| Patent | Date |
|---|
Self Aligned Buried Power Rail
App 20220181198 - LICAUSI; Nicholas V. ; et al. | 2022-06-09 |
Self aligned buried power rail
Grant 11,309,210 - Licausi , et al. April 19, 2 | 2022-04-19 |
Middle of the line self-aligned direct pattern contacts
Grant 11,043,418 - Stephens , et al. June 22, 2 | 2021-06-22 |
Skip via for metal interconnects
Grant 10,978,388 - Amanapu , et al. April 13, 2 | 2021-04-13 |
Gate tie-down enablement with inner spacer
Grant 10,879,375 - Fan , et al. December 29, 2 | 2020-12-29 |
Contact structures for integrated circuit products
Grant 10,872,809 - Xie , et al. December 22, 2 | 2020-12-22 |
Gate contact structure for a transistor
Grant 10,727,308 - Xie , et al. | 2020-07-28 |
Method of forming a buried interconnect and the resulting devices
Grant 10,720,391 - Paul , et al. | 2020-07-21 |
Method Of Forming A Buried Interconnect And The Resulting Devices
App 20200219813 - Paul; Bipul C. ; et al. | 2020-07-09 |
Gate Contact Structures And Cross-coupled Contact Structures For Transistor Devices
App 20200203497 - Xie; Ruilong ; et al. | 2020-06-25 |
Methods of forming gate contact structures and cross-coupled contact structures for transistor devices
Grant 10,651,284 - Xie , et al. | 2020-05-12 |
Skip Via For Metal Interconnects
App 20200111736 - Amanapu; Hari Prasad ; et al. | 2020-04-09 |
Middle Of The Line Self-aligned Direct Pattern Contacts
App 20200083102 - STEPHENS; Jason E. ; et al. | 2020-03-12 |
Interrupted small block shape
Grant 10,586,762 - Bouche , et al. | 2020-03-10 |
Contact Structures For Integrated Circuit Products
App 20200020575 - Xie; Ruilong ; et al. | 2020-01-16 |
Self Aligned Buried Power Rail
App 20200006112 - LICAUSI; Nicholas V. ; et al. | 2020-01-02 |
Gate tie-down enablement with inner spacer
Grant 10,522,654 - Fan , et al. Dec | 2019-12-31 |
Middle of the line self-aligned direct pattern contacts
Grant 10,522,403 - Stephens , et al. Dec | 2019-12-31 |
Gate Contact Structure For A Transistor Device
App 20190386107 - Xie; Ruilong ; et al. | 2019-12-19 |
Gate Contact Structure For A Transistor
App 20190378900 - Xie; Ruilong ; et al. | 2019-12-12 |
Methods of forming conductive spacers for gate contacts and the resulting device
Grant 10,504,790 - Xie , et al. Dec | 2019-12-10 |
Methods of forming contact structures on integrated circuit products
Grant 10,497,612 - Xie , et al. De | 2019-12-03 |
Gate Tie-down Enablement With Inner Spacer
App 20190363178 - Fan; Su Chen ; et al. | 2019-11-28 |
Methods of forming a gate contact structure for a transistor
Grant 10,490,641 - Xie , et al. Nov | 2019-11-26 |
Gate contact structures and cross-coupled contact structures for transistor devices
Grant 10,490,455 - Xie , et al. Nov | 2019-11-26 |
Methods of forming a gate contact structure above an active region of a transistor
Grant 10,483,363 - Xie , et al. Nov | 2019-11-19 |
Self aligned buried power rail
Grant 10,475,692 - Licausi , et al. Nov | 2019-11-12 |
Middle Of The Line Self-aligned Direct Pattern Contacts
App 20190214298 - STEPHENS; Jason E. ; et al. | 2019-07-11 |
Interrupted Small Block Shape
App 20190206787 - BOUCHE; Guillaume ; et al. | 2019-07-04 |
Hybrid gate-all-around (GAA) field effect transistor (FET) structure and method of forming
Grant 10,332,803 - Xie , et al. | 2019-06-25 |
Gate tie-down enablement with inner spacer
Grant 10,332,977 - Fan , et al. | 2019-06-25 |
Methods Of Forming Contact Structures On Integrated Circuit Products
App 20190181042 - Xie; Ruilong ; et al. | 2019-06-13 |
Method of forming complementary nano-sheet/wire transistor devices with same depth contacts
Grant 10,304,833 - Suvarna , et al. | 2019-05-28 |
Gate Contact Structures And Cross-coupled Contact Structures For Transistor Devices
App 20190148240 - Xie; Ruilong ; et al. | 2019-05-16 |
Methods of forming conductive contact structures to semiconductor devices and the resulting structures
Grant 10,290,544 - Xie , et al. | 2019-05-14 |
Methods Of Forming Conductive Lines And Vias And The Resulting Structures
App 20190139823 - Chen; Hsueh-Chung ; et al. | 2019-05-09 |
Methods Of Forming Gate Contact Structures And Cross-coupled Contact Structures For Transistor Devices
App 20190123162 - Xie; Ruilong ; et al. | 2019-04-25 |
Methods Of Forming Conductive Contact Structures To Semiconductor Devices And The Resulting Structures
App 20190109045 - Xie; Ruilong ; et al. | 2019-04-11 |
Methods of forming gate contact structures and cross-coupled contact structures for transistor devices
Grant 10,236,215 - Xie , et al. | 2019-03-19 |
Methods of forming a semiconductor device with a gate contact positioned above the active region
Grant 10,204,994 - Xie , et al. Feb | 2019-02-12 |
Methods Of Forming Conductive Spacers For Gate Contacts And The Resulting Device
App 20190035692 - Xie; Ruilong ; et al. | 2019-01-31 |
Gate Tie-down Enablement With Inner Spacer
App 20180374932 - Fan; Su Chen ; et al. | 2018-12-27 |
Gate tie-down enablement with inner spacer
Grant 10,128,352 - Fan , et al. November 13, 2 | 2018-11-13 |
Methods Of Forming A Gate Contact Structure Above An Active Region Of A Transistor
App 20180315822 - Xie; Ruilong ; et al. | 2018-11-01 |
Methods Of Forming A Gate Contact Structure For A Transistor
App 20180315821 - Xie; Ruilong ; et al. | 2018-11-01 |
Self Aligned Buried Power Rail
App 20180294267 - LICAUSI; Nicholas V. ; et al. | 2018-10-11 |
Methods Of Forming A Semiconductor Device With A Gate Contact Positioned Above The Active Region
App 20180286956 - Xie; Ruilong ; et al. | 2018-10-04 |
Reliability of an electronic device
Grant 10,042,969 - Liebmann , et al. August 7, 2 | 2018-08-07 |
Gate Tie-down Enablement With Inner Spacer
App 20180151433 - Fan; Su Chen ; et al. | 2018-05-31 |
Methods of forming a gate contact for a transistor above an active region and the resulting device
Grant 9,947,589 - Park , et al. April 17, 2 | 2018-04-17 |
Gate tie-down enablement with inner spacer
Grant 9,941,163 - Fan , et al. April 10, 2 | 2018-04-10 |
Gate tie-down enablement with inner spacer
Grant 9,929,049 - Fan , et al. March 27, 2 | 2018-03-27 |
Fin cut with alternating two color fin hardmask
Grant 9,911,619 - Xie , et al. March 6, 2 | 2018-03-06 |
Gate tie-down enablement with inner spacer
Grant 9,899,259 - Fan , et al. February 20, 2 | 2018-02-20 |
Gate Tie-down Enablement With Inner Spacer
App 20170372959 - Fan; Su Chen ; et al. | 2017-12-28 |
Forming stressed epitaxial layers between gates separated by different pitches
Grant 9,818,873 - Alptekin , et al. November 14, 2 | 2017-11-14 |
Gate Tie-down Enablement With Inner Spacer
App 20170278753 - Fan; Su Chen ; et al. | 2017-09-28 |
Self aligned via in integrated circuit
Grant 9,768,113 - Feurprier , et al. September 19, 2 | 2017-09-19 |
Gate tie-down enablement with inner spacer
Grant 9,735,054 - Fan , et al. August 15, 2 | 2017-08-15 |
Gate Tie-down Enablement With Inner Spacer
App 20170170070 - Fan; Su Chen ; et al. | 2017-06-15 |
Gate Tie-down Enablement With Inner Spacer
App 20170162438 - Fan; Su Chen ; et al. | 2017-06-08 |
Gate tie-down enablement with inner spacer
Grant 9,627,257 - Fan , et al. April 18, 2 | 2017-04-18 |
Forming Stressed Epitaxial Layer Using Dummy Gates
App 20170104100 - Alptekin; Emre ; et al. | 2017-04-13 |
Self-aligned Gate Tie-down Contacts With Selective Etch Stop Liner
App 20170092585 - Fan; Su Chen ; et al. | 2017-03-30 |
Subsurface wires of integrated chip and methods of forming
Grant 9,601,513 - Hook , et al. March 21, 2 | 2017-03-21 |
Reliability Of An Electronic Device
App 20170061062 - LIEBMANN; LARS W. ; et al. | 2017-03-02 |
Gate Tie-down Enablement With Inner Spacer
App 20170047252 - Fan; Su Chen ; et al. | 2017-02-16 |
Self-aligned Gate Tie-down Contacts With Selective Etch Stop Liner
App 20170047418 - Fan; Su Chen ; et al. | 2017-02-16 |
Gate Tie-down Enablement With Inner Spacer
App 20170047254 - Fan; Su Chen ; et al. | 2017-02-16 |
Self-aligned gate tie-down contacts with selective etch stop liner
Grant 9,570,573 - Fan , et al. February 14, 2 | 2017-02-14 |
Self Aligned Via In Integrated Circuit
App 20160379929 - Feurprier; Yannick ; et al. | 2016-12-29 |
Generating place and route abstracts
Grant 9,424,386 - Chu , et al. August 23, 2 | 2016-08-23 |
Integrated circuit line ends formed using additive processing
Grant 9,418,935 - Shao , et al. August 16, 2 | 2016-08-16 |
Gate tie-down enablement with inner spacer
Grant 9,397,049 - Fan , et al. July 19, 2 | 2016-07-19 |
Self aligned via in integrated circuit
Grant 9,385,078 - Feurprier , et al. July 5, 2 | 2016-07-05 |
Self aligned via in integrated circuit
Grant 9,373,582 - Feurprier , et al. June 21, 2 | 2016-06-21 |
Generating Place And Route Abstracts
App 20160147925 - CHU; ALBERT M. ; et al. | 2016-05-26 |
Mask design and decomposition for sidewall image transfer
Grant 9,335,626 - Lafferty , et al. May 10, 2 | 2016-05-10 |
Orthogonal circuit element routing
Grant 9,245,076 - Gerousis , et al. January 26, 2 | 2016-01-26 |
Reducing color conflicts in triple patterning lithography
Grant 9,158,885 - Gray , et al. October 13, 2 | 2015-10-13 |
Hierarchical Approach to Triple Patterning Decomposition
App 20150089457 - Agarwal; Kanak B. ; et al. | 2015-03-26 |
Mask Design And Decomposition For Sidewall Image Transfer
App 20150046888 - Lafferty; Neal V. ; et al. | 2015-02-12 |
Orthogonal Circuit Element Routing
App 20140359548 - Gerousis; Vassilios ; et al. | 2014-12-04 |
Method For Post Decomposition Density Balancing In Integrated Circuit Layouts, Related System And Program Product
App 20140065728 - Agarwal; Kanak B. ; et al. | 2014-03-06 |
Method for post decomposition density balancing in integrated circuit layouts, related system and program product
Grant 8,647,893 - Agarwal , et al. February 11, 2 | 2014-02-11 |
Density balancing in multiple patterning lithography using integrated circuit layout fill
Grant 8,627,245 - Banerjee , et al. January 7, 2 | 2014-01-07 |
Block mask decomposition for mitigating corner rounding
Grant 8,584,060 - Brearley , et al. November 12, 2 | 2013-11-12 |
Multiple patterning layout decomposition for ease of conflict removal
Grant 8,516,403 - Abou Ghaida , et al. August 20, 2 | 2013-08-20 |
Physical design system and method
Grant 8,473,885 - Cohn , et al. June 25, 2 | 2013-06-25 |
Mask assignment for multiple patterning lithography
Grant 8,434,033 - Abou Ghaida , et al. April 30, 2 | 2013-04-30 |
Multiple Patterning Layout Decomposition for Ease of Conflict Removal
App 20130061183 - Abou Ghaida; Rani S. ; et al. | 2013-03-07 |
Mask Assignment For Multiple Patterning Lithography
App 20130061185 - Abou Ghaida; Rani S. ; et al. | 2013-03-07 |
Placement and optimization of process dummy cells
Grant 8,347,246 - Ouyang , et al. January 1, 2 | 2013-01-01 |
Split-layer design for double patterning lithography
Grant 8,347,240 - Agarwal , et al. January 1, 2 | 2013-01-01 |
Leakage aware design post-processing
Grant 8,302,068 - Culp , et al. October 30, 2 | 2012-10-30 |
Placement And Optimization Of Process Dummy Cells
App 20120192137 - Ouyang; Xu ; et al. | 2012-07-26 |
Placement and optimization of process dummy cells
Grant 8,225,255 - Ouyang , et al. July 17, 2 | 2012-07-17 |
Physical design system and method
Grant 8,219,943 - Cohn , et al. July 10, 2 | 2012-07-10 |
Physical Design System And Method
App 20120167029 - Cohn; John M. ; et al. | 2012-06-28 |
Differential alternating phase shift mask optimization
Grant 8,181,126 - Liebmann , et al. May 15, 2 | 2012-05-15 |
Split-Layer Design for Double Patterning Lithography
App 20120110521 - Agarwal; Kanak B. ; et al. | 2012-05-03 |
Automated sensitivity definition and calibration for design for manufacturing tools
Grant 8,141,027 - Culp , et al. March 20, 2 | 2012-03-20 |
Electrically-driven optical proximity correction to compensate for non-optical effects
Grant 8,103,983 - Agarwal , et al. January 24, 2 | 2012-01-24 |
Leakage Aware Design Post-processing
App 20110179391 - Culp; James A. ; et al. | 2011-07-21 |
Automated Sensitivity Definition And Calibration For Design For Manufacturing Tools
App 20110166686 - Culp; James A. ; et al. | 2011-07-07 |
Electrically driven optical proximity correction
Grant 7,865,864 - Banerjee , et al. January 4, 2 | 2011-01-04 |
Method to check model accuracy during wafer patterning simulation
Grant 7,765,021 - Mansfield , et al. July 27, 2 | 2010-07-27 |
Electrically-driven Optical Proximity Correction To Compensate For Non-optical Effects
App 20100122231 - Agarwal; Kanak B. ; et al. | 2010-05-13 |
System for coloring a partially colored design in an alternating phase shift mask
Grant 7,687,207 - Graur , et al. March 30, 2 | 2010-03-30 |
Differential Alternating Phase Shift Mask Optimization
App 20100017780 - Liebmann; Lars W. ; et al. | 2010-01-21 |
Local coloring for hierarchical OPC
Grant 7,650,587 - Baum , et al. January 19, 2 | 2010-01-19 |
OPC trimming for performance
Grant 7,627,836 - Culp , et al. December 1, 2 | 2009-12-01 |
Placement And Optimization Of Process Dummy Cells
App 20090290401 - Ouyang; Xu ; et al. | 2009-11-26 |
Closed-loop design for manufacturability process
Grant 7,624,369 - Graur , et al. November 24, 2 | 2009-11-24 |
Differential alternating phase shift mask optimization
Grant 7,617,473 - Liebmann , et al. November 10, 2 | 2009-11-10 |
Designer's intent tolerance bands for proximity correction and checking
Grant 7,607,114 - Mansfield , et al. October 20, 2 | 2009-10-20 |
Iphysical Design System And Method
App 20090204930 - Cohn; John M. ; et al. | 2009-08-13 |
Electrically Driven Optical Proximity Correction
App 20090199151 - Banerjee; Shayak ; et al. | 2009-08-06 |
Method To Check Model Accuracy During Wafer Patterning Simulation
App 20090182448 - Mansfield; Scott M. ; et al. | 2009-07-16 |
Physical design system and method
Grant 7,536,664 - Cohn , et al. May 19, 2 | 2009-05-19 |
Alternating Phase Shift Mask Optimization For Improved Process Window
App 20090037866 - Graur; Ioana C. ; et al. | 2009-02-05 |
Generating mask patterns for alternating phase-shift mask lithography
Grant 7,475,380 - Liebmann , et al. January 6, 2 | 2009-01-06 |
Double exposure double resist layer process for forming gate patterns
Grant 7,473,648 - Brunner , et al. January 6, 2 | 2009-01-06 |
Method for designing alternating phase shift masks
Grant 7,470,489 - Liebmann , et al. December 30, 2 | 2008-12-30 |
System for Coloring a Partially Colored Design in an Alternating Phase Shift Mask
App 20080244503 - Graur; Ioana ; et al. | 2008-10-02 |
Local Coloring For Hierarchical Opc
App 20080134130 - Baum; Zachary ; et al. | 2008-06-05 |
Closed-loop Design For Manufacturability Process
App 20080127029 - Graur; Ioana ; et al. | 2008-05-29 |
System for coloring a partially colored design in an alternating phase shift mask
Grant 7,378,195 - Graur , et al. May 27, 2 | 2008-05-27 |
Method for fabricating integrated circuit features
Grant 7,346,887 - Liebmann , et al. March 18, 2 | 2008-03-18 |
Designer's Intent Tolerance Bands For Proximity Correction And Checking
App 20070261013 - Mansfield; Scott M. ; et al. | 2007-11-08 |
System and method for semiconductor device fabrication using modeling
App 20070226674 - Haffner; Henning ; et al. | 2007-09-27 |
Double Exposure Double Resist Layer Process For Forming Gate Patterns
App 20070212863 - Brunner; Timothy A. ; et al. | 2007-09-13 |
Designer's intent tolerance bands for proximity correction and checking
Grant 7,266,798 - Mansfield , et al. September 4, 2 | 2007-09-04 |
System and method of smoothing mask shapes for improved placement of sub-resolution assist features
Grant 7,261,981 - Lavin , et al. August 28, 2 | 2007-08-28 |
Alternating phase shift mask design for high performance circuitry
Grant 7,229,722 - Liebmann , et al. June 12, 2 | 2007-06-12 |
Opc Trimming For Performance
App 20070106968 - Culp; James A. ; et al. | 2007-05-10 |
Method For Fabricating Integrated Circuit Features
App 20070106972 - Liebmann; Lars W. ; et al. | 2007-05-10 |
Designer's Intent Tolerance Bands For Proximity Correction And Checking
App 20070083847 - Mansfield; Scott M. ; et al. | 2007-04-12 |
Method of conflict avoidance in fabrication of gate-shrink alternating phase shifting masks
Grant 7,175,942 - Liebmann , et al. February 13, 2 | 2007-02-13 |
Binary OPC for assist feature layout optimization
Grant 7,147,976 - Liebmann , et al. December 12, 2 | 2006-12-12 |
Layout impact reduction with angled phase shapes
Grant 7,135,255 - Bukofsky , et al. November 14, 2 | 2006-11-14 |
Pliant SRAF for improved performance and manufacturability
Grant 7,115,343 - Gordon , et al. October 3, 2 | 2006-10-03 |
Differential Alternating Phase Shift Mask Optimization
App 20060166105 - Liebmann; Lars W. ; et al. | 2006-07-27 |
Generating mask patterns for alternating phase-shift mask lithography
App 20060107248 - Liebmann; Lars W. ; et al. | 2006-05-18 |
Binary OPC for assist feature layout optimization
App 20060057475 - Liebmann; Lars W. ; et al. | 2006-03-16 |
Method for designing alternating phase shift masks
App 20060040188 - Liebmann; Lars W. ; et al. | 2006-02-23 |
Binary OPC for assist feature layout optimization
Grant 7,001,693 - Liebmann , et al. February 21, 2 | 2006-02-21 |
Physical design system and method
App 20060036977 - Cohn; John M. ; et al. | 2006-02-16 |
Method for verification of resolution enhancement techniques and optical proximity correction in lithography
Grant 6,996,797 - Liebmann , et al. February 7, 2 | 2006-02-07 |
Generating mask patterns for alternating phase-shift mask lithography
Grant 6,993,741 - Liebmann , et al. January 31, 2 | 2006-01-31 |
System For Coloring A Partially Colored Design In An Alternating Phase Shift Mask
App 20050287444 - Graur, Ioana ; et al. | 2005-12-29 |
Pitch-based subresolution assist feature design
Grant 6,964,032 - Liebmann , et al. November 8, 2 | 2005-11-08 |
Pliant Sraf For Improved Performance And Manufacturability
App 20050202321 - Gordon, Ronald L. ; et al. | 2005-09-15 |
Method Of Conflict Avoidance In Fabrication Of Gate-shrink Alternating Phase Shifting Masks
App 20050175906 - Liebmann, Lars W. ; et al. | 2005-08-11 |
Alternating phase shift mask design with optimized phase shapes
Grant 6,927,005 - Liebmann , et al. August 9, 2 | 2005-08-09 |
Alternating Phase Shift Mask Design For High Performance Circuitry
App 20050166175 - Liebmann, Lars W. ; et al. | 2005-07-28 |
System And Method Of Smoothing Mask Shapes For Improved Placement Of Sub-resolution Assist Features
App 20050153212 - Lavin, Mark A. ; et al. | 2005-07-14 |
Phase-width balanced alternating phase shift mask design
Grant 6,901,576 - Liebmann , et al. May 31, 2 | 2005-05-31 |
Generating Mask Patterns For Alternating Phase-shift Mask Lithography
App 20050014074 - Liebmann, Lars W. ; et al. | 2005-01-20 |
Integrated lithographic layout optimization
Grant 6,832,364 - Heng , et al. December 14, 2 | 2004-12-14 |
Self-aligned alternating phase shift mask patterning process
Grant 6,824,932 - Bukofsky , et al. November 30, 2 | 2004-11-30 |
Layout Impact Reduction With Angled Phase Shapes
App 20040191638 - Bukofsky, Scott J. ; et al. | 2004-09-30 |
Priority coloring for VLSI designs
Grant 6,795,961 - Liebmann , et al. September 21, 2 | 2004-09-21 |
Alternating phase shift mask design with optimized phase shapes
App 20040175635 - Liebmann, Lars W. ; et al. | 2004-09-09 |
Binary OPC for assist feature layout optimization
App 20040170905 - Liebmann, Lars W. ; et al. | 2004-09-02 |
Pitch-based subresolution assist feature design
App 20040172610 - Liebmann, Lars W. ; et al. | 2004-09-02 |
Alternating phase shift mask design with optimized phase shapes
Grant 6,757,886 - Liebmann , et al. June 29, 2 | 2004-06-29 |
Phase-width balanced alternating phase shift mask design
App 20040096752 - Liebmann, Lars W. ; et al. | 2004-05-20 |
Integrated lithographic layout optimization
App 20040068712 - Heng, Fook-Luen ; et al. | 2004-04-08 |
Self-aligned alternating phase shift mask patterning process
App 20030228526 - Bukofsky, Scott J. ; et al. | 2003-12-11 |
Priority coloring for VLSI designs
App 20030200524 - Liebmann, Lars W. ; et al. | 2003-10-23 |
Priority coloring for VLSI designs
Grant 6,609,245 - Liebmann , et al. August 19, 2 | 2003-08-19 |
Method for generating a proximity model based on proximity rules
Grant 6,602,728 - Liebmann , et al. August 5, 2 | 2003-08-05 |
Process window based optical proximity correction of lithographic images
Grant 6,578,190 - Ferguson , et al. June 10, 2 | 2003-06-10 |
Priority Coloring For Vlsi Designs
App 20030101430 - Liebmann, Lars W. ; et al. | 2003-05-29 |
Alternating phase shift mask design with optimized phase shapes
App 20030093766 - Liebmann, Lars W. ; et al. | 2003-05-15 |
Method to determine optical proximity correction and assist feature rules which account for variations in mask dimensions
Grant 6,553,559 - Liebmann , et al. April 22, 2 | 2003-04-22 |
Optical proximity correction (OPC) using automated shape and edge pre-sorting
App 20020138810 - Lavin, Mark A. ; et al. | 2002-09-26 |
Semiconductor device fabrication using a photomask with assist features
Grant 6,421,820 - Mansfield , et al. July 16, 2 | 2002-07-16 |
Process window based optical proximity correction of lithographic images
App 20020091986 - Ferguson, Richard A. ; et al. | 2002-07-11 |
Method to determine optical proximity correction and assist feature rules which account for variations in mask dimensions
App 20020091985 - Liebmann, Lars W. ; et al. | 2002-07-11 |
Method for incorporating sub resolution assist features in a photomask layout
Grant 6,413,683 - Liebmann , et al. July 2, 2 | 2002-07-02 |
Optimized alternating phase shifted mask design
Grant 6,338,922 - Liebmann , et al. January 15, 2 | 2002-01-15 |
Optimized phase shift design migration
Grant 6,083,275 - Heng , et al. July 4, 2 | 2000-07-04 |
Automatic generation of phase shift masks using net coloring
Grant 6,066,180 - Kim , et al. May 23, 2 | 2000-05-23 |
Phase shifted mask design system, phase shifted mask and VLSI circuit devices manufactured therewith
Grant 6,057,063 - Liebmann , et al. May 2, 2 | 2000-05-02 |
Focus monitor for alternating phase shifted masks
Grant 5,936,738 - Liebmann , et al. August 10, 1 | 1999-08-10 |
Exact transmission balanced alternating phase-shifting mask for photolithography
Grant 5,932,377 - Ferguson , et al. August 3, 1 | 1999-08-03 |
Method for automatically eliminating three way intersection design conflicts in phase edge, phase shift designs
Grant 5,923,562 - Liebmann , et al. July 13, 1 | 1999-07-13 |
Phase shifted design verification routine
Grant 5,923,566 - Galan , et al. July 13, 1 | 1999-07-13 |
Automatic generation of phase shift masks using net coloring
Grant 5,883,813 - Kim , et al. March 16, 1 | 1999-03-16 |
Lithographic patterning method and mask set therefor with light field trim mask
Grant 5,807,649 - Liebmann , et al. September 15, 1 | 1998-09-15 |
Simple repair method for phase shifting masks
Grant 5,795,685 - Liebmann , et al. August 18, 1 | 1998-08-18 |
Efficient generation of negative fill shapes for chips and packages
Grant 5,671,152 - Lavin , et al. September 23, 1 | 1997-09-23 |
Geometric autogeneration of"hard"phase-shift designs for VLSI
Grant 5,636,131 - Liebmann , et al. June 3, 1 | 1997-06-03 |
Vertex minimization in a smart optical proximity correction system
Grant 5,553,273 - Liebmann September 3, 1 | 1996-09-03 |
Vertex minimization in a smart optical proximity correction system
Grant 5,553,274 - Liebmann September 3, 1 | 1996-09-03 |
High resolution phase edge lithography without the need for a trim mask
Grant 5,538,833 - Ferguson , et al. July 23, 1 | 1996-07-23 |
Geometric autogeneration of "hard" phase-shift designs for VLSI
Grant 5,537,648 - Liebmann , et al. July 16, 1 | 1996-07-16 |
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