Ottens; Joost Jeroen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ottens; Joost Jeroen.The latest application filed is for "lithographic apparatus and method".

Company Profile

18.149.127

Ottens; Joost Jeroen - Veldhoven NL
Ottens; Joost Jeroen - TR Veldhoven N/A NL
Ottens; Joost Jeroen - Velhoven NL
Ottens; Joost Jeroen - Vedlhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Metrology method, patterning device, apparatus and computer program Grant 11,385,553 - Zhou , et al. July 12, 2	2022-07-12
Lithographic apparatus and device manufacturing method involving a heater Grant 11,378,893 - Cadee , et al. July 5, 2	2022-07-05
Lithographic Apparatus And Method App 20220206400 - TEN KATE; Nicolaas ; et al.	2022-06-30
Lithographic Apparatus And Device Manufacturing Method App 20220197154 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2022-06-23
Lithographic Apparatus And Device Manufacturing Method App 20220113641 - Leenders; Martinus Hendrikus Antonius ; et al.	2022-04-14
Lithographic apparatus and method Grant 11,281,115 - Ten Kate , et al. March 22, 2	2022-03-22
Lithographic apparatus and device manufacturing method Grant 11,275,316 - Zaal , et al. March 15, 2	2022-03-15
Lithographic apparatus and device manufacturing method Grant 11,209,738 - Leenders , et al. December 28, 2	2021-12-28
Metrology Method, Patterning Device, Apparatus And Computer Program App 20210255553 - ZHOU; Zili ; et al.	2021-08-19
System And Method For Scanning A Sample Using Multi-beam Inspection Apparatus App 20210217582 - MAASSEN; Martinus Gerardus, Maria, Johannes ; et al.	2021-07-15
Lithographic Apparatus And Device Manufacturing Method App 20210173294 - KEMPER; Nicolaas Rudolf ; et al.	2021-06-10
Metrology method, patterning device, apparatus and computer program Grant 10,996,570 - Zhou , et al. May 4, 2	2021-05-04
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20210063898 - CADEE; Theodorus Petrus Maria ; et al.	2021-03-04
Lithographic Apparatus And Device Manufacturing Method App 20200401057 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2020-12-24
Lithographic Apparatus And Device Manufacturing Method App 20200393768 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2020-12-17
Lithographic apparatus and device manufacturing method Grant 10,866,501 - Kemper , et al. December 15, 2	2020-12-15
Lithographic apparatus and device manufacturing method involving a heater Grant 10,838,310 - Cadee , et al. November 17, 2	2020-11-17
Lithographic apparatus and device manufacturing method Grant 10,768,536 - Leenders , et al. Sep	2020-09-08
Lithographic apparatus and device manufacturing method Grant 10,761,433 - Zaal , et al. Sep	2020-09-01
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al.	2020-07-07
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al.	2020-06-09
Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus Grant 10,649,346 - Kaneko , et al.	2020-05-12
Lithographic Apparatus And Method App 20200142325 - Ten Kate; Nicolaas ; et al.	2020-05-07
Metrology Method, Patterning Device, Apparatus and Computer Program App 20200110342 - ZHOU; Zili ; et al.	2020-04-09
Lithographic apparatus and method Grant 10,551,752 - Ten Kate , et al. Fe	2020-02-04
Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ; et al.	2019-08-15
Substrate Table, A Lithographic Apparatus And A Method For Manufacturing A Device Using A Lithographic Apparatus App 20190243256 - KANEKO; Takeshi ; et al.	2019-08-08
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20190235397 - CADEE; Theodorus Petrus Maria ; et al.	2019-08-01
Lithographic Apparatus And Device Manufacturing Method App 20190196342 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2019-06-27
Lithographic apparatus and device manufacturing method involving a heater Grant 10,254,663 - Cadee , et al.	2019-04-09
Lithographic Apparatus And Device Manufacturing Method App 20190079419 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2019-03-14
Lithographic apparatus and device manufacturing method Grant 10,222,711 - Zaal , et al.	2019-03-05
Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus Grant 10,203,612 - Kaneko , et al. Feb	2019-02-12
Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja	2019-01-15
Lithographic apparatus and device manufacturing method Grant 10,126,664 - Leenders , et al. November 13, 2	2018-11-13
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20180292762 - KEMPER; Nicolaas Rudolf ; et al.	2018-10-11
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 10,018,925 - Kemper , et al. July 10, 2	2018-07-10
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ; et al.	2018-07-05
Lithographic Apparatus And Device Manufacturing Method App 20180113388 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2018-04-26
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2	2018-02-27
Lithographic apparatus and device manufacturing method Grant 9,851,644 - Zaal , et al. December 26, 2	2017-12-26
Lithographic Apparatus And Device Manufacturing Method App 20170212432 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2017-07-27
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20170192365 - KEMPER; Nicolaas Rudolf ; et al.	2017-07-06
Lithographic apparatus Grant 9,696,638 - Van Der Pasch , et al. July 4, 2	2017-07-04
Lithographic apparatus and method Grant 9,632,435 - Ten Kate , et al. April 25, 2	2017-04-25
Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ; et al.	2017-04-13
Lithographic apparatus and device manufacturing method Grant 9,618,853 - Leenders , et al. April 11, 2	2017-04-11
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 9,606,429 - Kemper , et al. March 28, 2	2017-03-28
Lithographic apparatus and device manufacturing method Grant 9,581,916 - Ottens , et al. February 28, 2	2017-02-28
Substrate Table, A Lithographic Apparatus And A Method For Manufacturing A Device Using A Lithographic Apparatus App 20170052459 - KANEKO; Takeshi ; et al.	2017-02-23
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-16
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2	2017-01-10
Lithographic Apparatus And Device Manufacturing Method App 20160349629 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2016-12-01
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2	2016-11-29
Substrate table, a lithographic apparatus and a method involving an encoder plate Grant 9,488,919 - Kaneko , et al. November 8, 2	2016-11-08
Lithographic apparatus and device manufacturing method Grant 9,436,096 - Zaal , et al. September 6, 2	2016-09-06
Lithographic Apparatus And Device Manufacturing Method App 20160139514 - OTTENS; Joost Jeroen ; et al.	2016-05-19
Lithographic Apparatus App 20160109812 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al.	2016-04-21
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder Grant 9,268,236 - Jacobs , et al. February 23, 2	2016-02-23
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Grant 9,268,242 - Cadee , et al. February 23, 2	2016-02-23
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20160048085 - CADEE; Theodorus Petrus Maria ; et al.	2016-02-18
Lithographic apparatus and device manufacturing method Grant 9,235,113 - Kemper , et al. January 12, 2	2016-01-12
Lithographic apparatus Grant 9,229,340 - Van Der Pasch , et al. January 5, 2	2016-01-05
Lithographic Apparatus And Device Manufacturing Method App 20150355556 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2015-12-10
Lithographic apparatus and device manufacturing method involving a heater Grant 9,188,880 - Cadee , et al. November 17, 2	2015-11-17
Lithographic apparatus and device manufacturing method Grant 9,188,882 - Ottens , et al. November 17, 2	2015-11-17
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ; et al.	2015-11-12
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2	2015-10-06
Lithographic apparatus and device manufacturing method Grant 9,140,996 - Leenders , et al. September 22, 2	2015-09-22
Lithographic apparatus and device manufacturing method Grant 9,097,992 - Kemper , et al. August 4, 2	2015-08-04
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2	2015-07-14
Support structure, lithographic apparatus and method Grant 9,052,612 - Vermeulen , et al. June 9, 2	2015-06-09
Displacement device, lithographic apparatus and positioning method Grant 9,052,613 - Van de Rijdt , et al. June 9, 2	2015-06-09
Lithographic Apparatus And Device Manufacturing Method App 20150116676 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2015-04-30
Clamping device and object loading method Grant 9,013,682 - Compen , et al. April 21, 2	2015-04-21
Temperature stabilization system to stabilize a temperature of an article Grant 8,994,917 - Ottens , et al. March 31, 2	2015-03-31
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 8,953,142 - Kemper , et al. February 10, 2	2015-02-10
Lithographic apparatus and device manufacturing method Grant 8,947,631 - Zaal , et al. February 3, 2	2015-02-03
Lithographic apparatus and device manufacturing method Grant 8,941,810 - Zaal , et al. January 27, 2	2015-01-27
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20150015857 - KEMPER; Nicolaas Rudolf ; et al.	2015-01-15
Lithographic apparatus and device manufacturing method Grant 8,913,228 - Wijckmans , et al. December 16, 2	2014-12-16
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus Grant 8,902,399 - Compen , et al. December 2, 2	2014-12-02
Lithographic Apparatus And Device Manufacturing Method App 20140327893 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2014-11-06
Lithographic apparatus and device manufacturing method Grant 8,786,823 - Leenders , et al. July 22, 2	2014-07-22
Lithographic apparatus and device manufacturing method Grant 8,743,339 - Zaal , et al. June 3, 2	2014-06-03
Heat pipe, lithographic apparatus and device manufacturing method Grant 8,705,009 - Jacobs , et al. April 22, 2	2014-04-22
Lithographic Apparatus App 20140022527 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al.	2014-01-23
Lithographic apparatus Grant 8,570,492 - Van Der Pasch , et al. October 29, 2	2013-10-29
Lithographic apparatus and method Grant 8,564,763 - Jacobs , et al. October 22, 2	2013-10-22
Lithographic apparatus and device manufacturing method Grant 8,514,365 - De Jong , et al. August 20, 2	2013-08-20
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2	2013-07-09
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus Grant 8,476,167 - Van Mierlo , et al. July 2, 2	2013-07-02
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2	2013-05-21
Lithographic apparatus Grant 8,421,996 - Leenders , et al. April 16, 2	2013-04-16
Lithographic apparatus, stage apparatus and device manufacturing method Grant 8,384,881 - Ottens , et al. February 26, 2	2013-02-26
Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ; et al.	2012-11-01
Lithographic Apparatus App 20120242969 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al.	2012-09-27
Lithographic apparatus and device manufacturing method Grant 8,269,949 - Vermeulen , et al. September 18, 2	2012-09-18
Lithographic apparatus and substrate edge seal Grant 8,232,540 - Ottens , et al. July 31, 2	2012-07-31
Lithographic Apparatus And Device Manufacturing Method App 20120113402 - CADEE; Theodorus Petrus Maria ; et al.	2012-05-10
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2	2012-04-10
Displacement Device, Lithographic Apparatus And Positioning Method App 20110299054 - VAN DE RIJDT; Johannes Hubertus Antonius ; et al.	2011-12-08
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ; et al.	2011-11-24
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ; et al.	2011-11-17
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ; et al.	2011-11-10
Lithographic Apparatus And Device Manufacturing Method App 20110273678 - KEMPER; Nicolaas Rudolf ; et al.	2011-11-10
Lithographic Apparatus And Substrate Edge Seal App 20110267592 - OTTENS; Joost Jeroen ; et al.	2011-11-03
Lithographic Apparatus And Device Manufacturing Method App 20110242512 - KEMPER; Nicolaas Rudolf ; et al.	2011-10-06
Lithographic Apparatus And Device Manufacturing Method App 20110241259 - OTTENS; Joost Jeroen ; et al.	2011-10-06
Heat Pipe, Lithographic Apparatus And Device Manufacturing Method App 20110232878 - Jacobs; Johannes Henricus Wilhelmus ; et al.	2011-09-29
Lithographic apparatus and device manufacturing method Grant 8,027,019 - Kemper , et al. September 27, 2	2011-09-27
Lithographic Apparatus And Device Manufacturing Method App 20110222036 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2011-09-15
Lithographic Apparatus And Method App 20110222033 - Ten Kate; Nicolaas ; et al.	2011-09-15
Lithographic Apparatus And Method App 20110222032 - TEN KATE; Nicolaas ; et al.	2011-09-15
Lithographic Apparatus And Device Manufacturing Method App 20110222035 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2011-09-15
Lithographic apparatus and substrate edge seal Grant 8,003,968 - Ottens , et al. August 23, 2	2011-08-23
Substrate Table, A Lithographic Apparatus And A Method For Manufacturing A Device Using A Lithographic Apparatus App 20110199601 - KANEKO; Takeshi ; et al.	2011-08-18
Lithographic apparatus and device manufacturing method Grant 7,978,306 - Ottens , et al. July 12, 2	2011-07-12
Lithographic Apparatus And Device Manufacturing Method App 20110128517 - Ottens; Joost Jeroen ; et al.	2011-06-02
Lithographic Apparatus and Method of Manufacturing an Electrostatic Clamp for a Lithographic Apparatus App 20110126406 - VAN MIERLO; Hubert Adriaan ; et al.	2011-06-02
Lithographic Apparatus And Device Manufacturing Method App 20110096307 - Leenders; Martinus Hendrikus Antonius ; et al.	2011-04-28
Heat Pipe, Lithographic Apparatus And Device Manufacturing Method App 20110075118 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2011-03-31
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ; et al.	2011-01-13
Lithographic apparatus and device manufacturing method Grant 7,864,292 - Leenders , et al. January 4, 2	2011-01-04
Lithographic Apparatus And Device Manufacturing Method App 20100321650 - CADEE; THEODORUS PETRUS MARIA ; et al.	2010-12-23
Lithographic Apparatus App 20100321653 - Leenders; Martinus Hendrikus Antonius ; et al.	2010-12-23
Lithographic Apparatus And Device Manufacturing Method App 20100245791 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2010-09-30
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method Grant 7,804,582 - Zaal , et al. September 28, 2	2010-09-28
Lithographic apparatus and device manufacturing method having liquid evaporation control Grant 7,804,575 - Cadee , et al. September 28, 2	2010-09-28
Lithographic apparatus Grant 7,804,577 - Leenders , et al. September 28, 2	2010-09-28
Substrate support and lithographic process Grant 7,791,709 - Hennus , et al. September 7, 2	2010-09-07
Clamping Device And Object Loading Method App 20100195080 - Compen; Rene Theodorus ; et al.	2010-08-05
Lithographic apparatus and device manufacturing method Grant 7,751,027 - Jacobs , et al. July 6, 2	2010-07-06
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus Grant 7,746,447 - Zaal , et al. June 29, 2	2010-06-29
Lithographic Apparatus And Device Manufacturing Method App 20100085551 - VERMEULEN; Marcus Martinus Petrus Adrianus ; et al.	2010-04-08
Lithographic Apparatus And Device Manufacturing Method App 20100073650 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2010-03-25
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20100045950 - Kemper; Nicolaas Rudolf ; et al.	2010-02-25
Lithographic apparatus Grant 7,656,501 - Ten Kate , et al. February 2, 2	2010-02-02
Lithographic apparatus Grant 7,639,345 - Ottens , et al. December 29, 2	2009-12-29
Lithographic Apparatus And Device Manufacturing Method App 20090303455 - Kemper; Nicolaas Rudolf ; et al.	2009-12-10
Device manufacturing method, lithographic apparatus and device manufactured thereby Grant 7,630,060 - Ottens , et al. December 8, 2	2009-12-08
Support Structure, Lithographic Apparatus And Method App 20090290137 - VERMEULEN; Marcus Martinus Petrus Adrianus ; et al.	2009-11-26
Lithographic Apparatus And Method App 20090279061 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2009-11-12
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2	2009-10-13
Optimized correction of wafer thermal deformations in a lithographic process Grant 7,595,496 - Ottens , et al. September 29, 2	2009-09-29
Lithographic apparatus and device manufacturing method Grant 7,593,096 - Loopstra , et al. September 22, 2	2009-09-22
Lithographic apparatus and device manufacturing method Grant 7,564,536 - Ottens , et al. July 21, 2	2009-07-21
Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck Grant 7,532,310 - Mertens , et al. May 12, 2	2009-05-12
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,528,935 - Zaal , et al. May 5, 2	2009-05-05
Lithographic Apparatus, Stage Apparatus And Device Manufacturing Method App 20090086180 - OTTENS; Joost Jeroen ; et al.	2009-04-02
Lithographic apparatus and device manufacturing method App 20080297744 - Eduard De Jong; Frederik ; et al.	2008-12-04
Lithographic apparatus and substrate edge seal App 20080284995 - Ottens; Joost Jeroen ; et al.	2008-11-20
Calibration substrate and method for calibrating a lithographic apparatus Grant 7,453,063 - Ottens , et al. November 18, 2	2008-11-18
Lithographic apparatus and device manufacturing method App 20080278697 - Ottens; Joost Jeroen ; et al.	2008-11-13
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus App 20080218712 - Compen; Rene Theodorus Petrus ; et al.	2008-09-11
Device manufacturing method, lithographic apparatus and device manufactured thereby App 20080212053 - Ottens; Joost Jeroen ; et al.	2008-09-04
Lithographic apparatus and substrate edge seal Grant 7,420,194 - Ottens , et al. September 2, 2	2008-09-02
Lithographic apparatus and device manufacturing method Grant 7,411,657 - Ottens , et al. August 12, 2	2008-08-12
Substrate support and lithographic process App 20080158526 - Hennus; Pieter Renaat Maria ; et al.	2008-07-03
Lithographic apparatus and device manufacturing method App 20080137055 - Hennus; Pieter Renaat Maria ; et al.	2008-06-12
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus Grant 7,385,670 - Compen , et al. June 10, 2	2008-06-10
Lithographic apparatus and device manufacturing method Grant 7,327,439 - Zaal , et al. February 5, 2	2008-02-05
Lithographic apparatus and method of a manufacturing device Grant 7,327,438 - Zaal , et al. February 5, 2	2008-02-05
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method App 20080024748 - Zaal; Koen Jacobus Johannes Maria ; et al.	2008-01-31
Lithographic apparatus and device manufacturing method Grant 7,307,696 - Ottens , et al. December 11, 2	2007-12-11
Lithographic apparatus and device manufacturing method Grant 7,304,715 - Cadee , et al. December 4, 2	2007-12-04
Lithographic apparatus and device manufacturing method App 20070263201 - Loopstra; Erik Roelof ; et al.	2007-11-15
Optimized correction of water thermal deformations in a lithographic process App 20070257209 - Ottens; Joost Jeroen ; et al.	2007-11-08
Lithographic apparatus and device manufacturing method App 20070242245 - Wijckmans; Maurice ; et al.	2007-10-18
Lithographic apparatus and device manufacturing method App 20070229786 - Kemper; Nicolaas Rudolf ; et al.	2007-10-04
Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus App 20070182946 - Ottens; Joost Jeroen ; et al.	2007-08-09
Optimized correction of wafer thermal deformations in a lithographic process Grant 7,250,237 - Ottens , et al. July 31, 2	2007-07-31
Lithographic apparatus and device manufacturing method Grant 7,245,357 - Van Zwet , et al. July 17, 2	2007-07-17
Lithographic apparatus and device manufacturing method App 20070153244 - Maria Zaal; Koen Jacobus Johannes ; et al.	2007-07-05
Using unflatness information of the substrate table or mask table for decreasing overlay Grant 7,239,368 - Oesterholt , et al. July 3, 2	2007-07-03
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus App 20070146664 - Zaal; Koen Jacobus Johannes Maria ; et al.	2007-06-28
Lithographic apparatus and substrate edge seal App 20070146665 - Ottens; Joost Jeroen ; et al.	2007-06-28
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus App 20070139855 - Van Mierlo; Hubert Adriaan ; et al.	2007-06-21
Lithographic apparatus and device manufacturing method App 20070132979 - Lof; Joeri ; et al.	2007-06-14
Lithographic apparatus and device manufacturing method Grant 7,227,619 - Zaal , et al. June 5, 2	2007-06-05
Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus Grant 7,224,438 - Ottens , et al. May 29, 2	2007-05-29
Lithographic apparatus App 20070109512 - Kate; Nicolaas Ten ; et al.	2007-05-17
Lithographic apparatus App 20070110213 - Leenders; Martinus Hendrikus Antonius ; et al.	2007-05-17
Lithographic apparatus and device manufacturing method App 20070109513 - Antonius Leenders; Martinus Hendrikus ; et al.	2007-05-17
Lithographic apparatus and device manufacturing method App 20070103666 - Ottens; Joost Jeroen ; et al.	2007-05-10
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2	2007-05-08
Lithographic apparatus and device manufacturing method App 20070097346 - Maria Zaal; Koen Jacobus Johannes ; et al.	2007-05-03
Lithographic apparatus App 20070085987 - Ottens; Joost Jeroen ; et al.	2007-04-19
Lithographic apparatus and device manufacturing method App 20070070315 - Jacobs; Johannes Henricus Wilhelmus ; et al.	2007-03-29
Lithographic apparatus and device manufacturing method Grant 7,196,768 - Ottens , et al. March 27, 2	2007-03-27
Electrostatic clamp assembly for a lithographic apparatus Grant 7,187,433 - Ottens , et al. March 6, 2	2007-03-06
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,161,662 - Ottens , et al. January 9, 2	2007-01-09
Lithographic apparatus, article support member, and method Grant 7,133,120 - Zaal , et al. November 7, 2	2006-11-07
Lithographic apparatus and device manufacturing method Grant 7,119,885 - Ottens , et al. October 10, 2	2006-10-10
Lithographic apparatus and device manufacturing method Grant 7,119,884 - Ottens , et al. October 10, 2	2006-10-10
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,110,091 - Zaal , et al. September 19, 2	2006-09-19
Lithographic apparatus, substrate holder and method of manufacturing Grant 7,110,085 - Zaal , et al. September 19, 2	2006-09-19
Lithographic apparatus and device manufacturing method Grant 7,106,416 - Box , et al. September 12, 2	2006-09-12
Method and apparatus for cooling a reticle during lithographic exposure Grant 7,105,836 - del Puerto , et al. September 12, 2	2006-09-12
Chuck, lithographic apparatus and device manufacturing method Grant 7,092,231 - Hoeks , et al. August 15, 2	2006-08-15
Lithographic apparatus and device manufacturing method Grant 7,088,431 - Ottens , et al. August 8, 2	2006-08-08
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060158638 - Maria Zaal; Koen Jacobus Johannes ; et al.	2006-07-20
Substrate carrier and method for making a substrate carrier Grant 7,064,808 - Gilissen , et al. June 20, 2	2006-06-20
Calibration substrate and method for calibrating a lithographic apparatus App 20060119830 - Ottens; Joost Jeroen ; et al.	2006-06-08
Using unflatness information of the substrate table or mask table for decreasing overlay App 20060114436 - Oesterholt; Rene ; et al.	2006-06-01
Lithographic apparatus and device manufacturing method App 20060103831 - Ottens; Joost Jeroen ; et al.	2006-05-18
Lithographic apparatus and device manufacturing method App 20060102277 - Maria Zaal; Koen Jacobus Johannes ; et al.	2006-05-18
Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck App 20060102849 - Mertens; Jeroen Johannes Sophia Maria ; et al.	2006-05-18
Lithographic Apparatus And Device Manufacturing Method App 20060097201 - Neerhof; Hendrik Antony Johannes ; et al.	2006-05-11
Lithographic apparatus and device manufacturing method Grant 7,041,989 - Neerhof , et al. May 9, 2	2006-05-09
Lithographic apparatus and device manufacturing method App 20060087637 - Ottens; Joost Jeroen ; et al.	2006-04-27
Lithographic apparatus and device manufacturing method App 20060087630 - Kemper; Nicolaas Rudolf ; et al.	2006-04-27
Lithographic apparatus, device manufacturing method and substrate holder Grant 7,030,967 - Van Ballegoij , et al. April 18, 2	2006-04-18
Lithographic apparatus and device manufacturing method Grant 7,027,132 - Ottens , et al. April 11, 2	2006-04-11
Lithographic apparatus and device manufacturing method Grant 7,019,820 - Ottens , et al. March 28, 2	2006-03-28
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,019,816 - Ottens , et al. March 28, 2	2006-03-28
Lithographic apparatus and device manufacturing method App 20060033892 - Cadee; Theodorus Petrus Maria ; et al.	2006-02-16
Lithographic apparatus and device manufacturing method App 20060033898 - Cadee; Theodorus Petrus Maria ; et al.	2006-02-16
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Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050134829 - Ottens, Joost Jeroen ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050134828 - Ottens, Joost Jeroen ; et al.	2005-06-23
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Lithographic Apparatus And Device Manufacturing Method App 20050128463 - Ottens, Joost Jeroen ; et al.	2005-06-16
Lithographic apparatus and device manufacturing method App 20050128448 - Box, Wilhelmus Josephus ; et al.	2005-06-16
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Lithographic apparatus and device manufacturing method App 20050122503 - Ottens, Joost Jeroen ; et al.	2005-06-09
Lithographic apparatus and device manufacturing method App 20050117141 - Ottens, Joost Jeroen ; et al.	2005-06-02
Lithographic apparatus and device manufacturing method Grant 6,897,945 - Ottens , et al. May 24, 2	2005-05-24
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Lithographic apparatus and method of a manufacturing device App 20050002010 - Zaal, Koen Jacobus Johannes Maria ; et al.	2005-01-06
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