| Patent | Date |
|---|
Interconnect Features With Sharp Corners and Method Forming Same
App 20220310815 - Lee; Tze-Liang | 2022-09-29 |
Method of performing atomic layer deposition
Grant 11,441,221 - Cheng , et al. September 13, 2 | 2022-09-13 |
Semiconductor Structure And Manufacturing Method Thereof
App 20220285210 - Lin; Yu-Kai ; et al. | 2022-09-08 |
Dielectric Spacer to Prevent Contacting Shorting
App 20220285529 - Chen; Ting-Gang ; et al. | 2022-09-08 |
Forming isolation regions for separating fins and gate stacks
Grant 11,437,277 - Ko , et al. September 6, 2 | 2022-09-06 |
Source and drain stressors with recessed top surfaces
Grant 11,437,515 - Li , et al. September 6, 2 | 2022-09-06 |
Interconnect Structures Of Semiconductor Device And Methods Of Forming The Same
App 20220262725 - Chou; Chia-Cheng ; et al. | 2022-08-18 |
MOS devices having epitaxy regions with reduced facets
Grant 11,411,109 - Sung , et al. August 9, 2 | 2022-08-09 |
Hybrid Film Scheme For Self-aligned Contact
App 20220246473 - Lu; Jian-Hong ; et al. | 2022-08-04 |
Semiconductor Device, Finfet Device And Methods Of Forming The Same
App 20220238669 - Cheng; Po-Hsien ; et al. | 2022-07-28 |
Finfet Device And Method
App 20220231023 - Ho; Tsai-Jung ; et al. | 2022-07-21 |
Forming low-stress silicon nitride layer through hydrogen treatment
Grant 11,393,674 - Hsieh , et al. July 19, 2 | 2022-07-19 |
Wafer holder with tapered region
Grant 11,395,373 - Lin , et al. July 19, 2 | 2022-07-19 |
Surface Oxidation Control of Metal Gates Using Capping Layer
App 20220223422 - Chou; Pei-Yu ; et al. | 2022-07-14 |
Semiconductor Device And Methods Of Forming The Same
App 20220216147 - Chou; Pei-Yu ; et al. | 2022-07-07 |
Method For Forming Semiconductor Device With Multi-layer Etch Stop Structure
App 20220208603 - SHIH; Po-Cheng ; et al. | 2022-06-30 |
Methods of forming interconnect structures of semiconductor device
Grant 11,373,947 - Chou , et al. June 28, 2 | 2022-06-28 |
Apparatus For Manufacturing A Thin Film And A Method Therefor
App 20220181143 - HSIAO; Tsai-Fu ; et al. | 2022-06-09 |
Dielectric spacer to prevent contacting shorting
Grant 11,342,444 - Chen , et al. May 24, 2 | 2022-05-24 |
Seamless Gap Fill
App 20220157934 - Huang; Yen-Chun ; et al. | 2022-05-19 |
Interconnect structure and method
Grant 11,328,952 - Chou , et al. May 10, 2 | 2022-05-10 |
Contact Plug Structure Of Semiconductor Device And Method Of Forming Same
App 20220123115 - Chou; Pei-Yu ; et al. | 2022-04-21 |
In-Situ Deposition and Densification Treatment for Metal-Comprising Resist Layer
App 20220100088 - Kuo; Yi-Chen ; et al. | 2022-03-31 |
Metal Hard Masks for Reducing Line Bending
App 20220102143 - Chen; Chun-Kai ; et al. | 2022-03-31 |
Photoresist For Semiconductor Fabrication
App 20220100087 - Liu; Chih-Cheng ; et al. | 2022-03-31 |
Integrated Circuit Structure And Manufacturing Method Thereof
App 20220102508 - LEE; Tze-Liang | 2022-03-31 |
Patterning Material Including Silicon-containing Layer And Method For Semiconductor Device Fabrication
App 20220102150 - TUNG; Szu-Ping ; et al. | 2022-03-31 |
Patterning Material Including Carbon-containing Layer And Method For Semiconductor Device Fabrication
App 20220102200 - TUNG; Szu-Ping ; et al. | 2022-03-31 |
Photoresist For Semiconductor Fabrication
App 20220100086 - Liu; Chih-Cheng ; et al. | 2022-03-31 |
Semiconductor device and methods of forming the same
Grant 11,289,417 - Chou , et al. March 29, 2 | 2022-03-29 |
Semiconductor device with multi-layer etch stop structure and method for forming the same
Grant 11,282,742 - Shih , et al. March 22, 2 | 2022-03-22 |
Method for preventing bottom layer wrinkling in a semiconductor device
Grant 11,282,712 - Shiu , et al. March 22, 2 | 2022-03-22 |
Semiconductor device, FinFET device and methods of forming the same
Grant 11,271,083 - Cheng , et al. March 8, 2 | 2022-03-08 |
Method of making semiconductor device having first and second epitaxial materials
Grant 11,257,951 - Su , et al. February 22, 2 | 2022-02-22 |
Apparatus for manufacturing a thin film and a method therefor
Grant 11,244,822 - Hsiao , et al. February 8, 2 | 2022-02-08 |
Seamless gap fill
Grant 11,239,310 - Huang , et al. February 1, 2 | 2022-02-01 |
Photoresist Layer Outgassing Prevention
App 20220028684 - CHEN; Yen-Yu ; et al. | 2022-01-27 |
Method Of Manufacturing A Semiconductor Device And Pattern Formation Method
App 20220005687 - LIU; Chih-Cheng ; et al. | 2022-01-06 |
Semiconductor Device and Method
App 20210407794 - Chang; Ching-Yu ; et al. | 2021-12-30 |
Method Of Fabricating A Source/drain Recess In A Semiconductor Device
App 20210391465 - PENG; Eric ; et al. | 2021-12-16 |
Semiconductor Device And Method Of Fabricating The Same
App 20210375779 - Chou; Chia-Cheng ; et al. | 2021-12-02 |
Semiconductor Device And Method
App 20210343529 - Chang; Ching-Yu ; et al. | 2021-11-04 |
Field-effect transistor and method of manufacturing the same
Grant 11,164,948 - Ho , et al. November 2, 2 | 2021-11-02 |
Method for forming semiconductor device that includes covering metal gate with multilayer dielectric
Grant 11,164,789 - Ho , et al. November 2, 2 | 2021-11-02 |
Forming Isolation Regions For Separating Fins And Gate Stacks
App 20210335670 - Ko; Chung-Ting ; et al. | 2021-10-28 |
Method For Forming Semiconductor Device That Includes Covering Metal Gate With Multilayer Dielectric
App 20210327760 - HO; Tsai-Jung ; et al. | 2021-10-21 |
Method Of Manufacturing A Semiconductor Device
App 20210305047 - WEI; Jia-Lin ; et al. | 2021-09-30 |
Method Of Manufacturing A Semiconductor Device
App 20210302833 - WENG; Ming-Hui ; et al. | 2021-09-30 |
Photoresist Layer Surface Treatment, Cap Layer, And Method Of Forming Photoresist Pattern
App 20210305040 - KUO; Yi-Chen ; et al. | 2021-09-30 |
Method Of Manufacturing A Semiconductor Device
App 20210302839 - LIU; Chih-Cheng ; et al. | 2021-09-30 |
Dielectric spacer to prevent contacting shorting
Grant 11,107,902 - Chen , et al. August 31, 2 | 2021-08-31 |
Source/drain recess in a semiconductor device
Grant 11,107,921 - Peng , et al. August 31, 2 | 2021-08-31 |
Method of Performing Atomic Layer Deposition
App 20210262090 - Cheng; Po-Hsien ; et al. | 2021-08-26 |
Methods Of Forming Interconnect Structures Of Semiconductor Device
App 20210265264 - Chou; Chia-Cheng ; et al. | 2021-08-26 |
Patterning Interconnects and Other Structures by Photo-Sensitizing Method
App 20210265204 - Lo; Wei-Jen ; et al. | 2021-08-26 |
Semiconductor device and method
Grant 11,069,528 - Chang , et al. July 20, 2 | 2021-07-20 |
System and method for supplying a precursor for an atomic layer deposition (ALD) process
Grant 11,053,584 - Hsieh , et al. July 6, 2 | 2021-07-06 |
Multi-patterning to form vias with straight profiles
Grant 11,049,763 - Chen , et al. June 29, 2 | 2021-06-29 |
MOS Devices Having Epitaxy Regions with Reduced Facets
App 20210184037 - Sung; Hsueh-Chang ; et al. | 2021-06-17 |
Apparatus and method for spatial atomic layer deposition
Grant 11,008,654 - Lin , et al. May 18, 2 | 2021-05-18 |
Patterning Methods for Semiconductor Devices
App 20210134656 - Wang; Wei-Ren ; et al. | 2021-05-06 |
Semiconductor Device With Multi-layer Etch Stop Structure And Method For Forming The Same
App 20210118728 - SHIH; Po-Cheng ; et al. | 2021-04-22 |
Doping Profile For Strained Source/drain Region
App 20210119048 - Sung; Hsueh-Chang ; et al. | 2021-04-22 |
Morphology of resist mask prior to etching
Grant 10,978,301 - Chang , et al. April 13, 2 | 2021-04-13 |
Semiconductor Device And Methods Of Forming The Same
App 20210098365 - Chou; Pei-Yu ; et al. | 2021-04-01 |
Semiconductor Device, Finfet Device And Methods Of Forming The Same
App 20210098584 - Cheng; Po-Hsien ; et al. | 2021-04-01 |
Field-effect Transistor And Method Of Manufacturing The Same
App 20210091191 - Ho; Tsai-Jung ; et al. | 2021-03-25 |
Method Of Making Semiconductor Device Having First And Second Epitaxial Materials
App 20210083115 - SU; Lilly ; et al. | 2021-03-18 |
Interconnect Structure and Method
App 20210074581 - Chou; Chia-Cheng ; et al. | 2021-03-11 |
Method For Manufacturing Semiconductor Device
App 20210050451 - LIN; Che-Yu ; et al. | 2021-02-18 |
MOS devices having epitaxy regions with reduced facets
Grant 10,916,656 - Sung , et al. February 9, 2 | 2021-02-09 |
Treatment System and Method
App 20200411310 - Kao; Wan-Yi ; et al. | 2020-12-31 |
Patterning methods for semiconductor devices
Grant 10,867,839 - Wang , et al. December 15, 2 | 2020-12-15 |
Semiconductor device and method
Grant 10,867,807 - Huang , et al. December 15, 2 | 2020-12-15 |
Patterning method for semiconductor devices and structures resulting therefrom
Grant 10,867,794 - Chang , et al. December 15, 2 | 2020-12-15 |
FinFET with rounded source/drain profile
Grant 10,861,975 - Yu , et al. December 8, 2 | 2020-12-08 |
Doping profile for strained source/drain region
Grant 10,861,971 - Sung , et al. December 8, 2 | 2020-12-08 |
Method to reduce etch variation using ion implantation
Grant 10,854,729 - Wang , et al. December 1, 2 | 2020-12-01 |
Semiconductor device having first and second epitaxial materials
Grant 10,854,748 - SU , et al. December 1, 2 | 2020-12-01 |
Interconnect structure and method
Grant 10,840,134 - Chou , et al. November 17, 2 | 2020-11-17 |
Method for Manufacturing a Semiconductor Device
App 20200357634 - Tsai; Wan-Lin ; et al. | 2020-11-12 |
MOS Devices Having Epitaxy Regions with Reduced Facets
App 20200357921 - Sung; Hsueh-Chang ; et al. | 2020-11-12 |
Stress Modulation for Dielectric Layers
App 20200350433 - Ko; Chung-Ting ; et al. | 2020-11-05 |
Source and Drain Stressors with Recessed Top Surfaces
App 20200343381 - Li; Kun-Mu ; et al. | 2020-10-29 |
Semiconductor device having fins
Grant 10,811,537 - Lin , et al. October 20, 2 | 2020-10-20 |
Treatment system and method
Grant 10,796,898 - Kao , et al. October 6, 2 | 2020-10-06 |
MOS devices with non-uniform p-type impurity profile
Grant 10,797,173 - Sung , et al. October 6, 2 | 2020-10-06 |
Patterning Method for Semiconductor Devices and Structures Resulting Therefrom
App 20200312662 - Chang; Ching-Yu ; et al. | 2020-10-01 |
Source/drain recess in a semiconductor device
Grant 10,784,375 - Peng , et al. Sept | 2020-09-22 |
Seamless Gap Fill
App 20200295131 - HUANG; Yen-Chun ; et al. | 2020-09-17 |
MOS devices having epitaxy regions with reduced facets
Grant 10,734,520 - Sung , et al. | 2020-08-04 |
Method for manufacturing a semiconductor device
Grant 10,727,045 - Tsai , et al. | 2020-07-28 |
Source and drain stressors with recessed top surfaces
Grant 10,727,342 - Li , et al. | 2020-07-28 |
Stress modulation for dielectric layers
Grant 10,720,526 - Ko , et al. | 2020-07-21 |
Seamless gap fill
Grant 10,672,866 - Huang , et al. | 2020-06-02 |
Treatment System and Method
App 20200152449 - Kao; Wan-Yi ; et al. | 2020-05-14 |
Semiconductor Device And Method
App 20200135462 - Chang; Ching-Yu ; et al. | 2020-04-30 |
Method For Preventing Bottom Layer Wrinkling In A Semiconductor Device
App 20200135488 - SHIU; Jung-Hau ; et al. | 2020-04-30 |
Systems And Methods For A Plasma Enhanced Deposition Of Material On A Semiconductor Substrate
App 20200123656 - LIN; Kun-Mo ; et al. | 2020-04-23 |
Apparatus and Method for Spatial Atomic Layer Deposition
App 20200095682 - Lin; Anthony ; et al. | 2020-03-26 |
Source/drain Recess In A Semiconductor Device
App 20200098919 - PENG; Eric ; et al. | 2020-03-26 |
Multi-Patterning to Form Vias with Straight Profiles
App 20200090984 - Chen; Chun-Kai ; et al. | 2020-03-19 |
Morphology of Resist Mask Prior to Etching
App 20200075319 - Chang; Ching-Yu ; et al. | 2020-03-05 |
System and Method for Supplying a Precursor for an Atomic Layer Deposition (ALD) Process
App 20200040450 - Hsieh; Bor-Chiuan ; et al. | 2020-02-06 |
Mos Devices Having Epitaxy Regions With Reduced Facets
App 20200035831 - Sung; Hsueh-Chang ; et al. | 2020-01-30 |
Wafer Susceptor with Improved Thermal Characteristics
App 20200032415 - Lin; Yi-Hung ; et al. | 2020-01-30 |
Method To Reduce Etch Variation Using Ion Implantation
App 20200020784 - Wang; Tsan-Chun ; et al. | 2020-01-16 |
Dielectric Spacer to Prevent Contacting Shorting
App 20200013875 - Chen; Ting-Gang ; et al. | 2020-01-09 |
Treatment system and method
Grant 10,529,553 - Kao , et al. J | 2020-01-07 |
Stress Modulation for Dielectric Layers
App 20200006557 - Ko; Chung-Ting ; et al. | 2020-01-02 |
Systems and methods for a plasma enhanced deposition of material on a semiconductor substrate
Grant 10,519,545 - Lin , et al. Dec | 2019-12-31 |
Dielectric Spacer to Prevent Contacting Shorting
App 20190393324 - Chen; Ting-Gang ; et al. | 2019-12-26 |
Method for preventing bottom layer wrinkling in a semiconductor device
Grant 10,515,822 - Shiu , et al. Dec | 2019-12-24 |
Patterning Methods for Semiconductor Devices
App 20190385902 - Wang; Wei-Ren ; et al. | 2019-12-19 |
Via patterning using multiple photo multiple etch
Grant 10,510,584 - Shiu , et al. Dec | 2019-12-17 |
Multi-patterning to form vias with straight profiles
Grant 10,510,585 - Chen , et al. Dec | 2019-12-17 |
FinFETs and methods of forming the same
Grant 10,510,867 - Hsieh , et al. Dec | 2019-12-17 |
FinFET with Rounded Source/Drain Profile
App 20190371934 - Yu; Ming-Hua ; et al. | 2019-12-05 |
Apparatus and method for spatial atomic layer deposition
Grant 10,494,716 - Lin , et al. De | 2019-12-03 |
Method to reduce etch variation using ion implantation
Grant 10,490,648 - Wang , et al. Nov | 2019-11-26 |
Forming Low-Stress Silicon Nitride Layer Through Hydrogen Treatment
App 20190355570 - Hsieh; Wei-Che ; et al. | 2019-11-21 |
MOS devices having epitaxy regions with reduced facets
Grant 10,475,926 - Sung , et al. Nov | 2019-11-12 |
Via Patterning Using Multiple Photo Multiple Etch
App 20190326164 - Shiu; Jung-Hau ; et al. | 2019-10-24 |
System and method for supplying a precursor for an atomic layer deposition (ALD) process
Grant 10,443,127 - Hsieh , et al. Oc | 2019-10-15 |
Wafer susceptor with improved thermal characteristics
Grant 10,435,811 - Lin , et al. O | 2019-10-08 |
Treatment System and Method
App 20190259602 - Kao; Wan-Yi ; et al. | 2019-08-22 |
FinFET with rounded source/drain profile
Grant 10,388,792 - Yu , et al. A | 2019-08-20 |
Interconnect Structure and Method
App 20190252246 - Chou; Chia-Cheng ; et al. | 2019-08-15 |
High aspect ratio gap fill
Grant 10,361,112 - Tsai , et al. | 2019-07-23 |
Via patterning using multiple photo multiple etch
Grant 10,340,178 - Shiu , et al. | 2019-07-02 |
Semiconductor device and method of forming vertical structure
Grant 10,325,994 - Peng , et al. | 2019-06-18 |
Injector for forming films respectively on a stack of wafers
Grant 10,316,411 - Hsieh , et al. | 2019-06-11 |
Treatment system and method
Grant 10,312,075 - Kao , et al. | 2019-06-04 |
Apparatus and Method for Spatial Atomic Layer Deposition
App 20190136378 - Lin; Anthony ; et al. | 2019-05-09 |
FinFETs and Methods of Forming the Same
App 20190140076 - Hsieh; Bor Chiuan ; et al. | 2019-05-09 |
Wafer Holder with Tapered Region
App 20190124721 - Lin; Yi-Hung ; et al. | 2019-04-25 |
Semiconductor strips with undercuts and methods for forming the same
Grant 10,269,937 - Huang , et al. | 2019-04-23 |
Interconnect structure and method
Grant 10,269,627 - Chou , et al. | 2019-04-23 |
MOS Devices with Non-Uniform P-type Impurity Profile
App 20190115470A1 - | 2019-04-18 |
Method for Manufacturing a Semiconductor Device
App 20190103272 - Tsai; Wan-Lin ; et al. | 2019-04-04 |
Via Patterning Using Multiple Photo Multiple Etch
App 20190096752 - Shiu; Jung-Hau ; et al. | 2019-03-28 |
Semiconductor Device and Method
App 20190088499 - Huang; Ming-Jie ; et al. | 2019-03-21 |
Source And Drain Stressors With Recessed Top Surfaces
App 20190035931 - Li; Kun-Mu ; et al. | 2019-01-31 |
MOS Devices Having Epitaxy Regions with Reduced Facets
App 20190013405 - Sung; Hsueh-Chang ; et al. | 2019-01-10 |
High Aspect Ratio Gap Fill
App 20190006227 - TSAI; Wan-Lin ; et al. | 2019-01-03 |
Apparatus and method for spatial atomic layer deposition
Grant 10,161,039 - Lin , et al. Dec | 2018-12-25 |
MOS devices with non-uniform p-type impurity profile
Grant 10,158,016 - Sung , et al. Dec | 2018-12-18 |
FinFETs and methods of forming the same
Grant 10,157,997 - Hsieh , et al. Dec | 2018-12-18 |
Wafer holder with tapered region
Grant 10,159,112 - Lin , et al. Dec | 2018-12-18 |
Seamless Gap Fill
App 20180350906 - Huang; Yen-Chun ; et al. | 2018-12-06 |
Semiconductor Device Having Fins
App 20180342621 - LIN; Che-Yu ; et al. | 2018-11-29 |
Via patterning using multiple photo multiple etch
Grant 10,141,220 - Shiu , et al. Nov | 2018-11-27 |
Semiconductor device and method
Grant 10,134,604 - Huang , et al. November 20, 2 | 2018-11-20 |
Semiconductor Device And Method
App 20180315618 - Huang; Ming-Jie ; et al. | 2018-11-01 |
Source/drain Recess In A Semiconductor Device
App 20180315855 - PENG; Eric ; et al. | 2018-11-01 |
FinFETs and Methods of Forming the Same
App 20180315830 - Hsieh; Bor Chiuan ; et al. | 2018-11-01 |
Transistor structure including epitaxial channel layers and raised source/drain regions
Grant 10,103,064 - Li , et al. October 16, 2 | 2018-10-16 |
Seamless gap fill
Grant 10,084,040 - Huang , et al. September 25, 2 | 2018-09-25 |
Source and drain stressors with recessed top surfaces
Grant 10,084,089 - Li , et al. September 25, 2 | 2018-09-25 |
MOS devices having epitaxy regions with reduced facets
Grant 10,062,781 - Sung , et al. August 28, 2 | 2018-08-28 |
Semiconductor Device And Method Of Forming Vertical Structure
App 20180240882 - PENG; Chih-Tang ; et al. | 2018-08-23 |
System and method for damage reduction in light-assisted processes
Grant 10,049,886 - Lin , et al. August 14, 2 | 2018-08-14 |
Fin structure of semiconductor device, manufacturing method thereof, and manufacturing method of active region of semiconductor device
Grant 10,026,843 - Lin , et al. July 17, 2 | 2018-07-17 |
Bottle-neck recess in a semiconductor device
Grant 10,020,397 - Peng , et al. July 10, 2 | 2018-07-10 |
Modulating germanium percentage in MOS devices
Grant 10,014,411 - Kwok , et al. July 3, 2 | 2018-07-03 |
Transistor strain-inducing scheme
Grant 9,991,364 - Kwok , et al. June 5, 2 | 2018-06-05 |
Apparatus and Method for Spatial Atomic Layer Deposition
App 20180142351 - Lin; Anthony ; et al. | 2018-05-24 |
Semiconductor Strips with Undercuts and Methods for Forming the Same
App 20180130896 - Huang; Tai-Chun ; et al. | 2018-05-10 |
Honeycomb heaters for integrated circuit manufacturing
Grant 9,960,059 - Lin , et al. May 1, 2 | 2018-05-01 |
Semiconductor device and method of forming vertical structure
Grant 9,954,069 - Peng , et al. April 24, 2 | 2018-04-24 |
Semiconductor Device Having First And Second Epitaxial Materials
App 20180108777 - SU; Lilly ; et al. | 2018-04-19 |
FinFET with Rounded Source/Drain Profile
App 20180090608 - Yu; Ming-Hua ; et al. | 2018-03-29 |
MOS Devices Having Epitaxy Regions with Reduced Facets
App 20180069123 - Sung; Hsueh-Chang ; et al. | 2018-03-08 |
FinFET with bottom SiGe layer in source/drain
Grant 9,911,829 - Yu , et al. March 6, 2 | 2018-03-06 |
Multi-Patterning to Form Vias with Straight Profiles
App 20180033685 - Chen; Chun-Kai ; et al. | 2018-02-01 |
Apparatus and method for spatial atomic layer deposition
Grant 9,873,943 - Lin , et al. January 23, 2 | 2018-01-23 |
Source and Drain Stressors with Recessed Top Surfaces
App 20180012997 - Li; Kun-Mu ; et al. | 2018-01-11 |
Semiconductor strips with undercuts and methods for forming the same
Grant 9,865,708 - Huang , et al. January 9, 2 | 2018-01-09 |
Interconnect Structure and Method
App 20170372948 - Chou; Chia-Cheng ; et al. | 2017-12-28 |
MOS devices having epitaxy regions with reduced facets
Grant 9,853,155 - Li , et al. December 26, 2 | 2017-12-26 |
Method For Preventing Bottom Layer Wrinkling In A Semiconductor Device
App 20170365561 - SHIU; Jung-Hau ; et al. | 2017-12-21 |
Via Patterning Using Multiple Photo Multiple Etch
App 20170365508 - Shiu; Jung-Hau ; et al. | 2017-12-21 |
Semiconductor device and fabrication method thereof
Grant 9,842,930 - Su , et al. December 12, 2 | 2017-12-12 |
Systems And Methods For A Plasma Enhanced Deposition Of Material On A Semiconductor Substrate
App 20170342561 - LIN; Kun-Mo ; et al. | 2017-11-30 |
FinFET with rounded source/drain profile
Grant 9,831,345 - Yu , et al. November 28, 2 | 2017-11-28 |
Method for making source and drain regions of a MOSFET with embedded germanium-containing layers having different germanium concentration
Grant 9,806,171 - Kwok , et al. October 31, 2 | 2017-10-31 |
Uniform shallow trench isolation regions and the method of forming the same
Grant 9,779,980 - Liou , et al. October 3, 2 | 2017-10-03 |
Transistor Strain-inducing Scheme
App 20170271478 - Kwok; Tsz-Mei ; et al. | 2017-09-21 |
Apparatus and methods for annealing wafers
Grant 9,768,044 - Wang , et al. September 19, 2 | 2017-09-19 |
MOS Devices Having Epitaxy Regions with Reduced Facets
App 20170263771 - Li; Chii-Horng ; et al. | 2017-09-14 |
Interconnect Structure And Method
App 20170256445 - Chou; Chia-Cheng ; et al. | 2017-09-07 |
Interconnect structure and method
Grant 9,754,822 - Chou , et al. September 5, 2 | 2017-09-05 |
Via patterning using multiple photo multiple etch
Grant 9,754,818 - Shiu , et al. September 5, 2 | 2017-09-05 |
Source and drain stressors with recessed top surfaces
Grant 9,755,077 - Li , et al. September 5, 2 | 2017-09-05 |
Doping Profile For Strained Source/drain Region
App 20170243975 - Sung; Hsueh-Chang ; et al. | 2017-08-24 |
Semiconductor device and fabrication method thereof
Grant 9,728,641 - Lee , et al. August 8, 2 | 2017-08-08 |
Qualitative fault detection and classification system for tool condition monitoring and associated methods
Grant 9,727,049 - Ho , et al. August 8, 2 | 2017-08-08 |
Via Patterning Using Multiple Photo Multiple Etch
App 20170200636 - Shiu; Jung-Hau ; et al. | 2017-07-13 |
Seamless Gap Fill
App 20170194424 - Huang; Yen-Chun ; et al. | 2017-07-06 |
Transistor strain-inducing scheme
Grant 9,698,243 - Kwok , et al. July 4, 2 | 2017-07-04 |
Germanium profile for channel strain
Grant 9,691,898 - Sung , et al. June 27, 2 | 2017-06-27 |
MOS Devices with Non-Uniform P-type Impurity Profile
App 20170179287 - Sung; Hsueh-Chang ; et al. | 2017-06-22 |
Apparatus and Method for Spatial Atomic Layer Deposition
App 20170167021 - Lin; Anthony ; et al. | 2017-06-15 |
Source and Drain Stressors with Recessed Top Surfaces
App 20170170319 - Li; Kun-Mu ; et al. | 2017-06-15 |
Multi-patterning to form vias with straight profiles
Grant 9,679,804 - Chen , et al. June 13, 2 | 2017-06-13 |
Fin Structure Of Semiconductor Device, Manufacturing Method Thereof, And Manufacturing Method Of Active Region Of Semiconductor Device
App 20170154996 - LIN; Che-Yu ; et al. | 2017-06-01 |
MOS devices having epitaxy regions with reduced facets
Grant 9,666,686 - Li , et al. May 30, 2 | 2017-05-30 |
Selective etching in the formation of epitaxy regions in MOS devices
Grant 9,653,574 - Cheng , et al. May 16, 2 | 2017-05-16 |
Advanced forming method and structure of local mechanical strained transistor
Grant 9,647,111 - Chen , et al. May 9, 2 | 2017-05-09 |
Dummy FinFET structure and method of making same
Grant 9,647,066 - Lu , et al. May 9, 2 | 2017-05-09 |
Apparatus For Manufacturing A Thin Film And A Method Therefor
App 20170110312 - HSIAO; Tsai-Fu ; et al. | 2017-04-20 |
Wafer holder with varying surface property
Grant 9,612,056 - Lin , et al. April 4, 2 | 2017-04-04 |
Treatment System and Method
App 20170092487 - Kao; Wan-Yi ; et al. | 2017-03-30 |
Wafer Susceptor with Improved Thermal Characteristics
App 20170088976 - Lin; Yi-Hung ; et al. | 2017-03-30 |
MOS devices with non-uniform P-type impurity profile
Grant 9,601,619 - Sung , et al. March 21, 2 | 2017-03-21 |
Source and drain stressors with recessed top surfaces
Grant 9,583,483 - Li , et al. February 28, 2 | 2017-02-28 |
Strained isolation regions
Grant 9,564,488 - Liang , et al. February 7, 2 | 2017-02-07 |
Wafer susceptor with improved thermal characteristics
Grant 9,517,539 - Lin , et al. December 13, 2 | 2016-12-13 |
Semiconductor Strips with Undercuts and Methods for Forming the Same
App 20160351692 - Huang; Tai-Chun ; et al. | 2016-12-01 |
Semiconductor Device And Fabrication Method Thereof
App 20160336448 - LEE; Yen-Ru ; et al. | 2016-11-17 |
Semiconductor Device And Fabrication Method Thereof
App 20160322499 - SU; Lilly ; et al. | 2016-11-03 |
Structure and method for semiconductor device
Grant 9,484,265 - Lee , et al. November 1, 2 | 2016-11-01 |
Semiconductor strips with undercuts and methods for forming the same
Grant 9,443,961 - Huang , et al. September 13, 2 | 2016-09-13 |
High performance self aligned contacts and method of forming same
Grant 9,437,712 - Huang , et al. September 6, 2 | 2016-09-06 |
Modulating Germanium Percentage in MOS Devices
App 20160254381 - Kwok; Tsz-Mei ; et al. | 2016-09-01 |
MOS Device Having Source and Drain Regions With Embedded Germanium-Containing Diffusion Barrier
App 20160254364 - Kwok; Tsz-Mei ; et al. | 2016-09-01 |
Reducing variation by using combination epitaxy growth
Grant 9,425,287 - Cheng , et al. August 23, 2 | 2016-08-23 |
Apparatus and Methods for Annealing Wafers
App 20160240408 - Wang; Yi-Chao ; et al. | 2016-08-18 |
Semiconductor device and fabrication method thereof
Grant 9,412,868 - Lee , et al. August 9, 2 | 2016-08-09 |
Via patterning using multiple photo multiple etch
Grant 9,412,648 - Shiu , et al. August 9, 2 | 2016-08-09 |
Semiconductor device and fabrication method thereof
Grant 9,401,426 - Su , et al. July 26, 2 | 2016-07-26 |
Semiconductor Device And Method Of Forming Vertical Structure
App 20160211370 - PENG; CHIH-TANG ; et al. | 2016-07-21 |
Advanced Forming Method and Structure of Local Mechanical Strained Transistor
App 20160197183 - Chen; Chien-Hao ; et al. | 2016-07-07 |
Structure and Method for Semiconductor Device
App 20160190017 - Lee; Yi-Jing ; et al. | 2016-06-30 |
Method To Reduce Etch Variation Using Ion Implantation
App 20160172466 - Wang; Tsan-Chun ; et al. | 2016-06-16 |
FinFET with Bottom SiGe Layer in Source/Drain
App 20160163836 - Yu; Ming-Hua ; et al. | 2016-06-09 |
Selective Etching in the Formation of Epitaxy Regions in MOS Devices
App 20160163827 - Cheng; Yu-Hung ; et al. | 2016-06-09 |
Modulating germanium percentage in MOS devices
Grant 9,362,360 - Kwok , et al. June 7, 2 | 2016-06-07 |
Transistor Strain-inducing Scheme
App 20160155819 - Kwok; Tsz-Mei ; et al. | 2016-06-02 |
MOS device having source and drain regions with embedded germanium-containing diffusion barrier
Grant 9,337,337 - Kwok , et al. May 10, 2 | 2016-05-10 |
Apparatus and methods for annealing wafers
Grant 9,337,059 - Wang , et al. May 10, 2 | 2016-05-10 |
System and Method for Damage Reduction in Light-Assisted Processes
App 20160126105 - Lin; Yi-Hung ; et al. | 2016-05-05 |
Semiconductor device and method of forming vertical structure
Grant 9,318,447 - Peng , et al. April 19, 2 | 2016-04-19 |
Advanced forming method and structure of local mechanical strained transistor
Grant 9,306,065 - Chen , et al. April 5, 2 | 2016-04-05 |
MOS Devices Having Epitaxy Regions with Reduced Facets
App 20160087078 - Li; Chii-Horng ; et al. | 2016-03-24 |
FinFET with bottom SiGe layer in source/drain
Grant 9,293,581 - Yu , et al. March 22, 2 | 2016-03-22 |
Structure and method for semiconductor device
Grant 9,287,382 - Lee , et al. March 15, 2 | 2016-03-15 |
Transistor strain-inducing scheme
Grant 9,287,398 - Kwok , et al. March 15, 2 | 2016-03-15 |
Method to reduce etch variation using ion implantation
Grant 9,281,196 - Wang , et al. March 8, 2 | 2016-03-08 |
Wafer Susceptor with Improved Thermal Characteristics
App 20160064268 - Lin; Yi-Hung ; et al. | 2016-03-03 |
Structure and method and FinFET device
Grant 9,276,117 - Lee , et al. March 1, 2 | 2016-03-01 |
Structure and Method and FinFET Device
App 20160056277 - Lee; Yi-Jing ; et al. | 2016-02-25 |
Source/drain structures and methods of forming same
Grant 9,269,777 - Lee , et al. February 23, 2 | 2016-02-23 |
Selective etching in the formation of epitaxy regions in MOS devices
Grant 9,263,339 - Cheng , et al. February 16, 2 | 2016-02-16 |
Source/Drain Structures and Methods of Forming Same
App 20160027877 - Lee; Yi-Jing ; et al. | 2016-01-28 |
Tilt implantation for forming FinFETs
Grant 9,245,982 - Wang , et al. January 26, 2 | 2016-01-26 |
Semiconductor Device And Method Of Forming Vertical Structure
App 20160020180 - PENG; CHIH-TANG ; et al. | 2016-01-21 |
Uniform Shallow Trench Isolation Regions and the Method of Forming the Same
App 20160013095 - Liou; Yu-Ling ; et al. | 2016-01-14 |
Method for forming semiconductor device structure
Grant 9,236,294 - Chou , et al. January 12, 2 | 2016-01-12 |
Wafer processing chamber, heat treatment apparatus and method for processing wafers
Grant 9,228,260 - Hsiao , et al. January 5, 2 | 2016-01-05 |
Tilt Implantation For Forming Finfets
App 20150357442 - WANG; TSAN-CHUN ; et al. | 2015-12-10 |
MOS devices having epitaxy regions with reduced facets
Grant 9,209,175 - Sung , et al. December 8, 2 | 2015-12-08 |
Transistor Structure Including Epitaxial Channel Layers And Raised Source/drain Regions
App 20150349065 - Li; Kun-Mu ; et al. | 2015-12-03 |
Isolation region gap fill method
Grant 9,177,955 - Peng , et al. November 3, 2 | 2015-11-03 |
Wafer Holder With Tapered Region
App 20150296564 - Lin; Yi-Hung ; et al. | 2015-10-15 |
Semiconductor devices and methods of manufacture thereof
Grant 9,153,538 - Ko , et al. October 6, 2 | 2015-10-06 |
Bottle-neck Recess In A Semiconductor Device
App 20150270397 - Peng; Eric ; et al. | 2015-09-24 |
Tilt implantation for forming FinFETs
Grant 9,142,650 - Wang , et al. September 22, 2 | 2015-09-22 |
Uniform shallow trench isolation regions and the method of forming the same
Grant 9,142,402 - Liou , et al. September 22, 2 | 2015-09-22 |
High Performance Self Aligned Contacts and Method of Forming Same
App 20150255275 - Huang; Yen-Chun ; et al. | 2015-09-10 |
Transistor Strain-Inducing Scheme
App 20150236157 - Kwok; Tsz-Mei ; et al. | 2015-08-20 |
Modulating Germanium Percentage in MOS Devices
App 20150228724 - Kwok; Tsz-Mei ; et al. | 2015-08-13 |
Wafer holder with tapered region
Grant 9,099,514 - Lin , et al. August 4, 2 | 2015-08-04 |
Method For Forming Semiconductor Device Structure
App 20150200133 - CHOU; Chia-Cheng ; et al. | 2015-07-16 |
Injector For Forming Films Respectively On A Stack Of Wafers
App 20150191820 - HSIEH; WEI-CHE ; et al. | 2015-07-09 |
Method to Reduce Etch Variation Using Ion Implantation
App 20150187927 - Wang; Tsan-Chun ; et al. | 2015-07-02 |
Germanium Profile for Channel Strain
App 20150179796 - Sung; Hsueh-Chang ; et al. | 2015-06-25 |
Performing enhanced cleaning in the formation of MOS devices
Grant 9,064,688 - Cheng , et al. June 23, 2 | 2015-06-23 |
Bottle-neck recess in a semiconductor device
Grant 9,054,130 - Peng , et al. June 9, 2 | 2015-06-09 |
FinFET with Bottom SiGe Layer in Source/Drain
App 20150137180 - Yu; Ming-Hua ; et al. | 2015-05-21 |
System And Method For Supplying A Precursor For An Atomic Layer Deposition (ald) Process
App 20150125591 - HSIEH; BOR-CHIUAN ; et al. | 2015-05-07 |
Injector for forming films respectively on a stack of wafers
Grant 9,017,763 - Hsieh , et al. April 28, 2 | 2015-04-28 |
Advanced Forming Method and Structure of Local Mechanical Strained Transistor
App 20150108554 - Chen; Chien-Hao ; et al. | 2015-04-23 |
Modulating germanium percentage in MOS devices
Grant 9,012,964 - Kwok , et al. April 21, 2 | 2015-04-21 |
Method of temperature determination for deposition reactors
Grant 9,011,599 - Lu , et al. April 21, 2 | 2015-04-21 |
Pore Sealing Techniques For Porous Low-k Dielectric Interconnect
App 20150091172 - Ko; Chung-Chi ; et al. | 2015-04-02 |
Semiconductor Device And Fabrication Method Thereof
App 20150091103 - SU; Lilly ; et al. | 2015-04-02 |
Tilt Implantation For Forming Finfets
App 20150079750 - WANG; Tsan-Chun ; et al. | 2015-03-19 |
Source and Drain Stressors with Recessed Top Surfaces
App 20150061024 - Li; Kun-Mu ; et al. | 2015-03-05 |
Semiconductor Devices and Methods of Manufacture Thereof
App 20150054170 - Ko; Chung-Chi ; et al. | 2015-02-26 |
FinFET with bottom SiGe layer in source/drain
Grant 8,963,258 - Yu , et al. February 24, 2 | 2015-02-24 |
Germanium Barrier Embedded in MOS Devices
App 20150048417 - Kwok; Tsz-Mei ; et al. | 2015-02-19 |
Modulating Germanium Percentage in MOS Devices
App 20150041852 - Kwok; Tsz-Mei ; et al. | 2015-02-12 |
Methods of manufacturing strained semiconductor devices with facets
Grant 8,946,060 - Cheng , et al. February 3, 2 | 2015-02-03 |
MOS Devices with Non-Uniform P-type Impurity Profile
App 20150021688 - Sung; Hsueh-Chang ; et al. | 2015-01-22 |
MOS Devices Having Epitaxy Regions with Reduced Facets
App 20150021696 - Sung; Hsueh-Chang ; et al. | 2015-01-22 |
Advanced forming method and structure of local mechanical strained transistor
Grant 8,933,503 - Chen , et al. January 13, 2 | 2015-01-13 |
Semiconductor device and fabrication method thereof
Grant 8,927,374 - Su , et al. January 6, 2 | 2015-01-06 |
Semiconductor Device And Fabrication Method Thereof
App 20140367768 - LEE; Yen-Ru ; et al. | 2014-12-18 |
Reducing Variation by Using Combination Epitaxy Growth
App 20140342522 - Cheng; Yu-Hung ; et al. | 2014-11-20 |
Methods for forming MOS devices with raised source/drain regions
Grant 8,889,501 - Chuang , et al. November 18, 2 | 2014-11-18 |
Semiconductor Strips with Undercuts and Methods for Forming the Same
App 20140264491 - Huang; Tai-Chun ; et al. | 2014-09-18 |
FinFET with Bottom SiGe Layer in Source/Drain
App 20140264590 - Yu; Ming-Hua ; et al. | 2014-09-18 |
Semiconductor device and fabrication method thereof
Grant 8,835,267 - Lee , et al. September 16, 2 | 2014-09-16 |
CMOS dual metal gate semiconductor device
Grant 8,836,038 - Hou , et al. September 16, 2 | 2014-09-16 |
FinFET with Rounded Source/Drain Profile
App 20140252489 - Yu; Ming-Hua ; et al. | 2014-09-11 |
Isolation Region Gap Fill Method
App 20140252497 - Peng; Chih-Tang ; et al. | 2014-09-11 |
Semiconductor device and method of manufacture
Grant 8,828,841 - Peng , et al. September 9, 2 | 2014-09-09 |
Reducing variation by using combination epitaxy growth
Grant 8,828,850 - Cheng , et al. September 9, 2 | 2014-09-09 |
Epitaxy silicon on insulator (ESOI)
Grant 8,823,104 - Yu , et al. September 2, 2 | 2014-09-02 |
Strained Isolation Regions
App 20140242776 - Liang; Mong-Song ; et al. | 2014-08-28 |
Injector For Forming Films Respectively On A Stack Of Wafers
App 20140170319 - Hsieh; Wei-Che ; et al. | 2014-06-19 |
Strained isolation regions
Grant 8,736,016 - Liang , et al. May 27, 2 | 2014-05-27 |
Semiconductor Device and Method of Manufacture
App 20140127879 - Peng; Chih-Tang ; et al. | 2014-05-08 |
Method of forming SOI-like structure in a bulk semiconductor substrate by annealing a lower portion of a trench while protecting an upper portion of the trench
Grant 8,673,736 - Yang , et al. March 18, 2 | 2014-03-18 |
Qualitative Fault Detection And Classification System For Tool Condition Monitoring And Associated Methods
App 20140067324 - Ho; Chia-Tong ; et al. | 2014-03-06 |
Semiconductor device and method of manufacture
Grant 8,629,508 - Peng , et al. January 14, 2 | 2014-01-14 |
Methods for Forming MOS Devices with Raised Source/Drain Regions
App 20130323893 - Chuang; Harry-Hak-Lay ; et al. | 2013-12-05 |
Method for fabricating an isolation structure
Grant 8,580,653 - Lee , et al. November 12, 2 | 2013-11-12 |
Dummy FinFET Structure and Method of Making Same
App 20130277760 - Lu; Chang-Shen ; et al. | 2013-10-24 |
Epitaxy Silicon on Insulator (ESOI)
App 20130270579 - Yu; Ming-Hua ; et al. | 2013-10-17 |
MOSFET device with localized stressor
Grant 8,557,669 - Chen , et al. October 15, 2 | 2013-10-15 |
Honey Cone Heaters for Integrated Circuit Manufacturing
App 20130256292 - Lin; Yi-Hung ; et al. | 2013-10-03 |
Wafer Holder With Tapered Region
App 20130252424 - Lin; Yi-Hung ; et al. | 2013-09-26 |
Performing Enhanced Cleaning in the Formation of MOS Devices
App 20130252392 - Cheng; Yu-Hung ; et al. | 2013-09-26 |
Wafer Holder With Varying Surface Property
App 20130252189 - Lin; Yi-Hung ; et al. | 2013-09-26 |
Strained Semiconductor Device With Facets
App 20130244389 - CHENG; Yu-Hung ; et al. | 2013-09-19 |
Method for fabricating a semiconductor device
Grant 8,530,316 - Cheng , et al. September 10, 2 | 2013-09-10 |
Epitaxy silicon on insulator (ESOI)
Grant 8,481,402 - Yu , et al. July 9, 2 | 2013-07-09 |
Method For Fabricating An Isolation Structure
App 20130171803 - LEE; Tze-Liang ; et al. | 2013-07-04 |
Strained semiconductor device with facets
Grant 8,455,930 - Cheng , et al. June 4, 2 | 2013-06-04 |
Uniform Shallow Trench Isolation Regions and the Method of Forming the Same
App 20130137251 - Liou; Yu-Ling ; et al. | 2013-05-30 |
Apparatus and Method for Controlling Wafer Temperature
App 20130130184 - Lu; Chang-Shen ; et al. | 2013-05-23 |
Method For Fabricating A Semiconductor Device
App 20130122675 - CHENG; Yu-Hung ; et al. | 2013-05-16 |
Semiconductor Device and Method of Manufacture
App 20130099350 - Peng; Chih-Tang ; et al. | 2013-04-25 |
Semiconductor Device And Fabrication Method Thereof
App 20130082309 - SU; Lilly ; et al. | 2013-04-04 |
Semiconductor Device And Fabrication Method Thereof
App 20130084682 - LEE; Yen-Ru ; et al. | 2013-04-04 |
Method for fabricating an isolation structure
Grant 8,404,561 - Lee , et al. March 26, 2 | 2013-03-26 |
Apparatus and Methods for Annealing Wafers
App 20130052837 - Wang; Yi-Chao ; et al. | 2013-02-28 |
Method for fabricating a semiconductor device
Grant 8,377,784 - Cheng , et al. February 19, 2 | 2013-02-19 |
Semiconductor device and method of manufacture
Grant 8,329,552 - Peng , et al. December 11, 2 | 2012-12-11 |
Method of enhancing dopant activation without suffering additional dopant diffusion
Grant 8,273,633 - Kuo , et al. September 25, 2 | 2012-09-25 |
MOS devices with partial stressor channel
Grant 8,274,071 - Yu , et al. September 25, 2 | 2012-09-25 |
Semiconductor Device And Fabrication Method Thereof
App 20120168821 - CHENG; Yu-Hung ; et al. | 2012-07-05 |
Source/drain strained layers
Grant 8,168,501 - Yu , et al. May 1, 2 | 2012-05-01 |
Epitaxy Silicon on Insulator (ESOI)
App 20120043641 - Yu; Ming-Hua ; et al. | 2012-02-23 |
Method Of Temperature Determination For Deposition Reactors
App 20120012047 - LU; Jhi-Cherng ; et al. | 2012-01-19 |
Reducing Variation by Using Combination Epitaxy Growth
App 20110287611 - Cheng; Yu-Hung ; et al. | 2011-11-24 |
Epitaxy silicon on insulator (ESOI)
Grant 8,049,277 - Yu , et al. November 1, 2 | 2011-11-01 |
Source/drain strained layers
Grant 7,973,337 - Yu , et al. July 5, 2 | 2011-07-05 |
Narrow channel width effect modification in a shallow trench isolation device
Grant 7,960,286 - Liao , et al. June 14, 2 | 2011-06-14 |
Advanced forming method and structure of local mechanical strained transistor
Grant 7,935,587 - Chen , et al. May 3, 2 | 2011-05-03 |
MOS devices with partial stressor channel
Grant 7,868,317 - Yu , et al. January 11, 2 | 2011-01-11 |
STI stress modulation with additional implantation and natural pad sin mask
Grant 7,851,328 - Liao , et al. December 14, 2 | 2010-12-14 |
Multi-step epitaxial process for depositing Si/SiGe
Grant 7,816,217 - Lin , et al. October 19, 2 | 2010-10-19 |
Hybrid process for forming metal gates
Grant 7,812,414 - Hou , et al. October 12, 2 | 2010-10-12 |
Epitaxy silicon on insulator (ESOI)
Grant 7,803,690 - Yu , et al. September 28, 2 | 2010-09-28 |
Source/drain strained layers
Grant 7,781,799 - Yu , et al. August 24, 2 | 2010-08-24 |
Semiconductor device having ultra-shallow and highly activated source/drain extensions
Grant 7,741,699 - Ku , et al. June 22, 2 | 2010-06-22 |
Pad structure to prompt excellent bondability for low-k intermetal dielectric layers
Grant 7,642,658 - Lee , et al. January 5, 2 | 2010-01-05 |
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