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Layer transfer of films utilizing controlled shear region Grant 11,444,221 - Henley September 13, 2 | 2022-09-13 |
Three dimensional integrated circuit with lateral connection layer Grant 11,410,984 - Current , et al. August 9, 2 | 2022-08-09 |
Three Dimensional Integrated Circuit App 20210242184 - FONG; Theodore E. ;   et al. | 2021-08-05 |
Three dimensional integrated circuit Grant 10,923,459 - Fong , et al. February 16, 2 | 2021-02-16 |
Three dimensional integrated circuit Grant 10,804,252 - Fong , et al. October 13, 2 | 2020-10-13 |
Three Dimensional Integrated Circuit App 20200194409 - FONG; Theodore E. ;   et al. | 2020-06-18 |
Shaped silicon ingot using layer transfer Grant 10,683,588 - Henley | 2020-06-16 |
Three Dimensional Integrated Circuit App 20200185364 - FONG; Theodore E. ;   et al. | 2020-06-11 |
Three dimensional integrated circuit Grant 10,573,627 - Fong , et al. Feb | 2020-02-25 |
Layer Transfer Of Films Utilizing Controlled Shear Region App 20190326467 - HENLEY; Francois J. | 2019-10-24 |
Shaped Silicon Ingot Using Layer Transfer App 20190017192 - HENLEY; Francois J. | 2019-01-17 |
Three Dimensional Integrated Circuit App 20180350785 - FONG; Theodore E. ;   et al. | 2018-12-06 |
Method and device for slicing a shaped silicon ingot using layer transfer Grant 10,087,551 - Henley October 2, 2 | 2018-10-02 |
Three dimensional integrated circuit Grant 10,049,915 - Fong , et al. August 14, 2 | 2018-08-14 |
Three Dimensional Integrated Circuit App 20180175008 - FONG; Theodore E. ;   et al. | 2018-06-21 |
Three Dimensional Integrated Circuit App 20180082989 - Fong; Theodore E. ;   et al. | 2018-03-22 |
Techniques For Forming Optoelectronic Devices App 20170358704 - HENLEY; Francois J. ;   et al. | 2017-12-14 |
Three Dimensional Integrated Circuit App 20170301657 - FONG; Theodore E. ;   et al. | 2017-10-19 |
Three dimensional integrated circuit Grant 9,704,835 - Fong , et al. July 11, 2 | 2017-07-11 |
Substrate cleaving under controlled stress conditions Grant 9,640,711 - Henley , et al. May 2, 2 | 2017-05-02 |
Techniques For Forming Optoelectronic Devices App 20170084778 - HENLEY; Francois J. ;   et al. | 2017-03-23 |
Method And Device For Slicing A Shaped Silicon Ingot Using Layer Transfer App 20170002479 - Henley; Francois J. | 2017-01-05 |
Apparatus And Method Of Cleaving Thin Layer From Bulk Material App 20160319462 - HENLEY; Francois J. | 2016-11-03 |
Method and device for slicing a shaped silicon ingot using layer transfer Grant 9,460,908 - Henley October 4, 2 | 2016-10-04 |
Substrate Cleaving Under Controlled Stress Conditions App 20160276522 - HENLEY; Francois ;   et al. | 2016-09-22 |
Layer Transfer Of Films Utilizing Controlled Shear Region App 20160247958 - HENLEY; Francois J. | 2016-08-25 |
Apparatus And Method Of Cleaving Thin Layer From Bulk Material App 20160208416 - HENLEY; Francois J. | 2016-07-21 |
Three Dimensional Integrated Circuit App 20160204088 - FONG; Theodore E. ;   et al. | 2016-07-14 |
Layer transfer of films utilizing controlled shear region Grant 9,362,439 - Henley June 7, 2 | 2016-06-07 |
Substrate cleaving under controlled stress conditions Grant 9,356,181 - Henley , et al. May 31, 2 | 2016-05-31 |
Method of cleaving a thin sapphire layer from a bulk material by implanting a plurality of particles and performing a controlled cleaving process Grant 9,336,989 - Henley May 10, 2 | 2016-05-10 |
Techniques For Forming Optoelectronic Devices App 20160111500 - HENLEY; Francois J. ;   et al. | 2016-04-21 |
Techniques for forming optoelectronic devices Grant 9,257,339 - Henley , et al. February 9, 2 | 2016-02-09 |
Controlled process and resulting device Grant 9,159,605 - Henley , et al. October 13, 2 | 2015-10-13 |
Substrate Cleaving Under Controlled Stress Conditions App 20150155422 - HENLEY; Francois ;   et al. | 2015-06-04 |
Substrate cleaving under controlled stress conditions Grant 8,993,410 - Henley , et al. March 31, 2 | 2015-03-31 |
Cleaving Thin Layer From Bulk Material And Apparatus Including Cleaved Thin Layer App 20150044447 - HENLEY; Francois J. | 2015-02-12 |
Controlled Process And Resulting Device App 20140370687 - HENLEY; Francois J. ;   et al. | 2014-12-18 |
Controlled process and resulting device Grant 8,835,282 - Henley , et al. September 16, 2 | 2014-09-16 |
Method And Device For Slicing A Shaped Silicon Ingot Using Layer Transfer App 20140106540 - Henley; Francois J. | 2014-04-17 |
Layer transfer of films utilizing thermal flux regime for energy controlled cleaving Grant 8,637,382 - Henley January 28, 2 | 2014-01-28 |
Method and device for slicing a shaped silicon ingot using layer transfer Grant 8,623,137 - Henley January 7, 2 | 2014-01-07 |
Techniques For Forming Optoelectronic Devices App 20130292691 - Henley; Francois J. ;   et al. | 2013-11-07 |
Method and structure for fabricating solar cells using a thick layer transfer process Grant 8,563,402 - Henley October 22, 2 | 2013-10-22 |
Apparatus and Method of Cleaving Thin Layer from Bulk Material App 20130209740 - Henley; Francois J. | 2013-08-15 |
Controlled Process And Resulting Device App 20130143389 - HENLEY; FRANCOIS J. ;   et al. | 2013-06-06 |
Layer Transfer Of Films Utilizing Thermal Flux Regime For Energy Controlled Cleaving App 20130032582 - HENLEY; FRANCOIS J. | 2013-02-07 |
Techniques for forming thin films by implantation with reduced channeling Grant 8,329,557 - Brailove , et al. December 11, 2 | 2012-12-11 |
Race track configuration and method for wafering silicon solar substrates Grant 8,330,126 - Henley , et al. December 11, 2 | 2012-12-11 |
Layer transfer of films utilizing controlled propagation Grant 8,293,619 - Henley October 23, 2 | 2012-10-23 |
Substrate Cleaving Under Controlled Stress Conditions App 20120234887 - Henley; Francois ;   et al. | 2012-09-20 |
Substrate stiffness method and resulting devices for layer transfer process Grant 8,241,996 - Henley , et al. August 14, 2 | 2012-08-14 |
Apparatus and method of temperature control during cleaving processes of thick materials Grant 8,222,119 - Henley July 17, 2 | 2012-07-17 |
Non-contact etch annealing of strained layers Grant 8,187,377 - Malik , et al. May 29, 2 | 2012-05-29 |
Method and system for continuous large-area scanning implantation process Grant 8,153,513 - Henley April 10, 2 | 2012-04-10 |
Apparatus And Method Of Temperature Control During Cleaving Processes Of Thick Materials App 20120077289 - HENLEY; FRANCOIS J. | 2012-03-29 |
Method for fabricating semiconductor devices using strained silicon bearing material Grant 8,143,165 - Henley March 27, 2 | 2012-03-27 |
Free-standing thickness of single crystal material and method having carrier lifetimes Grant 8,133,800 - Henley , et al. March 13, 2 | 2012-03-13 |
Method And Structure For Fabricating Solar Cells Using A Thick Layer Transfer Process App 20120058624 - HENLEY; FRANCOIS J. | 2012-03-08 |
Method and structure for thick layer transfer using a linear accelerator Grant 8,124,499 - Henley , et al. February 28, 2 | 2012-02-28 |
Method and structure for fabricating solar cells using a thick layer transfer process Grant 8,110,480 - Henley February 7, 2 | 2012-02-07 |
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 8,071,463 - Henley December 6, 2 | 2011-12-06 |
Controlled Process And Resulting Device App 20110294306 - Henley; Francois J. ;   et al. | 2011-12-01 |
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 8,012,855 - Henley September 6, 2 | 2011-09-06 |
Method and structure for fabricating solar cells Grant 8,012,851 - Henley , et al. September 6, 2 | 2011-09-06 |
Controlled process and resulting device Grant 8,012,852 - Henley , et al. September 6, 2 | 2011-09-06 |
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 7,911,016 - Henley March 22, 2 | 2011-03-22 |
Method and structure using selected implant angles using a linear accelerator process for manufacture of free standing films of materials Grant 7,910,458 - Henley March 22, 2 | 2011-03-22 |
Liquid based substrate method and structure for layer transfer applications Grant 7,910,456 - Kirk March 22, 2 | 2011-03-22 |
Method and structure for fabricating solar cells using a layer transfer process Grant 7,863,157 - Henley , et al. January 4, 2 | 2011-01-04 |
Techniques For Forming Thin Films By Implantation With Reduced Channeling App 20100317140 - BRAILOVE; ADAM ;   et al. | 2010-12-16 |
Controlled process and resulting device Grant 7,846,818 - Henley , et al. December 7, 2 | 2010-12-07 |
Controlled Process And Resulting Device App 20100282323 - Henley; Francois J. ;   et al. | 2010-11-11 |
Method and edge region structure using co-implanted particles for layer transfer processes Grant 7,811,901 - Ong , et al. October 12, 2 | 2010-10-12 |
Method and structure for fabricating solar cells using a thick layer transfer process Grant 7,811,900 - Henley October 12, 2 | 2010-10-12 |
Controlled cleaving process Grant 7,781,305 - Henley , et al. August 24, 2 | 2010-08-24 |
Controlled process and resulting device Grant 7,776,717 - Henley , et al. August 17, 2 | 2010-08-17 |
Method for manufacturing devices on a multi-layered substrate utilizing a stiffening backing substrate Grant 7,772,088 - Henley , et al. August 10, 2 | 2010-08-10 |
Method and Structure for Fabricating Solar Cells App 20100180945 - Henley; Francois J. ;   et al. | 2010-07-22 |
Method and structure for fabricating solar cells using a layer transfer process Grant 7,759,220 - Henley July 20, 2 | 2010-07-20 |
Controlled process and resulting device Grant 7,759,217 - Henley , et al. July 20, 2 | 2010-07-20 |
Method and Structure for Fabricating Solar Cells Using a Thick Layer Transfer Process App 20100178723 - Henley; Francois J. | 2010-07-15 |
Method and Structure for Fabricating Multiple Tiled Regions Onto a Plate Using a Controlled Cleaving Process App 20100126587 - Henley; Francois J. | 2010-05-27 |
Method and Structure for Fabricating Multiple Tiled Regions Onto a Plate Using a Controlled Cleaving Process App 20100129951 - Henley; Francois J. | 2010-05-27 |
Method and Structure for Fabricating Multiple Tiled Regions Onto a Plate Using a Controlled Cleaving Process App 20100129950 - Henley; Francois J. | 2010-05-27 |
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 7,674,687 - Henley March 9, 2 | 2010-03-09 |
Layer transfer of films utilizing controlled propagation App 20100055874 - Henley; Francois J. | 2010-03-04 |
Free-standing thickness of single crystal material and method having carrier lifetimes App 20100052105 - Henley; Francois J. ;   et al. | 2010-03-04 |
Race track configuration and method for wafering silicon solar substrates App 20100044595 - Henley; Francois J. ;   et al. | 2010-02-25 |
Method and structure for implanting bonded substrates for electrical conductivity Grant 7,629,666 - Henley December 8, 2 | 2009-12-08 |
Layer Transfer Of Films Utilizing Controlled Shear Region App 20090277314 - Henley; Francois J. | 2009-11-12 |
Method for fabricating semiconductor devices using strained silicon bearing material App 20090258496 - Henley; Francois J. | 2009-10-15 |
Method and structure for fabricating bonded substrate structures using thermal processing to remove oxygen species Grant 7,598,153 - Henley , et al. October 6, 2 | 2009-10-06 |
Method and system for fabricating strained layers for the manufacture of integrated circuits Grant 7,595,499 - Henley , et al. September 29, 2 | 2009-09-29 |
Carrier Apparatus And Method For Shaped Sheet Materials App 20090152162 - TIAN; LU ;   et al. | 2009-06-18 |
Method and structure for implanting bonded substrates for electrical conductivity Grant 7,547,609 - Henley June 16, 2 | 2009-06-16 |
Method and device for controlled cleaving process App 20090093103 - Henley; Francois J. ;   et al. | 2009-04-09 |
Method And Structure Using Selected Implant Angles Using A Linear Accelerator Process For Manufacture Of Free Standing Films Of Materials App 20090042369 - Henley; Francois J. | 2009-02-12 |
Method and apparatus for flag-less water bonding tool Grant 7,479,441 - Kirk , et al. January 20, 2 | 2009-01-20 |
Method and structure for implanting bonded substrates for electrical conductivity App 20090001500 - Henley; Francois J. | 2009-01-01 |
Method and device for controlled cleaving process Grant 7,470,600 - Henley , et al. December 30, 2 | 2008-12-30 |
Method for fabricating semiconductor devices using strained silicon bearing material Grant 7,462,526 - Henley December 9, 2 | 2008-12-09 |
Controlled process and resulting device App 20080286945 - Henley; Francois J. ;   et al. | 2008-11-20 |
Manufacturing strained silicon substrates using a backing material Grant 7,427,554 - Henley , et al. September 23, 2 | 2008-09-23 |
Cleaving process to fabricate multilayered substrates using low implantation doses App 20080206963 - Henley; Francois J. ;   et al. | 2008-08-28 |
Method And Structure For Thick Layer Transfer Using A Linear Accelerator App 20080206962 - Henley; Francois J. ;   et al. | 2008-08-28 |
Controlled process and resulting device Grant 7,410,887 - Henley , et al. August 12, 2 | 2008-08-12 |
Apparatus And Method Of Temperature Conrol During Cleaving Processes Of Thick Film Materials App 20080188011 - Henley; Francois J. | 2008-08-07 |
Method And Structure For Fabricating Solar Cells Using A Thick Layer Transfer Process App 20080179547 - Henley; Francois J. | 2008-07-31 |
Controlled cleaving process App 20080182386 - Henley; Francois J. ;   et al. | 2008-07-31 |
Method and structure for implanting bonded substrates for electrical conductivity Grant 7,399,680 - Henley July 15, 2 | 2008-07-15 |
Method and structure for fabricating solar cells using a layer transfer process App 20080160661 - Henley; Francois J. | 2008-07-03 |
Method for fabricating semiconductor devices using strained silicon bearing material App 20080153220 - Henley; Francois J. | 2008-06-26 |
System for forming a strained layer of semiconductor material Grant 7,391,047 - Henley , et al. June 24, 2 | 2008-06-24 |
Method and system for lattice space engineering Grant 7,390,724 - Henley , et al. June 24, 2 | 2008-06-24 |
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20080141510 - Henley; Francois J. ;   et al. | 2008-06-19 |
Apparatus And Method For Introducing Particles Using A Radio Frequency Quadrupole Linear Accelerator For Semiconductor Materials App 20080128641 - Henley; Francois J. ;   et al. | 2008-06-05 |
Cleaving process to fabricate multilayered substrates using low implantation doses Grant 7,378,330 - Henley , et al. May 27, 2 | 2008-05-27 |
Controlled cleaving process Grant 7,371,660 - Henley , et al. May 13, 2 | 2008-05-13 |
Method for fabricating semiconductor devices using strained silicon bearing material Grant 7,354,815 - Henley April 8, 2 | 2008-04-08 |
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process Grant 7,351,644 - Henley April 1, 2 | 2008-04-01 |
Method and device for controlled cleaving process Grant 7,348,258 - Henley , et al. March 25, 2 | 2008-03-25 |
Method and Device for Controlled Cleaving Process App 20080057675 - Henley; Francois J. ;   et al. | 2008-03-06 |
Method And System For Continuous Large-area Scanning Implantation Process App 20080038908 - Henley; Francois J. | 2008-02-14 |
Controlled Process and Resulting Device App 20080038901 - Henley; Francois J. ;   et al. | 2008-02-14 |
Surface finishing of SOI substrates using an EPI process App 20070259526 - Kang; Sien G. ;   et al. | 2007-11-08 |
Method And Structure For Fabricating Solar Cells Using A Layer Transfer Process App 20070235074 - Henley; Francois J. ;   et al. | 2007-10-11 |
Method and structure for fabricating bonded substrate structures using thermal processing to remove oxygen species App 20070232022 - Henley; Francois J. ;   et al. | 2007-10-04 |
Surface finishing of SOI substrates using an EPI process Grant 7,253,081 - Kang , et al. August 7, 2 | 2007-08-07 |
Controlled Process And Resulting Device App 20070123013 - HENLEY; FRANCOIS J. ;   et al. | 2007-05-31 |
Controlled Process And Resulting Device App 20070122995 - HENLEY; FRANCOIS J. ;   et al. | 2007-05-31 |
Controlled Process And Resulting Device App 20070122997 - HENLEY; FRANCOIS J. ;   et al. | 2007-05-31 |
Method and apparatus for flag-less water bonding tool App 20070087531 - Kirk; Harry R. ;   et al. | 2007-04-19 |
Non-contact etch annealing of strained layers App 20070051299 - Ong; Philip ;   et al. | 2007-03-08 |
Manufacturing strained silicon substrates using a backing material App 20070037323 - Henley; Francois J. ;   et al. | 2007-02-15 |
Pre-made cleavable substrate method and structure of fabricating devices using one or more films provided by a layer transfer process App 20070029043 - Henley; Francois J. | 2007-02-08 |
Method and structure for fabricating devices using one or more films provided by a layer transfer process and etch back App 20070032044 - Henley; Francois J. | 2007-02-08 |
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process App 20070032084 - Henley; Francois J. | 2007-02-08 |
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process App 20070026638 - Henley; Francois J. | 2007-02-01 |
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process Grant 7,166,520 - Henley January 23, 2 | 2007-01-23 |
Controlled cleaving process Grant 7,160,790 - Henley , et al. January 9, 2 | 2007-01-09 |
Non-contact etch annealing of strained layers Grant 7,147,709 - Ong , et al. December 12, 2 | 2006-12-12 |
Method and system for source switching and in-situ plasma bonding App 20060240645 - Henley; Francois J. | 2006-10-26 |
Substrate stiffness method and resulting devices for layer transfer process App 20060211219 - Henley; Francois J. ;   et al. | 2006-09-21 |
Applications and equipment of substrate stiffness method and resulting devices for layer transfer processes on quartz or glass App 20060205180 - Henley; Francois J. ;   et al. | 2006-09-14 |
Method and system for fabricating strained layers for the manufacture of integrated circuits Grant 7,094,666 - Henley , et al. August 22, 2 | 2006-08-22 |
Cleaving process to fabricate multilayered substrates using low implantation doses App 20060166472 - Henley; Francois J. ;   et al. | 2006-07-27 |
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20060160329 - Henley; Francois J. ;   et al. | 2006-07-20 |
Method and system for source switching and in-situ plasma bonding Grant 7,078,317 - Henley July 18, 2 | 2006-07-18 |
Controlled cleaving process App 20060141747 - Henley; Francois J. ;   et al. | 2006-06-29 |
Method and structure for implanting bonded substrates for electrical conductivity App 20060138583 - Henley; Francois J. | 2006-06-29 |
Method and structure for implanting bonded substrates for electrical conductivity App 20060131687 - Henley; Francois J. | 2006-06-22 |
Cleaving process to fabricate multilayered substrates using low implantation doses Grant 7,056,808 - Henley , et al. June 6, 2 | 2006-06-06 |
Method and system for source switching and in-situ plasma bonding App 20060030167 - Henley; Francois J. | 2006-02-09 |
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20060024917 - Henley; Francois J. ;   et al. | 2006-02-02 |
Treatment method of film quality for the manufacture of substrates Grant 6,969,668 - Kang , et al. November 29, 2 | 2005-11-29 |
Method for smoothing a film of material using a ring structure App 20050247668 - Malik, Igor J. ;   et al. | 2005-11-10 |
Method and system for lattice space engineering App 20050233545 - Henley, Francois J. ;   et al. | 2005-10-20 |
Method for fabricating semiconductor devices using strained silicon bearing material App 20050227425 - Henley, Francois J. | 2005-10-13 |
Controlled cleaving process App 20050186758 - Henley, Francois J. ;   et al. | 2005-08-25 |
Apparatus and method for controlled cleaving App 20050150597 - Henley, Francois ;   et al. | 2005-07-14 |
In situ plasma wafer bonding method Grant 6,908,832 - Farrens , et al. June 21, 2 | 2005-06-21 |
Method for fabricating semiconductor devices using strained silicon bearing material App 20050118754 - Henley, Francois J. | 2005-06-02 |
Gettering technique for wafers made using a controlled cleaving process Grant 6,890,838 - Henley , et al. May 10, 2 | 2005-05-10 |
Smoothing method for cleaved films made using a release layer Grant 6,881,644 - Malik , et al. April 19, 2 | 2005-04-19 |
Method and device for controlled cleaving process App 20050070071 - Henley, Francois J. ;   et al. | 2005-03-31 |
Method and device for controlled cleaving process Grant 6,790,747 - Henley , et al. September 14, 2 | 2004-09-14 |
Method for multi-frequency bonding Grant 6,780,759 - Farrens , et al. August 24, 2 | 2004-08-24 |
In situ plasma wafer bonding method App 20040132304 - Farrens, Sharon N. ;   et al. | 2004-07-08 |
Gettering technique for wafers made using a controlled cleaving process App 20040097055 - Henley, Francois J. ;   et al. | 2004-05-20 |
In situ plasma wafer bonding method Grant 6,645,828 - Farrens , et al. November 11, 2 | 2003-11-11 |
System for the plasma treatment of large area substrates Grant 6,632,324 - Chan October 14, 2 | 2003-10-14 |
Controlled cleaving process Grant 6,632,724 - Henley , et al. October 14, 2 | 2003-10-14 |
Cleaving process to fabricate multilayered substrates using low implantation doses App 20030124815 - Henley, Francois J. ;   et al. | 2003-07-03 |
Controlled cleavage process using pressurized fluid Grant 6,582,999 - Henley , et al. June 24, 2 | 2003-06-24 |
Method and device for controlled cleaving process App 20030113983 - Henley, Francois J. ;   et al. | 2003-06-19 |
Apparatus and method for surface finishing a silicon film Grant 6,562,720 - Thilderkvist , et al. May 13, 2 | 2003-05-13 |
Silicon-on-silicon hybrid wafer assembly Grant 6,558,802 - Henley , et al. May 6, 2 | 2003-05-06 |
Substrate cleaving tool and method Grant 6,554,046 - Bryan , et al. April 29, 2 | 2003-04-29 |
Gettering technique for wafers made using a controlled cleaving process Grant 6,548,382 - Henley , et al. April 15, 2 | 2003-04-15 |
Particle distribution method and resulting structure for a layer transfer process Grant 6,544,862 - Bryan April 8, 2 | 2003-04-08 |
Method for fabricating multi-layered substrates Grant 6,534,381 - Cheung , et al. March 18, 2 | 2003-03-18 |
Controlled cleavage process and device for patterned films Grant 6,528,391 - Henley , et al. March 4, 2 | 2003-03-04 |
Method for non mass selected ion implant profile control Grant 6,514,838 - Chan February 4, 2 | 2003-02-04 |
Nozzle for cleaving substrates Grant 6,513,564 - Bryan , et al. February 4, 2 | 2003-02-04 |
Controlled cleavage process using pressurized fluid Grant 6,511,899 - Henley , et al. January 28, 2 | 2003-01-28 |
Smoothing method for cleaved films made using a release layer App 20030008477 - Kang, Sien G. ;   et al. | 2003-01-09 |
Method and apparatus for multi-frequency bonding App 20030003684 - Farrens, Shari N. ;   et al. | 2003-01-02 |
Cleaving process to fabricate multilayered substrates using low implantation doses Grant 6,500,732 - Henley , et al. December 31, 2 | 2002-12-31 |
Apparatus and method for surface finishing a silicon film Grant 6,489,241 - Thilderkvist , et al. December 3, 2 | 2002-12-03 |
Method and device for controlled cleaving process Grant 6,486,041 - Henley , et al. November 26, 2 | 2002-11-26 |
High temperature implant apparatus Grant 6,458,723 - Henley , et al. October 1, 2 | 2002-10-01 |
Controlled cleavage process and resulting device using beta annealing Grant 6,458,672 - Henley , et al. October 1, 2 | 2002-10-01 |
Smoothing method for cleaved films made using thermal treatment Grant 6,455,399 - Malik , et al. September 24, 2 | 2002-09-24 |
Method and system for generating a plurality of donor wafers and handle wafers prior to an order being placed by a customer Grant 6,448,152 - Henley , et al. September 10, 2 | 2002-09-10 |
Method and resulting device for manufacturing for double gated transistors App 20020090758 - Henley, Francois J. ;   et al. | 2002-07-11 |
Generic layer transfer methodology by controlled cleavage process App 20020081823 - Cheung, Nathan W. ;   et al. | 2002-06-27 |
Generic layer transfer methodology by controlled cleavage process Grant 6,391,740 - Cheung , et al. May 21, 2 | 2002-05-21 |
Controlled cleavage process using pressurized fluid App 20020055266 - Henley, Francois J. ;   et al. | 2002-05-09 |
Controlled cleavage thin film separation process using a reusable substrate Grant 6,335,264 - Henley , et al. January 1, 2 | 2002-01-01 |
Clustertool system software using plasma immersion ion implantation Grant 6,321,134 - Henley , et al. November 20, 2 | 2001-11-20 |
Enhanced plasma mode and system for plasma immersion ion implantation Grant 6,300,227 - Liu , et al. October 9, 2 | 2001-10-09 |
Method and device for controlled cleaving process Grant 6,291,313 - Henley , et al. September 18, 2 | 2001-09-18 |
Controlled cleavage process and device for patterned films using a release layer Grant 6,291,314 - Henley , et al. September 18, 2 | 2001-09-18 |
Controlled cleavage process using patterning Grant 6,290,804 - Henley , et al. September 18, 2 | 2001-09-18 |
Surface finishing of SOI substrates using an EPI process Grant 6,287,941 - Kang , et al. September 11, 2 | 2001-09-11 |
Method and device for controlled cleaving process Grant 6,284,631 - Henley , et al. September 4, 2 | 2001-09-04 |
Method for non mass selected ion implant profile control Grant 6,274,459 - Chan August 14, 2 | 2001-08-14 |
Collection devices for plasma immersion ion implantation Grant 6,269,765 - Chu , et al. August 7, 2 | 2001-08-07 |
Wafer edge engineering method and device Grant 6,265,328 - Henley , et al. July 24, 2 | 2001-07-24 |
Nozzle for cleaving substrates Grant 6,263,941 - Bryan , et al. July 24, 2 | 2001-07-24 |
Controlled cleavage process and device for patterned films using patterned implants Grant 6,248,649 - Henley , et al. June 19, 2 | 2001-06-19 |
Economical silicon-on-silicon hybrid wafer assembly Grant 6,245,161 - Henley , et al. June 12, 2 | 2001-06-12 |
Contoured platen design for plasma immerson ion implantation Grant 6,228,176 - Chu , et al. May 8, 2 | 2001-05-08 |
Substrate cleaving tool and method Grant 6,221,740 - Bryan , et al. April 24, 2 | 2001-04-24 |
Method for surface treatment of substrates Grant 6,221,774 - Malik April 24, 2 | 2001-04-24 |
Enhanced plasma mode and computer system for plasma immersion ion implantation Grant 6,213,050 - Liu , et al. April 10, 2 | 2001-04-10 |
Cluster tool apparatus using plasma immersion ion implantation Grant 6,207,005 - Henley , et al. March 27, 2 | 2001-03-27 |
Smoothing method for cleaved films made using thermal treatment Grant 6,204,151 - Malik , et al. March 20, 2 | 2001-03-20 |
Device for patterned films Grant 6,187,110 - Henley , et al. February 13, 2 | 2001-02-13 |
Shielded platen design for plasma immersion ion implantation Grant 6,186,091 - Chu , et al. February 13, 2 | 2001-02-13 |
Pre-semiconductor process implant and post-process film separation Grant 6,184,111 - Henley , et al. February 6, 2 | 2001-02-06 |
In situ plasma wafer bonding method Grant 6,180,496 - Farrens , et al. January 30, 2 | 2001-01-30 |
Treatment method of cleaved film for the manufacture of substrates Grant 6,171,965 - Kang , et al. January 9, 2 | 2001-01-09 |
Controlled cleavage process and resulting device using beta annealing Grant 6,162,705 - Henley , et al. December 19, 2 | 2000-12-19 |
Silicon-on-silicon wafer bonding process using a thin film blister-separation method Grant 6,159,824 - Henley , et al. December 12, 2 | 2000-12-12 |
Controlled cleavage thin film separation process using a reusable substrate Grant 6,159,825 - Henley , et al. December 12, 2 | 2000-12-12 |
Controlled cleavage system using pressurized fluid Grant 6,155,909 - Henley , et al. December 5, 2 | 2000-12-05 |
Cluster tool method using plasma immersion ion implantation Grant 6,153,524 - Henley , et al. November 28, 2 | 2000-11-28 |
Pressurized microbubble thin film separation process using a reusable substrate Grant 6,146,979 - Henley , et al. November 14, 2 | 2000-11-14 |
Removable liner design for plasma immersion ion implantation Grant 6,120,660 - Chu , et al. September 19, 2 | 2000-09-19 |
Distributed system and code for control and automation of plasma immersion ion implanter Grant 6,113,735 - Chu , et al. September 5, 2 | 2000-09-05 |
Planarizing technique for multilayered substrates Grant 6,103,599 - Henley , et al. August 15, 2 | 2000-08-15 |
Gettering technique for silicon-on-insulator wafers Grant 6,083,324 - Henley , et al. July 4, 2 | 2000-07-04 |
Perforated shield for plasma immersion ion implantation Grant 6,051,073 - Chu , et al. April 18, 2 | 2000-04-18 |
Silicon-on-silicon hybrid wafer assembly Grant 6,048,411 - Henley , et al. April 11, 2 | 2000-04-11 |
Method for controlled cleaving process Grant 6,033,974 - Henley , et al. March 7, 2 | 2000-03-07 |
Controlled cleavage process using pressurized fluid Grant 6,013,567 - Henley , et al. January 11, 2 | 2000-01-11 |
Controlled cleaning process Grant 6,013,563 - Henley , et al. January 11, 2 | 2000-01-11 |
Reusable substrate for thin film separation Grant 6,010,579 - Henley , et al. January 4, 2 | 2000-01-04 |
Controlled cleavage process using pressurized fluid Grant 5,994,207 - Henley , et al. November 30, 1 | 1999-11-30 |
Controlled cleavage process and device for patterned films Grant 5,985,742 - Henley , et al. November 16, 1 | 1999-11-16 |
Tumbling barrel plasma processor Grant 5,945,012 - Chan August 31, 1 | 1999-08-31 |