| Patent | Date |
|---|
Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method
Grant 11,387,074 - Nagasaka July 12, 2 | 2022-07-12 |
Charged Particle Beam Optical Apparatus, Exposure Apparatus, Exposure Method, Control Apparatus, Control Method, Information Generation Apparatus, Information Generation Method And Device Manufacturing Method
App 20210225611 - NAGASAKA; Hiroyuki | 2021-07-22 |
Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method
Grant 10,984,982 - Nagasaka April 20, 2 | 2021-04-20 |
Processing Apparatus, Processing Method, Computer Program, Recording Medium, And Control Apparatus
App 20210023779 - MATSUDA; Takeshi ; et al. | 2021-01-28 |
Charged Particle Beam Optical Apparatus, Exposure Apparatus, Exposure Method, Control Apparatus, Control Method, Information Gen
App 20200051780 - NAGASAKA; Hiroyuki | 2020-02-13 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20190146360 - NAGASAKA; Hiroyuki ; et al. | 2019-05-16 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20190121244 - NAGASAKA; Hiroyuki | 2019-04-25 |
Exposure method and device manufacturing method having lower scanning speed to expose peripheral shot area
Grant 10,209,622 - Nagasaka Feb | 2019-02-19 |
Exposure apparatus and device manufacturing method having lower scanning speed to expose peripheral shot area
Grant 10,203,608 - Nagasaka Feb | 2019-02-12 |
Exposure apparatus, exposure method, and method for producing device
Grant 10,203,614 - Nagasaka , et al. Feb | 2019-02-12 |
Exposure apparatus, exposure method, and method for producing device
Grant 10,180,632 - Nagasaka Ja | 2019-01-15 |
Exposure Apparatus, Exposure Method, Method For Producing Device, And Optical Part
App 20180364581 - NAGASAKA; Hiroyuki ; et al. | 2018-12-20 |
Substrate Holding Device, Exposure Apparatus, And Device Manufacturing Method
App 20180292759 - Nagasaka; Hiroyuki ; et al. | 2018-10-11 |
Exposure apparatus, exposure method, method for producing device, and optical part
Grant 10,088,760 - Nagasaka , et al. October 2, 2 | 2018-10-02 |
Exposure Apparatus And Device Manufacturing Method
App 20180239266 - NAGASAKA; Hiroyuki ; et al. | 2018-08-23 |
Exposure Method, Exposure Apparatus, And Method For Producing Device
App 20180173107 - NAGASAKA; Hiroyuki | 2018-06-21 |
Exposure Apparatus, Exposure Method, And Device Producing Method
App 20180149984 - NAGASAKA; Hiroyuki | 2018-05-31 |
Exposure method, exposure apparatus, and method for producing device
Grant 9,977,336 - Nagasaka May 22, 2 | 2018-05-22 |
Exposure apparatus and device manufacturing method
Grant 9,977,352 - Nagasaka , et al. May 22, 2 | 2018-05-22 |
Exposure method, exposure apparatus, and method for producing device
Grant 9,933,708 - Nagasaka April 3, 2 | 2018-04-03 |
Exposure apparatus, exposure method, and device producing method
Grant 9,910,369 - Nagasaka March 6, 2 | 2018-03-06 |
Projection Optical System, Exposure Apparatus, And Exposure Method
App 20180052398 - OMURA; Yasuhiro ; et al. | 2018-02-22 |
Projection optical system, exposure apparatus, and exposure method
Grant 9,891,539 - Omura , et al. February 13, 2 | 2018-02-13 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20180011411 - NAGASAKA; Hiroyuki ; et al. | 2018-01-11 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20170371253 - NAGASAKA; Hiroyuki | 2017-12-28 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
Grant 9,846,371 - Owa , et al. December 19, 2 | 2017-12-19 |
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method
App 20170329234 - OWA; Soichi ; et al. | 2017-11-16 |
Exposure Apparatus And Method For Producing Device
App 20170329239 - KOHNO; Hirotaka ; et al. | 2017-11-16 |
Exposure Apparatus, Exposure Method And Device Manufacturing Method
App 20170299966 - NAGASAKA; Hiroyuki ; et al. | 2017-10-19 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,778,580 - Nagasaka , et al. October 3, 2 | 2017-10-03 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,766,555 - Nagasaka , et al. September 19, 2 | 2017-09-19 |
Exposure apparatus and method for producing device
Grant 9,746,781 - Kohno , et al. August 29, 2 | 2017-08-29 |
Exposure Apparatus, Exposure Method, And Device Producing Method
App 20170176874 - NAGASAKA; Hiroyuki | 2017-06-22 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20170097578 - NAGASAKA; Hiroyuki ; et al. | 2017-04-06 |
Exposure apparatus and device manufacturing method
Grant 9,599,907 - Nagasaka , et al. March 21, 2 | 2017-03-21 |
Exposure Apparatus And Device Manufacturing Method
App 20170068176 - NAGASAKA; Hiroyuki ; et al. | 2017-03-09 |
Exposure apparatus, exposure method, and device producing method
Grant 9,588,436 - Nagasaka March 7, 2 | 2017-03-07 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,529,273 - Nagasaka , et al. December 27, 2 | 2016-12-27 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20160363870 - NAGASAKA; Hiroyuki ; et al. | 2016-12-15 |
Exposure apparatus and device manufacturing method
Grant 9,500,959 - Nagasaka , et al. November 22, 2 | 2016-11-22 |
Projection Optical System, Exposure Apparatus, And Exposure Method
App 20160252825 - OMURA; Yasuhiro ; et al. | 2016-09-01 |
Exposure Method, Exposure Apparatus, And Method For Producing Device
App 20160246181 - NAGASAKA; Hiroyuki | 2016-08-25 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20160246188 - NAGASAKA; Hiroyuki ; et al. | 2016-08-25 |
Exposure Method, Exposure Apparatus, And Method For Producing Device
App 20160238949 - NAGASAKA; Hiroyuki | 2016-08-18 |
Substrate Holding Device, Exposure Apparatus, And Device Manufacturing Method
App 20160231653 - NAGASAKA; Hiroyuki ; et al. | 2016-08-11 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,411,247 - Nagasaka , et al. August 9, 2 | 2016-08-09 |
Projection optical system, exposure apparatus, and exposure method
Grant 9,360,763 - Omura , et al. June 7, 2 | 2016-06-07 |
Exposure method, exposure apparatus, and method for producing device
Grant 9,354,525 - Nagasaka May 31, 2 | 2016-05-31 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,348,239 - Nagasaka May 24, 2 | 2016-05-24 |
Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region
App 20160124317 - Kida; Yoshiki ; et al. | 2016-05-05 |
Exposure Apparatus, Liquid Holding Method, And Device Manufacturing Method
App 20160124320 - Nagasaka; Hiroyuki | 2016-05-05 |
Projection optical system, exposure apparatus, and exposure method
Grant 9,310,696 - Omura , et al. April 12, 2 | 2016-04-12 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20160097982 - NAGASAKA; Hiroyuki ; et al. | 2016-04-07 |
Exposure method, exposure apparatus, and method for producing device
Grant 9,285,684 - Nagasaka March 15, 2 | 2016-03-15 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
Grant 9,268,237 - Owa , et al. February 23, 2 | 2016-02-23 |
Exposure apparatus, liquid holding method, and device manufacturing method
Grant 9,256,137 - Nagasaka February 9, 2 | 2016-02-09 |
Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region
Grant 9,239,524 - Kida , et al. January 19, 2 | 2016-01-19 |
Exposure Apparatus And Device Manufacturing Method
App 20150331335 - NAGASAKA; Hiroyuki ; et al. | 2015-11-19 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,182,684 - Nagasaka , et al. November 10, 2 | 2015-11-10 |
Exposure apparatus, exposure method, method for producing device, and optical part
Grant 9,182,685 - Nagasaka , et al. November 10, 2 | 2015-11-10 |
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method
App 20150301457 - OWA; Soichi ; et al. | 2015-10-22 |
Exposure Apparatus, Exposure Method, Method For Producing Device, And Optical Part
App 20150286151 - NAGASAKA; Hiroyuki ; et al. | 2015-10-08 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,134,621 - Nagasaka , et al. September 15, 2 | 2015-09-15 |
Exposure apparatus and device manufacturing method
Grant 9,097,988 - Nagasaka , et al. August 4, 2 | 2015-08-04 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,063,436 - Owa , et al. June 23, 2 | 2015-06-23 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
Grant 9,019,467 - Owa , et al. April 28, 2 | 2015-04-28 |
Exposure apparatus, exposure method, method for producing device, and optical part
Grant 9,019,469 - Nagasaka , et al. April 28, 2 | 2015-04-28 |
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Grant 9,013,675 - Nishii , et al. April 21, 2 | 2015-04-21 |
Exposure apparatus and device manufacturing method
Grant 8,982,322 - Nagasaka March 17, 2 | 2015-03-17 |
Projection Optical System, Exposure Apparatus, And Exposure Method
App 20150029482 - OMURA; Yasuhiro ; et al. | 2015-01-29 |
Projection Optical System, Exposure Apparatus, And Exposure Method
App 20150029476 - OMURA; Yasuhiro ; et al. | 2015-01-29 |
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Grant 8,891,059 - Nagasaka November 18, 2 | 2014-11-18 |
Exposure apparatus and method for manufacturing device
Grant 8,879,043 - Nagasaka November 4, 2 | 2014-11-04 |
Exposure Apparatus And Method For Producing Device
App 20140307238 - KOHNO; Hirotaka ; et al. | 2014-10-16 |
Exposure Apparatus And Device Manufacturing Method
App 20140300878 - NAGASAKA; Hiroyuki ; et al. | 2014-10-09 |
Projection optical system, exposure apparatus, and exposure method
Grant 8,854,601 - Omura , et al. October 7, 2 | 2014-10-07 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20140253889 - NAGASAKA; Hiroyuki | 2014-09-11 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20140240684 - NAGASAKA; Hiroyuki ; et al. | 2014-08-28 |
Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device
Grant 8,810,767 - Nagasaka , et al. August 19, 2 | 2014-08-19 |
Exposure apparatus and device manufacturing method
Grant 8,797,505 - Nagasaka , et al. August 5, 2 | 2014-08-05 |
Exposure Method, Exposure Apparatus, Exposure System And Device Manufacturing Method
App 20140204359 - NAGASAKA; Hiroyuki | 2014-07-24 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,736,809 - Nagasaka , et al. May 27, 2 | 2014-05-27 |
Cleaning liquid, cleaning method, liquid generating apparatus, exposure apparatus, and device fabricating method
Grant 8,721,803 - Nagasaka , et al. May 13, 2 | 2014-05-13 |
Exposure apparatus, exposure method, and device manufacturing method
Grant 8,724,077 - Nagasaka , et al. May 13, 2 | 2014-05-13 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,717,533 - Nagasaka , et al. May 6, 2 | 2014-05-06 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,704,999 - Nagasaka , et al. April 22, 2 | 2014-04-22 |
Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device
Grant 8,698,998 - Nagasaka , et al. April 15, 2 | 2014-04-15 |
Exposure apparatus and method for producing device
Grant 8,692,973 - Nagasaka April 8, 2 | 2014-04-08 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20140043593 - NAGASAKA; Hiroyuki ; et al. | 2014-02-13 |
Exposure Apparatus, Exposure Method, Method For Producing Device, And Optical Part
App 20140022523 - NAGASAKA; Hiroyuki ; et al. | 2014-01-23 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20130293860 - NAGASAKA; Hiroyuki ; et al. | 2013-11-07 |
Immersion exposure apparatus, device manufacturing method, cleaning method, and cleaning member to remove foreign substance using liquid
Grant 8,570,484 - Nagasaka October 29, 2 | 2013-10-29 |
Exposure Apparatus And Device Manufacturing Method
App 20130271739 - NAGASAKA; Hiroyuki ; et al. | 2013-10-17 |
Exposure Method, Exposure Apparatus, And Method For Producing Device
App 20130250259 - NAGASAKA; Hiroyuki | 2013-09-26 |
Exposure Method, Exposure Apparatus, And Method For Producing Device
App 20130250258 - NAGASAKA; Hiroyuki | 2013-09-26 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,508,713 - Nagasaka , et al. August 13, 2 | 2013-08-13 |
Projection Optical System, Exposure Apparatus, And Exposure Method
App 20130194560 - OMURA; Yasuhiro ; et al. | 2013-08-01 |
Exposure apparatus and device manufacturing method
Grant 8,488,099 - Nagasaka , et al. July 16, 2 | 2013-07-16 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,482,716 - Nagasaka , et al. July 9, 2 | 2013-07-09 |
Exposure Apparatus, Exposure Method, Device Manufacturing Method, Program, And Recording Medium
App 20130169944 - NISHII; Yasufumi ; et al. | 2013-07-04 |
Exposure method, exposure apparatus, and method for producing device
Grant 8,472,001 - Nagasaka June 25, 2 | 2013-06-25 |
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method
App 20130141701 - OWA; Soichi ; et al. | 2013-06-06 |
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method
App 20130141703 - OWA; Soichi ; et al. | 2013-06-06 |
Exposure Apparatus and Device Manufacturing Method Having Lower Scanning Speed to Expose Peripheral Shot Area
App 20130128244 - NAGASAKA; Hiroyuki | 2013-05-23 |
Exposure Apparatus, Liquid Holding Method, And Device Manufacturing Method
App 20130059253 - NAGASAKA; Hiroyuki | 2013-03-07 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,390,779 - Nagasaka March 5, 2 | 2013-03-05 |
Exposure Apparatus, Liquid Holding Method, And Device Manufacturing Method
App 20130050666 - NAGASAKA; Hiroyuki | 2013-02-28 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
Grant 8,384,880 - Owa , et al. February 26, 2 | 2013-02-26 |
Stage device, exposure apparatus, exposure method and device manufacturing method
Grant 8,379,189 - Nagasaka February 19, 2 | 2013-02-19 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,373,843 - Nagasaka February 12, 2 | 2013-02-12 |
Liquid recovery member, exposure apparatus, exposing method, and device fabricating method
Grant 8,345,217 - Nagasaka January 1, 2 | 2013-01-01 |
Exposure apparatus and device manufacturing method
Grant 8,330,934 - Nagasaka , et al. December 11, 2 | 2012-12-11 |
Maintenance Method, Exposure Method, Exposure Apparatus, and Method for Producing Device
App 20120307220 - NAGASAKA; Hiroyuki ; et al. | 2012-12-06 |
Exposure apparatus and device fabricating method
Grant 8,253,921 - Nagasaka , et al. August 28, 2 | 2012-08-28 |
Exposure Apparatus, Device Production Method, Cleaning Apparatus, Cleaning Method, And Exposure Method
App 20120204913 - NAGASAKA; Hiroyuki ; et al. | 2012-08-16 |
Exposure Apparatus And Device Manufacturing Method
App 20120200836 - NAGASAKA; Hiroyuki ; et al. | 2012-08-09 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20120176589 - Owa; Soichi ; et al. | 2012-07-12 |
Exposure apparatus and device manufacturing method
Grant 8,218,127 - Nagasaka , et al. July 10, 2 | 2012-07-10 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
Grant 8,208,117 - Owa , et al. June 26, 2 | 2012-06-26 |
Liquid Recovery System, Immersion Exposure Apparatus, Immersion Exposing Method, And Device Fabricating Method
App 20120133912 - NISHII; Yasufumi ; et al. | 2012-05-31 |
Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure method
Grant 8,189,168 - Nagasaka , et al. May 29, 2 | 2012-05-29 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,169,591 - Owa , et al. May 1, 2 | 2012-05-01 |
Substrate Holding Device, Exposure Apparatus, And Device Manufacturing Method
App 20120094238 - NAGASAKA; Hiroyuki ; et al. | 2012-04-19 |
Cleaning Liquid, Cleaning Method, Liquid Generating Apparatus, Exposure Apparatus, And Device Fabricating Method
App 20120067380 - Nagasaka; Hiroyuki ; et al. | 2012-03-22 |
Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20120062861 - NAGASAKA; Hiroyuki ; et al. | 2012-03-15 |
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Grant 8,134,685 - Nishii , et al. March 13, 2 | 2012-03-13 |
Exposure apparatus, exposure method, and device producing method
App 20120033192 - Nagasaka; Hiroyuki | 2012-02-09 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,102,504 - Nagasaka , et al. January 24, 2 | 2012-01-24 |
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
App 20120013860 - Nagasaka; Hiroyuki | 2012-01-19 |
Projection Optical System, Exposure Apparatus, And Exposure Method
App 20120002186 - Omura; Yasuhiro ; et al. | 2012-01-05 |
Exposure apparatus, exposure method, and device manufacturing method
Grant 8,089,608 - Nagasaka , et al. January 3, 2 | 2012-01-03 |
Exposure apparatus, exposure method, and device producing method
Grant 8,064,044 - Nagasaka November 22, 2 | 2011-11-22 |
Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure
Grant 8,064,037 - Nagasaka , et al. November 22, 2 | 2011-11-22 |
Exposure apparatus, exposure method, method for producing device, and optical part
Grant 8,054,447 - Nagasaka , et al. November 8, 2 | 2011-11-08 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,027,020 - Nagasaka September 27, 2 | 2011-09-27 |
Exposure apparatus, exposure method and device manufacturing method
App 20110211186 - Nagasaka; Hiroyuki | 2011-09-01 |
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Grant 8,004,651 - Nagasaka August 23, 2 | 2011-08-23 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,932,994 - Nagasaka April 26, 2 | 2011-04-26 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,932,991 - Nagasaka , et al. April 26, 2 | 2011-04-26 |
Exposure apparatus and device manufacturing method
Grant 7,924,402 - Nagasaka , et al. April 12, 2 | 2011-04-12 |
Exposure apparatus, exposure method, and device manufacturing method
Grant 7,916,270 - Nagasaka March 29, 2 | 2011-03-29 |
Exposure method and device manufacturing method
Grant 7,914,972 - Fujiwara , et al. March 29, 2 | 2011-03-29 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,911,583 - Nagasaka , et al. March 22, 2 | 2011-03-22 |
Exposure apparatus and method for manufacturing device
App 20110063589 - Nagasaka; Hiroyuki | 2011-03-17 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,907,254 - Nagasaka , et al. March 15, 2 | 2011-03-15 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,907,253 - Nagasaka , et al. March 15, 2 | 2011-03-15 |
Exposure apparatus, exposure method, and method for producing device
App 20110051112 - Nagasaka; Hiroyuki | 2011-03-03 |
Exposure apparatus, exposure method, and method for producing device
App 20110032498 - Nagasaka; Hiroyuki ; et al. | 2011-02-10 |
Liquid Immersion Member, Exposure Apparatus, Exposing Method, And Device Fabricating Method
App 20100323303 - NAGASAKA; Hiroyuki | 2010-12-23 |
Exposure apparatus and method for manufacturing device
Grant 7,855,777 - Nagasaka December 21, 2 | 2010-12-21 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,852,456 - Nagasaka December 14, 2 | 2010-12-14 |
Exposure method, device manufacturing method using the same, exposure apparatus, and substrate processing method and apparatus
Grant 7,803,516 - Nagasaka September 28, 2 | 2010-09-28 |
Exposure apparatus, exposure method, and device manufacturing method
App 20100231879 - Nagasaka; Hiroyuki | 2010-09-16 |
Exposure apparatus, exposure method, projection optical system and device producing method
Grant 7,782,442 - Nagasaka August 24, 2 | 2010-08-24 |
Exposure apparatus, exposure method, and method for producing device
App 20100195067 - Nagasaka; Hiroyuki ; et al. | 2010-08-05 |
Exposure Apparatus, Exposing Method, Liquid Immersion Member And Device Fabricating Method
App 20100196832 - Nagasaka; Hiroyuki | 2010-08-05 |
Ultra wideband radio transmitter, ultra wideband radio receiver, and ultra wideband radio communication method
Grant 7,769,092 - Nagasaka August 3, 2 | 2010-08-03 |
Exposure apparatus and device manufacturing method
App 20100157262 - Nagasaka; Hiroyuki ; et al. | 2010-06-24 |
Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device
App 20100134772 - Nagasaka; Hiroyuki ; et al. | 2010-06-03 |
Exposure apparatus, exposure method, and device manufacturing method
Grant 7,714,982 - Nagasaka May 11, 2 | 2010-05-11 |
Plate member, substrate holding device, exposure apparatus and method, and device manufacturing method
Grant 7,705,968 - Nagasaka , et al. April 27, 2 | 2010-04-27 |
Exposure apparatus and device manufacturing method
Grant 7,697,110 - Nagasaka , et al. April 13, 2 | 2010-04-13 |
Exposure Condition Determination Method, Exposure Method, Exposure Apparatus, And Device Manufacturing Method
App 20100002206 - Kida; Yoshiki ; et al. | 2010-01-07 |
Exposure Apparatus And Method For Producing Device
App 20090262316 - Kohno; Hirotaka ; et al. | 2009-10-22 |
Exposure Apparatus, Exposure Method, and Method for Producing Device
App 20090253083 - Nagasaka; Hiroyuki | 2009-10-08 |
Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure method
App 20090251672 - Nagasaka; Hiroyuki ; et al. | 2009-10-08 |
Exposure apparatus, method for cleaning member thereof , maintenance method for exposure apparatus, maintenance device, and method for producing device
App 20090225286 - Nagasaka; Hiroyuki ; et al. | 2009-09-10 |
Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device
App 20090218653 - Nagasaka; Hiroyuki ; et al. | 2009-09-03 |
Substrate holding apparatus, exposure apparatus, exposing method, device fabricating method, plate member, and wall
App 20090218743 - Fujiwara; Tomoharu ; et al. | 2009-09-03 |
Exposure apparatus and method for manufacturing device
Grant 7,580,114 - Nagasaka August 25, 2 | 2009-08-25 |
Stage device, exposure apparatus, exposure method and device manufacturing method
App 20090208883 - Nagasaka; Hiroyuki | 2009-08-20 |
Exposure apparatus and device manufacturing method
App 20090153820 - Nagasaka; Hiroyuki ; et al. | 2009-06-18 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,542,128 - Nagasaka , et al. June 2, 2 | 2009-06-02 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,535,550 - Nagasaka May 19, 2 | 2009-05-19 |
Exposure Apparatus, Exposure Method, and Device Manufacturing Method
App 20090115977 - Nagasaka; Hiroyuki ; et al. | 2009-05-07 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,515,246 - Nagasaka , et al. April 7, 2 | 2009-04-07 |
Exposure apparatus, exposure method, and method for producing device
App 20090079950 - Nagasaka; Hiroyuki ; et al. | 2009-03-26 |
Exposure apparatus and device manufacturing method
Grant 7,508,490 - Nagasaka , et al. March 24, 2 | 2009-03-24 |
Exposure Method, Exposure Apparatus And Device Fabricating Methods
App 20090047607 - Nagasaka; Hiroyuki ; et al. | 2009-02-19 |
Projection optical system, exposure apparatus, and exposure method
App 20090046268 - Omura; Yasuhiro ; et al. | 2009-02-19 |
Exposure Apparatus And Method, And Device Manufacturing Method
App 20090033896 - Nagasaka; Hiroyuki | 2009-02-05 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
Grant 7,483,119 - Owa , et al. January 27, 2 | 2009-01-27 |
Exposure apparatus, exposure method, and method for producing device
App 20090021709 - Nagasaka; Hiroyuki | 2009-01-22 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
App 20090015808 - Owa; Soichi ; et al. | 2009-01-15 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
App 20090015816 - Owa; Soichi ; et al. | 2009-01-15 |
Exposure method, exposure apparatus, and method for producing device
App 20090009745 - Nagasaka; Hiroyuki | 2009-01-08 |
Exposure apparatus, exposure method, and method for producing device
App 20090002655 - Nagasaka; Hiroyuki ; et al. | 2009-01-01 |
Exposure apparatus, exposure method, and method for producing device
App 20080316453 - Nagasaka; Hiroyuki | 2008-12-25 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,466,392 - Nagasaka , et al. December 16, 2 | 2008-12-16 |
Exposure method, exposure apparatus, and method for producing device
App 20080297746 - Nagasaka; Hiroyuki | 2008-12-04 |
Projection optical system, exposing method, exposure apparatus, and device fabricating method
App 20080291408 - Nagasaka; Hiroyuki | 2008-11-27 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,453,550 - Nagasaka , et al. November 18, 2 | 2008-11-18 |
Exposure Apparatus, Exposure Method, and Method for Producing Device
App 20080266533 - Nagasaka; Hiroyuki ; et al. | 2008-10-30 |
Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device
App 20080252865 - Nagasaka; Hiroyuki ; et al. | 2008-10-16 |
Exposing Method, Exposure Apparatus, Device Fabricating Method, and Film Evaluating Method
App 20080246937 - Nagasaka; Hiroyuki | 2008-10-09 |
Exposure apparatus, exposing method, and device fabricating method
App 20080239256 - Nagasaka; Hiroyuki | 2008-10-02 |
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
App 20080233512 - Nishii; Yasufumi ; et al. | 2008-09-25 |
Liquid recovery member, exposure apparatus, exposing method, and device fabricating method
App 20080231824 - Nagasaka; Hiroyuki | 2008-09-25 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20080212043 - Nagasaka; Hiroyuki | 2008-09-04 |
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
App 20080174748 - Nagasaka; Hiroyuki | 2008-07-24 |
Exposure method, exposure apparatus, and method for producing device
Grant 7,399,979 - Nagasaka July 15, 2 | 2008-07-15 |
Cleaning liquid, cleaning method, liquid generating apparatus, exposure apparatus, and device fabricating method
App 20080156356 - Nagasaka; Hiroyuki ; et al. | 2008-07-03 |
Exposure apparatus and method for manufacturing device
Grant 7,379,157 - Nagasaka May 27, 2 | 2008-05-27 |
Liquid recovery member, substrate holding member, exposure apparatus and device manufacturing method
App 20080106712 - Nagasaka; Hiroyuki | 2008-05-08 |
Exposure Apparatus,Exposure Method, And For Producing Device
App 20080084546 - Owa; Soichi ; et al. | 2008-04-10 |
Exposure Apparatus, Exposure Method, and Method for Producing Device
App 20080068567 - Nagasaka; Hiroyuki ; et al. | 2008-03-20 |
Exposure apparatus, device manufacturing method, cleaning method, and cleaning member
App 20080055575 - Nagasaka; Hiroyuki ; et al. | 2008-03-06 |
Plate Member, Substrate Holding Device, Exposure Apparatus and Method, and Device Manufacturing Method
App 20080049209 - Nagasaka; Hiroyuki ; et al. | 2008-02-28 |
Exposure Method, Exposure Apparatus, Exposure System and Device Manufacturing Method
App 20080038675 - Nagasaka; Hiroyuki | 2008-02-14 |
Exposure Apparatus and Device Producing Method
App 20080018866 - Nagasaka; Hiroyuki ; et al. | 2008-01-24 |
Exposure apparatus and method for manufacturing device
App 20080018873 - Nagasaka; Hiroyuki | 2008-01-24 |
Exposure apparatus, exposure method, and device manufacturing method
App 20080013062 - Nagasaka; Hiroyuki | 2008-01-17 |
Maintenance Method, Exposure Method, Exposure Apparatus, And Method For Producing Device
App 20070285634 - Nagasaka; Hiroyuki ; et al. | 2007-12-13 |
Exposure apparatus, exposure method, and method for producing device
App 20070279606 - Nagasaka; Hiroyuki | 2007-12-06 |
Exposure apparatus, exposure method, and device manufacturing method
App 20070273858 - Nagasaka; Hiroyuki | 2007-11-29 |
Exposure apparatus, exposure method, and method for producing device
App 20070273854 - Nagasaka; Hiroyuki | 2007-11-29 |
Substrate Holding Device, Exposure Apparatus, and Device Manufacturing Method
App 20070269294 - Nagasaka; Hiroyuki ; et al. | 2007-11-22 |
Exposure apparatus, exposure method, and method for producing device
App 20070263185 - Nagasaka; Hiroyuki ; et al. | 2007-11-15 |
Exposure apparatus, exposure method, and method for producing device
App 20070263186 - Nagasaka; Hiroyuki ; et al. | 2007-11-15 |
Exposure apparatus and method for manufacturing device
App 20070263193 - Nagasaka; Hiroyuki | 2007-11-15 |
Exposure apparatus, exposure method, and method for producing device
App 20070263195 - Nagasaka; Hiroyuki ; et al. | 2007-11-15 |
Exposure apparatus, exposure method, and method for producing device
App 20070263183 - Nagasaka; Hiroyuki ; et al. | 2007-11-15 |
Exposure apparatus, exposure method, and method for producing device
App 20070258065 - Nagasaka; Hiroyuki ; et al. | 2007-11-08 |
Exposure apparatus, exposure method, and method for producing device
App 20070258067 - Nagasaka; Hiroyuki ; et al. | 2007-11-08 |
Exposure apparatus, exposure method, and method for producing device
App 20070258066 - Nagasaka; Hiroyuki ; et al. | 2007-11-08 |
Exposure apparatus, method for cleaning memeber thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device
App 20070258072 - Nagasaka; Hiroyuki ; et al. | 2007-11-08 |
Exposure apparatus, exposure method, and method for producing device
App 20070258063 - Nagasaka; Hiroyuki ; et al. | 2007-11-08 |
Exposure apparatus and method for producing device
App 20070252964 - Kohno; Hirotaka ; et al. | 2007-11-01 |
Exposure apparatus, exposure method, and device manufacturing method
App 20070242244 - Nagasaka; Hiroyuki | 2007-10-18 |
Exposure apparatus, exposure method, and method for producing device
App 20070242255 - Nagasaka; Hiroyuki | 2007-10-18 |
Exposure Apparatus, Exposure Method, Method for Producing Device, and Optical Part
App 20070242242 - Nagasaka; Hiroyuki ; et al. | 2007-10-18 |
Exposure Apparatus and Device Manufacturing Method
App 20070242241 - Nagasaka; Hiroyuki ; et al. | 2007-10-18 |
Exposure apparatus and device manufacturing method
App 20070242254 - Nagasaka; Hiroyuki | 2007-10-18 |
Exposure apparatus, exposure method, and method for producing device
App 20070222957 - Nagasaka; Hiroyuki ; et al. | 2007-09-27 |
Exposure apparatus, exposure method, and method for producing device
App 20070222959 - Nagasaka; Hiroyuki ; et al. | 2007-09-27 |
Exposure apparatus and device manufacturing method
App 20070216884 - Nagasaka; Hiroyuki | 2007-09-20 |
Exposure apparatus, exposure method, and method for producing device
Grant 7,268,854 - Nagasaka September 11, 2 | 2007-09-11 |
Exposure Method And Device Manufacturing Method
App 20070196774 - Fujiwara; Tomoharu ; et al. | 2007-08-23 |
Exposure apparatus, exposure method, and method for producing device
App 20070195301 - Nagasaka; Hiroyuki | 2007-08-23 |
Exposure method, device manufacturing method using the same, exposure apparatus, and substrate processing method and apparatus
App 20070172767 - Nagasaka; Hiroyuki | 2007-07-26 |
Exposure apparatus and device manufacturing method
App 20070164234 - Tsuji; Toshihiko ; et al. | 2007-07-19 |
Exposure apparatus, exposure method, projection optical system and device producing method
App 20070153247 - Nagasaka; Hiroyuki | 2007-07-05 |
Exposure apparatus, exposure method, and device producing method
App 20070146663 - Nagasaka; Hiroyuki | 2007-06-28 |
Exposure apparatus, exposure method, and method for producing device
App 20070139628 - Nagasaka; Hiroyuki ; et al. | 2007-06-21 |
Exposure apparatus, exposure method, and method for producing device
App 20070132976 - Nagasaka; Hiroyuki | 2007-06-14 |
Exposure apparatus, exposure method and device manufacturing method
App 20070127135 - Nagasaka; Hiroyuki | 2007-06-07 |
Exposure apparatus and method, and device manufacturing method
App 20070127002 - Nagasaka; Hiroyuki | 2007-06-07 |
Exposure method, exposure apparatus, and method for producing device
App 20070121089 - Nagasaka; Hiroyuki | 2007-05-31 |
Complex coefficient transversal filter and radio communication system employing the same
App 20070118583 - Nagasaka; Hiroyuki | 2007-05-24 |
Exposure apparatus, exposure method, method for producing device, and optical part
App 20070115450 - Nagasaka; Hiroyuki ; et al. | 2007-05-24 |
Exposure apparatus, exposure method, and device fabricating method
App 20070070323 - Nagasaka; Hiroyuki | 2007-03-29 |
Exposure apparatus, exposure method, and method for producing device
App 20070035710 - Nagasaka; Hiroyuki ; et al. | 2007-02-15 |
Exposure apparatus, exposure method, and method for producing device
App 20060274294 - Nagasaka; Hiroyuki ; et al. | 2006-12-07 |
Exposure apparatus, exposure method, and method for producing device
App 20060274293 - Nagasaka; Hiroyuki ; et al. | 2006-12-07 |
Ultra wideband radio transmitter, ultra wideband radio receiver, and ultra wideband radio communication method
App 20060234761 - Nagasaka; Hiroyuki | 2006-10-19 |
Exposure apparatus and device manufacturing method
App 20060231206 - Nagasaka; Hiroyuki ; et al. | 2006-10-19 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
App 20060227312 - Owa; Soichi ; et al. | 2006-10-12 |
Exposure apparatus and device fabricating method
App 20060209279 - Nagasaka; Hiroyuki ; et al. | 2006-09-21 |
Exposure method, exposure apparatus, and method for manufacturing device
Grant 7,098,991 - Nagasaka , et al. August 29, 2 | 2006-08-29 |
Exposure apparatus and device manufacturing method
App 20060176456 - Nagasaka; Hiroyuki ; et al. | 2006-08-10 |
Exposure apparatus, exposure method, and method for producing device
App 20060146306 - Nagasaka; Hiroyuki ; et al. | 2006-07-06 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
App 20060139614 - Owa; Soichi ; et al. | 2006-06-29 |
Exposure apparatus, exposure method and device manufacturing method
App 20060139593 - Nagasaka; Hiroyuki ; et al. | 2006-06-29 |
Exposure apparatus, exposure method, and method for producing device
App 20060132736 - Nagasaka; Hiroyuki ; et al. | 2006-06-22 |
Exposure apparatus and method for manufacturing device
App 20060119818 - Nagasaka; Hiroyuki | 2006-06-08 |
Exposure method, exposure apparatus, and exposure method for producing device
App 20060098177 - Nagasaka; Hiroyuki | 2006-05-11 |
Exposure apparatus, exposure method, and method for producing device
App 20060098178 - Nagasaka; Hiroyuki ; et al. | 2006-05-11 |
Exposure apparatus, exposure method, and method for producing device
App 20050280791 - Nagasaka, Hiroyuki ; et al. | 2005-12-22 |
Exposure apparatus, exposure method, and method for producing device
App 20050237504 - Nagasaka, Hiroyuki ; et al. | 2005-10-27 |
Exposure method, exposure apparatus, and method for manufacturing device
App 20050117134 - Nagasaka, Hiroyuki ; et al. | 2005-06-02 |
Exposure method, exposure apparatus and its making method, device manufacturing method, and device
Grant 6,850,313 - Ishikawa , et al. February 1, 2 | 2005-02-01 |
Circuit and method for compensating for non-linear distortion
Grant 6,836,646 - Nagasaka December 28, 2 | 2004-12-28 |
Circuit and method for compensating for non-linear distortion
Grant 6,809,607 - Nagasaka October 26, 2 | 2004-10-26 |
Exposure apparatus, exposure method and device production method
Grant 6,798,495 - Nagasaka , et al. September 28, 2 | 2004-09-28 |
Exposure method, exposure apparatus and its making method, device manufacturing method, and device
App 20030197849 - Ishikawa, Jun ; et al. | 2003-10-23 |
Exposure apparatus, exposure method and device production method
App 20030156268 - Nagasaka, Hiroyuki ; et al. | 2003-08-21 |
Measuring method and measuring apparatus, exposure method and exposure apparatus
App 20030047692 - Nagasaka, Hiroyuki ; et al. | 2003-03-13 |
Circuit and method for compensating for non-linear distortion
App 20020136324 - Nagasaka, Hiroyuki | 2002-09-26 |
Circuit and method for compensating for non-linear distortion
App 20020130727 - Nagasaka, Hiroyuki | 2002-09-19 |
Circuit and method for compensating for non-linear distortion
App 20020131523 - Nagasaka, Hiroyuki ; et al. | 2002-09-19 |
| 