Mertens; Jeroen Johannes Sophia Maria
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mertens; Jeroen Johannes Sophia Maria.The latest application filed is for "lithographic apparatus and device manufacturing method involving a heater".
Company Profile
37.193.134
- Mertens; Jeroen Johannes Sophia Maria - Duizel NL
- Mertens; Jeroen Johannes Sophia Maria - Knegsel NL
- Mertens; Jeroen Johannes Sophia Maria - Duizen NL
- Mertens, Jeroen Johannes Sophia Maria - Diuzel NL
Patent Activity
| Patent | Date |
|---|---|
| Lithographic apparatus and device manufacturing method involving a heater Grant 11,378,893 - Cadee , et al. July 5, 2 | 2022-07-05 |
| Lithographic apparatus and device manufacturing method Grant 11,016,394 - Streefkerk , et al. May 25, 2 | 2021-05-25 |
| Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
| Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20210063898 - CADEE; Theodorus Petrus Maria ; et al. | 2021-03-04 |
| Lithographic apparatus and device manufacturing method involving a heater Grant 10,838,310 - Cadee , et al. November 17, 2 | 2020-11-17 |
| Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
| Lithographic apparatus and device manufacturing method Grant 10,739,684 - Streefkerk , et al. A | 2020-08-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ; et al. | 2020-07-16 |
| Lithographic apparatus and device manufacturing method Grant 10,705,432 - Kolesnychenko , et al. | 2020-07-07 |
| Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al. | 2020-07-07 |
| Lithographic apparatus and device manufacturing method Grant 10,684,554 - Streefkerk , et al. | 2020-06-16 |
| Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
| Lithographic apparatus and device manufacturing method Grant 10,599,054 - Kemper , et al. | 2020-03-24 |
| Lithographic apparatus and device manufacturing method Grant 10,527,955 - Hoogendam , et al. J | 2020-01-07 |
| Lithographic apparatus and device manufacturing method Grant 10,509,326 - Jansen , et al. Dec | 2019-12-17 |
| Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
| Lithographic apparatus and device manufacturing method Grant 10,488,759 - Streefkerk , et al. Nov | 2019-11-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20190339623 - STREEFKERK; Bob ; et al. | 2019-11-07 |
| Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No | 2019-11-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20190324374 - STREEFKERK; Bob ; et al. | 2019-10-24 |
| Lithographic apparatus and device manufacturing method Grant 10,451,973 - Streefkerk , et al. Oc | 2019-10-22 |
| Lithographic Apparatus And Device Manufacturing Method App 20190317411 - STREEFKERK; Bob ; et al. | 2019-10-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ; et al. | 2019-10-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20190294058 - Kemper; Nicolaas Rudolf ; et al. | 2019-09-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ; et al. | 2019-08-15 |
| Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20190235397 - CADEE; Theodorus Petrus Maria ; et al. | 2019-08-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20190227444 - HOOGENDAM; Christiaan Alexander ; et al. | 2019-07-25 |
| Lithographic apparatus and device manufacturing method Grant 10,353,296 - Streefkerk , et al. July 16, 2 | 2019-07-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ; et al. | 2019-07-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20190212662 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2019-07-11 |
| Lithographic apparatus and device manufacturing method Grant 10,345,712 - Streefkerk , et al. July 9, 2 | 2019-07-09 |
| Lithographic apparatus and device manufacturing method Grant 10,338,478 - Streefkerk , et al. | 2019-07-02 |
| Lithographic apparatus and device manufacturing method Grant 10,331,047 - Kemper , et al. | 2019-06-25 |
| Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al. | 2019-04-16 |
| Lithographic apparatus and device manufacturing method involving a heater Grant 10,254,663 - Cadee , et al. | 2019-04-09 |
| Lithographic apparatus and device manufacturing method Grant 10,248,034 - Hoogendam , et al. | 2019-04-02 |
| Lithographic apparatus and device manufacturing method Grant 10,248,033 - Mertens , et al. | 2019-04-02 |
| Lithographic apparatus and device manufacturing method Grant 10,234,768 - Kolesnychenko , et al. | 2019-03-19 |
| Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
| Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
| Lithographic apparatus and a method of operating the apparatus Grant 10,175,585 - Watso , et al. J | 2019-01-08 |
| Lithographic Apparatus And Device Manufacturing Method App 20180246418 - Kolesnychenko; Aleksey Yurievich ; et al. | 2018-08-30 |
| Lithographic apparatus and device manufacturing method Grant 10,025,196 - Streefkerk , et al. July 17, 2 | 2018-07-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ; et al. | 2018-07-05 |
| Lithographic apparatus and device manufacturing method Grant 9,989,861 - Kolesnychenko , et al. June 5, 2 | 2018-06-05 |
| Lithographic apparatus and device manufacturing method Grant 9,952,515 - Streefkerk , et al. April 24, 2 | 2018-04-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20180081282 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2018-03-22 |
| Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2 | 2018-02-27 |
| Lithographic Apparatus And Device Manufacturing Method App 20180046089 - STREEFKERK; Bob ; et al. | 2018-02-15 |
| Lithographic Apparatus And Device Manufacturing Method App 20180039188 - MERTENS; Jeroen Johannes Sophia Maria ; et al. | 2018-02-08 |
| Lithographic Apparatus And Device Manufacturing Method App 20170357165 - KEMPER; Nicolaas Rudolf ; et al. | 2017-12-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ; et al. | 2017-11-30 |
| Lithographic apparatus and device manufacturing method Grant 9,829,799 - Kolesnychenko , et al. November 28, 2 | 2017-11-28 |
| Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20170285488 - Jansen; Hans ; et al. | 2017-10-05 |
| Lithographic apparatus and device manufacturing method Grant 9,753,380 - Mertens , et al. September 5, 2 | 2017-09-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20170248854 - STREEFKERK; Bob ; et al. | 2017-08-31 |
| Lithographic apparatus and device manufacturing method Grant 9,746,788 - Kemper , et al. August 29, 2 | 2017-08-29 |
| Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
| Lithographic Apparatus And Device Manufacturing Method App 20170212422 - STREEFKERK; Bob ; et al. | 2017-07-27 |
| Lithographic apparatus and device manufacturing method Grant 9,703,210 - Jansen , et al. July 11, 2 | 2017-07-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20170153557 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2017-06-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20170139333 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2017-05-18 |
| Lithographic apparatus and device manufacturing method Grant 9,606,449 - Streefkerk , et al. March 28, 2 | 2017-03-28 |
| Lithographic apparatus and device manufacturing method Grant 9,581,914 - Dierichs , et al. February 28, 2 | 2017-02-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20170045830 - HOOGENDAM; Christiaan Alexander ; et al. | 2017-02-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ; et al. | 2017-02-16 |
| Lithographic apparatus and device manufacturing method Grant 9,568,840 - Kolesnychenko , et al. February 14, 2 | 2017-02-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ; et al. | 2017-01-12 |
| Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20160370714 - MERTENS; Jeroen Johannes Sophia Maria ; et al. | 2016-12-22 |
| Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2 | 2016-11-29 |
| Lithographic apparatus and device manufacturing method Grant 9,488,923 - Kemper , et al. November 8, 2 | 2016-11-08 |
| Lithographic apparatus and device manufacturing method Grant 9,482,962 - Hoogendam , et al. November 1, 2 | 2016-11-01 |
| Lithographic apparatus and device manufacturing method Grant 9,482,966 - Lof , et al. November 1, 2 | 2016-11-01 |
| Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
| Lithographic apparatus and device manufacturing method Grant 9,477,153 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ; et al. | 2016-10-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20160282727 - LOF; Joeri ; et al. | 2016-09-29 |
| Lithographic apparatus and device manufacturing method Grant 9,436,097 - Mertens , et al. September 6, 2 | 2016-09-06 |
| Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20160103399 - STREEFKERK; Bob ; et al. | 2016-04-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20160085161 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2016-03-24 |
| Lithographic apparatus involving an immersion liquid supply system with an aperture Grant 9,285,686 - Mertens , et al. March 15, 2 | 2016-03-15 |
| Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Grant 9,268,242 - Cadee , et al. February 23, 2 | 2016-02-23 |
| Lithographic Apparatus And Device Manufacturing Method App 20160026085 - STREEFKERK; Bob ; et al. | 2016-01-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20160004171 - STREEFKERK; Bob ; et al. | 2016-01-07 |
| Lithographic apparatus and device manufacturing method Grant 9,229,335 - Streefkerk , et al. January 5, 2 | 2016-01-05 |
| Lithographic apparatus and device manufacturing method involving a groove to collect liquid Grant 9,207,543 - Kolesnychenko , et al. December 8, 2 | 2015-12-08 |
| Lithographic apparatus and device manufacturing method involving a heater Grant 9,188,880 - Cadee , et al. November 17, 2 | 2015-11-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ; et al. | 2015-11-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20150316858 - STREEFKERK; Bob ; et al. | 2015-11-05 |
| Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
| Lithographic apparatus and device manufacturing method Grant 9,146,478 - Streefkerk , et al. September 29, 2 | 2015-09-29 |
| Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ; et al. | 2015-09-17 |
| Lithographic apparatus and device manufacturing method Grant 9,134,622 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
| Lithographic apparatus and device manufacturing method Grant 9,134,623 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
| Lithographic apparatus having a liquid detection system Grant 9,104,117 - Streefkerk , et al. August 11, 2 | 2015-08-11 |
| Lithographic apparatus and device manufacturing method Grant 9,097,992 - Kemper , et al. August 4, 2 | 2015-08-04 |
| Lithographic Apparatus And Device Manufacturing Method App 20150205214 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2015-07-23 |
| Lithographic apparatus and device manufacturing method Grant 9,081,300 - Streefkerk , et al. July 14, 2 | 2015-07-14 |
| Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ; et al. | 2015-06-18 |
| Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
| Lithographic apparatus and device manufacturing method Grant 9,025,127 - Dierichs , et al. May 5, 2 | 2015-05-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20150116677 - Mertens; Jeroen Johannes Sophia Maria ; et al. | 2015-04-30 |
| Lithographic Apparatus And Device Manufacturing Method App 20150116675 - JANSEN; Hans ; et al. | 2015-04-30 |
| Lithographic Apparatus And Device Manufacturing Method App 20150109593 - MERTENS; Jeroen Johannes Sophia Maria ; et al. | 2015-04-23 |
| Lithographic Apparatus And A Method Of Operating The Apparatus App 20150055102 - WATSO; Robert Douglas ; et al. | 2015-02-26 |
| Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
| Lithographic apparatus and device manufacturing method Grant 8,953,144 - Dierichs , et al. February 10, 2 | 2015-02-10 |
| Lithographic apparatus and device manufacturing method Grant 8,941,811 - Jansen , et al. January 27, 2 | 2015-01-27 |
| Lithographic apparatus and device manufacturing method involving a resistivity sensor Grant 8,937,704 - Mertens , et al. January 20, 2 | 2015-01-20 |
| Lithographic apparatus and device manufacturing method Grant 8,934,082 - Mertens , et al. January 13, 2 | 2015-01-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20140375973 - STREEFKERK; Bob ; et al. | 2014-12-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20140375972 - HOOGENDAM; Christiaan Alexander ; et al. | 2014-12-25 |
| Lithographic apparatus and device manufacturing method Grant 8,860,923 - Hoogendam , et al. October 14, 2 | 2014-10-14 |
| Lithographic apparatus and device manufacturing method Grant 8,860,926 - Hennus , et al. October 14, 2 | 2014-10-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20140300883 - Kemper; Nicolaas Rudolf ; et al. | 2014-10-09 |
| Lithographic Apparatus And Device Manufacturing Method App 20140253890 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2014-09-11 |
| Lithographic apparatus and a method of operating the apparatus Grant 8,823,918 - Watso , et al. September 2, 2 | 2014-09-02 |
| Lithographic Apparatus And Device Manufacturing Method App 20140233004 - Streefkerk; Bob ; et al. | 2014-08-21 |
| Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,755,033 - Kolesnychenko , et al. June 17, 2 | 2014-06-17 |
| Lithographic apparatus and device manufacturing method Grant 8,755,028 - Kemper , et al. June 17, 2 | 2014-06-17 |
| Lithographic apparatus and device manufacturing method Grant 8,749,754 - Streefkerk , et al. June 10, 2 | 2014-06-10 |
| Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
| Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
| Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,704,998 - Kolesnychenko , et al. April 22, 2 | 2014-04-22 |
| Lithographic apparatus and device manufacturing method Grant 8,687,168 - De Graaf , et al. April 1, 2 | 2014-04-01 |
| Lithographic apparatus Grant 8,638,418 - Hoogendam , et al. January 28, 2 | 2014-01-28 |
| Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table Grant 8,634,052 - Auer-Jongepier , et al. January 21, 2 | 2014-01-21 |
| Lithographic apparatus and device manufacturing method Grant 8,634,056 - Streefkerk , et al. January 21, 2 | 2014-01-21 |
| Lithographic apparatus and device manufacturing method Grant 8,629,971 - Dierichs , et al. January 14, 2 | 2014-01-14 |
| Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
| Lithographic apparatus and device manufacturing method Grant 8,553,201 - Streefkerk , et al. October 8, 2 | 2013-10-08 |
| Lithographic apparatus and device manufacturing method Grant 8,547,519 - Streefkerk , et al. October 1, 2 | 2013-10-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20130250270 - LOF; Joeri ; et al. | 2013-09-26 |
| Lithographic apparatus and device manufacturing method Grant 8,542,344 - Hoogendam , et al. September 24, 2 | 2013-09-24 |
| Lithographic apparatus Grant 8,542,343 - Hoogendam , et al. September 24, 2 | 2013-09-24 |
| Lithographic apparatus and device manufacturing method Grant 8,481,978 - Jansen , et al. July 9, 2 | 2013-07-09 |
| Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
| Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20130135595 - STREEFKERK; Bob ; et al. | 2013-05-30 |
| Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2 | 2013-05-21 |
| Lithographic Apparatus And Device Manufacturing Method App 20130070219 - STREEFKERK; Bob ; et al. | 2013-03-21 |
| Lithographic apparatus and device manufacturing method Grant 8,354,209 - Streefkerk , et al. January 15, 2 | 2013-01-15 |
| Immersion lithographic apparatus and device manufacturing method detecting residual liquid Grant 8,319,939 - Streefkerk , et al. November 27, 2 | 2012-11-27 |
| Lithographic Apparatus And Device Manufacturing Method App 20120257178 - HOOGENDAM; Christiaan Alexander ; et al. | 2012-10-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20120127441 - Streefkerk; Bob ; et al. | 2012-05-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20120113402 - CADEE; Theodorus Petrus Maria ; et al. | 2012-05-10 |
| Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
| Lithographic apparatus and device manufacturing method Grant 8,142,852 - Mertens , et al. March 27, 2 | 2012-03-27 |
| Lithographic apparatus and device manufacturing method Grant 8,138,486 - Jansen , et al. March 20, 2 | 2012-03-20 |
| Lithographic Apparatus And Device Manufacturing Method App 20120048193 - MERTENS; Jeroen Johannes Sophia Maria ; et al. | 2012-03-01 |
| Lithographic apparatus and device manufacturing method Grant 8,115,903 - Streefkerk , et al. February 14, 2 | 2012-02-14 |
| Lithographic apparatus and device manufacturing method Grant 8,115,905 - Hennus , et al. February 14, 2 | 2012-02-14 |
| Lithographic apparatus and device manufacturing method Grant 8,115,899 - Jansen , et al. February 14, 2 | 2012-02-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20120013867 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2012-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20120013874 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2012-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20120013870 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2012-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20120013869 - HOOGENDAM; Christiaan Alexander ; et al. | 2012-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20120013871 - STREEFKERK; Bob ; et al. | 2012-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20120013873 - Streefkerk; Bob ; et al. | 2012-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20120008119 - JANSEN; Hans ; et al. | 2012-01-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20110310367 - KEMPER; Nicolaas Rudolf ; et al. | 2011-12-22 |
| Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ; et al. | 2011-11-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ; et al. | 2011-11-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ; et al. | 2011-11-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ; et al. | 2011-11-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273677 - STREEFKERK; Bob ; et al. | 2011-11-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ; et al. | 2011-11-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20110249246 - MERTENS; Jeroen Johannes Sophia Maria ; et al. | 2011-10-13 |
| Lithographic apparatus and device manufacturing method Grant 8,031,325 - Kemper , et al. October 4, 2 | 2011-10-04 |
| Lithographic apparatus and device manufacturing method Grant 8,004,652 - Mertens , et al. August 23, 2 | 2011-08-23 |
| Lithographic Apparatus And Device Manufacturing Method App 20110183257 - JANSEN; Hans ; et al. | 2011-07-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ; et al. | 2011-07-14 |
| Lithographic Apparatus App 20110157570 - Hoogendam; Christiaan Alexander ; et al. | 2011-06-30 |
| Lithographic Apparatus And Device Manufacturing Method App 20110116061 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2011-05-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20110109887 - Jansen; Hans ; et al. | 2011-05-12 |
| Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2 | 2011-05-03 |
| Lithographic Apparatus App 20110090473 - Hoogendam; Christiaan Alexander ; et al. | 2011-04-21 |
| Lithographic Apparatus And Device Manufacturing Method App 20110090474 - JANSEN; Hans ; et al. | 2011-04-21 |
| Lithographic apparatus and device manufacturing method Grant 7,929,112 - De Graaf , et al. April 19, 2 | 2011-04-19 |
| Lithographic apparatus and device manufacturing method Grant 7,928,407 - Jansen , et al. April 19, 2 | 2011-04-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20110058148 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2011-03-10 |
| Lithographic apparatus and device manufacturing method Grant 7,898,642 - Kolesnychenko , et al. March 1, 2 | 2011-03-01 |
| Lithographic apparatus and device manufacturing method Grant 7,880,860 - Jansen , et al. February 1, 2 | 2011-02-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ; et al. | 2011-01-13 |
| Lithographic apparatus Grant 7,868,998 - Hoogendam , et al. January 11, 2 | 2011-01-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ; et al. | 2011-01-06 |
| Lithographic Apparatus And Device Manufacturing Method App 20110001944 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2011-01-06 |
| Lithographic Apparatus And Device Manufacturing Method App 20100321650 - CADEE; THEODORUS PETRUS MARIA ; et al. | 2010-12-23 |
| Lithographic apparatus and device manufacturing method Grant 7,834,977 - Baselmans , et al. November 16, 2 | 2010-11-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20100270709 - MERTENS; Jeroen Johannes Sophia Maria ; et al. | 2010-10-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20100265476 - Dierichs; Marcel Mathijs Theodore Marie ; et al. | 2010-10-21 |
| Lithographic apparatus and device manufacturing method Grant 7,812,924 - Baselmans , et al. October 12, 2 | 2010-10-12 |
| Lithographic apparatus and device manufacturing method having liquid evaporation control Grant 7,804,575 - Cadee , et al. September 28, 2 | 2010-09-28 |
| Lithographic apparatus and device manufacturing method Grant 7,779,781 - Mertens , et al. August 24, 2 | 2010-08-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20100149514 - KEMPER; Nicolaas Rudolf ; et al. | 2010-06-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20100141915 - Baselmans; Johannes Jacobus Matheus ; et al. | 2010-06-10 |
| Lithographic apparatus and device manufacturing method Grant 7,733,459 - Dierichs , et al. June 8, 2 | 2010-06-08 |
| Lithographic apparatus and device manufacturing method Grant 7,710,540 - Loopstra , et al. May 4, 2 | 2010-05-04 |
| Lithographic apparatus and device manufacturing method Grant 7,701,550 - Kemper , et al. April 20, 2 | 2010-04-20 |
| Lithographic Apparatus And Device Manufacturing Method App 20100091255 - STREEFKERK; Bob ; et al. | 2010-04-15 |
| Lithographic apparatus and device manufacturing method Grant 7,671,963 - Streefkerk , et al. March 2, 2 | 2010-03-02 |
| Lithographic apparatus and device manufacturing method Grant 7,652,751 - Baselmans , et al. January 26, 2 | 2010-01-26 |
| Prewetting of substrate before immersion exposure Grant 7,643,127 - Baselmans , et al. January 5, 2 | 2010-01-05 |
| Lithographic apparatus and device manufacturing method Grant 7,633,073 - Jansen , et al. December 15, 2 | 2009-12-15 |
| Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ; et al. | 2009-11-26 |
| Lithographic Apparatus And A Method Of Operating The Apparatus App 20090284715 - Watso; Robert Douglas ; et al. | 2009-11-19 |
| Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2 | 2009-10-13 |
| Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
| Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
| Lithographic Apparatus And Device Manufacturing Method App 20090207397 - Streefkerk; Bob ; et al. | 2009-08-20 |
| Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck Grant 7,532,310 - Mertens , et al. May 12, 2 | 2009-05-12 |
| Lithographic apparatus and device manufacturing method Grant 7,528,929 - Streefkerk , et al. May 5, 2 | 2009-05-05 |
| Lithographic apparatus and device manufacturing method Grant 7,486,381 - Streefkerk , et al. February 3, 2 | 2009-02-03 |
| Lithographic apparatus and device manufacturing method Grant 7,468,779 - De Graaf , et al. December 23, 2 | 2008-12-23 |
| Lithographic apparatus and device manufacturing method Grant 7,463,330 - Streefkerk , et al. December 9, 2 | 2008-12-09 |
| Sensor and lithographic apparatus Grant 7,459,669 - Bastiaensen , et al. December 2, 2 | 2008-12-02 |
| Calibration substrate and method for calibrating a lithographic apparatus Grant 7,453,063 - Ottens , et al. November 18, 2 | 2008-11-18 |
| Lithographic apparatus App 20080278696 - Hoogendam; Christiaan Alexander ; et al. | 2008-11-13 |
| Lithographic apparatus and device manufacturing method App 20080259292 - Mertens; Jeroen Johannes Sophia Maria ; et al. | 2008-10-23 |
| Lithographic apparatus and device manufacturing method App 20080246936 - Loopstra; Erik Roelof ; et al. | 2008-10-09 |
| Lithographic apparatus and device manufacturing method Grant 7,433,016 - Streefkerk , et al. October 7, 2 | 2008-10-07 |
| Lithographic apparatus and device manufacturing method App 20080218711 - Baselmans; Johannes Jacobus Matheus ; et al. | 2008-09-11 |
| Lithographic apparatus and device manufacturing method App 20080218717 - Streefkerk; Bob ; et al. | 2008-09-11 |
| Lithographic apparatus Grant 7,411,653 - Hoogendam , et al. August 12, 2 | 2008-08-12 |
| Lithographic apparatus and method App 20080186460 - Auer-Jongepier; Suzan Leonie ; et al. | 2008-08-07 |
| Lithographic apparatus and device manufacturing method Grant 7,379,155 - Mertens , et al. May 27, 2 | 2008-05-27 |
| Lithographic apparatus and device manufacturing method Grant 7,379,159 - Baselmans , et al. May 27, 2 | 2008-05-27 |
| Lithographic apparatus and device manufacturing method Grant 7,375,796 - Baselmans , et al. May 20, 2 | 2008-05-20 |
| Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
| Lithographic apparatus and device manufacturing method Grant 7,304,715 - Cadee , et al. December 4, 2 | 2007-12-04 |
| Lithographic apparatus and device manufacturing method App 20070268471 - Lof; Joeri ; et al. | 2007-11-22 |
| Sensor shield Grant 7,248,334 - Baselmans , et al. July 24, 2 | 2007-07-24 |
| Prewetting of substrate before immersion exposure App 20070159613 - Baselmans; Johannes Jacobus Matheus ; et al. | 2007-07-12 |
| Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ; et al. | 2007-06-14 |
| Lithographic apparatus and device manufacturing method Grant 7,227,619 - Zaal , et al. June 5, 2 | 2007-06-05 |
| Lithographic apparatus and device manufacturing method Grant 7,224,436 - Derksen , et al. May 29, 2 | 2007-05-29 |
| Lithographic apparatus and device manufacturing method App 20070114451 - Jansen; Hans ; et al. | 2007-05-24 |
| Lithographic apparatus and device manufacturing method App 20070114452 - Jansen; Hans ; et al. | 2007-05-24 |
| Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
| Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
| Prewetting of substrate before immersion exposure Grant 7,196,770 - Baselmans , et al. March 27, 2 | 2007-03-27 |
| Lithographic apparatus and device manufacturing method Grant 7,196,768 - Ottens , et al. March 27, 2 | 2007-03-27 |
| Lithographic apparatus and device manufacturing method App 20070013886 - Baselmans; Johannes Jacobus Matheus ; et al. | 2007-01-18 |
| Lithographic apparatus Grant 7,161,663 - Mertens , et al. January 9, 2 | 2007-01-09 |
| Lithographic apparatus and device manufacturing method Grant 7,161,654 - Baselmans , et al. January 9, 2 | 2007-01-09 |
| Lithographic apparatus and device manufacturing method App 20060290908 - De Graaf; Roelof Frederik ; et al. | 2006-12-28 |
| Lithographic apparatus and device manufacturing method App 20060250590 - Streefkerk; Bob ; et al. | 2006-11-09 |
| Lithographic apparatus and device manufacturing method Grant 7,075,616 - Derksen , et al. July 11, 2 | 2006-07-11 |
| Lithographic apparatus and device manufacturing method App 20060147821 - Streefkerk; Bob ; et al. | 2006-07-06 |
| Lithographic apparatus and device manufacturing method App 20060132731 - Jansen; Hans ; et al. | 2006-06-22 |
| Sensor shield App 20060119816 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-06-08 |
| Lithographic apparatus and device manufacturing method App 20060119807 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-06-08 |
| Lithographic apparatus and device manufacturing method Grant 7,057,702 - Lof , et al. June 6, 2 | 2006-06-06 |
| Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck App 20060102849 - Mertens; Jeroen Johannes Sophia Maria ; et al. | 2006-05-18 |
| Lithographic apparatus and device manufacturing method App 20060087637 - Ottens; Joost Jeroen ; et al. | 2006-04-27 |
| Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,034,917 - Baselmans , et al. April 25, 2 | 2006-04-25 |
| Lithographic apparatus and device manufacturing method App 20060082746 - Mertens; Jeroen Johannes Sophia Maria ; et al. | 2006-04-20 |
| Lithographic apparatus and device manufacturing method App 20060038968 - Kemper; Nicolaas Rudolf ; et al. | 2006-02-23 |
| Lithographic apparatus and device manufacturing method App 20060033892 - Cadee; Theodorus Petrus Maria ; et al. | 2006-02-16 |
| Lithographic apparatus App 20060017893 - Mertens; Jeroen Johannes Sophia Maria ; et al. | 2006-01-26 |
| Lithographic apparatus and device manufacturing method App 20060007419 - Streefkerk; Bob ; et al. | 2006-01-12 |
| Lithographic apparatus and device manufacturing method App 20050286032 - Lof, Joeri ; et al. | 2005-12-29 |
| Lithographic apparatus and device manufacturing method App 20050270506 - Streefkerk, Bob ; et al. | 2005-12-08 |
| Lithographic apparatus App 20050263068 - Hoogendam, Christiaan Alexander ; et al. | 2005-12-01 |
| Lithographic apparatus and device manufacturing method App 20050259233 - Streefkerk, Bob ; et al. | 2005-11-24 |
| Lithographic apparatus and device manufacturing method App 20050243292 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-11-03 |
| Lithographic apparatus and device manufacturing method App 20050231694 - Kolesnychenko, Aleksey Yurievich ; et al. | 2005-10-20 |
| Lithographic apparatus and device manufacturing method App 20050219499 - Maria Zaal, Koen Jacobus Johannes ; et al. | 2005-10-06 |
| Lithographic apparatus, device manufacturing method and device manufactured thereby App 20050219482 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-10-06 |
| Lithographic apparatus and device manufacturing method App 20050219483 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-10-06 |
| Lithographic apparatus and device manufacturing method App 20050175776 - Streefkerk, Bod ; et al. | 2005-08-11 |
| Lithographic apparatus and device manufacturing method App 20050078286 - Dierichs, Marcel Mathijs Theodore Marie ; et al. | 2005-04-14 |
| Lithographic apparatus and device manufacturing method App 20050048220 - Mertens, Jeroen Johannes Sophia Maria ; et al. | 2005-03-03 |
| Lithographic apparatus and device manufacturing method Grant 6,847,430 - Mertens January 25, 2 | 2005-01-25 |
| Lithographic apparatus and device manufacturing method App 20050007569 - Streefkerk, Bob ; et al. | 2005-01-13 |
| Lithographic apparatus and device manufacturing method App 20040160582 - Lof, Joeri ; et al. | 2004-08-19 |
| Lithographic apparatus and device manufacturing method App 20030197844 - Mertens, Jeroen Johannes Sophia Maria | 2003-10-23 |
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