| Patent | Date |
|---|
Hardware To Prevent Bottom Purge Incursion In Application Volume And Process Gas Diffusion Below Heater
App 20220307135 - Pathak; Nitin ; et al. | 2022-09-29 |
Systems and methods for providing maintenance access to electronic device manufacturing tools
Grant 11,456,197 - Rice , et al. September 27, 2 | 2022-09-27 |
Heated ceramic faceplate
Grant 11,434,568 - Rocha-Alvarez , et al. September 6, 2 | 2022-09-06 |
Semiconductor Processing Apparatus For High Rf Power Process
App 20220181120 - MA; Jun ; et al. | 2022-06-09 |
Actively Cooled Foreline Trap To Reduce Throttle Valve Drift
App 20220170151 - Fu; Gaosheng ; et al. | 2022-06-02 |
Film stack overlay improvement
Grant 11,339,475 - Han , et al. May 24, 2 | 2022-05-24 |
Bipolar Electrostatic Chuck To Limit Dc Discharge
App 20220130704 - Li; Jian ; et al. | 2022-04-28 |
Semiconductor Processing Chamber To Accommodate Parasitic Plasma Formation
App 20220130713 - Paul; Khokan Chandra ; et al. | 2022-04-28 |
High Heat Loss Heater And Electrostatic Chuck For Semiconductor Processing
App 20220127723 - Li; Jian ; et al. | 2022-04-28 |
High Temperature Bipolar Electrostatic Chuck
App 20220122875 - Li; Jian ; et al. | 2022-04-21 |
Multi-pressure Bipolar Electrostatic Chucking
App 20220122873 - Li; Jian ; et al. | 2022-04-21 |
Real Time Bias Detection And Correction For Electrostatic Chuck
App 20220122874 - Li; Jian ; et al. | 2022-04-21 |
Plasma corrision resistive heater for high temperature processing
Grant 11,299,805 - Khaja , et al. April 12, 2 | 2022-04-12 |
Semiconductor Substrate Support Leveling Apparatus
App 20220108907 - Woo; Katherine ; et al. | 2022-04-07 |
Showerhead assembly with multiple fluid delivery zones
Grant 11,293,099 - Bansal , et al. April 5, 2 | 2022-04-05 |
Power Supply Signal Conditioning For An Electrostatic Chuck
App 20220102179 - Ye; Zheng John ; et al. | 2022-03-31 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 11,276,562 - Ye , et al. March 15, 2 | 2022-03-15 |
Processing equipment component plating
Grant 11,270,870 - Duan , et al. March 8, 2 | 2022-03-08 |
Showerhead Design To Control Stray Deposition
App 20220064797 - DHANAKSHIRUR; Akshay ; et al. | 2022-03-03 |
Multiple Process Semiconductor Processing System
App 20220020615 - Pathak; Nitin ; et al. | 2022-01-20 |
Substrate Support Assemblies And Components
App 20220013373 - Li; Jian ; et al. | 2022-01-13 |
Substrate transfer structure
Grant D938,373 - Schaller , et al. December 14, 2 | 2021-12-14 |
Heated Ceramic Faceplate
App 20210363635 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2021-11-25 |
Bottom Purge For Semiconductor Processing System
App 20210320017 - Pathak; Nitin ; et al. | 2021-10-14 |
Dual temperature heater
Grant 11,133,210 - Du Bois , et al. September 28, 2 | 2021-09-28 |
Substrate Support Pedestal Having Plasma Confinement Features
App 20210296144 - LIN; Xing ; et al. | 2021-09-23 |
Semiconductor Substrate Support With Wafer Backside Damage Control
App 20210287924 - Li; Jian ; et al. | 2021-09-16 |
Chamber Design For Semiconductor Processing
App 20210217592 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2021-07-15 |
Systems And Methods For Providing Maintenance Access To Electronic Device Manufacturing Tools
App 20210183676 - Rice; Michael R. ; et al. | 2021-06-17 |
Loadlock integrated bevel etcher system
Grant 11,031,262 - Basu , et al. June 8, 2 | 2021-06-08 |
Chamber design for semiconductor processing
Grant 11,004,663 - Rocha-Alvarez , et al. May 11, 2 | 2021-05-11 |
Method And Apparatus Of Achieving High Input Impedance Without Using Ferrite Materials For Rf Filter Applications In Plasma
App 20210111000 - Ye; Zheng John ; et al. | 2021-04-15 |
Multi-zone pedestal for plasma processing
Grant 10,971,389 - Lin , et al. April 6, 2 | 2021-04-06 |
Ceramic heater and esc with enhanced wafer edge performance
Grant 10,950,477 - Lin , et al. March 16, 2 | 2021-03-16 |
Semiconductor Processing Apparatus With Improved Uniformity
App 20210066039 - LI; Jian ; et al. | 2021-03-04 |
Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates
Grant 10,916,407 - Khaja , et al. February 9, 2 | 2021-02-09 |
Heater pedestal assembly for wide range temperature control
Grant 10,910,238 - Alayavalli , et al. February 2, 2 | 2021-02-02 |
Bottom and side plasma tuning having closed loop control
Grant 10,910,227 - Rocha-Alvarez , et al. February 2, 2 | 2021-02-02 |
Electrostatic Chuck For Damage-free Substrate Processing
App 20210025056 - KULSHRESHTHA; Prashant Kumar ; et al. | 2021-01-28 |
Thermally Stable Flow Meters For Precision Fluid Delivery
App 20210003340 - SRIVASTAVA; Shailendra ; et al. | 2021-01-07 |
Isolator Apparatus And Methods For Substrate Processing Chambers
App 20210002763 - PATHAK; Nitin ; et al. | 2021-01-07 |
Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers
Grant 10,879,041 - Ye , et al. December 29, 2 | 2020-12-29 |
Pecvd Process
App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
Faceplate Having A Curved Surface
App 20200385862 - SRIVASTAVA; Shailendra ; et al. | 2020-12-10 |
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
Grant 10,858,735 - Wang , et al. December 8, 2 | 2020-12-08 |
Dual-zone heater for plasma processing
Grant 10,811,301 - Lin , et al. October 20, 2 | 2020-10-20 |
Plasma Densification Within A Processing Chamber
App 20200328066 - KWON; Byung Seok ; et al. | 2020-10-15 |
Processing Equipment Component Plating
App 20200321197 - DUAN; Ren-Guan ; et al. | 2020-10-08 |
PECVD process
Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
Tunable ground planes in plasma chambers
Grant 10,774,423 - Janakiraman , et al. September 15, 2 | 2020-09-15 |
Showerhead Assembly With Multiple Fluid Delivery Zones
App 20200263301 - BANSAL; Amit Kumar ; et al. | 2020-08-20 |
Method And Tool For Electrostatic Chucking
App 20200249263 - Kind Code | 2020-08-06 |
Heated Pedestal Design For Improved Heat Transfer And Temperature Uniformity
App 20200234932 - PARIMI; Venkata Sharat Chandra ; et al. | 2020-07-23 |
Loadlock Integrated Bevel Etcher System
App 20200234982 - BASU; Saptarshi ; et al. | 2020-07-23 |
Temperature measurement in multi-zone heater
Grant 10,720,349 - Du Bois , et al. | 2020-07-21 |
Alumina layer formation on aluminum surface to protect aluminum parts
Grant 10,711,350 - Duan , et al. | 2020-07-14 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20200203132 - YE; Zheng John ; et al. | 2020-06-25 |
Ceramic heater with enhanced RF power delivery
Grant 10,692,703 - Lin , et al. | 2020-06-23 |
Film Stack Overlay Improvement For 3d Nand Application
App 20200173022 - HAN; Xinhai ; et al. | 2020-06-04 |
Showerhead assembly with multiple fluid delivery zones
Grant 10,669,629 - Bansal , et al. | 2020-06-02 |
Loadlock integrated bevel etcher system
Grant 10,636,684 - Basu , et al. | 2020-04-28 |
Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components
Grant 10,599,043 - Ogiso , et al. | 2020-03-24 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 10,580,623 - Ye , et al. | 2020-03-03 |
Apparatus and method for UV treatment, chemical treatment, and deposition
Grant 10,570,517 - Bansal , et al. Feb | 2020-02-25 |
Dual-zone Heater For Plasma Processing
App 20200051848 - LIN; Xing ; et al. | 2020-02-13 |
External Substrate System Rotation In A Semiconductor Processing System
App 20200035522 - NGUYEN; Tuan Anh ; et al. | 2020-01-30 |
Controlling temperature in substrate processing systems
Grant 10,544,508 - Rocha-Alvarez , et al. Ja | 2020-01-28 |
High Impedance Rf Filter For Heater With Impedance Tuning Device
App 20200010957 - CHEN; Jian J. ; et al. | 2020-01-09 |
Wafer swapper
Grant 10,518,418 - Du Bois , et al. Dec | 2019-12-31 |
Alignment Systems Employing Actuators Providing Relative Displacement Between Lid Assemblies Of Process Chambers And Substrates,
App 20190390334 - WANG; Danny D. ; et al. | 2019-12-26 |
Loadlock Integrated Bevel Etcher System
App 20190371630 - Basu; Saptarshi ; et al. | 2019-12-05 |
Dual-zone heater for plasma processing
Grant 10,497,606 - Lin , et al. De | 2019-12-03 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20190355609 - KULSHRESHTHA; Prashant ; et al. | 2019-11-21 |
Apparatus for radical-based deposition of dielectric films
Grant 10,480,074 - Zhou , et al. Nov | 2019-11-19 |
PEALD apparatus to enable rapid cycling
Grant 10,480,077 - Du Bois , et al. Nov | 2019-11-19 |
Semiconductor process equipment
Grant 10,483,141 - Janakiraman , et al. Nov | 2019-11-19 |
Photo-assisted deposition of flowable films
Grant 10,460,936 - Underwood , et al. Oc | 2019-10-29 |
High impedance RF filter for heater with impedance tuning device
Grant 10,450,653 - Chen , et al. Oc | 2019-10-22 |
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
Grant 10,435,786 - Wang , et al. O | 2019-10-08 |
Dual Temperature Heater
App 20190304825 - Du BOIS; Dale R. ; et al. | 2019-10-03 |
External substrate rotation in a semiconductor processing system
Grant 10,431,480 - Nguyen , et al. O | 2019-10-01 |
Loadlock integrated bevel etcher system
Grant 10,403,515 - Basu , et al. Sep | 2019-09-03 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
Apparatus and method for purging gaseous compounds
Grant 10,385,448 - Rocha-Alvarez , et al. A | 2019-08-20 |
On-board metrology (OBM) design and implication in process tool
Grant 10,388,549 - Paul , et al. A | 2019-08-20 |
Temperature Measurement In Multi-zone Heater
App 20190206706 - Du Bois; Dale R. ; et al. | 2019-07-04 |
Plasma Corrision Resistive Heater For High Temperature Processing
App 20190203350 - KHAJA; Abdul Aziz ; et al. | 2019-07-04 |
Dual temperature heater
Grant 10,325,799 - Du Bois , et al. | 2019-06-18 |
High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials
Grant 10,325,800 - Kulshreshtha , et al. | 2019-06-18 |
High Impedance Rf Filter For Heater With Impedance Tuning Device
App 20190177848 - CHEN; Jian J. ; et al. | 2019-06-13 |
Dual-channel showerhead for formation of film stacks
Grant 10,276,353 - Alayavalli , et al. | 2019-04-30 |
Plasma corrosion resistive heater for high temperature processing
Grant 10,266,943 - Khaja , et al. | 2019-04-23 |
Showerhead Assembly With Multiple Fluid Delivery Zones
App 20190100839 - BANSAL; Amit Kumar ; et al. | 2019-04-04 |
Processing system containing an isolation region separating a deposition chamber from a treatment chamber
Grant 10,236,197 - Janakiraman , et al. | 2019-03-19 |
Showerhead assembly with multiple fluid delivery zones
Grant 10,233,543 - Bansal , et al. | 2019-03-19 |
Bottom And Side Plasma Tuning Having Closed Loop Control
App 20190080916 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2019-03-14 |
Conditioning Remote Plasma Source For Enhanced Performance Having Repeatable Etch And Deposition Rates
App 20190074163 - KHAJA; Abdul Aziz ; et al. | 2019-03-07 |
Multi-zone Pedestal For Plasma Processing
App 20190035665 - LIN; Xing ; et al. | 2019-01-31 |
Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates
Grant 10,192,717 - Khaja , et al. Ja | 2019-01-29 |
Apparatus and method for purging gaseous compounds
Grant 10,161,035 - Rocha-Alvarez , et al. Dec | 2018-12-25 |
Substrate temperature measurement in multi-zone heater
Grant 10,153,185 - Du Bois , et al. Dec | 2018-12-11 |
High impedance RF filter for heater with impedance tuning device
Grant 10,125,422 - Chen , et al. November 13, 2 | 2018-11-13 |
Bottom and side plasma tuning having closed loop control
Grant 10,128,118 - Rocha-Alvarez , et al. November 13, 2 | 2018-11-13 |
Active Far Edge Plasma Tunability
App 20180323039 - WOO; Hyungje ; et al. | 2018-11-08 |
Edge hump reduction faceplate by plasma modulation
Grant 10,100,408 - Ha , et al. October 16, 2 | 2018-10-16 |
Method and system for supplying a cleaning gas into a process chamber
Grant 10,094,486 - Sankarakrishnan , et al. October 9, 2 | 2018-10-09 |
Multi-zone pedestal for plasma processing
Grant 10,090,187 - Lin , et al. October 2, 2 | 2018-10-02 |
Auto frequency tuned remote plasma source
Grant 10,083,818 - Khaja , et al. September 25, 2 | 2018-09-25 |
Pecvd Process
App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
PECVD process
Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
Method And Apparatus Of Remote Plasmas Flowable Cvd Chamber
App 20180230597 - MA; Ying ; et al. | 2018-08-16 |
PECVD apparatus and process
Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground
Grant 10,032,608 - Chen , et al. July 24, 2 | 2018-07-24 |
Slit valve apparatus, systems, and methods
Grant 10,023,954 - Mazzocco , et al. July 17, 2 | 2018-07-17 |
Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater
Grant 9,975,320 - Duan , et al. May 22, 2 | 2018-05-22 |
Wafer Swapper
App 20180117771 - DU BOIS; Dale R. ; et al. | 2018-05-03 |
Apparatus For Radical-based Deposition Of Dielectric Films
App 20180080125 - ZHOU; Jianhua ; et al. | 2018-03-22 |
Heater Pedestal Assembly For Wide Range Temperature Control
App 20180082866 - ALAYAVALLI; Kaushik ; et al. | 2018-03-22 |
Wafer rotation in a semiconductor chamber
Grant 9,922,819 - Balasubramanian , et al. March 20, 2 | 2018-03-20 |
Tunable Ground Planes In Plasma Chambers
App 20180073142 - Janakiraman; Karthik ; et al. | 2018-03-15 |
Semiconductor Process Equipment
App 20180076075 - JANAKIRAMAN; Karthik ; et al. | 2018-03-15 |
Pecvd Process
App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
Critical Methodology In Vacuum Chambers To Determine Gap And Leveling Between Wafer And Hardware Components
App 20180046088 - OGISO; Hiroyuki ; et al. | 2018-02-15 |
Wafer swapper
Grant 9,889,567 - Du Bois , et al. February 13, 2 | 2018-02-13 |
Photo-assisted Deposition Of Flowable Films
App 20180040473 - UNDERWOOD; Brian Saxton ; et al. | 2018-02-08 |
Apparatus for radical-based deposition of dielectric films
Grant 9,840,777 - Zhou , et al. December 12, 2 | 2017-12-12 |
Electrostatic Chuck Having Properties For Optimal Thin Film Deposition Or Etch Processes
App 20170352569 - KHAJA; Abdul Aziz ; et al. | 2017-12-07 |
PECVD process
Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
Substrate Support Pedestal Having Plasma Confinement Features
App 20170306494 - LIN; Xing ; et al. | 2017-10-26 |
Dynamic Wafer Leveling/tilting/swiveling During A Chemical Vapor Deposition Process
App 20170309528 - BANSAL; Amit Kumar ; et al. | 2017-10-26 |
Ceramic Heater With Enhanced Rf Power Delivery
App 20170278682 - LIN; Xing ; et al. | 2017-09-28 |
Alumina Layer Formation On Aluminum Surface To Protect Aluminum Parts
App 20170275763 - DUAN; Ren-Guan ; et al. | 2017-09-28 |
Multi-zone Pedestal For Plasma Processing
App 20170263484 - LIN; Xing ; et al. | 2017-09-14 |
Multi-zone pedestal for plasma processing
Grant 9,725,806 - Lin , et al. August 8, 2 | 2017-08-08 |
Quad Chamber And Platform Having Multiple Quad Chambers
App 20170194174 - JANAKIRAMAN; Karthik ; et al. | 2017-07-06 |
Uniform Wafer Temperature Achievement In Unsymmetric Chamber Environment
App 20170178758 - HA; Sungwon ; et al. | 2017-06-22 |
Wafer Rotation In A Semiconductor Chamber
App 20170162385 - BALASUBRAMANIAN; Ganesh ; et al. | 2017-06-08 |
Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks
App 20170162417 - YE; Zheng John ; et al. | 2017-06-08 |
On-board Metrology (obm) Design And Implication In Process Tool
App 20170148654 - PAUL; Khokan C. ; et al. | 2017-05-25 |
Method And Apparatus For Cleaning A Cvd Chamber
App 20170121813 - ZHAO; Maosheng ; et al. | 2017-05-04 |
Showerhead Assembly With Multiple Fluid Delivery Zones
App 20170101712 - BANSAL; Amit Kumar ; et al. | 2017-04-13 |
Loadlock Integrated Bevel Etcher System
App 20170092511 - BASU; Saptarshi ; et al. | 2017-03-30 |
Wafer rotation in a semiconductor chamber
Grant 9,593,419 - Balasubramanian , et al. March 14, 2 | 2017-03-14 |
Method And Apparatus Of Achieving High Input Impedance Without Using Ferrite Materials For Rf Filter Applications In Plasma Chambers
App 20170069464 - YE; Zheng John ; et al. | 2017-03-09 |
Ceramic Heater And Esc With Enhanced Wafer Edge Performance
App 20170040198 - LIN; Xing ; et al. | 2017-02-09 |
Yttria-based material coated chemical vapor deposition chamber heater
Grant 9,556,507 - Duan , et al. January 31, 2 | 2017-01-31 |
Pecvd Process
App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
Method and hardware for cleaning UV chambers
Grant 9,506,145 - Baluja , et al. November 29, 2 | 2016-11-29 |
Dual-channel Showerhead For Formation Of Film Stacks
App 20160322200 - ALAYAVALLI; Kaushik ; et al. | 2016-11-03 |
Wafer Swapper
App 20160314995 - DU BOIS; Dale R. ; et al. | 2016-10-27 |
External Substrate Rotation In A Semiconductor Processing System
App 20160315000 - NGUYEN; Tuan Anh ; et al. | 2016-10-27 |
Method And Hardware For Cleaning Uv Chambers
App 20160296981 - BALUJA; Sanjeev ; et al. | 2016-10-13 |
Remote plasma source for controlling plasma skew
Grant 9,466,469 - Khaja , et al. October 11, 2 | 2016-10-11 |
Apparatus And Method For Uv Treatment, Chemical Treatment, And Deposition
App 20160289838 - BANSAL; Amit ; et al. | 2016-10-06 |
PECVD process
Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
Remote Plasma Source For Controlling Plasma Skew
App 20160268103 - KHAJA; Abdul Aziz ; et al. | 2016-09-15 |
Critical chamber component surface improvement to reduce chamber particles
Grant 9,428,424 - Duan , et al. August 30, 2 | 2016-08-30 |
Dual-zone Heater For Plasma Processing
App 20160230281 - LIN; Xing ; et al. | 2016-08-11 |
Apparatus And Method For Purging Gaseous Compounds
App 20160222507 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2016-08-04 |
Chamber coatings
Grant 9,384,950 - Duan , et al. July 5, 2 | 2016-07-05 |
Method and hardware for cleaning UV chambers
Grant 9,364,871 - Baluja , et al. June 14, 2 | 2016-06-14 |
Tunable Ground Planes In Plasma Chambers
App 20160145742 - Janakiraman; Karthik ; et al. | 2016-05-26 |
Processing System Containing An Isolation Region separating a Deposition chamber from a treatment chamber
App 20160133489 - JANAKIRAMAN; Karthik ; et al. | 2016-05-12 |
Methods of directing magnetic fields in a plasma source, and associated systems
Grant 9,305,749 - Ye , et al. April 5, 2 | 2016-04-05 |
Dual Temperature Heater
App 20160093521 - DU BOIS; Dale R. ; et al. | 2016-03-31 |
Auto Frequency Tuned Remote Plasma Source
App 20160086772 - KHAJA; Abdul Aziz ; et al. | 2016-03-24 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20160084400 - SANKARAKRISHNAN; Ramprakash ; et al. | 2016-03-24 |
Alignment Systems Employing Actuators Providing Relative Displacement Between Lid Assemblies Of Process Chambers And Substrates, And Related Methods
App 20160068951 - WANG; Danny D. ; et al. | 2016-03-10 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20160064264 - KULSHRESHTHA; Prashant ; et al. | 2016-03-03 |
Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System
App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
Wet Cleaning Of A Chamber Component
App 20160017263 - DUAN; Ren-Guan ; et al. | 2016-01-21 |
Pecvd Process
App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
Conditioning Remote Plasma Source For Enhanced Performance Having Repeatable Etch And Deposition Rates
App 20160020071 - KHAJA; Abdul Aziz ; et al. | 2016-01-21 |
Multi-zone Pedestal For Plasma Processing
App 20160002779 - LIN; XING ; et al. | 2016-01-07 |
Chamber Design For Semiconductor Processing
App 20150380217 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2015-12-31 |
Plasma Corrosion Resistive Heater For High Temperature Processing
App 20150376780 - KHAJA; Abdul Aziz ; et al. | 2015-12-31 |
Apparatus For Radical-based Deposition Of Dielectric Films
App 20150376788 - ZHOU; Jianhua ; et al. | 2015-12-31 |
Temperature Measurement In Multi-zone Heater
App 20150371881 - DU BOIS; Dale R. ; et al. | 2015-12-24 |
Method and system for supplying a cleaning gas into a process chamber
Grant 9,206,511 - Sankarakrishnan , et al. December 8, 2 | 2015-12-08 |
PECVD process
Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
Wafer Rotation In A Semiconductor Chamber
App 20150262859 - BALASUBRAMANIAN; Ganesh ; et al. | 2015-09-17 |
Critical Chamber Component Surface Improvement To Reduce Chamber Particles
App 20150251961 - DUAN; Ren-Guan ; et al. | 2015-09-10 |
Edge Hump Reduction Faceplate By Plasma Modulation
App 20150247237 - HA; Sungwon ; et al. | 2015-09-03 |
Methods Of Directing Magnetic Fields In A Plasma Source, And Associated Systems
App 20150228456 - YE; ZHENG JOHN ; et al. | 2015-08-13 |
Pecvd Apparatus And Process
App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
Chamber Coatings
App 20150221480 - DUAN; Ren-Guan ; et al. | 2015-08-06 |
Bottom Pump And Purge And Bottom Ozone Clean Hardware To Reduce Fall-on Particle Defects
App 20150211114 - KANGUDE; Abhijit ; et al. | 2015-07-30 |
Diffusion Bonded Plasma Resisted Chemical Vapor Deposition (cvd) Chamber Heater
App 20150201461 - DUAN; Ren-Guan ; et al. | 2015-07-16 |
Pecvd Ceramic Heater With Wide Range Of Operating Temperatures
App 20150194326 - ZHOU; Jianhua ; et al. | 2015-07-09 |
Photo-assisted Deposition Of Flowable Films
App 20150187563 - UNDERWOOD; BRIAN SAXTON ; et al. | 2015-07-02 |
Enabling Radical-based Deposition Of Dielectric Films
App 20150167160 - CHEN; Yihong ; et al. | 2015-06-18 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20150136325 - YE; Zheng John ; et al. | 2015-05-21 |
Quartz showerhead for nanocure UV chamber
Grant 8,911,553 - Baluja , et al. December 16, 2 | 2014-12-16 |
Apparatus and methods for improving reliability of RF grounding
Grant 8,884,524 - Zhou , et al. November 11, 2 | 2014-11-11 |
High Impedance Rf Filter For Heater With Impedance Tuning Device
App 20140302256 - CHEN; Jian J. ; et al. | 2014-10-09 |
Method And Apparatus For Tuning Electrode Impedance For High Frequency Radio Frequency And Terminating Low Frequency Radio Frequency To Ground
App 20140290576 - Chen; Jian J. ; et al. | 2014-10-02 |
High Throughput Multi-layer Stack Deposition
App 20140287593 - HAN; Xinhai ; et al. | 2014-09-25 |
Yttria-based Material Coated Chemical Vapor Deposition Chamber Heater
App 20140263272 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
Rotation Enabled Multifunctional Heater-chiller Pedestal
App 20140263275 - NGUYEN; Tuan Anh ; et al. | 2014-09-18 |
Light Irradiance And Thermal Measurement In Uv And Cvd Chambers
App 20140264059 - BALUJA; Sanjeev ; et al. | 2014-09-18 |
Thermal Treated Sandwich Structure Layer To Improve Adhesive Strength
App 20140272341 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
PLASMA EROSION RESISTED TRANSPARENT Mg-Al-Y-Si-O
App 20140274653 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
Transparent Yttria Coated Quartz Showerhead
App 20140262037 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
Peald Apparatus To Enable Rapid Cycling
App 20140261178 - DU BOIS; Dale R. ; et al. | 2014-09-18 |
Method To Detect Valve Deviation
App 20140261703 - RAJ; Daemian ; et al. | 2014-09-18 |
Multiple Chamber Module And Platform In Semiconductor Process Equipment
App 20140261168 - Liang; Qiwei ; et al. | 2014-09-18 |
Confined process volume PECVD chamber
Grant 8,778,813 - Sankarakrishnan , et al. July 15, 2 | 2014-07-15 |
Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film
Grant 8,753,449 - Chhabra , et al. June 17, 2 | 2014-06-17 |
Method And Apparatus For Cleaning A Cvd Chamber
App 20140158048 - ZHAO; Maosheng ; et al. | 2014-06-12 |
Pecvd Process
App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
Apparatus And Method For Purging Gaseous Compounds
App 20140083523 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
Bottom And Side Plasma Tuning Having Closed Loop Control
App 20140087489 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
Controlling Temperature In Substrate Processing Systems
App 20140083361 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
Deposition of an amorphous carbon layer with high film density and high etch selectivity
Grant 8,679,987 - Reilly , et al. March 25, 2 | 2014-03-25 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20140076236 - SANKARAKRISHNAN; Ramprakash ; et al. | 2014-03-20 |
Pulse method of oxidizing sidewall dielectrics for high capacitance applications
Grant 8,664,061 - Xie , et al. March 4, 2 | 2014-03-04 |
Method And Hardware For Cleaning Uv Chambers
App 20140053866 - BALUJA; Sanjeev ; et al. | 2014-02-27 |
Method for UV based silylation chamber clean
Grant 8,657,961 - Xie , et al. February 25, 2 | 2014-02-25 |
Enhancement In Uv Curing Efficiency Using Oxygen-doped Purge For Ultra Low-k Dielectric Film
App 20130344704 - CHHABRA; Mahendra ; et al. | 2013-12-26 |
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections
Grant 8,597,011 - Kaszuba , et al. December 3, 2 | 2013-12-03 |
Method and system for supplying a cleaning gas into a process chamber
Grant 8,591,699 - Sankarakrishnan , et al. November 26, 2 | 2013-11-26 |
Deposition Of An Amorphous Carbon Layer With High Film Density And High Etch Selectivity
App 20130302996 - REILLY; Patrick ; et al. | 2013-11-14 |
Method For Uv Based Silylation Chamber Clean
App 20130284204 - XIE; BO ; et al. | 2013-10-31 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20130213574 - Sankarakrishnan; Ramprakash ; et al. | 2013-08-22 |
Method For Seasoning Uv Chamber Optical Components To Avoid Degradation
App 20130177706 - Baluja; Sanjeev ; et al. | 2013-07-11 |
Zero Shrinkage Smooth Interface Oxy-nitride And Oxy-amorphous-silicon Stacks For 3d Memory Vertical Gate Application
App 20130161629 - HAN; XINHAI ; et al. | 2013-06-27 |
Method and apparatus for modulating wafer treatment profile in UV chamber
Grant 8,455,849 - Baluja , et al. June 4, 2 | 2013-06-04 |
Apparatus And Methods For Improving Reliability Of Rf Grounding
App 20130126206 - Zhou; Jianhua ; et al. | 2013-05-23 |
Dual-bulb Lamphead Control Methodology
App 20130122611 - YANG; YAO-HUNG ; et al. | 2013-05-16 |
Slit Valve Apparatus, Systems, And Methods
App 20130068391 - Mazzocco; John J. ; et al. | 2013-03-21 |
Fluid filtration for substrate processing chamber
Grant 8,382,885 - Ho , et al. February 26, 2 | 2013-02-26 |
Silicon dioxide layer deposited with BDEAS
Grant 8,343,881 - Lee , et al. January 1, 2 | 2013-01-01 |
Dual-bulb lamphead control methodology
Grant 8,309,421 - Yang , et al. November 13, 2 | 2012-11-13 |
Adhesion Improvement Of Dielectric Barrier To Copper By The Addition Of Thin Interface Layer
App 20120276301 - Lee; Yong-Won ; et al. | 2012-11-01 |
Apparatus And Method For Uv Treatment, Chemical Treatment, And Deposition
App 20120258259 - Bansal; Amit ; et al. | 2012-10-11 |
Multifunctional heater/chiller pedestal for wide range wafer temperature control
Grant 8,274,017 - Yap , et al. September 25, 2 | 2012-09-25 |
Methods And Apparatus For A Multi-zone Pedestal Heater
App 20120211484 - Zhou; Jianhua ; et al. | 2012-08-23 |
Tunable Ground Planes In Plasma Chambers
App 20120205046 - Janakiraman; Karthik ; et al. | 2012-08-16 |
Pulse Method Of Oxidizing Sidewall Dielectrics For High Capacitance Applications
App 20120187534 - Xie; Bo ; et al. | 2012-07-26 |
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
Grant 8,203,126 - Rocha-Alvarez , et al. June 19, 2 | 2012-06-19 |
Method And Apparatus For Modulating Wafer Treatment Profile In Uv Chamber
App 20120132618 - BALUJA; SANJEEV ; et al. | 2012-05-31 |
Dual-bulb Lamphead Control Methodology
App 20120129275 - Yang; Yao-Hung ; et al. | 2012-05-24 |
Quartz Showerhead For Nanocure Uv Chamber
App 20120090691 - Baluja; Sanjeev ; et al. | 2012-04-19 |
Apparatus And Method For Exposing A Substrate To Uv Radiation Using A Reflector Having Both Elliptical And Parabolic Reflective Sections
App 20120003398 - Kaszuba; Andrzei ; et al. | 2012-01-05 |
Silicon Dioxide Layer Deposited With Bdeas
App 20110298099 - LEE; Yong-Won ; et al. | 2011-12-08 |
Confined Process Volume Pecvd Chamber
App 20110294303 - Sankarakrishnan; Ramprakash ; et al. | 2011-12-01 |
Fluid Filtration For Substrate Processing Chamber
App 20110256041 - HO; Dustin W. ; et al. | 2011-10-20 |
Multifunctional Heater/chiller Pedestal For Wide Range Wafer Temperature Control
App 20110147363 - Yap; Lipyeow ; et al. | 2011-06-23 |
Method of improving initiation layer for low-k dielectric film by digital liquid flow meter
Grant 7,947,611 - Ho , et al. May 24, 2 | 2011-05-24 |
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections
Grant 7,909,595 - Kaszuba , et al. March 22, 2 | 2011-03-22 |
Dual Temperature Heater
App 20110034034 - Du Bois; Dale R. ; et al. | 2011-02-10 |
Apparatus And Method For Exposing A Substrate To A Rotating Irradiance Pattern Of Uv Radiation
App 20100285240 - Rocha-Alvarez; Juan Carlos ; et al. | 2010-11-11 |
Methods of uniformity control for low flow process and chamber to chamber matching
Grant 7,829,145 - Balasubramanian , et al. November 9, 2 | 2010-11-09 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
Grant 7,802,538 - Padhi , et al. September 28, 2 | 2010-09-28 |
Vacuum reaction chamber with x-lamp heater
Grant 7,777,197 - Al-Bayati , et al. August 17, 2 | 2010-08-17 |
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
Grant 7,777,198 - Rocha-Alvarez , et al. August 17, 2 | 2010-08-17 |
Ultraviolet-transmitting Microwave Reflector Comprising A Micromesh Screen
App 20100096569 - Nguyen; Tuan Anh ; et al. | 2010-04-22 |
Method And Apparatus For Cleaning A Cvd Chamber
App 20100095891 - Zhao; Maosheng ; et al. | 2010-04-22 |
Method and system for supplying a cleaning gas into a process chamber
Grant 7,699,935 - Sankarakrishnan , et al. April 20, 2 | 2010-04-20 |
Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors
Grant 7,692,171 - Kaszuba , et al. April 6, 2 | 2010-04-06 |
High efficiency UV curing system
Grant 7,663,121 - Nowak , et al. February 16, 2 | 2010-02-16 |
Method and apparatus for cleaning a CVD chamber
Grant 7,654,224 - Zhao , et al. February 2, 2 | 2010-02-02 |
Method and System for Supplying a Cleaning Gas Into a Process Chamber
App 20100012273 - Sankarakrishnan; Ramprakash ; et al. | 2010-01-21 |
Pedestal Heater For Low Temperature Pecvd Application
App 20090314208 - Zhou; Jianhua ; et al. | 2009-12-24 |
Big Foot Lift Pin
App 20090314211 - Du Bois; Dale R. ; et al. | 2009-12-24 |
Method And System For Supplying A Cleaning Gas Into A Process Chamber
App 20090314309 - Sankarakrishnan; Ramprakash ; et al. | 2009-12-24 |
Method And Apparatus For Uv Curing With Water Vapor
App 20090305515 - Ho; Dustin ; et al. | 2009-12-10 |
Uniformity control for low flow process and chamber to chamber matching
Grant 7,622,005 - Balasubramanian , et al. November 24, 2 | 2009-11-24 |
Tunable Ground Planes In Plasma Chambers
App 20090236214 - Janakiraman; Karthik ; et al. | 2009-09-24 |
Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors
Grant 7,589,336 - Kaszuba , et al. September 15, 2 | 2009-09-15 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
Grant 7,572,337 - Rocha-Alvarez , et al. August 11, 2 | 2009-08-11 |
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
Grant 7,566,891 - Rocha-Alvarez , et al. July 28, 2 | 2009-07-28 |
Increased tool utilization/reduction in MWBC for UV curing chamber
Grant 7,554,103 - Rocha-Alvarez , et al. June 30, 2 | 2009-06-30 |
High Efficiency Uv Curing System
App 20090162259 - Nowak; Thomas ; et al. | 2009-06-25 |
Method And Apparatus For Cleaning A Cvd Chamber
App 20090145360 - Zhao; Maosheng ; et al. | 2009-06-11 |
Adhesion Improvement Of Dielectric Barrier To Copper By The Addition Of Thin Interface Layer
App 20090107626 - Lee; Yong-Won ; et al. | 2009-04-30 |
Method and apparatus for cleaning a CVD chamber
Grant 7,500,445 - Zhao , et al. March 10, 2 | 2009-03-10 |
Uniformity Control For Low Flow Process And Chamber To Chamber Matching
App 20090047446 - Balasubramanian; Ganesh ; et al. | 2009-02-19 |
Method for cleaning a CVD chamber
Grant 7,464,717 - Zhao , et al. December 16, 2 | 2008-12-16 |
Computer-readable medium that contains software for executing a method for cleaning a CVD chamber
Grant 7,465,357 - Zhao , et al. December 16, 2 | 2008-12-16 |
Method Of Improving Initiation Layer For Low-k Dielectric Film By Digital Liquid Flow Meter
App 20080280457 - Ho; Dustin W. ; et al. | 2008-11-13 |
Method of improving initiation layer for low-k dielectric film by digital liquid flow meter
Grant 7,410,916 - Ho , et al. August 12, 2 | 2008-08-12 |
Method Of Improving Initiation Layer For Low-k Dielectric Film By Digital Liquid Flow Meter
App 20080119058 - HO; DUSTIN W. ; et al. | 2008-05-22 |
Apparatus And Method For Exposing A Substrate To Uv Radiation Using Asymmetric Reflectors
App 20080067425 - Kaszuba; Andrzei ; et al. | 2008-03-20 |
Ozone Abatement In A Re-circulating Cooling System
App 20070298167 - HO; DUSTIN W. ; et al. | 2007-12-27 |
Nitrogen Enriched Cooling Air Module For Uv Curing System
App 20070295012 - Ho; Dustin W. ; et al. | 2007-12-27 |
Increased Tool Utilization/reduction In Mwbc For Uv Curing Chamber
App 20070298362 - Rocha-Alvarez; Juan Carlos ; et al. | 2007-12-27 |
Apparatus And Method For Exposing A Substrate To A Rotating Irradiance Pattern Of Uv Radiation
App 20070286963 - Rocha-Alvarez; Juan Carlos ; et al. | 2007-12-13 |
Apparatus And Method For Treating A Substrate With Uv Radiation Using Primary And Secondary Reflectors
App 20070257205 - Rocha-Alvarez; Juan Carlos ; et al. | 2007-11-08 |
Apparatus And Method For Exposing A Substrate To Uv Radiation While Monitoring Deterioration Of The Uv Source And Reflectors
App 20070228289 - Kaszuba; Andrzei ; et al. | 2007-10-04 |
Apparatus And Method For Exposing A Substrate To Uv Radiation Using A Reflector Having Both Elliptical And Parabolic Reflective Sections
App 20070228618 - Kaszuba; Andrzei ; et al. | 2007-10-04 |
Interface engineering to improve adhesion between low k stacks
Grant 7,259,111 - Padhi , et al. August 21, 2 | 2007-08-21 |
Method To Deposit Functionally Graded Dielectric Films Via Chemical Vapor Deposition Using Viscous Precursors
App 20070079753 - Padhi; Deenesh ; et al. | 2007-04-12 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
Grant 7,189,658 - Lakshmanan , et al. March 13, 2 | 2007-03-13 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
Grant 7,166,544 - Padhi , et al. January 23, 2 | 2007-01-23 |
Vacuum Reaction Chamber With X-lamp Heater
App 20060289795 - Dubois; Dale R. ; et al. | 2006-12-28 |
Thermally conductive ceramic tipped contact thermocouple
App 20060275933 - Du Bois; Dale R. ; et al. | 2006-12-07 |
Vacuum Reaction Chamber With X-lamp Heater
App 20060272772 - Al-Bayati; Amir ; et al. | 2006-12-07 |
Heated Gas Feedthrough For Cvd Chambers
App 20060270221 - M'Saad; Hichem ; et al. | 2006-11-30 |
High Efficiency Uv Curing System
App 20060249078 - Nowak; Thomas ; et al. | 2006-11-09 |
High efficiency UV curing system
App 20060249175 - Nowak; Thomas ; et al. | 2006-11-09 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
App 20060252273 - Lakshmanan; Annamalai ; et al. | 2006-11-09 |
Tandem Uv Chamber For Curing Dielectric Materials
App 20060251827 - Nowak; Thomas ; et al. | 2006-11-09 |
Method And Apparatus For Cleaning A Cvd Chamber
App 20060231205 - Zhao; Maosheng ; et al. | 2006-10-19 |
Method And Apparatus For Cleaning A Cvd Chamber
App 20060225767 - Zhao; Maosheng ; et al. | 2006-10-12 |
Interface engineering to improve adhesion between low k stacks
App 20060160376 - Padhi; Deenesh ; et al. | 2006-07-20 |
Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber
App 20060054183 - Nowak; Thomas ; et al. | 2006-03-16 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
App 20060046520 - Padhi; Deenesh ; et al. | 2006-03-02 |
Heated gas distribution plate for a processing chamber
Grant 6,946,033 - Tsuei , et al. September 20, 2 | 2005-09-20 |
Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy
Grant 6,932,092 - Rocha-Alvarez , et al. August 23, 2 | 2005-08-23 |
Method for curing low dielectric constant film using direct current bias
Grant 6,914,014 - Li , et al. July 5, 2 | 2005-07-05 |
Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power
Grant 6,797,643 - Rocha-Alvarez , et al. September 28, 2 | 2004-09-28 |
Purge heater design and process development for the improvement of low k film properties
Grant 6,709,721 - Rocha-Alvarez , et al. March 23, 2 | 2004-03-23 |
Method and apparatus for fluid flow control
Grant 6,591,850 - Rocha-Alvarez , et al. July 15, 2 | 2003-07-15 |
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