Sugiura; Shinobu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sugiura; Shinobu.The latest application filed is for "substrate processing apparatus, method of manufacturing semiconductor device and heater".

Company Profile

2.20.10

Sugiura; Shinobu - Toyama JP
SUGIURA; Shinobu - Toyama-shi JP
Sugiura; Shinobu - Imizu JP
SUGIURA; Shinobu - Imizu-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Retainer plate of top heater for wafer processing furnace Grant D962,183 - Sugiura , et al. August 30, 2	2022-08-30
Retainer plate of top heater for wafer processing furnace Grant D962,184 - Sugiura , et al. August 30, 2	2022-08-30
Ceiling heater for substrate processing apparatus Grant D959,393 - Sugiura , et al. August 2, 2	2022-08-02
Heating part, substrate processing apparatus, and method of manufacturing semiconductor device Grant 11,198,935 - Sugiura , et al. December 14, 2	2021-12-14
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater App 20210313205 - SUGIURA; Shinobu ; et al.	2021-10-07
Retainer of ceiling heater for semiconductor fabrication apparatus Grant D918,848 - Sugiura , et al. May 11, 2	2021-05-11
Heater, Temperature Control System, And Processing Apparatus App 20200393197 - KOSUGI; Tetsuya ; et al.	2020-12-17
Heater supporting device Grant 9,779,970 - Kosugi , et al. October 3, 2	2017-10-03
Substrate processing apparatus Grant 9,698,037 - Nakashima , et al. July 4, 2	2017-07-04
Heating Part, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20170107620 - SUGIURA; Shinobu ; et al.	2017-04-20
Method of manufacturing semiconductor device using meander-shaped heating element Grant 9,449,849 - Murata , et al. September 20, 2	2016-09-20
Substrate processing apparatus capable of switching control mode of heater Grant 9,418,881 - Sugiura , et al. August 16, 2	2016-08-16
Heating device, substrate processing apparatus, and method of manufacturing semiconductor device Grant 9,064,912 - Murata , et al. June 23, 2	2015-06-23
Method Of Manufacturing Semiconductor Device App 20140322926 - Murata; Hitoshi ; et al.	2014-10-30
Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same Grant 8,847,124 - Murata , et al. September 30, 2	2014-09-30
Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part Grant 8,535,444 - Murata , et al. September 17, 2	2013-09-17
Substrate Processing Apparatus, Temperature Controlling Method Of Substrate Processing Apparatus, And Heating Method Of Substrate Processing Apparatus App 20120094010 - SUGIURA; Shinobu ; et al.	2012-04-19
Semiconductor manufacturing equipment Grant D652,395 - Shimada , et al. January 17, 2	2012-01-17
Semiconductor manufacturing equipment Grant D651,990 - Shimada , et al. January 10, 2	2012-01-10
Substrate Processing Apparatus App 20110305543 - NAKASHIMA; Seiyo ; et al.	2011-12-15
Heater Supporting Device App 20110281226 - KOSUGI; Tetsuya ; et al.	2011-11-17
Heating Device, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20110021038 - MURATA; Hitoshi ; et al.	2011-01-27
Heating Device, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20110021039 - MURATA; Hitoshi ; et al.	2011-01-27
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Ceiling Insulating Part App 20090209113 - MURATA; Hitoshi ; et al.	2009-08-20

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