkjet printing App 20080024548 - Shang; Quanyuan ;   et al. | 2008-01-31 |
Inks for display device manufacturing and methods of manufacturing and using the same App 20080022885 - Sun; Lizhong | 2008-01-31 |
Methods And Apparatus For Maintaining Inkjet Print Heads Using Parking Structures App 20070263026 - Shang; Quanyuan ;   et al. | 2007-11-15 |
Methods And Apparatus For Operating An Inkjet Printing System App 20070256709 - SHANG; QUANYUAN ;   et al. | 2007-11-08 |
Methods and apparatus for maintaining inkjet print heads using parking structures with spray mechanisms App 20070252863 - Sun; Lizhong ;   et al. | 2007-11-01 |
Conductive polishing article for electrochemical mechanical polishing Grant 7,278,911 - Butterfield , et al. October 9, 2 | 2007-10-09 |
Methods for reducing delamination during chemical mechanical polishing Grant 7,244,168 - Chen , et al. July 17, 2 | 2007-07-17 |
High-speed Divider With Pulse-width Control App 20070139088 - Garlapati; Akhil K. ;   et al. | 2007-06-21 |
Cu CMP polishing pad cleaning Grant 7,220,322 - Sun , et al. May 22, 2 | 2007-05-22 |
Methods And Apparatus For Adjusting Pixel Fill Profiles App 20070070105 - SUN; LIZHONG ;   et al. | 2007-03-29 |
Method for aortic graft installation App 20070067014 - Ke; Danian ;   et al. | 2007-03-22 |
Phase selectable divider circuit Grant 7,187,216 - Sun , et al. March 6, 2 | 2007-03-06 |
Blue printing ink for color filter applications App 20070014933 - Sun; Lizhong ;   et al. | 2007-01-18 |
Red printing ink for color filter applications App 20070015847 - Sun; Lizhong ;   et al. | 2007-01-18 |
Green printing ink for color filter applications App 20070015848 - Sun; Lizhong ;   et al. | 2007-01-18 |
Fractional-N baseband frequency synthesizer in bluetooth applications App 20060238226 - Holland; William Eric ;   et al. | 2006-10-26 |
Programmable frequency divider Grant 7,113,009 - Sun , et al. September 26, 2 | 2006-09-26 |
Barrier removal at low polish pressure Grant 7,104,869 - Tsai , et al. September 12, 2 | 2006-09-12 |
Methods for reducing delamination during chemical mechanical polishing App 20060172664 - Chen; Yufei ;   et al. | 2006-08-03 |
Method and apparatus for chemical mechanical polishing of semiconductor substrates App 20060166487 - Tsai; Stan D. ;   et al. | 2006-07-27 |
Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus Grant 7,077,725 - Sun , et al. July 18, 2 | 2006-07-18 |
Dual reduced agents for barrier removal in chemical mechanical polishing App 20060144825 - Tsai; Stand D. ;   et al. | 2006-07-06 |
Method and apparatus for chemical mechanical polishing of semiconductor substrates Grant 7,060,606 - Tsai , et al. June 13, 2 | 2006-06-13 |
Methods for reducing delamination during chemical mechanical polishing Grant 7,037,174 - Chen , et al. May 2, 2 | 2006-05-02 |
Method and composition for the removal of residual materials during substrate planarization Grant 7,022,608 - Sun , et al. April 4, 2 | 2006-04-04 |
Tantalum removal during chemical mechanical polishing Grant 7,012,025 - Sun , et al. March 14, 2 | 2006-03-14 |
Dual reduced agents for barrier removal in chemical mechanical polishing Grant 7,008,554 - Tsai , et al. March 7, 2 | 2006-03-07 |
Spray slurry delivery system for polish performance improvement and cost reduction App 20060025049 - Sun; Lizhong ;   et al. | 2006-02-02 |
Control of removal profile in electrochemically assisted CMP Grant 6,991,526 - Sun , et al. January 31, 2 | 2006-01-31 |
Conductive polishing article for electrochemical mechanical polishing App 20050284770 - Butterfield, Paul D. ;   et al. | 2005-12-29 |
Method And Apparatus For Chemical Mechanical Polishing Of Semiconductor Substrates App 20050282380 - Tsai, Stan D. ;   et al. | 2005-12-22 |
Conductive polishing article for electrochemical mechanical polishing Grant 6,962,524 - Butterfield , et al. November 8, 2 | 2005-11-08 |
Phase selectable divider circuit App 20050242848 - Sun, Lizhong ;   et al. | 2005-11-03 |
Programmable frequency divider App 20050212570 - Sun, Lizhong ;   et al. | 2005-09-29 |
Fractional-N baseband frequency synthesizer in bluetooth applications Grant 6,946,884 - Holland , et al. September 20, 2 | 2005-09-20 |
Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP App 20050145507 - Sun, Lizhong ;   et al. | 2005-07-07 |
Electrolyte composition and treatment for electrolytic chemical mechanical polishing Grant 6,899,804 - Duboust , et al. May 31, 2 | 2005-05-31 |
Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP Grant 6,863,797 - Sun , et al. March 8, 2 | 2005-03-08 |
Selective removal of tantalum-containing barrier layer during metal CMP Grant 6,858,540 - Sun , et al. February 22, 2 | 2005-02-22 |
Method and apparatus for electrochemical mechanical processing App 20050000801 - Wang, Yan ;   et al. | 2005-01-06 |
Method for chemical mechanical polishing of semiconductor substrates Grant 6,821,881 - Tsai , et al. November 23, 2 | 2004-11-23 |
Method and apparatus for face-up substrate polishing Grant 6,776,693 - Duboust , et al. August 17, 2 | 2004-08-17 |
Methods for reducing delamination during chemical mechanical polishing App 20040116052 - Chen, Yufei ;   et al. | 2004-06-17 |
Method and apparatus for electrochemical-mechanical planarization Grant 6,739,951 - Sun , et al. May 25, 2 | 2004-05-25 |
Conductive polishing article for electrochemical mechanical polishing App 20040082289 - Butterfield, Paul D. ;   et al. | 2004-04-29 |
Effective method to improve surface finish in electrochemically assisted CMP App 20040072445 - Sun, Lizhong ;   et al. | 2004-04-15 |
Method and apparatus for two-step barrier layer polishing Grant 6,709,316 - Sun , et al. March 23, 2 | 2004-03-23 |
Control of removal profile in electrochemically assisted CMP App 20040053560 - Sun, Lizhong ;   et al. | 2004-03-18 |
Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus App 20040050817 - Sun, Lizhong ;   et al. | 2004-03-18 |
Methods and compositions for chemical mechanical polishing Grant 6,677,239 - Hsu , et al. January 13, 2 | 2004-01-13 |
Pad cleaning for a CMP system Grant 6,669,538 - Li , et al. December 30, 2 | 2003-12-30 |
Solution to metal re-deposition during substrate planarization Grant 6,653,242 - Sun , et al. November 25, 2 | 2003-11-25 |
Method and composition for the removal of residual materials during substrate planarization App 20030216049 - Sun, Lizhong ;   et al. | 2003-11-20 |
Fractional-N baseband frequency synthesizer in bluetooth applications App 20030201805 - Holland, William Eric ;   et al. | 2003-10-30 |
Electro-chemical plating with reduced thickness and integration with chemical mechanical polisher into a single platform Grant 6,613,200 - Li , et al. September 2, 2 | 2003-09-02 |
Electrochemically assisted chemical polish Grant 6,592,742 - Sun , et al. July 15, 2 | 2003-07-15 |
Electro-chemical Plating With Reduced Thickness And Integration With Chemical Mechanical Polisher Into A Single Platform App 20030121797 - Li, Shijian ;   et al. | 2003-07-03 |
Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP App 20030116445 - Sun, Lizhong ;   et al. | 2003-06-26 |
Electrolyte composition and treatment for electrolytic chemical mechanical polishing App 20030116446 - Duboust, Alain ;   et al. | 2003-06-26 |
Method and apparatus for face-up substrate polishing App 20030114087 - Duboust, Alain ;   et al. | 2003-06-19 |
VCO gain self-calibration for low voltage phase lock-loop applications Grant 6,552,618 - Nelson , et al. April 22, 2 | 2003-04-22 |
Methods and compositions for chemical mechanical polishing App 20030040182 - Hsu, Wei-Yung ;   et al. | 2003-02-27 |
Method and composition for the selective removal of residual materials and barrier materials during substrate planarization Grant 6,524,167 - Tsai , et al. February 25, 2 | 2003-02-25 |
Method and apparatus for chemical mechanical polishing of semiconductor substrates App 20030022501 - Tsai, Stan D. ;   et al. | 2003-01-30 |
Selective removal of tantalum-containing barrier layer during metal CMP title App 20030022801 - Sun, Lizhong ;   et al. | 2003-01-30 |
Low-noise, fast-lock phase-lock loop with "gearshifting" control App 20030020550 - Nelson, Dale H. ;   et al. | 2003-01-30 |
Dual reduced agents for barrier removal in chemical mechanical polishing App 20030013306 - Tsai, Stan D. ;   et al. | 2003-01-16 |
Barrier removal at low polish pressure App 20030013387 - Tsai, Stan ;   et al. | 2003-01-16 |
Electrochemically assisted chemical polish App 20030010648 - Sun, Lizhong ;   et al. | 2003-01-16 |
Low-noise, fast-lock phase-lock loop with "gearshifting" control Grant 6,504,437 - Nelson , et al. January 7, 2 | 2003-01-07 |
Method and apparatus for two-step polishing App 20020173221 - Li, Shijian ;   et al. | 2002-11-21 |
Composition for metal CMP with low dishing and overpolish insensitivity App 20020148169 - Sun, Lizhong ;   et al. | 2002-10-17 |
Method for abrasive-free metal CMP in passivation domain Grant 6,451,697 - Sun , et al. September 17, 2 | 2002-09-17 |
Method and apparatus for electrochemical-mechanical planarization App 20020111121 - Sun, Lizhong ;   et al. | 2002-08-15 |
Photochemically enhanced chemical polish App 20020104269 - Sun, LIzhong ;   et al. | 2002-08-08 |
Abrasive-free metal CMP in passivation domain App 20020092827 - Sun, Lizhong ;   et al. | 2002-07-18 |
Tantalum removal during chemical mechanical polishing App 20020090820 - Sun, Lizhong ;   et al. | 2002-07-11 |
Pad Cleaning for a CMP system App 20020090896 - Li, Shijian ;   et al. | 2002-07-11 |
VCO gain self-calibration for low voltage phase lock-loop applications App 20020075080 - Nelson, Dale H. ;   et al. | 2002-06-20 |
Method and composition for the removal of residual materials during substrate planarization App 20020068454 - Sun, Lizhong ;   et al. | 2002-06-06 |
Low voltage differential voltage-controlled ring oscillator Grant 6,396,357 - Sun , et al. May 28, 2 | 2002-05-28 |
Low Voltage Differential Voltage-controlled Ring Oscillator App 20020057135 - Sun, Lizhong ;   et al. | 2002-05-16 |
Method and apparatus for electrochemical-mechanical planarization Grant 6,379,223 - Sun , et al. April 30, 2 | 2002-04-30 |
Abrasive-free metal CMP in passivation domain App 20020022370 - Sun, Lizhong ;   et al. | 2002-02-21 |
Metal removal system and method for chemical mechanical polishing App 20010052500 - Sun, Lizhong ;   et al. | 2001-12-20 |
Elimination Of Pad Glazing For Al Cmp App 20010031558 - SUN, LIZHONG ;   et al. | 2001-10-18 |
Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus Grant 6,299,741 - Sun , et al. October 9, 2 | 2001-10-09 |
Charge pump for low-voltage, low-jitter phase locked loops Grant 6,278,332 - Nelson , et al. August 21, 2 | 2001-08-21 |
High speed wide tuning range multi-phase output ring oscillator Grant 6,075,419 - Sun , et al. June 13, 2 | 2000-06-13 |