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Methods And Systems For Filling A Gap
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Methods And Systems For Forming A Layer Comprising Aluminum, Titanium, And Carbon
App 20220285147 - Chen; Lifu ; et al. | 2022-09-08 |
Methods And Systems For Filling A Gap
App 20220285211 - Farm; Elina ; et al. | 2022-09-08 |
Method For Treatment Of Deposition Reactor
App 20220277937 - Haukka; Suvi ; et al. | 2022-09-01 |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
Grant 11,424,119 - Shero , et al. August 23, 2 | 2022-08-23 |
Substrate susceptor using edge purging
Grant 11,404,302 - Singu , et al. August 2, 2 | 2022-08-02 |
Methods For Depositing A Transition Metal Nitride Film On A Substrate By Atomic Layer Deposition And Related Deposition Apparatus
App 20220228264 - Shero; Eric James ; et al. | 2022-07-21 |
Reactant vaporizer and related systems and methods
Grant 11,377,732 - Verghese , et al. July 5, 2 | 2022-07-05 |
Structures Including Metal Carbide Material, Devices Including The Structures, And Methods Of Forming Same
App 20220149175 - Raisanen; Petri ; et al. | 2022-05-12 |
Method Of Depositing Vanadium Metal, Structure, Device And A Deposition Assembly
App 20220127724 - Dezelah; Charles ; et al. | 2022-04-28 |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
Grant 11,306,395 - Shero , et al. April 19, 2 | 2022-04-19 |
Bottom-up Metal Nitride Formation
App 20220084831 - Shero; Eric James | 2022-03-17 |
Structures including metal carbide material, devices including the structures, and methods of forming same
Grant 11,242,598 - Raisanen , et al. February 8, 2 | 2022-02-08 |
Vapor Deposition Of Films Comprising Molybdenum
App 20210407809 - Zope; Bhushan ; et al. | 2021-12-30 |
Vapor Deposition Of Tungsten Films
App 20210404060 - Milligan; Robert Brennan ; et al. | 2021-12-30 |
System And Methods For Direct Liquid Injection Of Vanadium Precursors
App 20210371978 - Shero; Eric James ; et al. | 2021-12-02 |
Methods And Systems For Delivery Of Vanadium Compounds
App 20210348267 - Dezelah; Charles ; et al. | 2021-11-11 |
Solid Source Precursor Vessel
App 20210340671 - Huang; Jianqiu ; et al. | 2021-11-04 |
Method Of Forming Chromium Nitride Layer And Structure Including The Chromium Nitride Layer
App 20210327715 - Xie; Qi ; et al. | 2021-10-21 |
Structure including SiOC layer and method of forming same
Grant 11,114,294 - Sharma , et al. September 7, 2 | 2021-09-07 |
Deposition Of Hafnium Oxide Within A High Aspect Ratio Hole
App 20210249263 - Kim; Jiyeon ; et al. | 2021-08-12 |
Method Of Forming Structures Including A Vanadium Or Indium Layer
App 20210242011 - Shero; Eric James ; et al. | 2021-08-05 |
Showerhead Assembly And Components
App 20210214846 - Nandwana; Dinkar ; et al. | 2021-07-15 |
Method Of Forming Vanadium Nitride Layer And Structure Including The Vanadium Nitride Layer
App 20210180184 - Alessio Verni; Giuseppe ; et al. | 2021-06-17 |
Semiconductor Deposition Reactor Manifolds
App 20210118668 - Nandwana; Dinkar ; et al. | 2021-04-22 |
Semiconductor Processing Device
App 20210087679 - Winkler; Jereld Lee ; et al. | 2021-03-25 |
Heating Zone Separation For Reactant Evaporation System
App 20210079527 - White; Carl Louis ; et al. | 2021-03-18 |
Fill Vessels And Connectors For Chemical Sublimators
App 20210071301 - Ma; Paul ; et al. | 2021-03-11 |
Heater Assembly Including Cooling Apparatus And Method Of Using Same
App 20210040613 - White; Carl Louis ; et al. | 2021-02-11 |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
Grant 10,892,156 - Woodruff , et al. January 12, 2 | 2021-01-12 |
Reactant vaporizer and related systems and methods
Grant 10,876,205 - Verghese , et al. December 29, 2 | 2020-12-29 |
Substrate Susceptor Using Edge Purging
App 20200373187 - Singu; Raj ; et al. | 2020-11-26 |
Semiconductor processing reactor and components thereof
Grant 10,844,486 - Shero , et al. November 24, 2 | 2020-11-24 |
Reactant Vaporizer And Related Systems And Methods
App 20200340109 - Verghese; Mohith ; et al. | 2020-10-29 |
Reactor Manifolds
App 20200299836 - Nandwana; Dinkar ; et al. | 2020-09-24 |
STRUCTURE INCLUDING SiOC LAYER AND METHOD OF FORMING SAME
App 20200286725 - Sharma; Bed Prasad ; et al. | 2020-09-10 |
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
App 20200283893 - Byun; YoungChol ; et al. | 2020-09-10 |
Method For Selective Deposition Of Silicon Nitride Layer And Structure Including Selectively-deposited Silicon Nitride Layer
App 20200286726 - Shero; Eric James ; et al. | 2020-09-10 |
Solid Source Sublimator
App 20200056283 - Shero; Eric James ; et al. | 2020-02-20 |
Semiconductor Processing Reactor And Components Thereof
App 20200056286 - Shero; Eric James ; et al. | 2020-02-20 |
Cross-flow reactor and method
Grant 10,529,542 - White , et al. J | 2020-01-07 |
Structures Including Metal Carbide Material, Devices Including The Structures, And Methods Of Forming Same
App 20190390338 - Raisanen; Petri ; et al. | 2019-12-26 |
Semiconductor processing reactor and components thereof
Grant 10,480,072 - Shero , et al. Nov | 2019-11-19 |
Structures including metal carbide material, devices including the structures, and methods of forming same
Grant 10,458,018 - Raisanen , et al. Oc | 2019-10-29 |
Multi-zone Reactor, System Including The Reactor, And Method Of Using The Same
App 20190157054 - White; Carl Louis ; et al. | 2019-05-23 |
Multi-zone reactor, system including the reactor, and method of using the same
Grant 10,276,355 - White , et al. | 2019-04-30 |
Methods For Depositing A Transition Metal Nitride Film On A Substrate By Atomic Layer Deposition And Related Deposition Apparatus
App 20190003052 - Shero; Eric James ; et al. | 2019-01-03 |
Methods For Forming A Silicon Nitride Film On A Substrate And Related Semiconductor Device Structures
App 20180323056 - Woodruff; Jacob Huffman ; et al. | 2018-11-08 |
Reactant Vaporizer And Related Systems And Methods
App 20180094351 - Verghese; Mohith ; et al. | 2018-04-05 |
Reactant Vaporizer And Related Systems And Methods
App 20180094350 - Verghese; Mohith ; et al. | 2018-04-05 |
System For Treatment Of Deposition Reactor
App 20160376700 - Haukka; Suvi ; et al. | 2016-12-29 |
Structures Including Metal Carbide Material, Devices Including The Structures, And Methods Of Forming Same
App 20160376704 - Raisanen; Petri ; et al. | 2016-12-29 |
Semiconductor Processing Reactor And Components Thereof
App 20160289828 - Shero; Eric James ; et al. | 2016-10-06 |
Cross-flow Reactor And Method
App 20160268102 - White; Carl Louis ; et al. | 2016-09-15 |
Multi-zone Reactor, System Including The Reactor, And Method Of Using The Same
App 20160268107 - White; Carl Louis ; et al. | 2016-09-15 |
Method And System For Treatment Of Deposition Reactor
App 20160115590 - Haukka; Suvi ; et al. | 2016-04-28 |
Method for treatment of deposition reactor
Grant 9,228,259 - Haukka , et al. January 5, 2 | 2016-01-05 |
Multi-step method and apparatus for etching compounds containing a metal
Grant 8,894,870 - Winkler , et al. November 25, 2 | 2014-11-25 |
Multi-step Method And Apparatus For Etching Compounds Containing A Metal
App 20140217065 - Winkler; Jereld Lee ; et al. | 2014-08-07 |
Method And System For Treatment Of Deposition Reactor
App 20140220247 - Haukka; Suvi ; et al. | 2014-08-07 |
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