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Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method Grant 7,001,780 - Zhuang , et al. February 21, 2 | 2006-02-21 |
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Multi-layer Pt electrode for DRAM and FRAM with high K dielectric materials Grant 6,794,705 - Lian , et al. September 21, 2 | 2004-09-21 |
Method for formation of hardmask elements during a semiconductor device fabrication process App 20040171274 - Zhuang, Haoren ;   et al. | 2004-09-02 |
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Method to produce low leakage high K materials in thin film form App 20040121566 - Laibowitz, Robert Benjamin ;   et al. | 2004-06-24 |
Recess Pt structure for high k stacked capacitor in DRAM and FRAM, and the method to form this structure Grant 6,596,580 - Lian , et al. July 22, 2 | 2003-07-22 |
Recess Pt structure for high k stacked capacitor in DRAM and FRAM, and the method to form this structure App 20030077858 - Lian, Jingyu ;   et al. | 2003-04-24 |
Multi-layer Pt electrode for DRAM and FRAM with high K dielectric materials App 20020084481 - Lian, Jingyu ;   et al. | 2002-07-04 |