Miyagi; Tadashi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Miyagi; Tadashi.The latest application filed is for "current measurement method".

Company Profile

4.35.53

Miyagi; Tadashi - Kyoto JP
MIYAGI; Tadashi - Kyoto-shi Kyoto-shi
Miyagi; Tadashi - Kamigyo-ku N/A JP
Miyagi; Tadashi - Kawasaki-shi JP
Miyagi; Tadashi - Shimogyo-ku JP
Miyagi, Tadashi - Hyogo JP
Miyagi, Tadashi - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus and substrate processing method Grant 11,400,480 - Wajiki , et al. August 2, 2	2022-08-02
Current Measurement Method App 20220187244 - TANIGUCHI; Masateru ; et al.	2022-06-16
Substrate Processing Apparatus And Substrate Processing Method App 20210213480 - WAJIKI; Takehiro ; et al.	2021-07-15
Developing method Grant 10,684,548 - Tanaka , et al.	2020-06-16
Developing Method App 20190107780 - TANAKA; Yuji ; et al.	2019-04-11
Exposure device and substrate processing apparatus Grant 10,236,200 - Miyagi , et al.	2019-03-19
Developing method Grant 10,185,219 - Tanaka , et al. Ja	2019-01-22
Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate Grant 10,134,610 - Miyagi , et al. November 20, 2	2018-11-20
Substrate processing apparatus and substrate processing method Grant 10,047,441 - Harumoto , et al. August 14, 2	2018-08-14
Negative developing method and negative developing apparatus Grant 10,042,262 - Miyagi , et al. August 7, 2	2018-08-07
Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method Grant 9,972,516 - Miyagi , et al. May 15, 2	2018-05-15
Substrate Processing Apparatus And Substrate Processing Method App 20180044795 - HARUMOTO; Masahiko ; et al.	2018-02-15
Substrate processing apparatus and substrate processing method Grant 9,828,676 - Harumoto , et al. November 28, 2	2017-11-28
Substrate processing method Grant 9,477,162 - Kaneyama , et al. October 25, 2	2016-10-25
Substrate Processing Apparatus And Substrate Processing Method App 20160289839 - HARUMOTO; Masahiko ; et al.	2016-10-06
Exposure Device And Substrate Processing Apparatus App 20160279651 - MIYAGI; Tadashi ; et al.	2016-09-29
Negative Developing Method And Negative Developing Apparatus App 20160282722 - MIYAGI; Tadashi ; et al.	2016-09-29
Exposure Device, Substrate Processing Apparatus, Exposure Method For Substrate And Substrate Processing Method App 20160282725 - MIYAGI; Tadashi ; et al.	2016-09-29
Substrate Processing Method App 20160203997 - Miyagi; Tadashi ; et al.	2016-07-14
Developing Method App 20160195811 - Tanaka; Yuji ; et al.	2016-07-07
Substrate processing apparatus and substrate processing method Grant 9,375,748 - Harumoto , et al. June 28, 2	2016-06-28
Negative developing method and negative developing apparatus Grant 9,063,429 - Miyagi , et al. June 23, 2	2015-06-23
Substrate cleaning method and substrate cleaning device Grant 9,028,621 - Miyagi , et al. May 12, 2	2015-05-12
Substrate Processing Method App 20150086923 - Kaneyama; Koji ; et al.	2015-03-26
Substrate processing apparatus Grant 8,932,672 - Kaneyama , et al. January 13, 2	2015-01-13
Substrate processing apparatus and substrate processing method Grant 8,894,775 - Miyagi , et al. November 25, 2	2014-11-25
Negative Developing Method And Negative Developing Apparatus App 20140199638 - MIYAGI; Tadashi ; et al.	2014-07-17
Substrate Processing Apparatus App 20140120477 - Yasuda; Shuichi ; et al.	2014-05-01
Substrate Processing Apparatus And Substrate Processing Method App 20140022521 - HARUMOTO; Masahiko ; et al.	2014-01-23
Substrate processing apparatus and substrate processing method Grant 8,585,830 - Yasuda , et al. November 19, 2	2013-11-19
Substrate processing method Grant 8,540,824 - Kaneyama , et al. September 24, 2	2013-09-24
Substrate processing apparatus and substrate processing method Grant 8,496,761 - Kaneyama , et al. July 30, 2	2013-07-30
Diffusing Agent Composition And Method Of Forming Impurity Diffusion Layer App 20130109123 - Morita; Toshiro ; et al.	2013-05-02
Substrate processing method Grant 8,356,424 - Kaneyama , et al. January 22, 2	2013-01-22
Substrate processing apparatus Grant 8,286,576 - Tamada , et al. October 16, 2	2012-10-16
Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form Grant 8,218,124 - Miyagi , et al. July 10, 2	2012-07-10
Method And System For Removal Of Films From Peripheral Portions Of A Substrate App 20120037593 - Miyagi; Tadashi ; et al.	2012-02-16
Substrate Cleaning Method And Substrate Cleaning Device App 20120006361 - MIYAGI; Tadashi ; et al.	2012-01-12
Substrate processing apparatus Grant 8,040,488 - Yasuda , et al. October 18, 2	2011-10-18
Substrate processing apparatus and substrate processing method Grant 8,034,190 - Yasuda , et al. October 11, 2	2011-10-11
Substrate Processing Apparatus App 20100285225 - Kaneyama; Koji ; et al.	2010-11-11
Substrate Processing Apparatus App 20100239986 - Kaneyama; Koji ; et al.	2010-09-23
Substrate Processing Apparatus And Substrate Processing Method App 20100190116 - Kaneyama; Koji ; et al.	2010-07-29
Substrate Processing Apparatus And Substrate Processing Method App 20100159142 - Yasuda; Shuichi ; et al.	2010-06-24
Substrate Processing Apparatus App 20100136257 - Yasuda; Shuichi ; et al.	2010-06-03
Substrate Processing Apparatus And Substrate Processing Method App 20100136492 - Yasuda; Shuichi ; et al.	2010-06-03
Substrate Processing Apparatus App 20100129526 - Yasuda; Shuichi ; et al.	2010-05-27
Substrate Processing Apparatus App 20100081097 - Kaneyama; Koji ; et al.	2010-04-01
Substrate Processing Apparatus App 20100075054 - Kaneyama; Koji ; et al.	2010-03-25
Substrate Processing Apparatus App 20090269936 - Tamada; Osamu ; et al.	2009-10-29
Substrate processing apparatus Grant 7,604,424 - Shigemori , et al. October 20, 2	2009-10-20
Multi-speed Substrate Processing Apparatus And Substrate Processing Method App 20090071940 - Miyagi; Tadashi ; et al.	2009-03-19
Substrate Processing Apparatus With Multi-speed Drying App 20090073394 - Miyagi; Tadashi ; et al.	2009-03-19
Apparatus For And Method Of Processing Substrate App 20090070946 - Tamada; Osamu ; et al.	2009-03-19
Substrate Processing Apparatus And Substrate Processing Method App 20090074402 - Miyagi; Tadashi ; et al.	2009-03-19
Substrate processing apparatus and substrate processing method Grant 7,497,633 - Kaneyama , et al. March 3, 2	2009-03-03
Method and system for removal of films from peripheral portions of a substrate App 20080226830 - Miyagi; Tadashi ; et al.	2008-09-18
Substrate Processing Apparatus App 20080016714 - Kaneyama; Koji ; et al.	2008-01-24
Substrate Processing Apparatus And Substrate Processing Method App 20070274711 - KANEYAMA; Koji ; et al.	2007-11-29
Method Of Processing Substrate, Substrate Processing System And Substrate Processing Apparatus App 20070253710 - KANEYAMA; Koji ; et al.	2007-11-01
Substrate Processing Apparatus App 20070190437 - Kaneyama; Koji ; et al.	2007-08-16
Apparatus For And Method Of Processing Substrate App 20070172234 - Shigemori; Kazuhito ; et al.	2007-07-26
Method Of Processing Substrate, Substrate Processing System And Substrate Processing Apparatus App 20070147832 - Shigemori; Kazuhito ; et al.	2007-06-28
Substrate Processing Apparatus For Performing Exposure Process App 20070147831 - Kaneyama; Koji ; et al.	2007-06-28
Substrate Processing Apparatus App 20070071439 - Kaneyama; Koji ; et al.	2007-03-29
Substrate processing apparatus App 20060291855 - Shigemori; Kazuhito ; et al.	2006-12-28
Substrate processing apparatus App 20060291854 - Kaneyama; Koji ; et al.	2006-12-28
Substrate processing apparatus App 20060159449 - Yasuda; Shuichi ; et al.	2006-07-20
Substrate processing apparatus App 20060152694 - Yasuda; Shuichi ; et al.	2006-07-13
Substrate processing apparatus App 20060152693 - Yasuda; Shuichi ; et al.	2006-07-13
Substrate processing apparatus and substrate processing method App 20060147202 - Yasuda; Shuichi ; et al.	2006-07-06
Substrate processing apparatus and substrate processing method App 20060108068 - Kaneyama; Koji ; et al.	2006-05-25
Substrate processing apparatus and substrate processing method App 20060098979 - Kaneyama; Koji ; et al.	2006-05-11
Substrate processing apparatus and substrate processing method App 20060098978 - Yasuda; Schuichi ; et al.	2006-05-11
Semiconductor manufacturing apparatus and manufacturing method for semiconductor device App 20030188686 - Miyagi, Tadashi	2003-10-09
System for manufacturing semiconductor device utilizing photolithography technique, method of manufacturing semiconductor device, and semiconductor device manufactured thereby App 20020048857 - Saito, Takayuki ; et al.	2002-04-25
Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured thereby Grant 6,180,320 - Saito , et al. January 30, 2	2001-01-30