Patent | Date |
---|
Laminate diffusion barriers and related devices and methods Grant 11,133,461 - Petz , et al. September 28, 2 | 2021-09-28 |
Integrated structures and methods of forming integrated structures Grant 11,107,823 - Hu , et al. August 31, 2 | 2021-08-31 |
Integrated Structures and Methods of Forming Integrated Structures App 20200083238 - Hu; Yongjun Jeff ;   et al. | 2020-03-12 |
Integrated structures and methods of forming integrated structures Grant 10,504,911 - Hu , et al. Dec | 2019-12-10 |
Integrated Structures and Methods of Forming Integrated Structures App 20190267390 - Hu; Yongjun Jeff ;   et al. | 2019-08-29 |
Integrated structures and methods of forming integrated structures Grant 10,325,917 - Hu , et al. | 2019-06-18 |
Integrated Structures and Methods of Forming Integrated Structures App 20170373076 - Hu; Yongjun Jeff ;   et al. | 2017-12-28 |
Systems and methods for plasma processing of microfeature workpieces Grant 9,786,475 - Qin , et al. October 10, 2 | 2017-10-10 |
Methods of forming integrated structures Grant 9,780,103 - Hu , et al. October 3, 2 | 2017-10-03 |
Integrated Structures and Methods of Forming Integrated Structures App 20170141119 - Hu; Yongjun Jeff ;   et al. | 2017-05-18 |
Forming a memory device using sputtering to deposit silver-selenide film Grant 9,552,986 - Li , et al. January 24, 2 | 2017-01-24 |
Semiconductor devices Grant 9,530,842 - Qin , et al. December 27, 2 | 2016-12-27 |
Memory cells and methods of forming memory cells Grant 9,496,495 - Schubert , et al. November 15, 2 | 2016-11-15 |
N-type field effect transistors, arrays comprising N-type vertically-oriented transistors, methods of forming an N-type field effect transistor, and methods of forming an array comprising vertically-oriented N-type transistors Grant 9,472,663 - Hu , et al. October 18, 2 | 2016-10-18 |
Memory Cells and Methods of Forming Memory Cells App 20160284996 - Schubert; Martin ;   et al. | 2016-09-29 |
Barrier film techniques and configurations for phase-change memory elements Grant 9,419,212 - Petz , et al. August 16, 2 | 2016-08-16 |
Semiconductor Devices, and Methods of Forming Semiconductor Devices App 20160211324 - Qin; Shu ;   et al. | 2016-07-21 |
Memory cells and methods of forming memory cells Grant 9,385,317 - Schubert , et al. July 5, 2 | 2016-07-05 |
Barrier Film Techniques And Configurations For Phase-change Memory Elements App 20160163975 - Petz; Christopher W. ;   et al. | 2016-06-09 |
Low-Resistance Interconnects and Methods of Making Same App 20160118340 - Goswami; Jaydeb ;   et al. | 2016-04-28 |
Laminate Diffusion Barriers And Related Devices And Methods App 20160093804 - Petz; Christopher ;   et al. | 2016-03-31 |
Methods of forming memory cells having regions containing one or both of carbon and boron Grant 9,257,646 - Schubert , et al. February 9, 2 | 2016-02-09 |
Memory Cells and Methods of Forming Memory Cells App 20160035974 - Schubert; Martin ;   et al. | 2016-02-04 |
Arrays Comprising Vertically-Oriented Transistors and Integrated Circuitry Comprising a Conductive Line Buried in Silicon-Comprising Semiconductor Material App 20150357334 - Hu; Yongjun Jeff ;   et al. | 2015-12-10 |
Low-resistance interconnects and methods of making same Grant 9,202,786 - Goswami , et al. December 1, 2 | 2015-12-01 |
Arrays comprising vertically-oriented transistors, integrated circuitry comprising a conductive line buried in silicon-comprising semiconductor material, methods of forming a plurality of conductive lines buried in silicon-comprising semiconductor material, and methods of forming an array comprising Grant 9,129,896 - Hu , et al. September 8, 2 | 2015-09-08 |
N-type Field Effect Transistors, Arrays Comprising N-type Vertically-Oriented Transistors, Methods Of Forming An N-type Field Effect Transistor, And Methods Of Forming An Array Comprising Vertically-Oriented N-type Transistors App 20150214363 - Hu; Yongjun Jeff ;   et al. | 2015-07-30 |
Methods of forming doped regions in semiconductor substrates Grant 9,093,367 - Liu , et al. July 28, 2 | 2015-07-28 |
Memory Cells and Methods of Forming Memory Cells App 20150179936 - Schubert; Martin ;   et al. | 2015-06-25 |
N-type field effect transistors, arrays comprising N-type vertically-oriented transistors, methods of forming an N-type field effect transistor, and methods of forming an array comprising vertically-oriented N-type transistors Grant 9,006,060 - Hu , et al. April 14, 2 | 2015-04-14 |
Memory cells having regions containing one or both of carbon and boron Grant 8,981,334 - Schubert , et al. March 17, 2 | 2015-03-17 |
Systems and methods for plasma doping microfeature workpieces Grant 8,975,603 - Qin , et al. March 10, 2 | 2015-03-10 |
System and method for sputtering a tensile silicon nitride film Grant 8,936,702 - McTeer January 20, 2 | 2015-01-20 |
Silver selenide sputtered films and method and apparatus for controlling defect formation in silver selenide sputtered films Grant 8,821,697 - Li , et al. September 2, 2 | 2014-09-02 |
Silver Selenide Film Stoichiometry And Morphology Control In Sputter Deposition App 20140224646 - Li; Jiutao ;   et al. | 2014-08-14 |
Apparatuses and devices for absorbing electromagnetic radiation, and methods of forming the apparatuses and devices Grant 8,797,662 - Hu , et al. August 5, 2 | 2014-08-05 |
Systems And Methods For Plasma Processing Of Microfeature Workpieces App 20140197134 - Qin; Shu ;   et al. | 2014-07-17 |
Systems And Methods For Plasma Doping Microfeature Workpieces App 20140144379 - Qin; Shu ;   et al. | 2014-05-29 |
Systems and methods for plasma processing of microfeature workpieces Grant 8,671,879 - Qin , et al. March 18, 2 | 2014-03-18 |
N-type Field Effect Transistors, Arrays Comprising N-type Vertically-Oriented Transistors, Methods Of Forming An N-type Field Effect Transistor, And Methods Of Forming An Array Comprising Vertically-Oriented N-type Transistors App 20140054678 - Hu; Yongjun Jeff ;   et al. | 2014-02-27 |
Arrays Comprising Vertically-Oriented Transistors, Integrated Circuitry Comprising A Conductive Line Buried In Silicon-Comprising Semiconductor Material, Methods Of Forming A Plurality Of Conductive Lines Buried In Silicon-Comprising Semiconductor Material, And Methods Of Forming An Array Comprising App 20140054677 - Hu; Yongjun Jeff ;   et al. | 2014-02-27 |
Systems and methods for plasma doping microfeature workpieces Grant 8,642,135 - Qin , et al. February 4, 2 | 2014-02-04 |
Methods of Forming Doped Regions in Semiconductor Substrates App 20130288466 - Liu; Lequn Jennifer ;   et al. | 2013-10-31 |
Methods of forming doped regions in semiconductor substrates Grant 8,497,194 - Liu , et al. July 30, 2 | 2013-07-30 |
Silver Selenide Sputtered Films And Method And Apparatus For Controlling Defect Formation In Silver Selenide Sputtered Films App 20130118894 - Li; Jiutao ;   et al. | 2013-05-16 |
Methods of Forming Doped Regions in Semiconductor Substrates App 20130072006 - Liu; Lequn Jennifer ;   et al. | 2013-03-21 |
Methods of forming doped regions in semiconductor substrates Grant 8,329,567 - Liu , et al. December 11, 2 | 2012-12-11 |
Layered resistance variable memory device and method of fabrication Grant 8,263,958 - Campbell , et al. September 11, 2 | 2012-09-11 |
Semiconductor structures resulting from selective oxidation Grant 8,227,875 - Hu , et al. July 24, 2 | 2012-07-24 |
Methods of forming transistor gate constructions, methods of forming NAND transistor gate constructions, and methods forming DRAM transistor gate constructions Grant 8,216,935 - Blomiley , et al. July 10, 2 | 2012-07-10 |
Apparatuses And Devices For Absorbing Electromagnetic Radiation, And Methods Of Forming The Apparatuses And Devices App 20120154919 - Hu; Yongjun Jeff ;   et al. | 2012-06-21 |
Methods Of Forming Doped Regions In Semiconductor Substrates App 20120108042 - Liu; Jennifer Lequn ;   et al. | 2012-05-03 |
Co-sputter deposition of metal-doped chalcogenides Grant 7,964,436 - Li , et al. June 21, 2 | 2011-06-21 |
Low-resistance Interconnects And Methods Of Making Same App 20110095427 - Goswami; Jaydeb ;   et al. | 2011-04-28 |
Silver Selenide Sputtered Films And Method And Apparatus For Controlling Defect Formation In Silver Selenide Sputtered Films App 20110014115 - Li; Jiutao ;   et al. | 2011-01-20 |
Low-resistance interconnects and methods of making same Grant 7,863,176 - Goswami , et al. January 4, 2 | 2011-01-04 |
Seed layer for reduced resistance tungsten film Grant 7,830,016 - Meldrim , et al. November 9, 2 | 2010-11-09 |
Methods Of Forming Transistor Gate Constructions, Methods Of Forming NAND Transistor Gate Constructions, And Methods Forming DRAM Transistor Gate Constructions App 20100255669 - Blomiley; Eric R. ;   et al. | 2010-10-07 |
Semiconductor Structures Resulting From Selective Oxidation App 20100244158 - Hu; Yongjun Jeff ;   et al. | 2010-09-30 |
Silver selenide sputtered films and method and apparatus for controlling defect formation in silver selenide sputtered films Grant 7,799,180 - Li , et al. September 21, 2 | 2010-09-21 |
Layered Resistance Variable Memory Device And Method Of Fabrication App 20100219391 - Campbell; Kristy A. ;   et al. | 2010-09-02 |
Methods of selectively oxidizing semiconductor structures, and structures resulting therefrom Grant 7,749,849 - Hu , et al. July 6, 2 | 2010-07-06 |
Method of photoresist strip for plasma doping process of semiconductor manufacturing Grant 7,737,010 - Qin , et al. June 15, 2 | 2010-06-15 |
Layered resistance variable memory device and method of fabrication Grant 7,723,713 - Campbell , et al. May 25, 2 | 2010-05-25 |
Use of AIN as cooper passivation layer and thermal conductor Grant 7,679,193 - McTeer March 16, 2 | 2010-03-16 |
Seed Layer For Reduced Resistance Tungsten Film App 20090321943 - Meldrim; Mark ;   et al. | 2009-12-31 |
Methods of forming a resistance variable element Grant 7,632,702 - McTeer December 15, 2 | 2009-12-15 |
Low-resistance Interconnects And Methods Of Making Same App 20090283907 - Goswami; Jaydeb ;   et al. | 2009-11-19 |
Methods for determining a dose of an impurity implanted in a semiconductor substrate Grant 7,592,212 - Qin , et al. September 22, 2 | 2009-09-22 |
Methods Of Selectively Oxidizing Semiconductor Structures, And Structures Resulting Therefrom App 20090152629 - Hu; Yongjun Jeff ;   et al. | 2009-06-18 |
Systems And Methods For Plasma Processing Of Microfeature Workpieces App 20090120581 - Qin; Shu ;   et al. | 2009-05-14 |
Co-sputter Deposition Of Metal-doped Chalcogenides App 20090098717 - Li; Jiutao ;   et al. | 2009-04-16 |
Electrically conductive line, method of forming an electrically conductive line, and method of reducing titanium silicide agglomeration in fabrication of titanium silicide over polysilicon transistor gate lines Grant 7,510,966 - Pan , et al. March 31, 2 | 2009-03-31 |
Systems and methods for plasma processing of microfeature workpieces Grant 7,476,556 - Qin , et al. January 13, 2 | 2009-01-13 |
Methods of Forming A Resistance Variable Element App 20080299699 - McTeer; Allen | 2008-12-04 |
Electrically Conductive Line App 20080284025 - Pan; Qi ;   et al. | 2008-11-20 |
Co-sputter deposition of metal-doped chalcogenides Grant 7,446,393 - Li , et al. November 4, 2 | 2008-11-04 |
Methods for determining a dose of an impurity implanted in a semiconductor substrate and an apparatus for same App 20080248597 - Qin; Shu ;   et al. | 2008-10-09 |
Methods of forming a resistance variable element Grant 7,422,927 - McTeer September 9, 2 | 2008-09-09 |
Silver selenide film stoichiometry and morphology control in sputter deposition App 20080210921 - Li; Jiutao ;   et al. | 2008-09-04 |
Silver selenide film stoichiometry and morphology control in sputter deposition Grant 7,364,644 - Li , et al. April 29, 2 | 2008-04-29 |
Method of photoresist strip for plasma doping process of semiconductor manufacturing App 20070243700 - Qin; Shu ;   et al. | 2007-10-18 |
System and method for sputtering a tensile silicon nitride film App 20070212893 - McTeer; Allen | 2007-09-13 |
Co-sputter deposition of metal-doped chalcogenides App 20070164398 - Li; Jiutao ;   et al. | 2007-07-19 |
Use of AIN as cooper passivation layer and thermal conductor App 20070164442 - McTeer; Allen | 2007-07-19 |
Method of forming an interconnect structure for a semiconductor device Grant 7,205,223 - McTeer April 17, 2 | 2007-04-17 |
Co-sputter deposition of metal-doped chalcogenides Grant 7,202,104 - Li , et al. April 10, 2 | 2007-04-10 |
Systems and methods for plasma doping microfeature workpieces App 20070048453 - Qin; Shu ;   et al. | 2007-03-01 |
Method of forming an interconnect structure for a semiconductor device App 20070042596 - McTeer; Allen | 2007-02-22 |
Systems and methods for plasma processing of microfeature workpieces App 20070037300 - Qin; Shu ;   et al. | 2007-02-15 |
Memory cell with selective deposition of refractory metals App 20070012987 - McTeer; Allen ;   et al. | 2007-01-18 |
Layered resistance variable memory device and method of fabrication App 20070007506 - Campbell; Kristy A. ;   et al. | 2007-01-11 |
Methods of depositing silver onto a metal selenide-comprising surface and methods of depositing silver onto a selenium-comprising surface Grant 7,138,290 - McTeer November 21, 2 | 2006-11-21 |
Methods of forming a resistance variable element App 20060240663 - McTeer; Allen | 2006-10-26 |
Electrically conductive line, method of forming an electrically conductive line, and method of reducing titanium silicide agglomeration in fabrication of titanium silicide over polysilicon transistor gate lines App 20060197225 - Pan; Qi ;   et al. | 2006-09-07 |
Layered resistance variable memory device and method of fabrication Grant 7,087,919 - Campbell , et al. August 8, 2 | 2006-08-08 |
Memory cell with selective deposition of refractory metals Grant 7,078,755 - McTeer , et al. July 18, 2 | 2006-07-18 |
Interconnect structure for use in an integrated circuit Grant 7,061,111 - McTeer June 13, 2 | 2006-06-13 |
Methods of depositing silver onto a metal selenide-comprising surface, methods of depositing silver onto a selenium-comprising surface, and methods of forming a resistance variable device App 20060121726 - McTeer; Allen | 2006-06-08 |
Silver selenide film stoichiometry and morphology control in sputter deposition Grant 7,049,009 - Li , et al. May 23, 2 | 2006-05-23 |
Silver selenide sputtered films and method and apparatus for controlling defect formation in silver selenide sputtered films App 20050103621 - Li, Jiutao ;   et al. | 2005-05-19 |
Silver selenide film stoichiometry and morphology control in sputter deposition App 20050098428 - Li, Jiutao ;   et al. | 2005-05-12 |
Co-sputter deposition of metal-doped chalcogenides Grant 6,890,790 - Li , et al. May 10, 2 | 2005-05-10 |
Elimination of dendrite formation during metal/chalcogenide glass deposition Grant 6,858,465 - Li , et al. February 22, 2 | 2005-02-22 |
Integrated circuit device and fabrication using metal-doped chalcogenide materials App 20050026433 - Li, Jiutao ;   et al. | 2005-02-03 |
Method of forming a multi-layered copper bond pad for an integrated circuit Grant 6,841,478 - McTeer January 11, 2 | 2005-01-11 |
Elimination of dendrite formation during metal/chalcogenide glass deposition Grant 6,825,135 - Li , et al. November 30, 2 | 2004-11-30 |
Co-sputter deposition of metal-doped chalcogenides App 20040235235 - Li, Jiutao ;   et al. | 2004-11-25 |
Integrated circuit device and fabrication using metal-doped chalcogenide materials Grant 6,800,504 - Li , et al. October 5, 2 | 2004-10-05 |
Layered resistance variable memory device and method of fabrication App 20040192006 - Campbell, Kristy A. ;   et al. | 2004-09-30 |
Integrated circuit device and fabrication using metal-doped chalcogenide materials Grant 6,730,547 - Li , et al. May 4, 2 | 2004-05-04 |
Elimination of dendrite formation during metal/chalcogenide glass deposition App 20040082099 - Lin, Jiutao ;   et al. | 2004-04-29 |
Multi-layered copper bond pad for an integrated circuit App 20040056361 - McTeer, Allen | 2004-03-25 |
Integrated circuit device and fabrication using metal-doped chalcogenide materials Grant 6,709,958 - Li , et al. March 23, 2 | 2004-03-23 |
Method of forming chalcogenide sputter target App 20040040837 - McTeer, Allen ;   et al. | 2004-03-04 |
Elimination of dendrite formation during metal/chalcogenide glass deposition App 20040043553 - Li, Jiutao ;   et al. | 2004-03-04 |
Silver selenide film stoichiometry and morphology control in sputter deposition App 20040040835 - Li, Jiutao ;   et al. | 2004-03-04 |
Co-sputter deposition of metal-doped chalcogenides App 20030228717 - Li, Jiutao ;   et al. | 2003-12-11 |
Elimination Of Dendrite Formation During Metal/chalcogenide Glass Deposition App 20030228771 - Li, Jiutao ;   et al. | 2003-12-11 |
Reducing reflectivity on a semiconductor wafer by annealing titanium and aluminum Grant 6,649,519 - McTeer November 18, 2 | 2003-11-18 |
Multi-layered copper bond pad for an integrated circuit Grant 6,642,623 - McTeer November 4, 2 | 2003-11-04 |
Integrated circuit device and fabrication using metal-doped chalcogenide materials App 20030186504 - Li, Jiutao ;   et al. | 2003-10-02 |
Copper interconnect for an integrated circuit and method for its fabrication App 20030160330 - McTeer, Allen | 2003-08-28 |
Integrated circuit device and fabrication using metal-doped chalcogenide materials App 20030068861 - Li, Jiutao ;   et al. | 2003-04-10 |
Integrated circuit device and fabrication using metal-doped chalcogenide materials App 20030068862 - Li, Jiutao ;   et al. | 2003-04-10 |
Memory cell with selective deposition of refractory metals App 20020179956 - McTeer, Allen ;   et al. | 2002-12-05 |
Use of ALN as copper passivation layer and thermal conductor App 20020175362 - McTeer, Allen | 2002-11-28 |
Selective cap layers over recessed polysilicon plugs Grant 6,455,424 - McTeer , et al. September 24, 2 | 2002-09-24 |
Copper interconnect for an integrated circuit and methods for its fabrication App 20020090804 - McTeer, Allen | 2002-07-11 |
Reducing reflectivity on a semiconductor wafer by annealing titanium and aluminum App 20020045341 - McTeer, Allen | 2002-04-18 |
Copper interconnect for an integrated circuit and methods for its fabrication Grant 6,373,137 - McTeer April 16, 2 | 2002-04-16 |
Suppression of hillock formation in thin aluminum films Grant 6,348,403 - Raina , et al. February 19, 2 | 2002-02-19 |
Semiconductor Constructions Compromising Aluminum-Containing Layers App 20010039077 - McTeer, Allen | 2001-11-08 |
Formation of electrical contacts to conductive elements in the fabrication of semiconductor integrated circuits Grant 6,261,947 - McTeer July 17, 2 | 2001-07-17 |
Metallization on titanium aluminide Grant 6,258,466 - McTeer July 10, 2 | 2001-07-10 |
Method for forming dual damascene structures Grant 6,204,166 - McTeer March 20, 2 | 2001-03-20 |
Methods of reducing corrosion of materials, methods of protecting aluminum within aluminum-comprising layers from electrochemical degradation during semiconductor processing methods of forming aluminum-comprising lines Grant 6,110,830 - Skrovan , et al. August 29, 2 | 2000-08-29 |
Copper diffusion barrier, aluminum wetting layer and improved methods for filling openings in silicon substrates with cooper Grant 5,939,788 - McTeer August 17, 1 | 1999-08-17 |
Reducing reflectivity on a semiconductor wafer by annealing titanium and aluminum Grant 5,838,052 - McTeer November 17, 1 | 1998-11-17 |
Method for increased metal interconnect reliability in situ formation of titanium aluminide Grant 5,700,718 - McTeer December 23, 1 | 1997-12-23 |