| Patent | Date |
|---|
Systems and Methods for Measurement of Misregistration and Amelioration Thereof
App 20220307824 - Volkovich; Roie ; et al. | 2022-09-29 |
Optical Metrology Utilizing Short-wave Infrared Wavelengths
App 20220291143 - Manassen; Amnon ; et al. | 2022-09-15 |
On-the-fly scatterometry overlay metrology target
Grant 11,378,394 - Paskover , et al. July 5, 2 | 2022-07-05 |
Method and system for providing a quality metric for improved process control
Grant 11,372,340 - Kandel , et al. June 28, 2 | 2022-06-28 |
Device-like Metrology Targets
App 20220197152 - Levinski; Vladimir ; et al. | 2022-06-23 |
On-the-fly Scatterometry Overlay Metrology Target
App 20220187062 - Paskover; Yuri ; et al. | 2022-06-16 |
Imaging Overlay Targets Using Moire Elements And Rotational Symmetry Arrangements
App 20220171297 - Feler; Yoel ; et al. | 2022-06-02 |
Topographic phase control for overlay measurement
Grant 11,314,173 - Levinski , et al. April 26, 2 | 2022-04-26 |
Off-axis illumination overlay measurement using two-diffracted orders imaging
Grant 11,281,111 - Shalibo , et al. March 22, 2 | 2022-03-22 |
Imaging overlay targets using Moire elements and rotational symmetry arrangements
Grant 11,256,177 - Feler , et al. February 22, 2 | 2022-02-22 |
Misregistration metrology by using fringe Moire and optical Moire effects
Grant 11,164,307 - Feler , et al. November 2, 2 | 2021-11-02 |
Metrology Target For Scanning Metrology
App 20210311401 - Hill; Andrew V. ; et al. | 2021-10-07 |
Metrology targets and methods with oblique periodic structures
Grant 11,137,692 - Feler , et al. October 5, 2 | 2021-10-05 |
Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements
Grant 11,112,704 - Adam , et al. September 7, 2 | 2021-09-07 |
Parameter-stable misregistration measurement amelioration in semiconductor devices
Grant 11,101,153 - Levinski , et al. August 24, 2 | 2021-08-24 |
Topographic Phase Control For Overlay Measurement
App 20210255551 - Levinski; Vladimir ; et al. | 2021-08-19 |
Metrology target for scanning metrology
Grant 11,073,768 - Hill , et al. July 27, 2 | 2021-07-27 |
Polarization measurements of metrology targets and corresponding target designs
Grant 11,060,845 - Amit , et al. July 13, 2 | 2021-07-13 |
Improved Self-moire Grating Design For Use In Metrology
App 20210200106 - Levinski; Vladimir ; et al. | 2021-07-01 |
Reduction Or Elimination Of Pattern Placement Error In Metrology Measurements
App 20210149296 - Feler; Yoel ; et al. | 2021-05-20 |
Imaging Overlay Targets Using Moire Elements and Rotational Symmetry Arrangements
App 20210072650 - Feler; Yoel ; et al. | 2021-03-11 |
Determining the impacts of stochastic behavior on overlay metrology data
Grant 10,901,325 - Gurevich , et al. January 26, 2 | 2021-01-26 |
Parameter-stable Misregistration Measurement Amelioration In Semiconductor Devices
App 20210020480 - LEVINSKI; Vladimir ; et al. | 2021-01-21 |
Overlay targets with orthogonal underlayer dummyfill
Grant 10,890,436 - Amir , et al. January 12, 2 | 2021-01-12 |
Metrology Target for Scanning Metrology
App 20200409271 - Hill; Andrew V. ; et al. | 2020-12-31 |
Estimating amplitude and phase asymmetry in imaging technology for achieving high accuracy in overlay metrology
Grant 10,866,090 - Marciano , et al. December 15, 2 | 2020-12-15 |
Estimation of asymmetric aberrations
Grant 10,824,082 - Feler , et al. November 3, 2 | 2020-11-03 |
Diffraction based overlay scatterometry
Grant 10,824,079 - Lubashevsky , et al. November 3, 2 | 2020-11-03 |
Diffraction-based focus metrology
Grant 10,761,023 - Levinski Sep | 2020-09-01 |
Reticle optimization algorithms and optimal target design
Grant 10,754,261 - Feler , et al. A | 2020-08-25 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20200158492 - Amit; Eran ; et al. | 2020-05-21 |
Topographic Phase Control For Overlay Measurement
App 20200142323 - Levinski; Vladimir ; et al. | 2020-05-07 |
Topographic Phase Control For Overlay Measurement
App 20200142322 - Levinski; Vladimir ; et al. | 2020-05-07 |
Topographic Phase Control For Overlay Measurement
App 20200142321 - Levinski; Vladimir ; et al. | 2020-05-07 |
Off-axis Illumination Overlay Measurement Using Two-diffracted Orders Imaging
App 20200132446 - Shalibo; Yoni ; et al. | 2020-04-30 |
Estimation Of Asymmetric Aberrations
App 20200133135 - Feler; Yoel ; et al. | 2020-04-30 |
Estimating Amplitude and Phase Asymmetry in Imaging Technology for Achieving High Accuracy in Overlay Metrology
App 20200132445 - Marciano; Tal ; et al. | 2020-04-30 |
Device-like Metrology Targets
App 20200124981 - Levinski; Vladimir ; et al. | 2020-04-23 |
Metrology Targets And Methods With Oblique Periodic Structures
App 20200124982 - Feler; Yoel ; et al. | 2020-04-23 |
Symmetric target design in scatterometry overlay metrology
Grant 10,591,406 - Bringoltz , et al. | 2020-03-17 |
Process compatibility improvement by fill factor modulation
Grant 10,579,768 - Levinski , et al. | 2020-03-03 |
Utilizing overlay misregistration error estimations in imaging overlay metrology
Grant 10,565,697 - Grunzweig , et al. Feb | 2020-02-18 |
Metrology targets with supplementary structures in an intermediate layer
Grant 10,551,749 - Levinski , et al. Fe | 2020-02-04 |
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
Grant 10,527,954 - Kandel , et al. J | 2020-01-07 |
Topographic phase control for overlay measurement
Grant 10,520,832 - Levinski , et al. Dec | 2019-12-31 |
Polarization measurements of metrology targets and corresponding target designs
Grant 10,458,777 - Amit , et al. Oc | 2019-10-29 |
Systems and methods for metrology with layer-specific illumination spectra
Grant 10,444,161 - Manassen , et al. Oc | 2019-10-15 |
Reduction Or Elimination Of Pattern Placement Error In Metrology Measurements
App 20190250504 - Feler; Yoel ; et al. | 2019-08-15 |
Control of amplitude and phase of diffraction orders using polarizing targets and polarized illumination
Grant 10,337,991 - Levinski | 2019-07-02 |
Utilizing Overlay Misregistration Error Estimations In Imaging Overlay Metrology
App 20190122357 - Grunzweig; Tzahi ; et al. | 2019-04-25 |
Near field metrology
Grant 10,261,014 - Sapiens , et al. | 2019-04-16 |
Method, system, and user interface for metrology target characterization
Grant 10,242,290 - Tarshish-Shapir , et al. | 2019-03-26 |
Achieving a small pattern placement error in metrology targets
Grant 10,228,320 - Levinski , et al. | 2019-03-12 |
Determining The Impacts Of Stochastic Behavior On Overlay Metrology Data
App 20190049858 - GUREVICH; Evgeni ; et al. | 2019-02-14 |
Diffraction-Based Focus Metrology
App 20190049373 - Levinski; Vladimir | 2019-02-14 |
Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields
Grant 10,197,389 - Levinski , et al. Fe | 2019-02-05 |
Focus metrology and targets which utilize transformations based on aerial images of the targets
Grant 10,197,922 - Gutman , et al. Fe | 2019-02-05 |
Mitigation of Inaccuracies Related to Grating Asymmetries in Scatterometry Measurements
App 20190033726 - Adam; Ido ; et al. | 2019-01-31 |
Diffraction Based Overlay Scatterometry
App 20190004439 - LUBASHEVSKY; Yuval ; et al. | 2019-01-03 |
Reticle Optimization Algorithms and Optimal Target Design
App 20180348648 - Feler; Yoel ; et al. | 2018-12-06 |
Diffraction Based Overlay Scatterometry
App 20180342063 - LUBASHEVSKY; Yuval ; et al. | 2018-11-29 |
Compound objectives for imaging and scatterometry overlay
Grant 10,139,528 - Seligson , et al. Nov | 2018-11-27 |
Self-moire target design principles for measuring unresolved device-like pitches
Grant 10,101,592 - Levinski , et al. October 16, 2 | 2018-10-16 |
Systems and Methods for Metrology with Layer-Specific Illumination Spectra
App 20180292326 - Manassen; Amnon ; et al. | 2018-10-11 |
Multi-Layer Overlay Metrology Target and Complimentary Overlay Metrology Measurement Systems
App 20180275530 - Kandel; Daniel ; et al. | 2018-09-27 |
Device-Like Metrology Targets
App 20180188663 - Levinski; Vladimir ; et al. | 2018-07-05 |
Process Compatibility Improvement by Fill Factor Modulation
App 20180157784 - Levinski; Vladimir ; et al. | 2018-06-07 |
Focus measurements using scatterometry metrology
Grant 9,934,353 - El Kodadi , et al. April 3, 2 | 2018-04-03 |
Optical Near-Field Metrology
App 20180087900 - Paskover; Yuri ; et al. | 2018-03-29 |
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
Grant 9,927,718 - Kandel , et al. March 27, 2 | 2018-03-27 |
Self-Moire Target Design Principles for Measuring Unresolved Device-Like Pitches
App 20180081193 - Levinski; Vladimir ; et al. | 2018-03-22 |
Control of Amplitude and Phase of Diffraction Orders Using Polarizing Targets and Polarized Illumination
App 20180031470 - Levinski; Vladimir | 2018-02-01 |
Reducing algorithmic inaccuracy in scatterometry overlay metrology
Grant 9,869,543 - Bringoltz , et al. January 16, 2 | 2018-01-16 |
Self-moire target design principles for measuring unresolved device-like pitches
Grant 9,864,209 - Levinski , et al. January 9, 2 | 2018-01-09 |
Approach for model calibration used for focus and dose measurement
Grant 9,841,689 - Levinski , et al. December 12, 2 | 2017-12-12 |
New Approaches in First Order Scatterometry Overlay Based on Introduction of Auxiliary Electromagnetic Fields
App 20170268869 - Levinski; Vladimir ; et al. | 2017-09-21 |
Symmetric target design in scatterometry overlay metrology
Grant 9,739,702 - Bringoltz , et al. August 22, 2 | 2017-08-22 |
Focus Metrology and Targets Which Utilize Transformations Based on Aerial Images of the Targets
App 20170212427 - Gutman; Nadav ; et al. | 2017-07-27 |
Target element types for process parameter metrology
Grant 9,678,421 - Levinski , et al. June 13, 2 | 2017-06-13 |
Topographic Phase Control For Overlay Measurement
App 20170146915 - Levinski; Vladimir ; et al. | 2017-05-25 |
Self-Moire Target Design Principles for Measuring Unresolved Device-Like Pitches
App 20170146810 - Levinski; Vladimir ; et al. | 2017-05-25 |
Phase characterization of targets
Grant 9,581,430 - Manassen , et al. February 28, 2 | 2017-02-28 |
Method and system for providing a target design displaying high sensitivity to scanner focus change
Grant 9,454,072 - Levinski , et al. September 27, 2 | 2016-09-27 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20160216197 - Bringoltz; Barak ; et al. | 2016-07-28 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20160178351 - AMIT; Eran ; et al. | 2016-06-23 |
Focus Measurements Using Scatterometry Metrology
App 20160103946 - El Kodadi; Mohamed ; et al. | 2016-04-14 |
Angle-resolved antisymmetric scatterometry
Grant 9,255,895 - Kandel , et al. February 9, 2 | 2016-02-09 |
Target Element Types For Process Parameter Metrology
App 20150309402 - LEVINSKI; Vladimir ; et al. | 2015-10-29 |
Reducing Algorithmic Inaccuracy In Scatterometry Overlay Metrology
App 20150233705 - Bringoltz; Barak ; et al. | 2015-08-20 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20150204664 - Bringoltz; Barak ; et al. | 2015-07-23 |
Near Field Metrology
App 20150198524 - Sapiens; Noam ; et al. | 2015-07-16 |
Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements
Grant 9,080,990 - Chuang , et al. July 14, 2 | 2015-07-14 |
Metrology systems and methods
Grant 9,080,971 - Kandel , et al. July 14, 2 | 2015-07-14 |
Illuminating a specimen for metrology or inspection
Grant 9,080,991 - Chuang , et al. July 14, 2 | 2015-07-14 |
Angle-Resolved Antisymmetric Scatterometry
App 20150177162 - Kandel; Daniel ; et al. | 2015-06-25 |
Metrology Systems and Methods
App 20150036142 - Kandel; Daniel ; et al. | 2015-02-05 |
Device-like scatterometry overlay targets
Grant 8,913,237 - Levinski , et al. December 16, 2 | 2014-12-16 |
Discrete polarization scatterometry
Grant 8,896,832 - Hill , et al. November 25, 2 | 2014-11-25 |
Metrology systems and methods
Grant 8,873,054 - Kandel , et al. October 28, 2 | 2014-10-28 |
Angle-resolved antisymmetric scatterometry
Grant 8,848,186 - Kandel , et al. September 30, 2 | 2014-09-30 |
Method and System for Providing a Target Design Displaying High Sensitivity to Scanner Focus Change
App 20140141536 - Levinski; Vladimir ; et al. | 2014-05-22 |
Metrology Target Characterization
App 20140136137 - Tarshish-Shapir; Inna ; et al. | 2014-05-15 |
Phase Characterization Of Targets
App 20140111791 - Manassen; Amnon ; et al. | 2014-04-24 |
Device-like Scatterometry Overlay Targets
App 20130342831 - Levinski; Vladimir ; et al. | 2013-12-26 |
Overlay metrology by pupil phase analysis
Grant 8,582,114 - Manassen , et al. November 12, 2 | 2013-11-12 |
Overlay Targets with Orthogonal Underlayer Dummyfill
App 20130293890 - Amir; Nuriel ; et al. | 2013-11-07 |
Metrology Systems and Methods
App 20130229661 - Kandel; Daniel ; et al. | 2013-09-05 |
Optical system
Grant 8,456,641 - Levinski , et al. June 4, 2 | 2013-06-04 |
Metrology systems and methods
Grant 8,441,639 - Kandel , et al. May 14, 2 | 2013-05-14 |
Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods
Grant 8,390,808 - Levinski , et al. March 5, 2 | 2013-03-05 |
Overlay Metrology By Pupil Phase Analysis
App 20130044331 - Manassen; Amnon ; et al. | 2013-02-21 |
Method And System For Providing A Quality Metric For Improved Process Control
App 20130035888 - Kandel; Daniel ; et al. | 2013-02-07 |
Overlay metrology target
Grant 8,345,243 - Ghinovker , et al. January 1, 2 | 2013-01-01 |
Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods
Grant 8,243,273 - Levinski , et al. August 14, 2 | 2012-08-14 |
Angle-resolved Antisymmetric Scatterometry
App 20120120396 - Kandel; Daniel ; et al. | 2012-05-17 |
Multi-layer Overlay Metrology Target And Complimentary Overlay Metrology Measurement Systems
App 20120033215 - Kandel; Daniel ; et al. | 2012-02-09 |
Discrete Polarization Scatterometry
App 20110310388 - Hill; Andrew V. ; et al. | 2011-12-22 |
Illumination Subsystems Of A Metrology System, Metrology Systems, And Methods For Illuminating A Specimen For Metrology Measurements
App 20110279819 - Chuang; Yung-Ho (Alex) ; et al. | 2011-11-17 |
Illuminating A Specimen For Metrology Or Inspection
App 20110228263 - Chuang; Yung-Ho (Alex) ; et al. | 2011-09-22 |
Target design and methods for scatterometry overlay determination
Grant 8,004,679 - Levinski , et al. August 23, 2 | 2011-08-23 |
Metrology Systems And Methods
App 20110069312 - Kandel; Daniel ; et al. | 2011-03-24 |
Overlay Metrology Target
App 20100155968 - Ghinovker; Mark ; et al. | 2010-06-24 |
Method and apparatus for increasing metrology or inspection tool throughput
Grant 7,724,375 - Novikov , et al. May 25, 2 | 2010-05-25 |
Overlay metrology target
Grant 7,684,038 - Ghinovker , et al. March 23, 2 | 2010-03-23 |
Cross hatched metrology marks and associated method of use
Grant 7,671,990 - Adel , et al. March 2, 2 | 2010-03-02 |
Enhanced Ovl dummy field enabling "on-the-fly" ovl measurement methods
App 20090303482 - Levinski; Vladimir ; et al. | 2009-12-10 |
Target Design And Methods For Scatterometry Overlay Determination
App 20090279091 - Levinski; Vladimir ; et al. | 2009-11-12 |
Optical gain approach for enhancement of overlay and alignment systems performance
Grant 7,602,491 - Kandel , et al. October 13, 2 | 2009-10-13 |
Order selected overlay metrology
Grant 7,528,941 - Kandel , et al. May 5, 2 | 2009-05-05 |
Target acquisition and overlay metrology based on two diffracted orders imaging
Grant 7,528,953 - Frommer , et al. May 5, 2 | 2009-05-05 |
Methods and apparatus for designing and using micro-targets in overlay metrology
Grant 7,526,749 - Levinski , et al. April 28, 2 | 2009-04-28 |
Optical Gain Approach For Enhancement Of Overlay And Alignment Systems Performance
App 20080266561 - Kandel; Daniel ; et al. | 2008-10-30 |
Apparatus and methods for reducing tool-induced shift during overlay metrology
Grant 7,433,039 - Levinski , et al. October 7, 2 | 2008-10-07 |
System method and structure for determining focus accuracy
Grant 7,352,451 - Levinski , et al. April 1, 2 | 2008-04-01 |
Use of overlay diagnostics for enhanced automatic process control
Grant 7,310,789 - Seligson , et al. December 18, 2 | 2007-12-18 |
Order Selected Overlay Metrology
App 20070279630 - Kandel; Daniel ; et al. | 2007-12-06 |
Methods and apparatus for designing and using micro-targets in overlay metrology
App 20070096094 - Levinski; Vladimir ; et al. | 2007-05-03 |
Use of overlay diagnostics for enhanced automatic process control
App 20060280357 - Seligson; Joel L. ; et al. | 2006-12-14 |
Use of overlay diagnostics for enhanced automatic process control
Grant 7,111,256 - Seligson , et al. September 19, 2 | 2006-09-19 |
Diffraction order controlled overlay metrology
App 20060197951 - Frommer; Aviv ; et al. | 2006-09-07 |
System method and structure for determining focus accuracy
App 20060103836 - Levinski; Vladimir ; et al. | 2006-05-18 |
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