| Patent | Date |
|---|
Laser unit
Grant 10,447,001 - Taniyama , et al. Oc | 2019-10-15 |
High-voltage Pulse Generator And Gas Laser Apparatus
App 20190252846 - JIANG; Weihua ; et al. | 2019-08-15 |
System and method for generating extreme ultraviolet light
Grant 10,306,743 - Hori , et al. | 2019-05-28 |
System And Method For Generating Extreme Ultraviolet Light
App 20190141826 - HORI; Tsukasa ; et al. | 2019-05-09 |
System and method for generating extreme ultraviolet light
Grant 10,251,255 - Hori , et al. | 2019-04-02 |
System And Method For Generating Extreme Ultraviolet Light
App 20190037677 - HORI; Tsukasa ; et al. | 2019-01-31 |
System and method for generating extreme ultraviolet light
Grant 10,117,317 - Hori , et al. October 30, 2 | 2018-10-30 |
Laser Unit
App 20180123308 - TANIYAMA; Minoru ; et al. | 2018-05-03 |
Laser unit and extreme ultraviolet light generating system
Grant 9,954,339 - Suganuma , et al. April 24, 2 | 2018-04-24 |
System And Method For Generating Extreme Ultraviolet Light
App 20180110116 - HORI; Tsukasa ; et al. | 2018-04-19 |
System and method for generating extreme ultraviolet light
Grant 9,877,378 - Hori , et al. January 23, 2 | 2018-01-23 |
Spheroidal Mirror Reflectivity Measuring Apparatus For Extreme Ultraviolet Light
App 20170336282 - KOBAYASHI; Yohei ; et al. | 2017-11-23 |
High-voltage Pulse Generator And Gas Laser Apparatus
App 20170338618 - JIANG; Weihua ; et al. | 2017-11-23 |
Target Generation Device, And Method For Manufacturing Filter Structure
App 20170203238 - ISHIHARA; Takanobu ; et al. | 2017-07-20 |
System And Method For Generating Extreme Ultraviolet Light
App 20170019983 - HORI; Tsukasa ; et al. | 2017-01-19 |
Two-beam interference apparatus and two-beam interference exposure system
Grant 9,507,248 - Okazaki , et al. November 29, 2 | 2016-11-29 |
Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam
Grant 9,510,434 - Mizoguchi , et al. November 29, 2 | 2016-11-29 |
System and method for generating extreme ultraviolet light
Grant 9,497,842 - Hori , et al. November 15, 2 | 2016-11-15 |
Extreme ultraviolet light generation system
Grant 9,402,297 - Wakabayashi , et al. July 26, 2 | 2016-07-26 |
Laser chamber and discharge excitation gas laser apparatus
Grant 9,373,926 - Tsushima , et al. June 21, 2 | 2016-06-21 |
Laser Unit And Extreme Ultraviolet Light Generating System
App 20160172814 - SUGANUMA; Takashi ; et al. | 2016-06-16 |
Optical device, laser apparatus, and extreme ultraviolet light generation system
Grant 9,362,703 - Mizoguchi , et al. June 7, 2 | 2016-06-07 |
System And Method For Generating Extreme Ultraviolet Light
App 20160128172 - HORI; Tsukasa ; et al. | 2016-05-05 |
Laser apparatus
Grant 9,331,450 - Asayama , et al. May 3, 2 | 2016-05-03 |
System and method for generating extreme ultraviolet light
Grant 9,265,136 - Hori , et al. February 16, 2 | 2016-02-16 |
Extreme Ultraviolet Light Generating Apparatus, Method Of Generating Extreme Ultraviolet Light, Concentrated Pulsed Laser Light Beam Measuring Apparatus, And Method Of Measuring Concentrated Pulsed Laser Light Beam
App 20150351211 - MIZOGUCHI; Hakaru ; et al. | 2015-12-03 |
Extreme Ultraviolet Light Generation System
App 20150264793 - WAKABAYASHI; Osamu ; et al. | 2015-09-17 |
Laser Processing Apparatus And Laser Processing Method
App 20150246848 - Ikenoue; Hiroshi ; et al. | 2015-09-03 |
Laser Chamber And Discharge Excitation Gas Laser Apparatus
App 20150249312 - TSUSHIMA; Hiroaki ; et al. | 2015-09-03 |
Laser Apparatus
App 20150194781 - ASAYAMA; Takeshi ; et al. | 2015-07-09 |
Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target
Grant 9,072,153 - Wakabayashi , et al. June 30, 2 | 2015-06-30 |
Extreme Ultraviolet Light Generation System
App 20150102239 - YANAGIDA; Tatsuya ; et al. | 2015-04-16 |
Laser Apparatus
App 20150028231 - MIZOGUCHI; Hakaru ; et al. | 2015-01-29 |
Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System
App 20140374605 - MIZOGUCHI; Hakaru ; et al. | 2014-12-25 |
Optical device, laser apparatus, and extreme ultraviolet light generation system
Grant 8,891,161 - Mizoguchi , et al. November 18, 2 | 2014-11-18 |
Laser Apparatus
App 20140328364 - FUJIMOTO; Junichi ; et al. | 2014-11-06 |
Chamber replacing method
Grant 8,813,329 - Fujimoto , et al. August 26, 2 | 2014-08-26 |
Target supply unit and extreme ultraviolet light generation apparatus
Grant 8,809,819 - Yabu , et al. August 19, 2 | 2014-08-19 |
Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus
Grant 8,785,895 - Umeda , et al. July 22, 2 | 2014-07-22 |
Target supply unit
Grant 8,779,401 - Mizoguchi , et al. July 15, 2 | 2014-07-15 |
Target supply unit
Grant 8,742,378 - Kameda , et al. June 3, 2 | 2014-06-03 |
Droplet generation and detection device, and droplet control device
Grant 8,710,473 - Mizoguchi , et al. April 29, 2 | 2014-04-29 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device
Grant 8,698,114 - Moriya , et al. April 15, 2 | 2014-04-15 |
Target Supply Apparatus, Chamber, And Extreme Ultraviolet Light Generation Apparatus
App 20140008552 - UMEDA; Hiroshi ; et al. | 2014-01-09 |
Cleaning Method For Euv Light Generation Apparatus
App 20130319466 - MIZOGUCHI; Hakaru ; et al. | 2013-12-05 |
Device For Collecting Extreme Ultraviolet Light
App 20130228695 - MIZOGUCHI; Hakaru ; et al. | 2013-09-05 |
Target Supply Device
App 20130228709 - UMEDA; Hiroshi ; et al. | 2013-09-05 |
Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System
App 20130208742 - Mizoguchi; Hakaru ; et al. | 2013-08-15 |
Extreme ultraviolet light source apparatus
Grant 8,507,883 - Endo , et al. August 13, 2 | 2013-08-13 |
Extreme Ultraviolet Light Source Device, Laser Light Source Device For Extreme Ultraviolet Light Source Device, And Method Of Adjusting Laser Light Source Device For Extreme Ultraviolet Light Source Device
App 20130148677 - MORIYA; Masato ; et al. | 2013-06-13 |
Two-beam Interference Apparatus And Two-beam Interference Exposure System
App 20130135601 - OKAZAKI; Shinji ; et al. | 2013-05-30 |
Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System
App 20130126751 - Mizoguchi; Hakaru ; et al. | 2013-05-23 |
Apparatus and method of adjusting a laser light source for an EUV source device
Grant 8,395,133 - Moriya , et al. March 12, 2 | 2013-03-12 |
Target Supply Unit
App 20130048878 - MIZOGUCHI; Hakaru ; et al. | 2013-02-28 |
System And Method For Generating Extreme Ultraviolet Light
App 20120307851 - HORI; Tsukasa ; et al. | 2012-12-06 |
Target Supply Unit And Extreme Ultraviolet Light Generation Apparatus
App 20120241650 - YABU; Takayuki ; et al. | 2012-09-27 |
Target Supply Unit
App 20120236273 - KAMEDA; Hidenobu ; et al. | 2012-09-20 |
Wavelength Conversion Device, Solid-state Laser Apparatus, And Laser System
App 20120236894 - ONOSE; Takashi ; et al. | 2012-09-20 |
Extreme Ultra Violet Light Source Apparatus
App 20120228527 - ABE; Tamotsu ; et al. | 2012-09-13 |
Extreme ultra violet light source apparatus
Grant 8,212,228 - Abe , et al. July 3, 2 | 2012-07-03 |
Droplet Generation And Detection Device, And Droplet Control Device
App 20120104289 - MIZOGUCHI; Hakaru ; et al. | 2012-05-03 |
Chamber Replacing Method
App 20110232058 - FUJIMOTO; Junichi ; et al. | 2011-09-29 |
Chamber replacing method
Grant 7,984,539 - Fujimoto , et al. July 26, 2 | 2011-07-26 |
Extreme Ultraviolet Light Source Apparatus
App 20100090132 - ENDO; Akira ; et al. | 2010-04-15 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method of adjusting laser light source device for extreme ultraviolet light source device
App 20100078577 - Moriya; Masato ; et al. | 2010-04-01 |
Extreme ultra violet light source apparatus
App 20090224181 - Abe; Tamotsu ; et al. | 2009-09-10 |
Chamber replacing method
App 20080115342 - Fujimoto; Junichi ; et al. | 2008-05-22 |
Laser device for exposure device
App 20080095209 - Wakabayashi; Osamu ; et al. | 2008-04-24 |
Extreme ultra violet light source device
App 20080035865 - Komori; Hiroshi ; et al. | 2008-02-14 |
Light source device and exposure equipment using the same
Grant 7,078,717 - Mizoguchi July 18, 2 | 2006-07-18 |
Extreme ultraviolet light source
Grant 7,067,832 - Mizoguchi , et al. June 27, 2 | 2006-06-27 |
Light source device and exposure equipment using the same
App 20050205803 - Mizoguchi, Hakaru | 2005-09-22 |
Ultra-narrow band flourine laser apparatus
Grant 6,839,373 - Takehisa , et al. January 4, 2 | 2005-01-04 |
Arf excimer laser device, scanning type exposure device and ultraviolet laser device
Grant 6,819,699 - Enami , et al. November 16, 2 | 2004-11-16 |
Discharge electrode and discharge electrode manufacturing method
Grant 6,810,061 - Hori , et al. October 26, 2 | 2004-10-26 |
Ultraviolet laser device
App 20030231687 - Wakabayashi, Osamu ; et al. | 2003-12-18 |
Pulse oscillating gas laser device
Grant 6,639,929 - Mizoguchi , et al. October 28, 2 | 2003-10-28 |
Discharge electrode and discharge electrode manufacturing method
App 20030042436 - Hori, Tsukasa ; et al. | 2003-03-06 |
Pulse oscillating gas laser device
App 20030031225 - Mizoguchi, Hakaru ; et al. | 2003-02-13 |
Gas supplementation method of excimer laser apparatus
Grant 6,130,904 - Ishihara , et al. October 10, 2 | 2000-10-10 |
Narrow-band laser apparatus
Grant 6,101,211 - Wakabayashi , et al. August 8, 2 | 2000-08-08 |
Laser gas controller and charging/discharging device for discharge-excited laser
Grant 5,754,579 - Mizoguchi , et al. May 19, 1 | 1998-05-19 |
Excimer laser device
Grant 5,642,374 - Wakabayashi , et al. June 24, 1 | 1997-06-24 |
Laser device having an electrode with auxiliary conductor members
Grant 5,557,629 - Mizoguchi , et al. September 17, 1 | 1996-09-17 |
Excimer laser apparatus
Grant 5,373,523 - Fujimoto , et al. December 13, 1 | 1994-12-13 |
Gas laser apparatus
Grant 5,291,509 - Mizoguchi , et al. March 1, 1 | 1994-03-01 |
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