| Patent | Date |
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Dynamic cooling control for thermal stabilization for lithography system
Grant 11,009,801 - Johnston , et al. May 18, 2 | 2021-05-18 |
Dynamic Cooling Control For Thermal Stabilization For Lithography System
App 20210011390 - JOHNSTON; Benjamin M. ; et al. | 2021-01-14 |
Dynamic cooling control for thermal stabilization for lithography system
Grant 10,788,762 - Johnston , et al. September 29, 2 | 2020-09-29 |
Dynamic Cooling Control For Thermal Stabilization For Lithography System
App 20200272063 - JOHNSTON; Benjamin M. ; et al. | 2020-08-27 |
Empirical detection of lens aberration for diffraction-limited optical system
Grant 10,451,564 - Zhong , et al. Oc | 2019-10-22 |
Empirical Detection Of Lens Aberration For Diffraction-limited Optical System
App 20190128825 - ZHONG; Qin ; et al. | 2019-05-02 |
Focus Centering Method For Digital Lithography
App 20180024448 - TUNG; Yeishin ; et al. | 2018-01-25 |
Wafer Sawing System
App 20140083407 - Schmid; Andreas ; et al. | 2014-03-27 |
Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads
Grant 8,142,260 - Kollata , et al. March 27, 2 | 2012-03-27 |
Systems for thin film laser scribing devices
Grant 8,129,658 - Manens , et al. March 6, 2 | 2012-03-06 |
Multi-layer polishing pad for low-pressure polishing
Grant 8,066,552 - Duboust , et al. November 29, 2 | 2011-11-29 |
CMP pad thickness and profile monitoring system
Grant 8,043,870 - Manens , et al. October 25, 2 | 2011-10-25 |
Laser Processing System With Variable Beam Spot Size
App 20110253685 - Hsu; Wei-Yung ; et al. | 2011-10-20 |
In-line Metrology Methods And Systems For Solar Cell Fabrication
App 20110198322 - Manens; Antoine P. ; et al. | 2011-08-18 |
Latitudinal Iso-line Scribe, Stitching, And Simplified Laser And Scanner Controls
App 20110139758 - Fan; Jiafa ; et al. | 2011-06-16 |
Multi-wavelength Laser-scribing Tool
App 20110139755 - Manens; Antoine P. ; et al. | 2011-06-16 |
Laser Modules And Processes For Thin Film Solar Panel Laser Scribing
App 20110132884 - Manens; Antoine P. ; et al. | 2011-06-09 |
Methods And Related Systems For Thin Film Laser Scribing Devices
App 20110033970 - Manens; Antoine P. ; et al. | 2011-02-10 |
Methods And Systems For Laser-scribed Line Alignment
App 20100314367 - SHAMOUN; Bassam ; et al. | 2010-12-16 |
Polishing Pad With Projecting Portion
App 20100267318 - Duboust; Alain ; et al. | 2010-10-21 |
Laser-scribing Tool Architecture
App 20100252543 - Manens; Antoine P. ; et al. | 2010-10-07 |
Endpoint for electroprocessing
Grant 7,790,015 - Wang , et al. September 7, 2 | 2010-09-07 |
Electroprocessing profile control
Grant 7,709,382 - Manens , et al. May 4, 2 | 2010-05-04 |
Methods And Apparatus For Polishing An Edge And/or Notch Of A Substrate
App 20100105299 - Ettinger; Gary C. ; et al. | 2010-04-29 |
Methods And Apparatus To Minimize The Effect Of Tape Tension In Electronic Device Polishing
App 20100105294 - Ettinger; Gary C. ; et al. | 2010-04-29 |
Methods And Apparatus For Polishing A Notch Of A Substrate
App 20100105291 - Ettinger; Gary C. ; et al. | 2010-04-29 |
Electroprocessing profile control
Grant 7,655,565 - Manens , et al. February 2, 2 | 2010-02-02 |
Laser Scribe Inspection Methods And Systems
App 20090314751 - Manens; Antoine P. ; et al. | 2009-12-24 |
In-situ Monitoring For Laser Ablation
App 20090314752 - MANENS; ANTOINE P. ; et al. | 2009-12-24 |
Algorithm for real-time process control of electro-polishing
Grant 7,628,905 - Manens , et al. December 8, 2 | 2009-12-08 |
Cmp Pad Thickness And Profile Monitoring System
App 20090280580 - Manens; Antoine P. ; et al. | 2009-11-12 |
Biased retaining ring
Grant 7,608,173 - Manens , et al. October 27, 2 | 2009-10-27 |
Apparatus And Methods For Using A Polishing Tape Cassette
App 20090264053 - Manens; Antoine P. ; et al. | 2009-10-22 |
Laser Scribing Platform And Hybrid Writing Strategy
App 20090255911 - Krishnaswami; Sriram ; et al. | 2009-10-15 |
Grooved retaining ring
Grant 7,520,795 - Wang , et al. April 21, 2 | 2009-04-21 |
Edge Bead Removal Process With Ecmp Technology
App 20090061617 - Duboust; Alain ; et al. | 2009-03-05 |
Methods And Apparatus For Removal Of Films And Flakes From The Edge Of Both Sides Of A Substrate Using Backing Pads
App 20080293340 - Kollata; Eashwer ; et al. | 2008-11-27 |
Methods And Apparatus For Polishing A Notch Of A Substrate Using A Polishing Pad
App 20080293344 - Ettinger; Gary C. ; et al. | 2008-11-27 |
Methods And Apparatus For Using A Bevel Polishing Head With An Efficient Tape Routing Arrangement
App 20080293334 - Kollata; Eashwer ; et al. | 2008-11-27 |
Methods And Apparatus For Using A Rolling Backing Pad For Substrate Polishing
App 20080293341 - Kollata; Eashwer ; et al. | 2008-11-27 |
Methods And Apparatus For Substrate Edge Polishing Using A Polishing Arm
App 20080293335 - Ettinger; Gary C. ; et al. | 2008-11-27 |
Pad Assemblies For Electrochemically Assisted Planarization
App 20080254713 - Manens; Antoine P. ; et al. | 2008-10-16 |
Conductive polishing article for electrochemical mechanical polishing
Grant 7,422,516 - Butterfield , et al. September 9, 2 | 2008-09-09 |
Conductive Polishing Article For Electrochemical Mechanical Polishing
App 20080156657 - Butterfield; Paul D. ; et al. | 2008-07-03 |
Platen Assembly For Electrochemical Mechanical Processing
App 20080146121 - Ozgun; Omer ; et al. | 2008-06-19 |
Conductive polishing article for electrochemical mechanical polishing
Grant 7,374,644 - Butterfield , et al. May 20, 2 | 2008-05-20 |
Endpoint For Electroprocessing
App 20080051009 - Wang; Yan ; et al. | 2008-02-28 |
Electroprocessing Profile Control
App 20080047841 - MANENS; ANTOINE P. ; et al. | 2008-02-28 |
Electroprocessing Profile Control
App 20080045012 - Manens; Antoine P. ; et al. | 2008-02-21 |
Retaining Ring With Conductive Portion
App 20080038999 - Manens; Antoine P. ; et al. | 2008-02-14 |
Conductive Polishing Article For Electrochemical Mechanical Polishing
App 20080026681 - BUTTERFIELD; PAUL D. ; et al. | 2008-01-31 |
Process Control In Electro-chemical Mechanical Polishing
App 20080017521 - MANENS; ANTOINE P. ; et al. | 2008-01-24 |
Conditioning Disk Having Uniform Structures
App 20080014845 - Yilmaz; Alpay ; et al. | 2008-01-17 |
System And Method For In-situ Head Rinse
App 20080003931 - Manens; Antoine P. ; et al. | 2008-01-03 |
Edge bead removal by an electro polishing process
Grant 7,303,462 - Duboust , et al. December 4, 2 | 2007-12-04 |
Process control in electrochemically assisted planarization
Grant 7,294,038 - Manens , et al. November 13, 2 | 2007-11-13 |
Conductive polishing article for electrochemical mechanical polishing
Grant 7,278,911 - Butterfield , et al. October 9, 2 | 2007-10-09 |
Retaining ring with conductive portion
Grant 7,276,743 - Manens , et al. October 2, 2 | 2007-10-02 |
Electropolish Assisted Electrochemical Mechanical Polishing Apparatus
App 20070221495 - MANENS; ANTOINE P. | 2007-09-27 |
Methods and apparatus for electroprocessing with recessed bias contact
App 20070215488 - Wang; Yan ; et al. | 2007-09-20 |
Ball Contact Cover For Copper Loss Reduction And Spike Reduction
App 20070096315 - Manens; Antoine P. ; et al. | 2007-05-03 |
Conductive polishing article for electrochemical mechanical polishing
Grant 7,207,878 - Hu , et al. April 24, 2 | 2007-04-24 |
Contact assembly cleaning in an electrochemical mechanical processing apparatus
App 20070084729 - Manens; Antoine P. ; et al. | 2007-04-19 |
Processing pad assembly with zone control
Grant 7,186,164 - Manens March 6, 2 | 2007-03-06 |
Grooved Retaining Ring
App 20070044913 - Wang; Shi-Ping ; et al. | 2007-03-01 |
Algorithm for real-time process control of electro-polishing
App 20060237330 - Manens; Antoine P. ; et al. | 2006-10-26 |
Process Control In Electrochemically Assisted Planarization
App 20060228992 - Manens; Antoine P. ; et al. | 2006-10-12 |
Algorithm for real-time process control of electro-polishing
Grant 7,112,270 - Manens , et al. September 26, 2 | 2006-09-26 |
Electroprocessing profile control
App 20060166500 - Manens; Antoine P. ; et al. | 2006-07-27 |
Algorithm For Real-time Process Control Of Electro-polishing
App 20060163074 - Manens; Antoine P. ; et al. | 2006-07-27 |
Process control in electrochemically assisted planarization
Grant 7,070,475 - Manens , et al. July 4, 2 | 2006-07-04 |
Biased retaining ring
App 20060137819 - Manens; Antoine P. ; et al. | 2006-06-29 |
Conductive polishing article for electrochemical mechanical polishing
Grant 6,991,528 - Hu , et al. January 31, 2 | 2006-01-31 |
Conductive polishing article for electrochemical mechanical polishing
App 20050284770 - Butterfield, Paul D. ; et al. | 2005-12-29 |
Retaining ring with conductive portion
App 20050282322 - Manens, Antoine P. ; et al. | 2005-12-22 |
Conductive polishing article for electrochemical mechanical polishing
Grant 6,962,524 - Butterfield , et al. November 8, 2 | 2005-11-08 |
Multi-layer polishing pad for low-pressure polishing
App 20050221723 - Duboust, Alain ; et al. | 2005-10-06 |
Process control in electrochemically assisted planarization
App 20050178743 - Manens, Antoine P. ; et al. | 2005-08-18 |
Edge bead removal by an electro polishing process
App 20050161341 - Duboust, Alain ; et al. | 2005-07-28 |
Conductive polishing article for electrochemical mechanical polishing
App 20050133363 - Hu, Yongqi ; et al. | 2005-06-23 |
Real time process control for a polishing process
App 20050121141 - Manens, Antoine P. | 2005-06-09 |
Processing pad assembly with zone control
App 20050124262 - Manens, Antoine P. | 2005-06-09 |
Apparatus for electrochemical processing
Grant 6,884,153 - Manens , et al. April 26, 2 | 2005-04-26 |
Endpoint compensation in electroprocessing
App 20050061674 - Wang, Yan ; et al. | 2005-03-24 |
Process control in electrochemically assisted planarization
Grant 6,848,970 - Manens , et al. February 1, 2 | 2005-02-01 |
Process control in electro-chemical mechanical polishing
App 20040182721 - Manens, Antoine P. ; et al. | 2004-09-23 |
Conductive polishing article for electrochemical mechanical polishing
App 20040134792 - Butterfield, Paul D. ; et al. | 2004-07-15 |
Conductive polishing article for electrochemical mechanical polishing
App 20040082289 - Butterfield, Paul D. ; et al. | 2004-04-29 |
Process control in electrochemically assisted planarization
App 20040053512 - Manens, Antoine P. ; et al. | 2004-03-18 |
Conductive polishing article for electrochemical mechanical polishing
App 20040023610 - Hu, Yongqi ; et al. | 2004-02-05 |
Apparatus for electrochemical processing
App 20030220053 - Manens, Antoine P. ; et al. | 2003-11-27 |
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