Opsal; Jon

Patent Applications and Registrations

Patent applications and USPTO patent grants for Opsal; Jon.The latest application filed is for "high resolution monitoring of cd variations".

Company Profile

0.120.90

Opsal; Jon - Livermore CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Modulated reflectance measurement system using UV probe Grant 8,817,260 - Opsal , et al. August 26, 2	2014-08-26
High resolution monitoring of CD variations Grant 8,049,903 - Opsal , et al. November 1, 2	2011-11-01
High Resolution Monitoring Of Cd Variations App 20110205554 - OPSAL; Jon ; et al.	2011-08-25
Methods for depth profiling in semiconductors using modulated optical reflectance technology Grant 7,982,867 - Salnik , et al. July 19, 2	2011-07-19
High resolution monitoring of CD variations Grant 7,933,026 - Opsal , et al. April 26, 2	2011-04-26
Methods For Depth Profiling In Semiconductors Using Modulated Optical Reflectance Technology App 20100315625 - SALNIK; Alex ; et al.	2010-12-16
Scatterometry multi-structure shape definition with multi-periodicity Grant 7,747,424 - Opsal , et al. June 29, 2	2010-06-29
Modulated Reflectance Measurement System Using Uv Probe App 20100134785 - Opsal; Jon ; et al.	2010-06-03
Methods for depth profiling in semiconductors using modulated optical reflectance technology Grant 7,705,977 - Salnik , et al. April 27, 2	2010-04-27
Detector configurations for optical metrology Grant 7,667,841 - Opsal February 23, 2	2010-02-23
Modulated reflectance measurement system using UV probe Grant 7,646,486 - Opsal , et al. January 12, 2	2010-01-12
Modulated reflectance measurement system with multiple wavelengths Grant 7,619,741 - Nicolaides , et al. November 17, 2	2009-11-17
Global shape definition method for scatterometry Grant 7,613,598 - Opsal , et al. November 3, 2	2009-11-03
High Resolution Monitoring Of Cd Variations App 20090259605 - Opsal; Jon ; et al.	2009-10-15
High resolution monitoring of CD variations Grant 7,567,351 - Opsal , et al. July 28, 2	2009-07-28
Detector configurations for optical metrology App 20090066954 - Opsal; Jon	2009-03-12
Probe beam profile modulated optical reflectance system and methods Grant 7,502,104 - Salnik , et al. March 10, 2	2009-03-10
Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications Grant 7,499,168 - Salnik , et al. March 3, 2	2009-03-03
Multiple tool and structure analysis Grant 7,478,019 - Zangooie , et al. January 13, 2	2009-01-13
Modulated Reflectance Measurement System With Multiple Wavelengths App 20080309943 - Nicolaides; Lena ; et al.	2008-12-18
Detector configurations for optical metrology Grant 7,456,964 - Opsal November 25, 2	2008-11-25
Systems and methods for immersion metrology Grant 7,436,527 - Opsal October 14, 2	2008-10-14
Modulated reflectance measurement system with multiple wavelengths Grant 7,423,757 - Nicolaides , et al. September 9, 2	2008-09-09
Method for measuring peak carrier concentration in ultra-shallow junctions Grant 7,403,022 - Salnik , et al. July 22, 2	2008-07-22
Beam profile ellipsometer with rotating compensator Grant 7,400,403 - Opsal July 15, 2	2008-07-15
Modulated Reflectance Measurement System Using Uv Probe App 20080158565 - Opsal; Jon ; et al.	2008-07-03
Methods for depth profiling in semiconductors using modulated optical reflectance technology App 20080151247 - Salnik; Alex ; et al.	2008-06-26
Modulated reflectance measurement system using UV probe Grant 7,362,441 - Opsal , et al. April 22, 2	2008-04-22
Modulated optical reflectance measurement system with enhanced sensitivity App 20080074668 - Salnik; Alex ; et al.	2008-03-27
Probe beam profile modulated optical reflectance system and methods App 20080036998 - Salnik; Alex ; et al.	2008-02-14
Method for measuring ion-implanted semiconductors with improved repeatability Grant 7,330,260 - Nicolaides , et al. February 12, 2	2008-02-12
Systems and methods for immersion metrology App 20080024780 - Opsal; Jon	2008-01-31
Detector configurations for optical metrology App 20080018895 - Opsal; Jon	2008-01-24
Photothermal system with spectroscopic pump and probe Grant 7,280,215 - Salnik , et al. October 9, 2	2007-10-09
Scatterometry multi-structure shape definition with multi-periodicity App 20070219737 - Opsal; Jon ; et al.	2007-09-20
High resolution monitoring of CD variations App 20070201017 - Opsal; Jon ; et al.	2007-08-30
Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications App 20070188761 - Salnik; Alex ; et al.	2007-08-16
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 7,248,375 - Opsal , et al. July 24, 2	2007-07-24
Characterization of ultra shallow junctions in semiconductor wafers Grant 7,248,367 - Salnik , et al. July 24, 2	2007-07-24
Beam profile ellipsometer with rotating compensator App 20070159630 - Opsal; Jon	2007-07-12
Scatterometry for samples with non-uniform edges Grant 7,233,390 - Chang , et al. June 19, 2	2007-06-19
Systems and methods for immersion metrology Grant 7,215,431 - Opsal May 8, 2	2007-05-08
Position modulated optical reflectance measurement system for semiconductor metrology Grant 7,212,288 - Opsal , et al. May 1, 2	2007-05-01
Detector configurations for optical metrology Grant 7,206,071 - Opsal April 17, 2	2007-04-17
Beam profile ellipsometer with rotating compensator Grant 7,206,070 - Opsal April 17, 2	2007-04-17
Global shape definition method for scatterometry App 20070040852 - Opsal; Jon ; et al.	2007-02-22
Modulated reflectance measurement system using UV probe App 20070008541 - Opsal; Jon ; et al.	2007-01-11
Global shape definition method for scatterometry Grant 7,145,664 - Opsal , et al. December 5, 2	2006-12-05
Modulated reflectance measurement system with multiple wavelengths App 20060262314 - Nicolaides; Lena ; et al.	2006-11-23
Modulated reflectance measurement system using UV probe Grant 7,126,690 - Opsal , et al. October 24, 2	2006-10-24
Modulated reflectance measurement system with multiple wavelengths Grant 7,116,424 - Nicolaides , et al. October 3, 2	2006-10-03
Modulated reflectance measurement system with multiple wavelengths Grant 7,106,446 - Nicolaides , et al. September 12, 2	2006-09-12
Method for determining ion concentration and energy of shallow junction implants Grant 7,099,007 - Hovinen , et al. August 29, 2	2006-08-29
Feed forward critical dimension control Grant 7,085,676 - Opsal , et al. August 1, 2	2006-08-01
Multiple tool and structure analysis App 20060167651 - Zangooie; Shahin ; et al.	2006-07-27
Method for measuring peak carrier concentration in ultra-shallow junctions App 20060166385 - Salnik; Alex ; et al.	2006-07-27
Optical scatterometry of asymmetric lines and structures Grant 7,061,627 - Opsal , et al. June 13, 2	2006-06-13
Optical metrology tool having improved contrast Grant 7,050,162 - Opsal , et al. May 23, 2	2006-05-23
Beam profile ellipsometer with rotating compensator App 20060103844 - Opsal; Jon	2006-05-18
Modulated reflectance measurement system with multiple wavelengths App 20060092425 - Nicolaides; Lena ; et al.	2006-05-04
CD metrology analysis using green's function Grant 7,038,850 - Chang , et al. May 2, 2	2006-05-02
Real time analysis of periodic structures on semiconductors Grant 7,031,848 - Opsal , et al. April 18, 2	2006-04-18
Detector configurations for optical metrology App 20060066868 - Opsal; Jon	2006-03-30
Ion implant monitoring through measurement of modulated optical response Grant 7,002,690 - Salnik , et al. February 21, 2	2006-02-21
Detector configurations for optical metrology Grant 6,995,842 - Opsal February 7, 2	2006-02-07
Standardized sample for characterizing the performance of a scatterometer Grant 6,989,896 - Wen , et al. January 24, 2	2006-01-24
Ion implant monitoring through measurement of modulated optical response Grant 6,989,899 - Salnik , et al. January 24, 2	2006-01-24
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20060012803 - Opsal; Jon ; et al.	2006-01-19
Calibration and alignment of X-ray reflectometric systems Grant 6,987,832 - Koppel , et al. January 17, 2	2006-01-17
Scatterometry to simultaneously measure critical dimensions and film properties Grant 6,982,791 - Opsal January 3, 2	2006-01-03
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,972,852 - Opsal , et al. December 6, 2	2005-12-06
Real time analysis of periodic structures on semiconductors App 20050251350 - Opsal, Jon ; et al.	2005-11-10
Combination thermal wave and optical spectroscopy measurement systems Grant 6,963,401 - Opsal , et al. November 8, 2	2005-11-08
Real time analysis of periodic structures on semiconductors Grant 6,947,850 - Opsal , et al. September 20, 2	2005-09-20
Systems and methods for immersion metrology App 20050195412 - Opsal, Jon	2005-09-08
Method for measuring ion-implanted semiconductors with improved repeatability App 20050195399 - Nicolaides, Lena ; et al.	2005-09-08
Ion implant monitoring through measurement of modulated optical response App 20050190369 - Salnik, Alex ; et al.	2005-09-01
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,934,025 - Opsal , et al. August 23, 2	2005-08-23
Real time analysis of periodic structures on semiconductors Grant 6,931,361 - Opsal , et al. August 16, 2	2005-08-16
Systems and methods for evaluating semiconductor layers App 20050162654 - Opsal, Jon ; et al.	2005-07-28
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,922,244 - Rosencwaig , et al. July 26, 2	2005-07-26
Method for determining ion concentration and energy of shallow junction implants App 20050140976 - Hovinen, Minna ; et al.	2005-06-30
CD metrology analysis using green's function App 20050137809 - Chang, Yia Chung ; et al.	2005-06-23
Detector configurations for optical metrology App 20050105089 - Opsal, Jon	2005-05-19
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer Grant 6,894,781 - Wei , et al. May 17, 2	2005-05-17
ION implant monitoring through measurement of modulated optical response App 20050083528 - Salnik, Alex ; et al.	2005-04-21
Standardized sample for characterizing the performance of a scatterometer App 20050083520 - Wen, Youxian ; et al.	2005-04-21
Systems and methods for evaluating semiconductor layers Grant 6,882,424 - Opsal , et al. April 19, 2	2005-04-19
Apparatus for optical measurements of nitrogen concentration in thin films Grant 6,882,421 - Opsal , et al. April 19, 2	2005-04-19
Photothermal system with spectroscopic pump and probe App 20050062971 - Salnik, Alex ; et al.	2005-03-24
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20050057760 - Opsal, Jon ; et al.	2005-03-17
CD metrology analysis using green's function Grant 6,867,866 - Chang , et al. March 15, 2	2005-03-15
Optical scatterometry of asymmetric lines and structures App 20050041258 - Opsal, Jon ; et al.	2005-02-24
Scatterometry to simultaneously measure critical dimensions and film properties App 20050041250 - Opsal, Jon	2005-02-24
Method for determining ion concentration and energy of shallow junction implants Grant 6,859,281 - Hovinen , et al. February 22, 2	2005-02-22
Position modulated optical reflectance measurement system for semiconductor metrology App 20050036136 - Opsal, Jon ; et al.	2005-02-17
Spatial averaging technique for ellipsometry and reflectometry Grant 6,856,385 - Wei , et al. February 15, 2	2005-02-15
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements Grant 6,842,259 - Rosencwaig , et al. January 11, 2	2005-01-11
Feed forward critical dimension control App 20040267490 - Opsal, Jon ; et al.	2004-12-30
Apparatus for evaluating metalized layers on semiconductors Grant 6,836,338 - Opsal , et al. December 28, 2	2004-12-28
Detector configurations for optical metrology Grant 6,836,328 - Opsal December 28, 2	2004-12-28
Photothermal ultra-shallow junction monitoring system with UV pump App 20040253751 - Salnik, Alex ; et al.	2004-12-16
Characterization of ultra shallow junctions in semiconductor wafers App 20040251927 - Salnik, Alex ; et al.	2004-12-16
Broadband spectroscopic rotating compensator ellipsometer Grant 6,831,743 - Aspnes , et al. December 14, 2	2004-12-14
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,829,057 - Opsal , et al. December 7, 2	2004-12-07
Apparatus for optical measurements of nitrogen concentration in thin films App 20040239933 - Opsal, Jon ; et al.	2004-12-02
Combination thermal wave and optical spectroscopy measurement systems App 20040233435 - Opsal, Jon ; et al.	2004-11-25
Real time analysis of periodic structures on semiconductors App 20040233462 - Opsal, Jon ; et al.	2004-11-25
Thin film optical measurement system and method with calibrating ellipsometer App 20040218180 - Rosencwaig, Allan ; et al.	2004-11-04
Calibration and alignment of X-ray reflectometric systems App 20040218717 - Koppel, Louis N. ; et al.	2004-11-04
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements Grant 6,813,034 - Rosencwaig , et al. November 2, 2	2004-11-02
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements App 20040212810 - Rosencwaig, Allan ; et al.	2004-10-28
Global shape definition method for scatterometry App 20040210402 - Opsal, Jon ; et al.	2004-10-21
Thin film optical measurement system and method with calibrating ellipsometer App 20040207845 - Opsal, Jon ; et al.	2004-10-21
Scatterometry for samples with non-uniform edges App 20040201836 - Chang, Yia-Chung ; et al.	2004-10-14
Systems and methods for evaluating semiconductor layers App 20040174538 - Opsal, Jon ; et al.	2004-09-09
Apparatus for optical measurements of nitrogen concentration in thin films Grant 6,784,993 - Opsal , et al. August 31, 2	2004-08-31
Real time analysis of periodic structures on semiconductors Grant 6,778,911 - Opsal , et al. August 17, 2	2004-08-17
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,774,997 - Rosencwaig , et al. August 10, 2	2004-08-10
Calibration and alignment of X-ray reflectometric systems Grant 6,768,785 - Koppel , et al. July 27, 2	2004-07-27
Real time analysis of periodic structures on semiconductors App 20040122599 - Opsal, Jon ; et al.	2004-06-24
Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry Grant 6,754,305 - Rosencwaig , et al. June 22, 2	2004-06-22
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,753,962 - Opsal , et al. June 22, 2	2004-06-22
Modulated reflectance measurement system using UV probe App 20040104352 - Opsal, Jon ; et al.	2004-06-03
Detector configurations for optical metrology App 20040085539 - Opsal, Jon	2004-05-06
Method for determining ion concentration and energy of shallow junction implants App 20040085538 - Hovinen, Minna ; et al.	2004-05-06
Calibration and alignment of X-ray reflectometric systems App 20040052330 - Koppel, Louis N. ; et al.	2004-03-18
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20040046968 - Opsal, Jon ; et al.	2004-03-11
Real time analysis of periodic structures on semiconductors Grant 6,704,661 - Opsal , et al. March 9, 2	2004-03-09
Broadband spectroscopic rotating compensator ellipsometer App 20040042009 - Aspnes, David E. ; et al.	2004-03-04
Detector configurations for optical metrology Grant 6,678,046 - Opsal January 13, 2	2004-01-13
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements Grant 6,678,349 - Opsal , et al. January 13, 2	2004-01-13
Combination thermal wave and optical spectroscopy measurement systems Grant 6,671,047 - Opsal , et al. December 30, 2	2003-12-30
Modulated reflectance measurement system with multiple wavelengths App 20030234932 - Nicolaides, Lena ; et al.	2003-12-25
Method for determining ion concentration and energy of shallow junction implants Grant 6,665,071 - Hovinen , et al. December 16, 2	2003-12-16
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,654,131 - Opsal , et al. November 25, 2	2003-11-25
Spatial averaging technique for ellipsometry and reflectometry App 20030214654 - Wei, Lanhua ; et al.	2003-11-20
Broadband spectroscopic rotating compensator ellipsometer Grant 6,650,415 - Aspnes , et al. November 18, 2	2003-11-18
Apparatus for optical measurements of nitrogen concentration in thin films App 20030206299 - Opsal, Jon ; et al.	2003-11-06
Calibration and alignment of X-ray reflectometric systems Grant 6,643,354 - Koppel , et al. November 4, 2	2003-11-04
Real time analysis of periodic structures on semiconductors App 20030204326 - Opsal, Jon ; et al.	2003-10-30
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer App 20030197864 - Wei, Lanhua ; et al.	2003-10-23
Apparatus for analyzing multi-layer thin film stacks on semiconductors App 20030160959 - Rosencwaig, Allan ; et al.	2003-08-28
Combination thin-film stress and thickness measurement device Grant 6,608,689 - Wei , et al. August 19, 2	2003-08-19
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements App 20030147086 - Rosencwaig, Allan ; et al.	2003-08-07
Method for determining ion concentration and energy of shallow junction implants App 20030137663 - Hovinen, Minna ; et al.	2003-07-24
Apparatus for evaluating metalized layers on semiconductors App 20030137668 - Opsal, Jon ; et al.	2003-07-24
Combination thermal wave and optical spectroscopy measurement systems App 20030137664 - Opsal, Jon ; et al.	2003-07-24
Optical metrology tool having improved contrast App 20030133102 - Opsal, Jon	2003-07-17
Thin film optical measurement system and method with calibrating ellipsometer App 20030123060 - Opsal, Jon ; et al.	2003-07-03
Apparatus for optical measurements of nitrogen concentration in thin films Grant 6,583,876 - Opsal , et al. June 24, 2	2003-06-24
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer Grant 6,583,875 - Wei , et al. June 24, 2	2003-06-24
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,567,213 - Rosencwaig , et al. May 20, 2	2003-05-20
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements App 20030081725 - Opsal, Jon ; et al.	2003-05-01
Apparatus for optical measurements of nitrogen concentration in thin films App 20030053053 - Opsal, Jon ; et al.	2003-03-20
Detector configurations for optical metrology App 20030043375 - Opsal, Jon	2003-03-06
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,515,746 - Opsal , et al. February 4, 2	2003-02-04
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements Grant 6,512,815 - Opsal , et al. January 28, 2	2003-01-28
Broadband spectroscopic rotating compensator ellipsometer App 20020191186 - Aspnes, David E. ; et al.	2002-12-19
Thin film optical measurement system and method with calibrating ellipsometer App 20020176081 - Opsal, Jon ; et al.	2002-11-28
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements App 20020154736 - Opsal, Jon ; et al.	2002-10-24
Apparatus for analyzing multi-layer thin film stacks on semiconductors App 20020154302 - Rosencwaig, Allan ; et al.	2002-10-24
Analysis of interface layer characteristics Grant 6,465,265 - Opsal , et al. October 15, 2	2002-10-15
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20020135783 - Opsal, Jon ; et al.	2002-09-26
Calibration and alignment of X-ray reflectometric systems Grant 6,453,006 - Koppel , et al. September 17, 2	2002-09-17
Broadband spectroscopic rotating compensator ellipsometer Grant 6,449,043 - Aspnes , et al. September 10, 2	2002-09-10
Calibration and alignment of X-ray reflectometric systems App 20020110218 - Koppel, Louis N. ; et al.	2002-08-15
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,429,943 - Opsal , et al. August 6, 2	2002-08-06
Apparatus for evaluating metalized layers on semiconductors App 20020097403 - Opsal, Jon ; et al.	2002-07-25
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,411,385 - Aspnes , et al. June 25, 2	2002-06-25
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements Grant 6,408,048 - Opsal , et al. June 18, 2	2002-06-18
Analysis of interface layer characteristics App 20020045282 - Opsal, Jon ; et al.	2002-04-18
Spatial averaging technique for ellipsometry and reflectometry App 20020045284 - Wei, Lanhua ; et al.	2002-04-18
Broadband spectroscopic rotating compensator ellipsometer App 20020018205 - Aspnes, David E. ; et al.	2002-02-14
Apparatus for evaluating metalized layers on semiconductors App 20020015157 - Opsal, Jon ; et al.	2002-02-07
Spatial averaging technique for ellipsometry and reflectometry App 20020012123 - Wei, Lanhua ; et al.	2002-01-31
Apparatus for analyzing samples using combined thermal wave and x-ray reflectance measurements App 20020001364 - Opsal, Jon ; et al.	2002-01-03
Thin film optical measurement system and method with calibrating ellipsometer App 20010046049 - Aspnes, David E. ; et al.	2001-11-29
Apparatus for evaluating metalized layers on semiconductors Grant 6,320,666 - Opsal , et al. November 20, 2	2001-11-20
Broadband spectroscopic rotating compensator ellipsometer Grant 6,320,657 - Aspnes , et al. November 20, 2	2001-11-20
Apparatus for analyzing multi-layer thin film stacks on semiconductors App 20010033378 - Rosencwaig, Allan ; et al.	2001-10-25
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,304,326 - Aspnes , et al. October 16, 2	2001-10-16
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,297,880 - Rosencwaig , et al. October 2, 2	2001-10-02
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,278,519 - Rosencwaig , et al. August 21, 2	2001-08-21
Apparatus for evaluating metalized layers on semiconductors Grant 6,191,846 - Opsal , et al. February 20, 2	2001-02-20
Broadband spectroscopic rotating compensator ellipsometer Grant 6,134,012 - Aspnes , et al. October 17, 2	2000-10-17
Apparatus for evaluating metalized layers on semiconductors Grant 5,978,074 - Opsal , et al. November 2, 1	1999-11-02
Broadband spectroscopic rotating compensator ellipsometer Grant 5,973,787 - Aspnes , et al. October 26, 1	1999-10-26
Method and apparatus for optical data analysis Grant 5,953,446 - Opsal , et al. September 14, 1	1999-09-14
Thin film optical measurement system and method with calibrating ellipsometer Grant 5,900,939 - Aspnes , et al. May 4, 1	1999-05-04
Broadband spectroscopic rotating compensator ellipsometer Grant 5,877,859 - Aspnes , et al. March 2, 1	1999-03-02
Method and apparatus for optical data analysis Grant 5,864,633 - Opsal , et al. January 26, 1	1999-01-26
Thin film optical measurement system and method with calibrating ellipsometer Grant 5,798,837 - Aspnes , et al. August 25, 1	1998-08-25
Integrated spectroscopic ellipsometer Grant 5,596,411 - Fanton , et al. January 21, 1	1997-01-21
Method and apparatus for evaluating the thickness of thin films Grant 5,181,080 - Fanton , et al. January 19, 1	1993-01-19
Optical measurement device with enhanced sensitivity Grant 5,159,412 - Willenborg , et al. October 27, 1	1992-10-27
Apparatus for measuring grain sizes in metalized layers Grant 5,149,978 - Opsal , et al. September 22, 1	1992-09-22
Method and apparatus for evaluating ion implant dosage levels in semiconductors Grant 5,074,669 - Opsal December 24, 1	1991-12-24
High resolution ellipsometric apparatus Grant 5,042,951 - Gold , et al. August 27, 1	1991-08-27
Method and apparatus for evaluating surface and subsurface and subsurface features in a semiconductor Grant 5,042,952 - Opsal , et al. * August 27, 1	1991-08-27
Method and apparatus for measuring thickness of thin films Grant 4,999,014 - Gold , et al. March 12, 1	1991-03-12
Method and apparatus for evaluating surface and subsurface features in a semiconductor Grant 4,952,063 - Opsal , et al. * August 28, 1	1990-08-28
Method and apparatus for evaluating surface and subsurface features in a semiconductor Grant 4,854,710 - Opsal , et al. August 8, 1	1989-08-08
Method and apparatus for optically detecting surface states in materials Grant 4,750,822 - Rosencwaig , et al. June 14, 1	1988-06-14
Evaluating both thickness and compositional variables in a thin film sample Grant 4,679,946 - Rosencwaig , et al. * July 14, 1	1987-07-14
Method and apparatus for detecting thermal waves Grant 4,634,290 - Rosencwaig , et al. * January 6, 1	1987-01-06
Evaluation of surface and subsurface characteristics of a sample Grant 4,632,561 - Rosencwaig , et al. December 30, 1	1986-12-30
Detecting thermal waves to evaluate thermal parameters Grant 4,579,463 - Rosencwaig , et al. April 1, 1	1986-04-01
Thin film thickness measurement with thermal waves Grant 4,522,510 - Rosencwaig , et al. June 11, 1	1985-06-11

Company Registrations

SEC

0001205027

OPSAL JON