Patent | Date |
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Method of fabricating hafnium oxide layer and semiconductor device having the same Grant 9,831,085 - Kil , et al. November 28, 2 | 2017-11-28 |
Method Of Fabricating Hafnium Oxide Layer And Semiconductor Device Having The Same App 20170004967 - KIL; Deok Sin ;   et al. | 2017-01-05 |
Method for fabricating capacitor Grant 9,214,467 - Kim , et al. December 15, 2 | 2015-12-15 |
Method For Fabricating Capacitor App 20150132916 - KIM; Jin-Hyock ;   et al. | 2015-05-14 |
Method for fabricating capacitor Grant 8,946,047 - Kim , et al. February 3, 2 | 2015-02-03 |
Semiconductor device and method for fabricating the same Grant 8,298,909 - Do , et al. October 30, 2 | 2012-10-30 |
Semiconductor device and method of fabricating the same Grant 8,134,195 - Lee , et al. March 13, 2 | 2012-03-13 |
Semiconductor device including ruthenium electrode and method for fabricating the same Grant 8,120,180 - Kim , et al. February 21, 2 | 2012-02-21 |
Method for fabricating capacitor utilizes a sacrificial pattern enclosing the upper outer walls of the storage nodes Grant 8,048,757 - Roh , et al. November 1, 2 | 2011-11-01 |
Method for fabricating a capacitor utilizes the sacrificial pattern covering the cell region Grant 8,048,758 - Roh , et al. November 1, 2 | 2011-11-01 |
Method for fabricating capacitor Grant 8,017,491 - Lee , et al. September 13, 2 | 2011-09-13 |
Method For Fabricating Capacitor App 20110171807 - Roh; Jae-Sung ;   et al. | 2011-07-14 |
Method For Fabricating A Capacitor App 20110171808 - ROH; Jae-Sung ;   et al. | 2011-07-14 |
Method for fabricating a cylinder-type capacitor utilizing a connected ring structure Grant 7,910,452 - Roh , et al. March 22, 2 | 2011-03-22 |
Plasma doping method and method for fabricating semiconductor device using the same Grant 7,888,245 - Roh , et al. February 15, 2 | 2011-02-15 |
Capacitor and method for fabricating the same Grant 7,835,134 - Kil , et al. November 16, 2 | 2010-11-16 |
Semiconductor Device Including Ruthenium Electrode And Method For Fabricating The Same App 20100276804 - KIM; Jin-Hyock ;   et al. | 2010-11-04 |
Powder Container Capable Of Controlling Amount Of Discharged Powder App 20100270333 - ROH; Jae-Sung | 2010-10-28 |
Method for fabricating capacitor in semiconductor device Grant 7,816,202 - Do , et al. October 19, 2 | 2010-10-19 |
Method For Fabricating Capacitor App 20100240188 - KIM; Jin-Hyock ;   et al. | 2010-09-23 |
Semiconductor device with dielectric structure and method for fabricating the same Grant 7,786,521 - Park , et al. August 31, 2 | 2010-08-31 |
Semiconductor device including ruthenium electrode and method for fabricating the same Grant 7,781,336 - Kim , et al. August 24, 2 | 2010-08-24 |
Method for forming tetragonal zirconium oxide layer and method for fabricating capacitor having the same Grant 7,772,132 - Kil , et al. August 10, 2 | 2010-08-10 |
Method for fabricating capacitor Grant 7,754,577 - Kim , et al. July 13, 2 | 2010-07-13 |
Method for fabricating a cylindrical capacitor using amorphous carbon-based layer Grant 7,670,903 - Park , et al. March 2, 2 | 2010-03-02 |
Semiconductor Device And Method Of Fabricating The Same App 20100012989 - LEE; Kee-Jeung ;   et al. | 2010-01-21 |
Capacitor And Method For Fabricating The Same App 20100014212 - Kil; Deok-Sin ;   et al. | 2010-01-21 |
Method for forming capacitor of semiconductor device Grant 7,629,221 - Park , et al. December 8, 2 | 2009-12-08 |
Capacitor and method for fabricating the same Grant 7,616,426 - Kil , et al. November 10, 2 | 2009-11-10 |
Method For Forming Thin Film App 20090148625 - Yeom; Seung-Jin ;   et al. | 2009-06-11 |
Semiconductor Device With Dielectric Structure And Method For Fabricating The Same App 20090134445 - Park; Ki-Seon ;   et al. | 2009-05-28 |
Method for fabricating capacitor in semiconductor device using hafnium terbium oxide dielectric layer Grant 7,531,422 - Lee , et al. May 12, 2 | 2009-05-12 |
Semiconductor device with dielectric structure and method for fabricating the same Grant 7,501,320 - Park , et al. March 10, 2 | 2009-03-10 |
Method For Fabricating Capacitor In Semiconductor Device App 20090061587 - Do; Kwan-Woo ;   et al. | 2009-03-05 |
Method For Fabricating Semiconductor Device App 20090004808 - LEE; Kee-Jeung ;   et al. | 2009-01-01 |
Semiconductor device including ruthenium electrode and method for fabricating the same App 20080272490 - Kim; Jin-Hyock ;   et al. | 2008-11-06 |
Capacitor with hafnium oxide and aluminum oxide alloyed dielectric layer and method for fabricating the same Grant 7,416,936 - Kil , et al. August 26, 2 | 2008-08-26 |
Semiconductor Device And Method For Fabricating The Same App 20080157278 - Do; Kwan-Woo ;   et al. | 2008-07-03 |
Transistor Structure Of Memory Device And Method For Fabricating The Same App 20080096355 - Jang; Se Aug ;   et al. | 2008-04-24 |
Method for fabricating capacitor in semiconductor device Grant 7,361,544 - Yeom , et al. April 22, 2 | 2008-04-22 |
Method For Fabricating A Capacitor App 20080081431 - ROH; Jae-Sung ;   et al. | 2008-04-03 |
Transistor structure of memory device and method for fabricating the same Grant 7,332,755 - Jang , et al. February 19, 2 | 2008-02-19 |
Method for fabricating a cylindrical capacitor using amorphous carbon-based layer App 20080003741 - Park; Ki-Seon ;   et al. | 2008-01-03 |
Plasma Doping Method And Method For Fabricating Semiconductor Device Using The Same App 20070264808 - ROH; Jae-Sung ;   et al. | 2007-11-15 |
Method for forming tetragonal zirconium oxide layer and method for fabricating capacitor having the same App 20070232081 - Kil; Deok-Sin ;   et al. | 2007-10-04 |
Capacitor with hafnium oxide and aluminum oxide alloyed dielectric layer and method for fabricating the same App 20070223176 - Kil; Deok-Sin ;   et al. | 2007-09-27 |
Method for forming capacitor of semiconductor device Grant 7,259,059 - Kil , et al. August 21, 2 | 2007-08-21 |
Method for fabricating capacitor in semiconductor device App 20070148897 - Yeom; Seung-Jin ;   et al. | 2007-06-28 |
Capacitor with hafnium oxide and aluminum oxide alloyed dielectric layer and method for fabricating the same Grant 7,229,888 - Kil , et al. June 12, 2 | 2007-06-12 |
Method for fabricating capacitor in semiconductor device App 20070117309 - Lee; Kee-Jeung ;   et al. | 2007-05-24 |
Capacitor and method for fabricating the same App 20070102742 - Kil; Deok-Sin ;   et al. | 2007-05-10 |
Method for fabricating capacitor App 20070099375 - Kim; Jin-Hyock ;   et al. | 2007-05-03 |
Semiconductor device with dielectric structure and method for fabricating the same App 20070048929 - Park; Ki-Seon ;   et al. | 2007-03-01 |
Method for forming capacitor of semiconductor device App 20060270177 - Park; Ki Seon ;   et al. | 2006-11-30 |
Transistor structure of memory device and method for fabricating the same App 20060244055 - Jang; Se Aug ;   et al. | 2006-11-02 |
Method for forming thin film App 20060183301 - Yeom; Seung-Jin ;   et al. | 2006-08-17 |
Capacitor of semiconductor device and method for forming the same Grant 7,074,668 - Park , et al. July 11, 2 | 2006-07-11 |
Capacitor Of Semiconductor Device And Method For Forming The Same App 20060134854 - Park; Ki Seon ;   et al. | 2006-06-22 |
Method for forming capacitor of semiconductor device App 20060094199 - Kil; Deok Sin ;   et al. | 2006-05-04 |
Method for forming storage node electrode of capacitor App 20050287737 - Park, Ki Seon ;   et al. | 2005-12-29 |
Method for fabricating capacitor in semiconductor device App 20050130326 - Lee, Kee-Jeung ;   et al. | 2005-06-16 |
Capacitor with hafnium oxide and aluminum oxide alloyed dielectric layer and method for fabricating the same App 20050110115 - Kil, Deok-Sin ;   et al. | 2005-05-26 |
Hafnium oxide and aluminium oxide alloyed dielectric layer and method for fabricating the same App 20050110069 - Kil, Deok-Sin ;   et al. | 2005-05-26 |
Capacitor using high dielectric constant film for semiconductor memory device and fabrication method therefor Grant 6,645,811 - Roh November 11, 2 | 2003-11-11 |
Capacitor using high dielectric constant film for semiconductor memory device and fabrication method therefor App 20020089811 - Roh, Jae-Sung | 2002-07-11 |
Semiconductor device having sidewall spacers manifesting a self-aligned contact hole App 20010017423 - Roh, Jae Sung ;   et al. | 2001-08-30 |
Semiconductor memory device and method for fabricating the same Grant 6,071,770 - Roh June 6, 2 | 2000-06-06 |
Semiconductor device and method for manufacturing the same Grant 6,060,346 - Roh , et al. May 9, 2 | 2000-05-09 |
Semiconductor memory device including a capacitor having a top portion which is a diffusion barrier Grant 5,828,129 - Roh October 27, 1 | 1998-10-27 |
Method for forming a dielectric film and method for fabricating a capacitor using the same Grant 5,783,253 - Roh July 21, 1 | 1998-07-21 |
Method for making thin film transistors Grant 5,728,604 - Rha , et al. March 17, 1 | 1998-03-17 |
Semiconductor device having overlapped storage electrodes Grant 5,629,540 - Roh , et al. May 13, 1 | 1997-05-13 |