| Patent | Date |
|---|
Batch curing chamber with gas distribution and individual pumping
Grant 11,408,075 - Khan , et al. August 9, 2 | 2022-08-09 |
Multi-source ion beam etch system
Grant 11,387,071 - Liang , et al. July 12, 2 | 2022-07-12 |
Gas delivery module
Grant 11,361,978 - Khan , et al. June 14, 2 | 2022-06-14 |
Methods For Graphene Formation
App 20220172948 - Zhou; Jie ; et al. | 2022-06-02 |
Monopole Antenna Array Source For Semiconductor Process Equipment
App 20220139668 - Liang; Qiwei ; et al. | 2022-05-05 |
Blending Of Agricultural Products Via Hyperspectral Imaging And Analysis
App 20220139076 - DEEVI; Seetharama C. ; et al. | 2022-05-05 |
Methods for graphene formation using microwave surface-wave plasma on dielectric materials
Grant 11,289,331 - Zhou , et al. March 29, 2 | 2022-03-29 |
Chemical control features in wafer process equipment
Grant 11,264,213 - Liang , et al. March 1, 2 | 2022-03-01 |
Blending of agricultural products via hyperspectral imaging and analysis
Grant 11,250,259 - Deevi , et al. February 15, 2 | 2022-02-15 |
Monopole antenna array source for semiconductor process equipment
Grant 11,244,808 - Liang , et al. February 8, 2 | 2022-02-08 |
Substrate transfer blade
Grant D941,787 - Malik , et al. January 25, 2 | 2022-01-25 |
Monopole antenna array source with gas supply or grid filter for semiconductor process equipment
Grant 11,222,769 - Liang , et al. January 11, 2 | 2022-01-11 |
Chemical control features in wafer process equipment
Grant 11,222,771 - Liang , et al. January 11, 2 | 2022-01-11 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20220004104 - BABAYAN; Viachslav ; et al. | 2022-01-06 |
Self-assembled Monolayer Deposition From Low Vapor Pressure Organic Molecules
App 20210375600 - Liang; Qiwei ; et al. | 2021-12-02 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 11,112,697 - Babayan , et al. September 7, 2 | 2021-09-07 |
Gas abatement apparatus
Grant 11,110,383 - Khan , et al. September 7, 2 | 2021-09-07 |
Method and apparatus for thin wafer carrier
Grant 11,094,573 - Qiao , et al. August 17, 2 | 2021-08-17 |
Pin-less Substrate Transfer Apparatus And Method For A Processing Chamber
App 20210225687 - MALIK; Sultan ; et al. | 2021-07-22 |
Chemical delivery chamber for self-assembled monolayer processes
Grant 11,066,747 - Liang , et al. July 20, 2 | 2021-07-20 |
Methods And Apparatus For Carbon Compound Film Deposition
App 20210217585 - LIANG; Qiwei ; et al. | 2021-07-15 |
Multi-source Ion Beam Etch System
App 20210104374 - Liang; Qiwei ; et al. | 2021-04-08 |
High temperature vapor delivery system and method
Grant 10,954,594 - Babayan , et al. March 23, 2 | 2021-03-23 |
Low vapor pressure chemical delivery
Grant 10,947,621 - Khan , et al. March 16, 2 | 2021-03-16 |
Blending of agricultural products via hyperspectral imaging and analysis
Grant 10,896,325 - Deevi , et al. January 19, 2 | 2021-01-19 |
Gas Abatement Apparatus
App 20200368666 - KHAN; Adib ; et al. | 2020-11-26 |
Gas Delivery System For High Pressure Processing Chamber
App 20200350183 - LIANG; Qiwei ; et al. | 2020-11-05 |
Gas Delivery Module
App 20200343103 - KHAN; Adib M. ; et al. | 2020-10-29 |
Gas delivery module
Grant 10,748,783 - Khan , et al. A | 2020-08-18 |
Gas delivery system for high pressure processing chamber
Grant 10,720,341 - Liang , et al. | 2020-07-21 |
In-situ CVD and ALD coating of chamber to control metal contamination
Grant 10,704,141 - Malik , et al. | 2020-07-07 |
Semiconductor Processing System
App 20200185260 - MALIK; Sultan ; et al. | 2020-06-11 |
Gas abatement apparatus
Grant 10,675,581 - Khan , et al. | 2020-06-09 |
Method And Apparatus For Thin Wafer Carrier
App 20200161156 - QIAO; Jingyu ; et al. | 2020-05-21 |
Flow Control Features Of Cvd Chambers
App 20200149166 - CHUC; Kien N. ; et al. | 2020-05-14 |
Plasma reactor with non-power-absorbing dielectric gas shower plate assembly
Grant 10,615,007 - Stowell , et al. | 2020-04-07 |
Methods For Graphene Formation
App 20200105525 - Zhou; Jie ; et al. | 2020-04-02 |
Gas control in process chamber
Grant 10,590,530 - Liang , et al. | 2020-03-17 |
Gas Abatement Apparatus
App 20200038797 - KHAN; Adib ; et al. | 2020-02-06 |
Flow control features of CVD chambers
Grant 10,550,472 - Chuc , et al. Fe | 2020-02-04 |
Gas Delivery Module
App 20200035509 - KHAN; Adib M. ; et al. | 2020-01-30 |
Processing Apparatus
App 20200035513 - KHAN; Adib ; et al. | 2020-01-30 |
High pressure wafer processing systems and related methods
Grant 10,529,603 - Liang , et al. J | 2020-01-07 |
Chemical Control Features In Wafer Process Equipment
App 20190385823 - Liang; Qiwei ; et al. | 2019-12-19 |
In-situ Cvd And Ald Coating Of Chamber To Control Metal Contamination
App 20190368035 - MALIK; Sultan ; et al. | 2019-12-05 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,474,033 - Babayan , et al. Nov | 2019-11-12 |
Integrated Cluster Tool For Selective Area Deposition
App 20190301009 - KAUFMAN-OSBORN; Tobin ; et al. | 2019-10-03 |
Monopole antenna array source with phase shifted zones for semiconductor process equipment
Grant 10,431,427 - Liang , et al. O | 2019-10-01 |
Chemical Control Features In Wafer Process Equipment
App 20190244792 - Liang; Qiwei ; et al. | 2019-08-08 |
Integrated cluster tool for selective area deposition
Grant 10,358,715 - Kaufman-Osborn , et al. | 2019-07-23 |
Chemical control features in wafer process equipment
Grant 10,354,843 - Liang , et al. July 16, 2 | 2019-07-16 |
High Pressure Wafer Processing Systems And Related Methods
App 20190198367 - LIANG; Qiwei ; et al. | 2019-06-27 |
Gas Control In Process Chamber
App 20190194805 - LIANG; Qiwei ; et al. | 2019-06-27 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20190187563 - BABAYAN; Viachslav ; et al. | 2019-06-20 |
Gas Delivery System For High Pressure Processing Chamber
App 20190148178 - LIANG; Qiwei ; et al. | 2019-05-16 |
Semiconductor processing system and methods using capacitively coupled plasma
Grant 10,283,321 - Yang , et al. | 2019-05-07 |
Gas Delivery System For High Pressure Processing Chamber
App 20190119769 - KHAN; Adib ; et al. | 2019-04-25 |
Low Vapor Pressure Chemical Delivery
App 20190119813 - KHAN; Adib ; et al. | 2019-04-25 |
Workpiece processing chamber having a thermal controlled microwave window
Grant 10,269,541 - Stowell , et al. | 2019-04-23 |
Gas control in process chamber
Grant 10,240,232 - Liang , et al. | 2019-03-26 |
High pressure wafer processing systems and related methods
Grant 10,224,224 - Liang , et al. | 2019-03-05 |
Batch Curing Chamber With Gas Distribution And Individual Pumping
App 20190048470 - KHAN; Adib ; et al. | 2019-02-14 |
Microwave Reactor For Deposition or Treatment of Carbon Compounds
App 20190051495 - Liang; Qiwei ; et al. | 2019-02-14 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,203,604 - Babayan , et al. Feb | 2019-02-12 |
Gas Delivery System For High Pressure Processing Chamber
App 20190017131 - Khan; Adib M. ; et al. | 2019-01-17 |
Gas delivery system for high pressure processing chamber
Grant 10,179,941 - Khan , et al. Ja | 2019-01-15 |
Workpiece Processing Chamber Having a Rotary Microwave Plasma Source
App 20180352617 - Stowell; Michael W. ; et al. | 2018-12-06 |
Monopole Antenna Array Source With Gas Supply Or Grid Filter For Semiconductor Process Equipment
App 20180342374 - Liang; Qiwei ; et al. | 2018-11-29 |
Monopole Antenna Array Source With Phase Shifted Zones For Semiconductor Process Equipment
App 20180342372 - Liang; Qiwei ; et al. | 2018-11-29 |
Monopole Antenna Array Source For Semiconductor Process Equipment
App 20180342373 - Liang; Qiwei ; et al. | 2018-11-29 |
Batch curing chamber with gas distribution and individual pumping
Grant 10,113,236 - Khan , et al. October 30, 2 | 2018-10-30 |
Pulsed plasma for film deposition
Grant 10,096,466 - Xue , et al. October 9, 2 | 2018-10-09 |
Blending Of Agricultural Products Via Hyperspectral Imaging And Analysis
App 20180285621 - DEEVI; Seetharama C. ; et al. | 2018-10-04 |
High Pressure Wafer Processing Systems And Related Methods
App 20180258533 - Liang; Qiwei ; et al. | 2018-09-13 |
High Pressure Wafer Processing Systems And Related Methods
App 20180261480 - LIANG; Qiwei ; et al. | 2018-09-13 |
Workpiece processing chamber having a rotary microwave plasma source
Grant 10,039,157 - Stowell , et al. July 31, 2 | 2018-07-31 |
Plasma Reactor With Non-power-absorbing Dielectric Gas Shower Plate Assembly
App 20180182599 - Stowell; Michael W. ; et al. | 2018-06-28 |
Blending of agricultural products via hyperspectral imaging and analysis
Grant 9,996,745 - Deevi , et al. June 12, 2 | 2018-06-12 |
Chemical control features in wafer process equipment
Grant 9,978,564 - Liang , et al. May 22, 2 | 2018-05-22 |
Plasma reactor with non-power-absorbing dielectric gas shower plate assembly
Grant 9,905,400 - Stowell , et al. February 27, 2 | 2018-02-27 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170363960 - BABAYAN; Viachslav ; et al. | 2017-12-21 |
Integrated Cluster Tool For Selective Area Deposition
App 20170350004 - KAUFMAN-OSBORN; Tobin ; et al. | 2017-12-07 |
Chemical Delivery Chamber For Self-assembled Monolayer Processes
App 20170306491 - LIANG; Qiwei ; et al. | 2017-10-26 |
Chemical Control Features In Wafer Process Equipment
App 20170236691 - Liang; Qiwei ; et al. | 2017-08-17 |
Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer
Grant 9,733,579 - Nam , et al. August 15, 2 | 2017-08-15 |
Process Chamber For Dielectric Gapfill
App 20170226637 - Lubomirsky; Dmitry ; et al. | 2017-08-10 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170154797 - Babayan; Viachslav ; et al. | 2017-06-01 |
Sealing groove methods for semiconductor equipment
Grant 9,646,807 - Lubomirsky , et al. May 9, 2 | 2017-05-09 |
High Temperature Vapor Delivery System And Method
App 20170088949 - BABAYAN; Viachslav ; et al. | 2017-03-30 |
Plasma process chambers employing distribution grids having focusing surfaces thereon enabling angled fluxes to reach a substrate, and related methods
Grant 9,534,289 - Xue , et al. January 3, 2 | 2017-01-03 |
Gas Control In Process Chamber
App 20160369395 - LIANG; Qiwei ; et al. | 2016-12-22 |
Pulsed Plasma For Film Deposition
App 20160276150 - Xue; Jun ; et al. | 2016-09-22 |
Tooling Configuration For Electric/magnetic Field Guided Acid Profile Control In A Photoresist Layer
App 20160109813 - NAM; Sang Ki ; et al. | 2016-04-21 |
Plasma Reactor With Non-power-absorbing Dielectric Gas Shower Plate Assembly
App 20160111256 - Stowell; Michael W. ; et al. | 2016-04-21 |
Chemical Control Features In Wafer Process Equipment
App 20160005572 - Liang; Qiwei ; et al. | 2016-01-07 |
Plasma Process Chambers Employing Distribution Grids Having Focusing Surfaces Thereon Enabling Angled Fluxes To Reach A Substrate, And Related Methods
App 20150368801 - XUE; Jun ; et al. | 2015-12-24 |
Workpiece Processing Chamber Having A Rotary Microwave Plasma Source
App 20150351166 - Stowell; Michael W. ; et al. | 2015-12-03 |
Workpiece Processing Chamber Having A Thermal Controlled Microwave Window
App 20150348757 - Stowell; Michael W. ; et al. | 2015-12-03 |
Batch Curing Chamber With Gas Distribution And Individual Pumping
App 20150329970 - KHAN; Adib ; et al. | 2015-11-19 |
Blending Of Agricultural Products Via Hyperspectral Imaging And Analysis
App 20150289557 - Deevi; Seetharama C. ; et al. | 2015-10-15 |
Combined Inductive And Capacitive Sources For Semiconductor Process Equipment
App 20150279623 - LIANG; Qiwei | 2015-10-01 |
Semiconductor processing system and methods using capacitively coupled plasma
Grant 9,144,147 - Yang , et al. September 22, 2 | 2015-09-22 |
Chemical control features in wafer process equipment
Grant 9,132,436 - Liang , et al. September 15, 2 | 2015-09-15 |
Sealing Groove Methods For Semiconductor Equipment
App 20150047786 - LUBOMIRSKY; Dmitry ; et al. | 2015-02-19 |
Flow Control Features Of Cvd Chambers
App 20150013793 - CHUC; Kien N. ; et al. | 2015-01-15 |
Flow control features of CVD chambers
Grant 8,894,767 - Chuc , et al. November 25, 2 | 2014-11-25 |
Multiple Chamber Module And Platform In Semiconductor Process Equipment
App 20140261168 - Liang; Qiwei ; et al. | 2014-09-18 |
Blending Of Agricultural Products Via Hyperspectral Imaging And Analysis
App 20140137877 - Deevi; Seetharama C. ; et al. | 2014-05-22 |
Chemical Control Features In Wafer Process Equipment
App 20140097270 - Liang; Qiwei ; et al. | 2014-04-10 |
Process Chamber For Dielectric Gapfill
App 20140083362 - LUBOMIRSKY; Dmitry ; et al. | 2014-03-27 |
Precursor Distribution Features For Improved Deposition Uniformity
App 20130306758 - Park; Soonam ; et al. | 2013-11-21 |
Semiconductor Processing System And Methods Using Capacitively Coupled Plasma
App 20130153148 - Yang; Jang-Gyoo ; et al. | 2013-06-20 |
Semiconductor Processing System And Methods Using Capacitively Coupled Plasma
App 20130082197 - Yang; Jang-Gyoo ; et al. | 2013-04-04 |
Inductive Plasma Sources For Wafer Processing And Chamber Cleaning
App 20130034666 - Liang; Qiwei | 2013-02-07 |
Flowable dielectric equipment and processes
Grant 8,357,435 - Lubomirsky , et al. January 22, 2 | 2013-01-22 |
Semiconductor Processing System And Methods Using Capacitively Coupled Plasma
App 20120180954 - Yang; Jang-Gyoo ; et al. | 2012-07-19 |
Process Chamber For Dielectric Gapfill
App 20120073501 - Lubomirsky; Dmitry ; et al. | 2012-03-29 |
Remote plasma source seasoning
Grant 7,989,365 - Park , et al. August 2, 2 | 2011-08-02 |
Remote Plasma Source Seasoning
App 20110045676 - Park; Soonam ; et al. | 2011-02-24 |
Flow Control Features Of Cvd Chambers
App 20110011338 - Chuc; Kien N. ; et al. | 2011-01-20 |
Thermal management of inductively coupled plasma reactors
Grant 7,811,411 - Lu , et al. October 12, 2 | 2010-10-12 |
Internal balanced coil for inductively coupled high density plasma processing chamber
Grant 7,789,993 - Chen , et al. September 7, 2 | 2010-09-07 |
Plasma Source For Chamber Cleaning And Process
App 20100098882 - Lubomirsky; Dmitry ; et al. | 2010-04-22 |
Two-piece dome with separate RF coils for inductively coupled plasma reactors
Grant 7,651,587 - Lu , et al. January 26, 2 | 2010-01-26 |
Flowable Dielectric Equipment And Processes
App 20090277587 - Lubomirsky; Dmitry ; et al. | 2009-11-12 |
Flowable Dielectric Equipment And Processes
App 20090280650 - Lubomirsky; Dmitry ; et al. | 2009-11-12 |
Internal balanced coil for inductively coupled high density plasma processing chamber
Grant 7,572,647 - Chen , et al. August 11, 2 | 2009-08-11 |
Self-cooling gas delivery apparatus under high vacuum for high density plasma applications
Grant 7,510,624 - Liang , et al. March 31, 2 | 2009-03-31 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber
App 20080188087 - CHEN; ROBERT ; et al. | 2008-08-07 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber
App 20080188090 - Chen; Robert ; et al. | 2008-08-07 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber
App 20080185284 - Chen; Robert ; et al. | 2008-08-07 |
In-situ process state monitoring of chamber
App 20080063810 - Park; Soonam ; et al. | 2008-03-13 |
Process Chamber For Dielectric Gapfill
App 20070289534 - Lubomirsky; Dmitry ; et al. | 2007-12-20 |
Process Chamber For Dielectric Gapfill
App 20070281106 - Lubomirsky; Dmitry ; et al. | 2007-12-06 |
Process Chamber For Dielectric Gapfill
App 20070277734 - Lubomirsky; Dmitry ; et al. | 2007-12-06 |
Two-piece dome with separate RF coils for inductively coupled plasma reactors
App 20070037397 - Lu; Siqing ; et al. | 2007-02-15 |
Thermal management of inductively coupled plasma reactors
App 20070034153 - Lu; Siqing ; et al. | 2007-02-15 |
Inductive plasma system with sidewall magnet
App 20060177600 - Lu; Siqing ; et al. | 2006-08-10 |
Self-cooling gas delivery apparatus under high vacuum for high density plasma applications
App 20060130756 - Liang; Qiwei ; et al. | 2006-06-22 |
Magnetic-field concentration in inductively coupled plasma reactors
App 20060075967 - Lu; Siqing ; et al. | 2006-04-13 |
Non-intrusive plasma probe
Grant 6,894,474 - Cox , et al. May 17, 2 | 2005-05-17 |
Non-intrusive plasma probe
App 20030227283 - Cox, Michael S. ; et al. | 2003-12-11 |
Temperature controlled chamber
Grant 6,598,559 - Vellore , et al. July 29, 2 | 2003-07-29 |
Temperature control system for process chamber
Grant 6,326,597 - Lubomirsky , et al. December 4, 2 | 2001-12-04 |
| 