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Lithographic apparatus and device manufacturing method involving a heater
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Projection system and mirror and radiation source for a lithographic apparatus
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Mask assembly
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Lithographic apparatus and device manufacturing method
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Lithographic Apparatus And Device Manufacturing Method Involving A Heater
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Lithographic method
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Lithographic apparatus and device manufacturing method involving a heater
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Lithographic apparatus and device manufacturing method
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Projection System and Mirror and Radiation Source for a Lithographic Apparatus
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Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets
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Projection system and mirror and radiation source for a lithographic apparatus
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Lithographic Apparatus And Device Manufacturing Method
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Lithographic Apparatus, Lithographic Projection Apparatus and Device Manufacturing Method
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Lithographic apparatus and device manufacturing method
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Dual stage lithographic apparatus and device manufacturing method
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Lithographic apparatus and device manufacturing method
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Pellicle Attachment Apparatus
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Beam delivery apparatus and method
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Mask Assembly
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Mask assembly
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Pellicle attachment apparatus
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Pellicle Attachment Apparatus
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Lithographic apparatus and device manufacturing method
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Lithographic apparatus and device manufacturing method
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Graphene spectral purity filter
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Lithographic apparatus and device manufacturing method
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Lithographic Apparatus And Device Manufacturing Method
App 20190324374 - STREEFKERK; Bob ; et al. | 2019-10-24 |
Lithographic method
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Lithographic Apparatus And Device Manufacturing Method
App 20190302631 - LOF; Joeri ; et al. | 2019-10-03 |
Lithographic Method
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Lithographic Apparatus And Device Manufacturing Method
App 20190265596 - LOF; Joeri ; et al. | 2019-08-29 |
Lithographic Apparatus And Device Manufacturing Method
App 20190250518 - LOF; Joeri ; et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater
App 20190235397 - CADEE; Theodorus Petrus Maria ; et al. | 2019-08-01 |
Lithographic Apparatus And Device Manufacturing Method
App 20190227444 - HOOGENDAM; Christiaan Alexander ; et al. | 2019-07-25 |
Lithographic Apparatus And Device Manufacturing Method
App 20190212661 - LOF; Joeri ; et al. | 2019-07-11 |
Lithographic apparatus and device manufacturing method
Grant 10,345,712 - Streefkerk , et al. July 9, 2 | 2019-07-09 |
Projection System and Mirror and Radiation Source for a Lithographic Apparatus
App 20190171109 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2019-06-06 |
Lithographic apparatus and device manufacturing method
Grant 10,261,428 - Lof , et al. | 2019-04-16 |
Lithographic apparatus and device manufacturing method involving a heater
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Lithographic apparatus and device manufacturing method
Grant 10,248,034 - Hoogendam , et al. | 2019-04-02 |
Lithographic Apparatus And Device Manufacturing Method
App 20190086819 - LOOPSTRA; Erik Roelof ; et al. | 2019-03-21 |
Lithographic apparatus and device manufacturing method
Grant 10,222,706 - Lof , et al. | 2019-03-05 |
Reflector
Grant 10,216,101 - Nienhuys , et al. Feb | 2019-02-26 |
Projection system and minor and radiation source for a lithographic apparatus
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Lithographic apparatus and device manufacturing method
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Lithographic apparatus and device manufacturing method
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Lithographic apparatus and device manufacturing method
Grant 10,146,142 - Loopstra , et al. De | 2018-12-04 |
Mask Assembly
App 20180329314 - KRUIZINGA; Matthias ; et al. | 2018-11-15 |
Radiation Beam Apparatus
App 20180314164 - DEKKERS; Jeroen ; et al. | 2018-11-01 |
Pellicle For Reticle And Multilayer Mirror
App 20180259846 - YAKUNIN; Andrei Mikhailovich ; et al. | 2018-09-13 |
Reflector
App 20180239252 - NIENHUYS; Han-Kwang ; et al. | 2018-08-23 |
Gas flow optimization in reticle stage environment
Grant 10,031,428 - Cuypers , et al. July 24, 2 | 2018-07-24 |
Lithographic Apparatus And Device Manufacturing Method
App 20180203364 - STREEFKERK; Bob ; et al. | 2018-07-19 |
Dual stage lithographic apparatus and device manufacturing method
Grant RE46,933 - Van Den Brink , et al. July 3, 2 | 2018-07-03 |
Lithographic apparatus, spectral purity filter and device manufacturing method
Grant 10,001,709 - Banine , et al. June 19, 2 | 2018-06-19 |
Radiation collector, radiation source and lithographic apparatus
Grant 9,983,482 - Loopstra , et al. May 29, 2 | 2018-05-29 |
Method and apparatus for generating radiation
Grant 9,986,628 - Loopstra , et al. May 29, 2 | 2018-05-29 |
Lithographic Apparatus And Device Manufacturing Method
App 20180129143 - HOOGENDAM; Christiaan Alexander ; et al. | 2018-05-10 |
Lithographic method and apparatus
Grant 9,958,787 - Loopstra , et al. May 1, 2 | 2018-05-01 |
Lithographic apparatus and device manufacturing method
Grant 9,952,515 - Streefkerk , et al. April 24, 2 | 2018-04-24 |
Undulator
Grant 9,952,513 - Nikipelov , et al. April 24, 2 | 2018-04-24 |
Lithographic Method
App 20180081278 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2018-03-22 |
Patterning device manipulating system and lithographic apparatuses
Grant 9,910,368 - Valentin , et al. March 6, 2 | 2018-03-06 |
Lithographic Apparatus And Device Manufacturing Method
App 20180046089 - STREEFKERK; Bob ; et al. | 2018-02-15 |
Lithographic apparatus and device manufacturing method
Grant 9,885,965 - Hoogendam , et al. February 6, 2 | 2018-02-06 |
Radiation System
App 20180031982 - NIENHUYS; Han-Kwang ; et al. | 2018-02-01 |
Radiation source
Grant 9,853,412 - Nikipelov , et al. December 26, 2 | 2017-12-26 |
Lithographic Apparatus And Device Manufacturing Method
App 20170343904 - LOF; Joeri ; et al. | 2017-11-30 |
Lithographic method
Grant 9,823,572 - Nikipelov , et al. November 21, 2 | 2017-11-21 |
Lithographic apparatus and device manufacturing method
Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
Substrate table system, lithographic apparatus and substrate table swapping method
Grant 9,753,381 - Van De Ven , et al. September 5, 2 | 2017-09-05 |
Lithographic Apparatus And Device Manufacturing Method
App 20170242347 - HOOGENDAM; Christiaan Alexander ; et al. | 2017-08-24 |
Lithographic apparatus and device manufacturing method
Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
Active Drying Station And Method To Remove Immersion Liquid Using Gas Flow Supply With Gas Outlet Between Two Gas Inlets
App 20170235236 - STREEFKERK; Bob ; et al. | 2017-08-17 |
Radiation Source
App 20170237225 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2017-08-17 |
Spectral purity filter
Grant 9,726,989 - Soer , et al. August 8, 2 | 2017-08-08 |
Device, lithographic apparatus, method for guiding radiation and device manufacturing method
Grant 9,715,183 - Koek , et al. July 25, 2 | 2017-07-25 |
Lithographic apparatus and device manufacturing method
Grant 9,696,630 - Van Der Wijst , et al. July 4, 2 | 2017-07-04 |
Lithographic apparatus, device manufacturing method and computer program
Grant 9,696,636 - Tinnemans , et al. July 4, 2 | 2017-07-04 |
An Undulator
App 20170184975 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2017-06-29 |
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method
App 20170160646 - BANINE; Vadim Yevgenyevich ; et al. | 2017-06-08 |
Lithographic Apparatus And Device Manufacturing Method
App 20170160650 - LOOPSTRA; Erik Roelof ; et al. | 2017-06-08 |
Lithographic Apparatus And Device Manufacturing Method
App 20170139333 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2017-05-18 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets
Grant 9,623,436 - Streefkerk , et al. April 18, 2 | 2017-04-18 |
Lithographic Apparatus And Device Manufacturing Method
App 20170102621 - LOF; Joeri ; et al. | 2017-04-13 |
Lithographic apparatus and device manufacturing method
Grant 9,606,448 - Loopstra , et al. March 28, 2 | 2017-03-28 |
Method for calibration of an encoder scale and a lithographic apparatus
Grant 9,606,458 - Dekkers , et al. March 28, 2 | 2017-03-28 |
Lithographic apparatus, spectral purity filter and device manufacturing method
Grant 9,594,306 - Banine , et al. March 14, 2 | 2017-03-14 |
Lithographic apparatus and device manufacturing method
Grant 9,588,442 - Hoogendam , et al. March 7, 2 | 2017-03-07 |
Lithographic apparatus and device manufacturing method
Grant 9,581,914 - Dierichs , et al. February 28, 2 | 2017-02-28 |
Lithographic apparatus, device manufacturing method and displacement measurement system
Grant 9,575,416 - Van Der Pasch , et al. February 21, 2 | 2017-02-21 |
Lithographic Apparatus And Device Manufacturing Method
App 20170045830 - HOOGENDAM; Christiaan Alexander ; et al. | 2017-02-16 |
Pellicle For Reticle And Multilayer Mirror
App 20170017150 - YAKUNIN; Andrei Mikhailovich ; et al. | 2017-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20170010545 - LOF; Joeri ; et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Lithographic apparatus and device manufacturing method
Grant 9,529,269 - Baselmans , et al. December 27, 2 | 2016-12-27 |
EUV radiation system and lithographic apparatus
Grant 9,523,921 - Van Dijsseldonk , et al. December 20, 2 | 2016-12-20 |
Radiation source
Grant 9,516,732 - Wagner , et al. December 6, 2 | 2016-12-06 |
Pellicle for reticle and multilayer mirror
Grant 9,482,960 - Yakunin , et al. November 1, 2 | 2016-11-01 |
Lithographic apparatus and device manufacturing method
Grant 9,482,962 - Hoogendam , et al. November 1, 2 | 2016-11-01 |
Lithographic apparatus and device manufacturing method
Grant 9,482,966 - Lof , et al. November 1, 2 | 2016-11-01 |
Lithographic apparatus and device manufacturing method
Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
Lithographic Apparatus And Device Manufacturing Method
App 20160299440 - STREEFKERK; Bob ; et al. | 2016-10-13 |
Lithographic Apparatus And Device Manufacturing Method
App 20160282727 - LOF; Joeri ; et al. | 2016-09-29 |
Lithographic Apparatus And Device Manufacturing Method
App 20160274473 - HOOGENDAM; Christiaan Alexander ; et al. | 2016-09-22 |
Lithographic apparatus and device manufacturing method
Grant 9,442,388 - Loopstra , et al. September 13, 2 | 2016-09-13 |
Radiation system and lithographic apparatus
Grant 9,411,250 - Banine , et al. August 9, 2 | 2016-08-09 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 9,414,477 - Loopstra , et al. August 9, 2 | 2016-08-09 |
Beam Delivery Apparatus And Method
App 20160225477 - BANINE; Vadim Yevgenyevich ; et al. | 2016-08-04 |
Lithographic apparatus and method
Grant 9,395,630 - Yakunin , et al. July 19, 2 | 2016-07-19 |
Lithographic apparatus and device manufacturing method
Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
Lithographic apparatus and device manufacturing method
Grant 9,360,765 - Hoogendam , et al. June 7, 2 | 2016-06-07 |
Module and method for producing extreme ultraviolet radiation
Grant 9,363,879 - Van Empel , et al. June 7, 2 | 2016-06-07 |
Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program
Grant 9,354,502 - Loopstra , et al. May 31, 2 | 2016-05-31 |
Lithographic Method
App 20160147161 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2016-05-26 |
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor
Grant 9,329,500 - Staals , et al. May 3, 2 | 2016-05-03 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device
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Lithographic Apparatus And Device Manufacturing Method
App 20160062248 - LOF; Joeri ; et al. | 2016-03-03 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder
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Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
Grant 9,268,242 - Cadee , et al. February 23, 2 | 2016-02-23 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater
App 20160048085 - CADEE; Theodorus Petrus Maria ; et al. | 2016-02-18 |
Radiation Collector, Radiation Source and Lithographic Apparatus
App 20160026091 - LOOPSTRA; Erik Roelof ; et al. | 2016-01-28 |
Lithographic Apparatus and Device Manufacturing Method
App 20160004170 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2016-01-07 |
Lithographic Apparatus And Device Manufacturing Method
App 20160004171 - STREEFKERK; Bob ; et al. | 2016-01-07 |
Lithographic Apparatus And Device Manufacturing Method
App 20150362844 - LOF; Joeri ; et al. | 2015-12-17 |
Gas Flow Optimization in Reticle Stage Environment
App 20150355557 - CUYPERS; Koen ; et al. | 2015-12-10 |
Radiation source with a debris mitigation system, lithographic apparatus with a debris mitigation system, method for preventing debris from depositing on collector mirror, and device manufacturing method
Grant 9,207,548 - Banine , et al. December 8, 2 | 2015-12-08 |
Lithographic Apparatus And Device Manufacturing Method
App 20150338748 - HOOGENDAM; Christiaan Alexander ; et al. | 2015-11-26 |
Lithographic apparatus and device manufacturing method
Grant 9,195,153 - Lof , et al. November 24, 2 | 2015-11-24 |
Radiation source
Grant 9,192,039 - Kempen , et al. November 17, 2 | 2015-11-17 |
Lithographic apparatus and device manufacturing method involving a heater
Grant 9,188,880 - Cadee , et al. November 17, 2 | 2015-11-17 |
Projection System and Mirror and Radiation Source for a Lithographic Apparatus
App 20150323872 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2015-11-12 |
Lithographic apparatus and device manufacturing method
Grant 9,182,679 - Hoogendam , et al. November 10, 2 | 2015-11-10 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 9,164,403 - Kempen , et al. October 20, 2 | 2015-10-20 |
Projection system and lithographic apparatus
Grant 9,164,401 - Loopstra , et al. October 20, 2 | 2015-10-20 |
Method and Apparatus for Generating Radiation
App 20150296602 - Loopstra; Erik Roelof ; et al. | 2015-10-15 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening
Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Patterning Device Manipulating System and Lithographic Apparatuses
App 20150277241 - Valentin; Christiaan Louis ; et al. | 2015-10-01 |
Lithographic Apparatus And Device Manufacturing Method
App 20150261102 - LOF; Joeri ; et al. | 2015-09-17 |
Lithographic apparatus and device manufacturing method
Grant 9,134,632 - Van Der Wijst , et al. September 15, 2 | 2015-09-15 |
Lithographic apparatus and device manufacturing method
Grant 9,134,622 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
Lithographic apparatus and device manufacturing method
Grant 9,134,623 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
Illumination system, lithographic apparatus and method of forming an illumination mode
Grant 9,134,629 - Loopstra , et al. September 15, 2 | 2015-09-15 |
Lithographic Method and Apparatus
App 20150253679 - Loopstra; Erik Roelof ; et al. | 2015-09-10 |
Method For Calibration Of An Encoder Scale And A Lithographic Apparatus
App 20150241795 - Dekkers; Jeroen ; et al. | 2015-08-27 |
Radiation source
Grant 9,119,280 - Kempen , et al. August 25, 2 | 2015-08-25 |
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
Grant 9,110,377 - Loopstra , et al. August 18, 2 | 2015-08-18 |
Lithography Apparatus, An Apparatus For Providing Setpoint Data, A Device Manufacturing Method, A Method For Providing Setpoint Data And A Computer Program
App 20150227036 - Loopstra; Erik Roelof ; et al. | 2015-08-13 |
Lithographic apparatus and device manufacturing method
Grant 9,097,987 - Hoogendam , et al. August 4, 2 | 2015-08-04 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
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Lithographic Apparatus, Device Manufacturing Method And Displacement Measurement System
App 20150212428 - Van Der Pasch; Engelbertus Antonius Fransiscus ; et al. | 2015-07-30 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
Grant 9,091,940 - Derksen , et al. July 28, 2 | 2015-07-28 |
Source collector, lithographic apparatus and device manufacturing method
Grant 9,091,944 - Loopstra , et al. July 28, 2 | 2015-07-28 |
Lithographic Apparatus And Device Manufacturing Method
App 20150205214 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2015-07-23 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Dual stage lithographic apparatus and device manufacturing method
Grant RE45,576 - Van Den Brink , et al. June 23, 2 | 2015-06-23 |
Lithographic Apparatus And Device Manufacturing Method
App 20150168850 - STREEFKERK; Bob ; et al. | 2015-06-18 |
Lithographic apparatus and device manufacturing method
Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Substrate Table System, Lithographic Apparatus And Substrate Table Swapping Method
App 20150153661 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2015-06-04 |
Lithographic Apparatus And Device Manufacturing Method
App 20150131067 - Baselmans; Johannes Jacobus Matheus ; et al. | 2015-05-14 |
Lithographic apparatus and device manufacturing method
Grant 9,025,127 - Dierichs , et al. May 5, 2 | 2015-05-05 |
Collector mirror assembly and method for producing extreme ultraviolet radiation
Grant 9,013,679 - Labetski , et al. April 21, 2 | 2015-04-21 |
Module And Method For Producing Extreme Ultraviolet Radiation
App 20150077729 - VAN EMPEL; Tjarko Adriaan Rudolf ; et al. | 2015-03-19 |
System for detecting motion, lithographic apparatus and device manufacturing method
Grant 8,982,359 - Van Eijk , et al. March 17, 2 | 2015-03-17 |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
Grant 8,975,599 - Staals , et al. March 10, 2 | 2015-03-10 |
Lithographic apparatus and device manufacturing method
Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
Lithographic apparatus and device manufacturing method
Grant 8,953,144 - Dierichs , et al. February 10, 2 | 2015-02-10 |
Lithographic apparatus and method
Grant 8,947,641 - Onvlee , et al. February 3, 2 | 2015-02-03 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 8,946,661 - Loopstra , et al. February 3, 2 | 2015-02-03 |
Lithographic Apparatus And Device Manufacturing Method
App 20150015858 - HOOGENDAM; Christiaan Alexander ; et al. | 2015-01-15 |
Lithographic apparatus and patterning device
Grant 8,922,749 - Butler , et al. December 30, 2 | 2014-12-30 |
Lithographic Apparatus And Device Manufacturing Method
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Lithographic apparatus and method
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Lithographic apparatus and device manufacturing method
Grant 8,913,225 - Uitterdijk , et al. December 16, 2 | 2014-12-16 |
Module and method for producing extreme ultraviolet radiation
Grant 8,901,521 - Van Empel , et al. December 2, 2 | 2014-12-02 |
Lithographic Apparatus And Device Manufacturing Method
App 20140347642 - LOOPSTRA; Erik Roelof ; et al. | 2014-11-27 |
Device, Lithographic Apparatus, Method For Guiding Radiation And Device Manufacturing Method
App 20140347641 - Koek; Wouter Dick ; et al. | 2014-11-27 |
Lithographic apparatus and device manufacturing method
Grant 8,896,809 - Stoeldraijer , et al. November 25, 2 | 2014-11-25 |
Radiation source and method for lithographic apparatus and device manufacturing method
Grant 8,866,111 - Loopstra , et al. October 21, 2 | 2014-10-21 |
Lithographic apparatus and device manufacturing method
Grant 8,860,922 - Hoogendam , et al. October 14, 2 | 2014-10-14 |
Lithographic apparatus and device manufacturing method
Grant 8,860,923 - Hoogendam , et al. October 14, 2 | 2014-10-14 |
Lithographic Apparatus, Device Manufacturing Method And Computer Program
App 20140285785 - Tinnemans; Patricius Aloysius Jacobus ; et al. | 2014-09-25 |
Lithographic apparatus having an encoder type position sensor system
Grant 8,836,913 - Steijaert , et al. September 16, 2 | 2014-09-16 |
Method of cooling an optical element, lithographic apparatus and method for manufacturing a device
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Lithographic Apparatus And Device Manufacturing Method
App 20140233004 - Streefkerk; Bob ; et al. | 2014-08-21 |
Lithographic apparatus and device manufacturing method
Grant 8,810,771 - Hoogendam , et al. August 19, 2 | 2014-08-19 |
Active Drying Station And Method To Remove Immersion Liquid Using Gas Flow Supply With Gas Outlet Between Two Gas Inlets
App 20140224173 - STREEFKERK; Bob ; et al. | 2014-08-14 |
Lithographic apparatus and device manufacturing method
Grant 8,804,097 - Loopstra , et al. August 12, 2 | 2014-08-12 |
Radiation Source And Lithographic Apparatus
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Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
Grant 8,797,503 - Lof , et al. August 5, 2 | 2014-08-05 |
Radiation Source
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Radiation Source
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Lithographic Apparatus, Method Of Setting Up A Lithographic Apparatus And Device Manufacturing Method
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Lithographic apparatus having encoder type position sensor system
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Radiation source and lithographic apparatus
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Pellicle For Reticle And Multilayer Mirror
App 20140160455 - YAKUNIN; Andrei Mikhailovich ; et al. | 2014-06-12 |
Radiation Source And Method For Lithographic Apparatus And Device Manufacturing Method
App 20140160450 - Loopstra; Erik Roelof ; et al. | 2014-06-12 |
Radiation Source
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Lithographic apparatus and device manufacturing method
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Lithographic apparatus and device manufacturing method
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Lithographic apparatus and device manufacturing method
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Lithographic Apparatus And Device Manufacturing Method
App 20140098357 - STREEFKERK; Bob ; et al. | 2014-04-10 |
Radiation source, lithographic apparatus and device manufacturing method
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Lithographic apparatus having an encoder position sensor system
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Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method
App 20140085619 - Banine; Vadim Yevgenyevich ; et al. | 2014-03-27 |
Lithographic apparatus and method of removing liquid
Grant 8,675,172 - Jacobs , et al. March 18, 2 | 2014-03-18 |
Lithographic Apparatus And Device Manufacturing Method
App 20140071420 - Loopstra; Erik Roelof ; et al. | 2014-03-13 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets
Grant 8,638,415 - Streefkerk , et al. January 28, 2 | 2014-01-28 |
Lithographic apparatus
Grant 8,638,418 - Hoogendam , et al. January 28, 2 | 2014-01-28 |
Lithographic apparatus and device manufacturing method
Grant 8,634,056 - Streefkerk , et al. January 21, 2 | 2014-01-21 |
Lithographic apparatus and device manufacturing method
Grant 8,629,971 - Dierichs , et al. January 14, 2 | 2014-01-14 |
Immersion lithographic apparatus with immersion fluid re-circulating system
Grant 8,629,970 - Sewell , et al. January 14, 2 | 2014-01-14 |
Electrostatic Clamp Apparatus And Lithographic Apparatus
App 20140002805 - Banine; Vadim Yevgenyevich ; et al. | 2014-01-02 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20130327955 - Loopstra; Erik Roelof ; et al. | 2013-12-12 |
EUV radiation source comprising a droplet accelerator and lithographic apparatus
Grant 8,598,551 - Mestrom , et al. December 3, 2 | 2013-12-03 |
Lithographic Apparatus And Device Manufacturing Method
App 20130301017 - Derksen; Antonius Theodorus Anna Maria ; et al. | 2013-11-14 |
Lithographic apparatus and device manufacturing method
Grant 8,570,486 - Mulkens , et al. October 29, 2 | 2013-10-29 |
Lithographic apparatus and device manufacturing method
Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic Apparatus And Device Manufacturing Method
App 20130250270 - LOF; Joeri ; et al. | 2013-09-26 |
Lithographic Apparatus And Device Manufacturing Method
App 20130235358 - HOOGENDAM; Christiaan Alexander ; et al. | 2013-09-12 |
System for Detecting Motion, Lithographic Apparatus and Device Manufacturing Method
App 20130194586 - Van Eijk; Jan ; et al. | 2013-08-01 |
Lithographic Apparatus, Euv Radiation Generation Apparatus And Device Manufacturing Method
App 20130141709 - Loopstra; Erik Roelof ; et al. | 2013-06-06 |
Lithographic Apparatus And Device Manufacturing Method
App 20130128256 - LOF; Joeri ; et al. | 2013-05-23 |
Collector Mirror Assembly And Method For Producing Extreme Ultraviolet Radiation
App 20130088697 - Labetski; Dzmitry ; et al. | 2013-04-11 |
Lithographic Apparatus And Method
App 20130088699 - Yakunin; Andrei Mikhailovich ; et al. | 2013-04-11 |
System For Removing Contaminant Particles, Lithographic Apparatus, Method For Removing Contaminant Particles And Method For Manufacturing A Device
App 20130070218 - Ivanov; Vladimir Vitalevich ; et al. | 2013-03-21 |
Spectral Purity Filter
App 20130038926 - Soer; Wouter Anthon ; et al. | 2013-02-14 |
Radiation Source, Lithographic Apparatus and Device Manufacturing Method
App 20120327381 - Labetski; Dzmitry ; et al. | 2012-12-27 |
Radiation Source, Lithographic Apparatus and Device Manufacturing Method
App 20120295205 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2012-11-22 |
Euv Radiation Source Comprising A Droplet Accelerator And Lithographic Apparatus
App 20120280149 - Mestrom; Wilbert Jan ; et al. | 2012-11-08 |
Euv Radiation Source And Lithographic Apparatus
App 20120280148 - Loopstra; Erik Roelof ; et al. | 2012-11-08 |
Lithographic Apparatus And Method
App 20120281193 - Loopstra; Erik Roelof ; et al. | 2012-11-08 |
Lithographic Apparatus And Device Manufacturing Method
App 20120274911 - LOF; Joeri ; et al. | 2012-11-01 |
Illumination System, Lithographic Apparatus And Illumination Method
App 20120262690 - De Boeij; Wilhelmus Petrus ; et al. | 2012-10-18 |
Lithographic Apparatus And Device Manufacturing Method
App 20120257178 - HOOGENDAM; Christiaan Alexander ; et al. | 2012-10-11 |
Lithographic Apparatus And Device Manufacturing Method
App 20120194790 - Hubertus Mulkens; Johannes Catharinus ; et al. | 2012-08-02 |
Source Collector, Lithographic Apparatus And Device Manufacturing Method
App 20120182536 - Loopstra; Erik Roelof ; et al. | 2012-07-19 |
Lithographic Apparatus and Device Manufacturing Method
App 20120154774 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2012-06-21 |
Euv Radiation System And Lithographic Apparatus
App 20120147349 - Van Dijsseldonk; Antonius Johannes Josephus ; et al. | 2012-06-14 |
Lithographic Apparatus And Device Manufacturing Method
App 20120120377 - HOOGENDAM; Christiaan Alexander ; et al. | 2012-05-17 |
Lithographic Apparatus And Device Manufacturing Method
App 20120113402 - CADEE; Theodorus Petrus Maria ; et al. | 2012-05-10 |
Lithographic Apparatus And Device Manufacturing Method
App 20120086926 - Hoogendam; Christiaan Alexander ; et al. | 2012-04-12 |
Lithographic Apparatus Having an Encoder Type Position Sensor System
App 20120075613 - STEIJAERT; Peter Paul ; et al. | 2012-03-29 |
Image-Compensating Addressable Electrostatic Chuck System
App 20120026480 - LOOPSTRA; Erik Roelof ; et al. | 2012-02-02 |
Lithographic Apparatus And Device Manufacturing Method
App 20120013869 - HOOGENDAM; Christiaan Alexander ; et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20120013874 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20120013870 - DIERICHS; Marcel Mathijs Theodore Marie ; et al. | 2012-01-19 |
Illumination System, Lithographic Apparatus And Method Of Forming An Illumination Mode
App 20120013882 - Loopstra; Erik Roelof ; et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20120013868 - Loopstra; Erik Roelof ; et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20110285977 - LOF; Joeri ; et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method
App 20110279795 - STREEFKERK; Bob ; et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method
App 20110279800 - Lof; Joeri ; et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method
App 20110279796 - Uitterdijk; Tammo ; et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method
App 20110273683 - STREEFKERK; Bob ; et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method
App 20110228241 - LOF; Joeri ; et al. | 2011-09-22 |
Radiation System, Radiation Collector, Radiation Beam Conditioning System, Spectral Purity Filter For Radiation System And Method For Forming A Spectral Purity Filter
App 20110223543 - Banine; Vadim Yevgenyevich ; et al. | 2011-09-15 |
Radiation Source Apparatus, Lithographic Apparatus, Method Of Generating And Delivering Radiation And Method For Manufacturing A Device
App 20110222040 - STEINHOFF; Jens Arno ; et al. | 2011-09-15 |
Lithographic Apparatus And Device Manufacturing Method
App 20110181859 - Streefkerk; Bob ; et al. | 2011-07-28 |
Lithographic Apparatus, Device Manufacturing Method And Computer Readable Medium
App 20110176121 - LOOPSTRA; Erik Roelof ; et al. | 2011-07-21 |
Projection System and Lithographic Apparatus
App 20110170078 - Loopstra; Erik Roelof ; et al. | 2011-07-14 |
Radiation System And Lithographic Apparatus
App 20110170079 - Banine; Vadim Yevgenyevich ; et al. | 2011-07-14 |
Lithographic Apparatus And Device Manufacturing Method
App 20110170077 - LOF; Joeri ; et al. | 2011-07-14 |
Radiation Source And Lithographic Apparatus
App 20110164236 - Yakunin; Andrei Mikhailovich ; et al. | 2011-07-07 |
Lithographic Apparatus
App 20110157570 - Hoogendam; Christiaan Alexander ; et al. | 2011-06-30 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20110143288 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2011-06-16 |
Lithographic Apparatus And Device Manufacturing Method
App 20110122376 - Derksen; Antonius Theodorus Anna Maria ; et al. | 2011-05-26 |
Lithographic Apparatus And Device Manufacturing Method
App 20110116066 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al. | 2011-05-19 |
Lithographic Apparatus And Patterning Device
App 20110096311 - BUTLER; Hans ; et al. | 2011-04-28 |
Lithographic Apparatus
App 20110090473 - Hoogendam; Christiaan Alexander ; et al. | 2011-04-21 |
Lithographic Apparatus And Method For Calibrating The Same
App 20110075154 - LOOPSTRA; Erik Roelof ; et al. | 2011-03-31 |
Euv Radiation Generation Apparatus
App 20110026002 - LOOPSTRA; Erik Roelof ; et al. | 2011-02-03 |
Lithographic Apparatus And Device Manufacturing Method
App 20110027721 - LOF; JOERI ; et al. | 2011-02-03 |
Radiation System And Lithographic Apparatus
App 20110013166 - Loopstra; Erik Roelof ; et al. | 2011-01-20 |
Lithographic Apparatus Comprising A Magnet, Method For The Protection Of A Magnet In A Lithographic Apparatus And Device Manufacturing Method
App 20110013157 - Moors; Johannes Hubertus Josephina ; et al. | 2011-01-20 |
Lithographic Apparatus And Device Manufacturing Method
App 20110007285 - Lof; Joeri ; et al. | 2011-01-13 |
Lithographic Apparatus And Device Manufacturing Method
App 20110001942 - Lof; Joeri ; et al. | 2011-01-06 |
Lithographic Apparatus And Device Manufacturing Method
App 20100321650 - CADEE; THEODORUS PETRUS MARIA ; et al. | 2010-12-23 |
Lithographic Apparatus And Device Manufacturing Method
App 20100321651 - LUIJTEN; Carlo Cornelis Maria ; et al. | 2010-12-23 |
Lithographic Apparatus And Device Manufacturing Method
App 20100265476 - Dierichs; Marcel Mathijs Theodore Marie ; et al. | 2010-10-21 |
Lithographic Apparatus And Device Manufacturing Method
App 20100245791 - JACOBS; Johannes Henricus Wilhelmus ; et al. | 2010-09-30 |
Radiation Source, Lithographic Apparatus, And Device Manufacturing Method
App 20100231130 - LABETSKI; Dzmitry ; et al. | 2010-09-16 |
Device Manufacturing Method, Lithographic Apparatus and a Computer Program
App 20100231890 - Oudshoorn; Alex ; et al. | 2010-09-16 |
Lithographic Apparatus And Method For Calibrating The Same
App 20100220335 - LOOPSTRA; Erik Roelof ; et al. | 2010-09-02 |
Lithographic Apparatus And Method Of Removing Liquid
App 20100208224 - Jacobs; Hernes ; et al. | 2010-08-19 |
Image Sensor, Method for Image Detection and Computer Program Product
App 20100195071 - Staals; Frank ; et al. | 2010-08-05 |
Laser Device
App 20100182579 - Loopstra; Erik Roelof ; et al. | 2010-07-22 |
Lithographic Apparatus And Device Manufacturing Method
App 20100165319 - Jacobs; Hernes ; et al. | 2010-07-01 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20100157267 - SCHIMMEL; Hendrikus Gijsbertus ; et al. | 2010-06-24 |
Lithographic Apparatus and A Method to Compensate for the Effect of Disturbances on the Projection System of a Lithographic Apparatus
App 20100149516 - LOOPSTRA; Erik Roelof ; et al. | 2010-06-17 |
Radiation Source And Lithographic Apparatus
App 20100110405 - LOOPSTRA; Erik Roelof ; et al. | 2010-05-06 |
Source Module, Radiation Source And Lithographic Apparatus
App 20100085547 - Labetski; Dzmitry ; et al. | 2010-04-08 |
Lithographic Apparatus And Device Manufacturing Method
App 20100085551 - VERMEULEN; Marcus Martinus Petrus Adrianus ; et al. | 2010-04-08 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20100053576 - LOOPSTRA; Erik Roelof ; et al. | 2010-03-04 |
Radiation Source And Lithographic Apparatus
App 20100053581 - SWINKELS; Gerardus Hubertus Petrus Maria ; et al. | 2010-03-04 |
Displacement Measurement Systems, Lithographic Apparatus, and Device Manufacturing Method
App 20100053586 - KLAVER; Renatus Gerardus ; et al. | 2010-03-04 |
Liquid Immersion Lithography System Comprising a Tilted Showerhead Relative to a Substrate
App 20100053574 - Khmelichek; Aleksandr ; et al. | 2010-03-04 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20100044591 - Loopstra; Erik Roelof ; et al. | 2010-02-25 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20100038562 - SCHIMMEL; Hendrikus Gijsbertus ; et al. | 2010-02-18 |
Radiation Sources And Methods Of Generating Radiation
App 20100039631 - LOOPSTRA; Erik Roelof ; et al. | 2010-02-18 |
Lithographic Apparatus And Device Manufacturing Method
App 20100014061 - STREEFKERK; Bob ; et al. | 2010-01-21 |
Lithographic Apparatus And Device Manufacturing Method
App 20100002207 - LOOPSTRA; Erik Roelof ; et al. | 2010-01-07 |
Lithographic Apparatus, Alignment Apparatus, Device Manufacturing Method, And A Method Of Converting An Apparatus
App 20090296061 - Mulkens; Johannes Catharinus Hubertus ; et al. | 2009-12-03 |
Substrate Table, Lithographic Apparatus And Device Manufacturing Method
App 20090296056 - Mondt; Eva ; et al. | 2009-12-03 |
Lithographic Apparatus And Device Manufacturing Method
App 20090290135 - Lof; Joeri ; et al. | 2009-11-26 |
Radiation Source
App 20090272917 - Soer; Wouter Anthon ; et al. | 2009-11-05 |
Illumination System And Lithographic Method
App 20090262328 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2009-10-22 |
Lithographic Apparatus And Device Manufacturing Method
App 20090214986 - STREEFKERK; Bob ; et al. | 2009-08-27 |
Lithographic Apparatus And Device Manufacturing Method
App 20090207397 - Streefkerk; Bob ; et al. | 2009-08-20 |
Lithographic System, Lithographic Apparatus and Device Manufacturing Method
App 20090208878 - LOOPSTRA; Erik Roelof ; et al. | 2009-08-20 |
Lithographic Apparatus And Method For Calibrating The Same
App 20090207422 - LOOPSTRA; Erik Roelof ; et al. | 2009-08-20 |
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