Makino; Akitaka
Patent Applications and Registrations
Patent applications and USPTO patent grants for Makino; Akitaka.The latest application filed is for "plasma processing apparatus".
Company Profile
0.29.38
- Makino; Akitaka - Tokyo JP
- Makino; Akitaka - Hikari N/A JP
- Makino; Akitaka - Hikari-shi JP
- MAKINO; Akitaka - Hikeari-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma processing apparatus with gas feed and evacuation conduit Grant 10,103,007 - Tandou , et al. October 16, 2 | 2018-10-16 |
| Plasma Processing Apparatus App 20160064189 - Tandou; Takumi ; et al. | 2016-03-03 |
| Plasma Processing Apparatus And Sample Stage Fabricating Method App 20160027621 - TANDOU; Takumi ; et al. | 2016-01-28 |
| Plasma Processing Apparatus App 20150248994 - TANDOU; Takumi ; et al. | 2015-09-03 |
| Vacuum Processing Apparatus App 20150214014 - SATO; Kohei ; et al. | 2015-07-30 |
| Vacuum Processing Apparatus App 20150096685 - Sato; Kohei ; et al. | 2015-04-09 |
| Wafer processing based on sensor detection and system learning Grant 8,897,906 - Ohashi , et al. November 25, 2 | 2014-11-25 |
| Vacuum processing apparatus Grant 8,740,011 - Tauchi , et al. June 3, 2 | 2014-06-03 |
| Plasma processing apparatus and plasma processing method Grant 8,569,177 - Ohashi , et al. October 29, 2 | 2013-10-29 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130189800 - OHASHI; Tomohiro ; et al. | 2013-07-25 |
| Vacuum processing apparatus Grant 8,460,467 - Makino , et al. June 11, 2 | 2013-06-11 |
| Vacuum Processing Apparatus And Vacuum Processing Method App 20130053997 - Ohashi; Tomohiro ; et al. | 2013-02-28 |
| Vacuum processing apparatus Grant 8,286,822 - Tauchi , et al. October 16, 2 | 2012-10-16 |
| Plasma processing apparatus Grant 8,216,420 - Kazumi , et al. July 10, 2 | 2012-07-10 |
| Vacuum Processing Apparatus App 20120091386 - Tauchi; Susumu ; et al. | 2012-04-19 |
| Plasma treatment apparatus and plasma treatment method Grant 8,148,268 - Sato , et al. April 3, 2 | 2012-04-03 |
| Vacuum processing apparatus Grant 8,100,620 - Isozaki , et al. January 24, 2 | 2012-01-24 |
| Vacuum processing apparatus Grant 8,048,259 - Kobayashi , et al. November 1, 2 | 2011-11-01 |
| Vacuum Processing Apparatus App 20110259522 - MAKINO; Akitaka ; et al. | 2011-10-27 |
| Vacuum processing apparatus Grant 7,976,632 - Makino , et al. July 12, 2 | 2011-07-12 |
| Vacuum processing apparatus Grant 7,833,382 - Makino , et al. November 16, 2 | 2010-11-16 |
| Vacuum processing apparatus Grant 7,828,928 - Makino , et al. November 9, 2 | 2010-11-09 |
| Plasma processing apparatus and plasma processing method Grant 7,807,581 - Tauchi , et al. October 5, 2 | 2010-10-05 |
| Vacuum Processing Apparatus App 20100171061 - TAUCHI; Susumu ; et al. | 2010-07-08 |
| Plasma processing apparatus Grant 7,674,351 - Makino , et al. March 9, 2 | 2010-03-09 |
| Vacuum processing apparatus Grant 7,641,069 - Tauchi , et al. January 5, 2 | 2010-01-05 |
| Vacuum Processing Apparatus App 20090324367 - Isozaki; Masakazu ; et al. | 2009-12-31 |
| Vacuum Processing Apparatus App 20090214399 - Yatomi; Minoru ; et al. | 2009-08-27 |
| Vacuum Processing Apparatus App 20090165952 - Tauchi; Susumu ; et al. | 2009-07-02 |
| Plasma Treatment Apparatus And Plasma Treatment Method App 20090152242 - Sato; Kohei ; et al. | 2009-06-18 |
| Plasma processing apparatus and plasma processing method App 20090001052 - Makino; Akitaka ; et al. | 2009-01-01 |
| Vacuum processing apparatus App 20090000739 - Makino; Akitaka ; et al. | 2009-01-01 |
| Vacuum Processing Apparatus App 20080317581 - MAKINO; Akitaka ; et al. | 2008-12-25 |
| Plasma Processing Apparatus And Plasma Processing Method App 20080217295 - TAUCHI; SUSUMU ; et al. | 2008-09-11 |
| Plasma processing apparatus Grant 7,416,633 - Makino , et al. August 26, 2 | 2008-08-26 |
| Vacuum Processing Apparatus App 20080145193 - Makino; Akitaka ; et al. | 2008-06-19 |
| Plasma processing apparatus capable of adjusting pressure within processing chamber App 20080066859 - Kobayashi; Michiaki ; et al. | 2008-03-20 |
| Vacuum processing apparatus Grant 7,335,277 - Makino , et al. February 26, 2 | 2008-02-26 |
| Vacuum processing apparatus Grant 7,322,561 - Tauchi , et al. January 29, 2 | 2008-01-29 |
| Electrode cover for a plasma processing apparatus Grant D557,226 - Uchino , et al. December 11, 2 | 2007-12-11 |
| Cover ring for a plasma processing apparatus Grant D557,425 - Nakamura , et al. December 11, 2 | 2007-12-11 |
| Grounded electrode for a plasma processing apparatus Grant D556,704 - Nakamura , et al. December 4, 2 | 2007-12-04 |
| Plasma etching apparatus and plasma etching method App 20070209759 - Miya; Go ; et al. | 2007-09-13 |
| Vacuum processing apparatus Grant 7,247,207 - Makino , et al. July 24, 2 | 2007-07-24 |
| Vacuum processing apparatus App 20070068626 - Kobayashi; Michiaki ; et al. | 2007-03-29 |
| Vacuum processing apparatus and vacuum processing method Grant 7,194,821 - Edamura , et al. March 27, 2 | 2007-03-27 |
| Plasma processing apparatus App 20060283550 - Kazumi; Hideyuki ; et al. | 2006-12-21 |
| Apparatus and method for processing wafer App 20060191482 - Kanno; Seiichiro ; et al. | 2006-08-31 |
| Plasma etching apparatus and plasma etching method App 20060169671 - Miya; Go ; et al. | 2006-08-03 |
| Vacuum processing apparatus and vacuum processing method App 20060168844 - Edamura; Manabu ; et al. | 2006-08-03 |
| Vacuum processing apparatus App 20060054854 - Tauchi; Susumu ; et al. | 2006-03-16 |
| Vacuum processing apparatus App 20060057008 - Tauchi; Susumu ; et al. | 2006-03-16 |
| Plasma processing apparatus App 20060054278 - Makino; Akitaka ; et al. | 2006-03-16 |
| Plasma processing apparatus and plasma processing method App 20060027324 - Makino; Akitaka ; et al. | 2006-02-09 |
| Plasma processing apparatus App 20050193953 - Makino, Akitaka ; et al. | 2005-09-08 |
| Plasma processing apparatus App 20050194093 - Makino, Akitaka ; et al. | 2005-09-08 |
| Vacuum processing apparatus App 20050051092 - Makino, Akitaka ; et al. | 2005-03-10 |
| Vacuum processing apparatus App 20050051093 - Makino, Akitaka ; et al. | 2005-03-10 |
| Vacuum processing apparatus App 20050051091 - Makino, Akitaka ; et al. | 2005-03-10 |
| Plasma processing apparatus Grant 6,850,012 - Edamura , et al. February 1, 2 | 2005-02-01 |
| Plasma processing apparatus App 20030057845 - Edamura, Manabu ; et al. | 2003-03-27 |
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