| Patent | Date |
|---|
Modulation Of Scanning Velocity During Overlay Metrology
App 20220307825 - Brown; David L. ; et al. | 2022-09-29 |
Systems and Methods for Measurement of Misregistration and Amelioration Thereof
App 20220307824 - Volkovich; Roie ; et al. | 2022-09-29 |
Overlay Metrology Using Spectroscopic Phase
App 20220299308 - Shchegrov; Andrei V. ; et al. | 2022-09-22 |
Optical Metrology Utilizing Short-wave Infrared Wavelengths
App 20220291143 - Manassen; Amnon ; et al. | 2022-09-15 |
Multi-field Scanning Overlay Metrology
App 20220283514 - Hill; Andrew V. ; et al. | 2022-09-08 |
Scanning scatterometry overlay measurement
Grant 11,428,642 - Hill , et al. August 30, 2 | 2022-08-30 |
Measurement Of Properties Of Patterned Photoresist
App 20220236181 - Volkovich; Roie ; et al. | 2022-07-28 |
Scanning Scatterometry Overlay Measurement
App 20220214285 - Hill; Andrew V. ; et al. | 2022-07-07 |
Device-like Metrology Targets
App 20220197152 - Levinski; Vladimir ; et al. | 2022-06-23 |
Darkfield imaging of grating target structures for overlay measurement
Grant 11,359,916 - Hill , et al. June 14, 2 | 2022-06-14 |
System and method for tilt calculation based on overlay metrology measurements
Grant 11,360,398 - Volkovich , et al. June 14, 2 | 2022-06-14 |
System and method for error reduction for metrology measurements
Grant 11,353,799 - Volkovich , et al. June 7, 2 | 2022-06-07 |
Method Of Measuring Misregistration In The Manufacture Of Topographic Semiconductor Device Wafers
App 20220171296 - Negri; Daria ; et al. | 2022-06-02 |
Measurement modes for overlay
Grant 11,346,657 - Manassen , et al. May 31, 2 | 2022-05-31 |
System and Method for Error Reduction for Metrology Measurements
App 20220155693 - Volkovich; Roie ; et al. | 2022-05-19 |
Topographic phase control for overlay measurement
Grant 11,314,173 - Levinski , et al. April 26, 2 | 2022-04-26 |
Systems and methods for optimizing focus for imaging-based overlay metrology
Grant 11,313,669 - Manassen , et al. April 26, 2 | 2022-04-26 |
Pupil-plane beam scanning for metrology
Grant 11,300,524 - Hill , et al. April 12, 2 | 2022-04-12 |
Grey-mode scanning scatterometry overlay metrology
Grant 11,300,405 - Manassen , et al. April 12, 2 | 2022-04-12 |
System Amd Method For Determining Target Feature Focus In Image-based Overlay Metrology
App 20220108128 - Lavert; Etay ; et al. | 2022-04-07 |
Method of measuring misregistration in the manufacture of topographic semiconductor device wafers
Grant 11,281,112 - Negri , et al. March 22, 2 | 2022-03-22 |
Off-axis illumination overlay measurement using two-diffracted orders imaging
Grant 11,281,111 - Shalibo , et al. March 22, 2 | 2022-03-22 |
Grey-mode Scanning Scatterometry Overlay Metrology
App 20220034652 - Manassen; Amnon ; et al. | 2022-02-03 |
Imaging System For Buried Metrology Targets
App 20210372784 - Hill; Andrew V. ; et al. | 2021-12-02 |
Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)
App 20210373445 - Manassen; Amnon ; et al. | 2021-12-02 |
Spectral filter for high-power fiber illumination sources
Grant 11,187,838 - Hill , et al. November 30, 2 | 2021-11-30 |
Measurement Modes for Overlay
App 20210364279 - Manassen; Amnon ; et al. | 2021-11-25 |
Fab Management With Dynamic Sampling Plans, Optimized Wafer Measurement Paths And Optimized Wafer Transport, Using Quantum Computing
App 20210335638 - MANASSEN; Amnon ; et al. | 2021-10-28 |
High-brightness illumination source for optical metrology
Grant 11,156,846 - Manassen , et al. October 26, 2 | 2021-10-26 |
Metrology Target For Scanning Metrology
App 20210311401 - Hill; Andrew V. ; et al. | 2021-10-07 |
Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s)
Grant 11,119,417 - Manassen , et al. September 14, 2 | 2021-09-14 |
Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements
Grant 11,112,704 - Adam , et al. September 7, 2 | 2021-09-07 |
Parameter-stable misregistration measurement amelioration in semiconductor devices
Grant 11,101,153 - Levinski , et al. August 24, 2 | 2021-08-24 |
Topographic Phase Control For Overlay Measurement
App 20210255551 - Levinski; Vladimir ; et al. | 2021-08-19 |
Metrology target for scanning metrology
Grant 11,073,768 - Hill , et al. July 27, 2 | 2021-07-27 |
Polarization measurements of metrology targets and corresponding target designs
Grant 11,060,845 - Amit , et al. July 13, 2 | 2021-07-13 |
Method Of Measuring Misregistration In The Manufacture Of Topographic Semiconductor Device Wafers
App 20210200104 - Negri; Daria ; et al. | 2021-07-01 |
System And Method For Measuring Misregistration Of Semiconductor Device Wafers Utilizing Induced Topography
App 20210191279 - Negri; Daria ; et al. | 2021-06-24 |
Measurement of Overlay Error Using Device Inspection System
App 20210159128 - Hoo; Choon Hoong ; et al. | 2021-05-27 |
System And Method For Tilt Calculation Based On Overlay Metrology Measurements
App 20210149313 - Volkovich; Roie ; et al. | 2021-05-20 |
Nano-structured non-polarizing beamsplitter
Grant 10,976,562 - Gorelik , et al. April 13, 2 | 2021-04-13 |
Sensitive Optical Metrology in Scanning and Static Modes
App 20210096061 - Hill; Andrew V. ; et al. | 2021-04-01 |
Darkfield Imaging Of Grating Target Structures For Overlay Measurement
App 20210072021 - Hill; Andrew V. ; et al. | 2021-03-11 |
Measurement of overlay error using device inspection system
Grant 10,943,838 - Hoo , et al. March 9, 2 | 2021-03-09 |
Parameter-stable Misregistration Measurement Amelioration In Semiconductor Devices
App 20210020480 - LEVINSKI; Vladimir ; et al. | 2021-01-21 |
Metrology Target for Scanning Metrology
App 20200409271 - Hill; Andrew V. ; et al. | 2020-12-31 |
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
Grant 10,831,108 - Marciano , et al. November 10, 2 | 2020-11-10 |
Diffraction based overlay scatterometry
Grant 10,824,079 - Lubashevsky , et al. November 3, 2 | 2020-11-03 |
High-Brightness Illumination Source for Optical Metrology
App 20200333612 - Manassen; Amnon ; et al. | 2020-10-22 |
Systems and Methods for Optimizing Focus for Imaging-Based Overlay Metrology
App 20200240765 - Manassen; Amnon ; et al. | 2020-07-30 |
On the fly target acquisition
Grant 10,684,563 - Manassen , et al. | 2020-06-16 |
Systems and methods for optimizing focus for imaging-based overlay metrology
Grant 10,663,281 - Manassen , et al. | 2020-05-26 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20200158492 - Amit; Eran ; et al. | 2020-05-21 |
Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)
App 20200159129 - Manassen; Amnon ; et al. | 2020-05-21 |
Topographic Phase Control For Overlay Measurement
App 20200142321 - Levinski; Vladimir ; et al. | 2020-05-07 |
Topographic Phase Control For Overlay Measurement
App 20200142322 - Levinski; Vladimir ; et al. | 2020-05-07 |
Topographic Phase Control For Overlay Measurement
App 20200142323 - Levinski; Vladimir ; et al. | 2020-05-07 |
Off-axis Illumination Overlay Measurement Using Two-diffracted Orders Imaging
App 20200132446 - Shalibo; Yoni ; et al. | 2020-04-30 |
Device-like Metrology Targets
App 20200124981 - Levinski; Vladimir ; et al. | 2020-04-23 |
Process compatibility improvement by fill factor modulation
Grant 10,579,768 - Levinski , et al. | 2020-03-03 |
Metrology targets with supplementary structures in an intermediate layer
Grant 10,551,749 - Levinski , et al. Fe | 2020-02-04 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,533,940 - Manassen , et al. Ja | 2020-01-14 |
Topographic phase control for overlay measurement
Grant 10,520,832 - Levinski , et al. Dec | 2019-12-31 |
Polarization measurements of metrology targets and corresponding target designs
Grant 10,458,777 - Amit , et al. Oc | 2019-10-29 |
Systems and methods for metrology with layer-specific illumination spectra
Grant 10,444,161 - Manassen , et al. Oc | 2019-10-15 |
System and method for spectral tuning of broadband light sources
Grant 10,422,508 - Hill , et al. Sept | 2019-09-24 |
Overlay control with non-zero offset prediction
Grant 10,409,171 - Adel , et al. Sept | 2019-09-10 |
Overlay metrology using multiple parameter configurations
Grant 10,401,738 - Hill , et al. Sep | 2019-09-03 |
Simultaneous capturing of overlay signals from multiple targets
Grant 10,401,228 - Hill , et al. Sep | 2019-09-03 |
Measurement of Overlay Error Using Device Inspection System
App 20190252270 - Hoo; Choon Hoong ; et al. | 2019-08-15 |
System and method for generating multi-channel tunable illumination from a broadband source
Grant 10,371,626 - Hill , et al. | 2019-08-06 |
On The Fly Target Acquisition
App 20190228518 - Manassen; Amnon ; et al. | 2019-07-25 |
Enhancing Metrology Target Information Content
App 20190178630 - Amit; Eran ; et al. | 2019-06-13 |
Near field metrology
Grant 10,261,014 - Sapiens , et al. | 2019-04-16 |
Nano-Structured Non-Polarizing Beamsplitter
App 20190107727 - Gorelik; Dmitry ; et al. | 2019-04-11 |
Scanning in Angle-Resolved Reflectometry and Algorithmically Eliminating Diffraction from Optical Metrology
App 20190094142 - Manassen; Amnon ; et al. | 2019-03-28 |
Method, system, and user interface for metrology target characterization
Grant 10,242,290 - Tarshish-Shapir , et al. | 2019-03-26 |
Systems for providing illumination in optical metrology
Grant 10,203,247 - Brady , et al. Feb | 2019-02-12 |
Overlay Metrology Using Multiple Parameter Configurations
App 20190041329 - Hill; Andrew V. ; et al. | 2019-02-07 |
Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields
Grant 10,197,389 - Levinski , et al. Fe | 2019-02-05 |
Mitigation of Inaccuracies Related to Grating Asymmetries in Scatterometry Measurements
App 20190033726 - Adam; Ido ; et al. | 2019-01-31 |
Spectral Filter for High-Power Fiber Illumination Sources
App 20190033501 - Hill; Andrew V. ; et al. | 2019-01-31 |
Metrology imaging targets having reflection-symmetric pairs of reflection-asymmetric structures
Grant 10,190,979 - Manassen , et al. Ja | 2019-01-29 |
Diffraction Based Overlay Scatterometry
App 20190004439 - LUBASHEVSKY; Yuval ; et al. | 2019-01-03 |
Diffraction Based Overlay Scatterometry
App 20180342063 - LUBASHEVSKY; Yuval ; et al. | 2018-11-29 |
Compound objectives for imaging and scatterometry overlay
Grant 10,139,528 - Seligson , et al. Nov | 2018-11-27 |
Simultaneous Capturing of Overlay Signals From Multiple Targets
App 20180335346 - Hill; Andrew V. ; et al. | 2018-11-22 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,126,238 - Manassen , et al. November 13, 2 | 2018-11-13 |
Systems and Methods for Metrology with Layer-Specific Illumination Spectra
App 20180292326 - Manassen; Amnon ; et al. | 2018-10-11 |
Systems and Methods for Optimizing Focus for Imaging-Based Overlay Metrology
App 20180292198 - Manassen; Amnon ; et al. | 2018-10-11 |
Overlay Control with Non-Zero Offset Prediction
App 20180253017 - Adel; Michael E. ; et al. | 2018-09-06 |
Simultaneous capturing of overlay signals from multiple targets
Grant 10,048,132 - Hill , et al. August 14, 2 | 2018-08-14 |
Device-Like Metrology Targets
App 20180188663 - Levinski; Vladimir ; et al. | 2018-07-05 |
Process Compatibility Improvement by Fill Factor Modulation
App 20180157784 - Levinski; Vladimir ; et al. | 2018-06-07 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 9,958,385 - Manassen , et al. May 1, 2 | 2018-05-01 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20180106723 - Manassen; Amnon ; et al. | 2018-04-19 |
Optical Near-Field Metrology
App 20180087900 - Paskover; Yuri ; et al. | 2018-03-29 |
Spectral control system
Grant 9,921,050 - Manassen , et al. March 20, 2 | 2018-03-20 |
System and Method for Generating Multi-Channel Tunable Illumination from a Broadband Source
App 20180052099 - Hill; Andrew V. ; et al. | 2018-02-22 |
Simultaneous Capturing Of Overlay Signals From Multiple Targets
App 20180031424 - Hill; Andrew V. ; et al. | 2018-02-01 |
Decreasing inaccuracy due to non-periodic effects on scatterometric signals
Grant 9,851,300 - Bringoltz , et al. December 26, 2 | 2017-12-26 |
System and Method for Spectral Tuning of Broadband Light Sources
App 20170350575 - Hill; Andrew V. ; et al. | 2017-12-07 |
Apodization for pupil imaging scatterometry
Grant 9,784,987 - Hill , et al. October 10, 2 | 2017-10-10 |
New Approaches in First Order Scatterometry Overlay Based on Introduction of Auxiliary Electromagnetic Fields
App 20170268869 - Levinski; Vladimir ; et al. | 2017-09-21 |
Compressive sensing with illumination patterning
Grant 9,719,940 - Manassen , et al. August 1, 2 | 2017-08-01 |
Systems for Providing Illumination in Optical Metrology
App 20170146399 - Brady; Gregory R. ; et al. | 2017-05-25 |
Topographic Phase Control For Overlay Measurement
App 20170146915 - Levinski; Vladimir ; et al. | 2017-05-25 |
Grazing order metrology
Grant 9,618,448 - Manassen April 11, 2 | 2017-04-11 |
Phase characterization of targets
Grant 9,581,430 - Manassen , et al. February 28, 2 | 2017-02-28 |
Systems for providing illumination in optical metrology
Grant 9,512,985 - Brady , et al. December 6, 2 | 2016-12-06 |
Methods Of Analyzing And Utilizing Landscapes To Reduce Or Eliminate Inaccuracy In Overlay Optical Metrology
App 20160313658 - Marciano; Tal ; et al. | 2016-10-27 |
Spectral Control System
App 20160305766 - Manassen; Amnon ; et al. | 2016-10-20 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20160178351 - AMIT; Eran ; et al. | 2016-06-23 |
Spectral control system
Grant 9,341,769 - Manassen , et al. May 17, 2 | 2016-05-17 |
Method for estimating and correcting misregistration target inaccuracy
Grant 9,329,033 - Amit , et al. May 3, 2 | 2016-05-03 |
Metrology Imaging Targets Having Reflection-symmetric Pairs Of Reflection-asymmetric Structures
App 20160084758 - Manassen; Amnon ; et al. | 2016-03-24 |
Measurement of critical dimension and scanner aberration utilizing metrology targets
Grant 9,255,787 - Manassen , et al. February 9, 2 | 2016-02-09 |
Compressive Sensing With Illumination Patterning
App 20160025646 - MANASSEN; Amnon ; et al. | 2016-01-28 |
Overlay measurement based on moire effect between structured illumination and overlay target
Grant 9,182,219 - Manassen , et al. November 10, 2 | 2015-11-10 |
Apodization for Pupil Imaging Scatterometry
App 20150316783 - Hill; Andrew V. ; et al. | 2015-11-05 |
Optics symmetrization for metrology
Grant 9,164,397 - Manassen , et al. October 20, 2 | 2015-10-20 |
Fit-to-pitch overlay measurement targets
Grant 9,123,649 - Manassen , et al. September 1, 2 | 2015-09-01 |
Grazing Order Metrology
App 20150233818 - Manassen; Amnon | 2015-08-20 |
Apodization for pupil imaging scatterometry
Grant 9,091,650 - Hill , et al. July 28, 2 | 2015-07-28 |
Near Field Metrology
App 20150198524 - Sapiens; Noam ; et al. | 2015-07-16 |
Metrology systems and methods
Grant 9,080,971 - Kandel , et al. July 14, 2 | 2015-07-14 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20150116717 - MANASSEN; Amnon ; et al. | 2015-04-30 |
Metrology Systems and Methods
App 20150036142 - Kandel; Daniel ; et al. | 2015-02-05 |
Discrete polarization scatterometry
Grant 8,896,832 - Hill , et al. November 25, 2 | 2014-11-25 |
Metrology systems and methods
Grant 8,873,054 - Kandel , et al. October 28, 2 | 2014-10-28 |
Systems for Providing Illumination in Optical Metrology
App 20140240951 - Brady; Gregory R. ; et al. | 2014-08-28 |
Spectral Control System
App 20140168650 - Manassen; Amnon ; et al. | 2014-06-19 |
Apodization for Pupil Imaging Scatterometry
App 20140146322 - Hill; Andrew V. ; et al. | 2014-05-29 |
Metrology Target Characterization
App 20140136137 - Tarshish-Shapir; Inna ; et al. | 2014-05-15 |
Phase Characterization Of Targets
App 20140111791 - Manassen; Amnon ; et al. | 2014-04-24 |
Illumination control
Grant 8,681,413 - Manassen , et al. March 25, 2 | 2014-03-25 |
Method For Estimating And Correcting Misregistration Target Inaccuracy
App 20140060148 - Amit; Eran ; et al. | 2014-03-06 |
Overlay metrology by pupil phase analysis
Grant 8,582,114 - Manassen , et al. November 12, 2 | 2013-11-12 |
Metrology Systems and Methods
App 20130229661 - Kandel; Daniel ; et al. | 2013-09-05 |
Inspection system with fiber coupled OCT focusing
Grant 8,508,748 - Manassen August 13, 2 | 2013-08-13 |
Metrology systems and methods
Grant 8,441,639 - Kandel , et al. May 14, 2 | 2013-05-14 |
Overlay Metrology By Pupil Phase Analysis
App 20130044331 - Manassen; Amnon ; et al. | 2013-02-21 |
Illumination Control
App 20120327503 - Manassen; Amnon ; et al. | 2012-12-27 |
Scatterometry metrology target design optimization
Grant 8,214,771 - Adel , et al. July 3, 2 | 2012-07-03 |
Near field detection for optical metrology
Grant 8,209,767 - Manassen June 26, 2 | 2012-06-26 |
Optics Symmetrization For Metrology
App 20120033226 - Manassen; Amnon ; et al. | 2012-02-09 |
Discrete Polarization Scatterometry
App 20110310388 - Hill; Andrew V. ; et al. | 2011-12-22 |
Solid state image wavelength converter
Grant 8,063,463 - Manassen , et al. November 22, 2 | 2011-11-22 |
Metrology Systems And Methods
App 20110069312 - Kandel; Daniel ; et al. | 2011-03-24 |
Apparatus and methods for scattering-based semiconductor inspection and metrology
Grant 7,884,936 - Manassen February 8, 2 | 2011-02-08 |
Scatterometry Metrology Target Design Optimization
App 20100175033 - Adel; Michael ; et al. | 2010-07-08 |
Apparatus And Methods For Scattering-based Semiconductor Inspection And Metrology
App 20090050823 - Manassen; Amnon | 2009-02-26 |
Solid state image wavelength converter
App 20070273770 - Manassen; Amnon ; et al. | 2007-11-29 |
Solid state image wavelength converter
Grant 7,196,390 - Manassen , et al. March 27, 2 | 2007-03-27 |
Optical modulator
Grant 6,999,219 - Manassen , et al. February 14, 2 | 2006-02-14 |
Optical modulator
App 20040125429 - Manassen, Amnon ; et al. | 2004-07-01 |
Large aperture optical image shutter
Grant 6,331,911 - Manassen , et al. December 18, 2 | 2001-12-18 |
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