Lee; Hyosan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lee; Hyosan.The latest application filed is for "slurry composition for chemical mechanical polishing".

Company Profile

10.26.42

Lee; Hyosan - Hwaseong-si KR
Lee; Hyosan - Suwon-si KR
Lee; Hyosan - Gyeonggi-do KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Etchant compositions for metal-containing films and methods of manufacturing integrated circuit devices using the etchant compositions Grant 11,427,759 - Song , et al. August 30, 2	2022-08-30
Etching composition and method for manufacturing semiconductor device using the same Grant 11,390,805 - Lee , et al. July 19, 2	2022-07-19
Slurry Composition For Chemical Mechanical Polishing App 20210403756 - KIM; Inkwon ; et al.	2021-12-30
Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system Grant 11,189,503 - Kim , et al. November 30, 2	2021-11-30
Silicon layer etchant composition and method of forming pattern by using the same Grant 11,168,253 - Jeon , et al. November 9, 2	2021-11-09
Etching Composition, A Method Of Etching A Metal Barrier Layer And A Metal Layer Using The Same, And Method Of Manufacturing Semiconductor Device Using The Same App 20210254224 - KIM; Jungah ; et al.	2021-08-19
Etching Composition And Method For Manufacturing Semiconductor Device Using The Same App 20210238478 - LEE; Jae Sung ; et al.	2021-08-05
Process Chamber and Substrate Processing Apparatus Including the Same App 20210217636 - Cho; Yong-Jhin ; et al.	2021-07-15
Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same Grant 11,028,488 - Kim , et al. June 8, 2	2021-06-08
Process chamber and substrate processing apparatus including the same Grant 10,991,600 - Cho , et al. April 27, 2	2021-04-27
Etchant Compositions For Metal-containing Films And Methods Of Manufacturing Integrated Circuit Devices Using The Etchant Compositions App 20210115334 - Song; Kihun ; et al.	2021-04-22
Cleaning Apparatus, Chemical Mechanical Polishing System Including The Same, Cleaning Method After Chemical Mechanical Polishing, And Method Of Manufacturing Semiconductor Device Including The Same App 20210098261 - KIM; Chae Lyoung ; et al.	2021-04-01
Pre-treatment composition before etching SiGe and method of fabricating semiconductor device using the same Grant 10,837,115 - Kim , et al. November 17, 2	2020-11-17
Silicon Layer Etchant Composition And Method Of Forming Pattern By Using The Same App 20200216757 - JEON; Changsu ; et al.	2020-07-09
Etchant Composition For Etching Metal Film And Method Of Forming Pattern Using The Same App 20200208052 - SONG; Kihun ; et al.	2020-07-02
Substrate Drying Method, Photoresist Developing Method, Photolithography Method Including The Same, And Substrate Drying System App 20200152486 - KIM; Young-Hoo ; et al.	2020-05-14
Etching Composition, A Method Of Etching A Metal Barrier Layer And A Metal Layer Using The Same, And Method Of Manufacturing Sem App 20200087798 - KIM; Jungah ; et al.	2020-03-19
PRE-TREATMENT COMPOSITION BEFORE ETCHING SiGe AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME App 20190284701 - KIM; Soojin ; et al.	2019-09-19
Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same Grant 10,388,537 - Kim , et al. A	2019-08-20
Apparatus and methods for treating a substrate Grant 10,361,100 - Lee , et al.	2019-07-23
Substrate treating apparatus Grant 10,186,427 - Kim , et al. Ja	2019-01-22
Process Chamber and Substrate Processing Apparatus Including the Same App 20180366349 - Cho; Yong-Jhin ; et al.	2018-12-20
Metal etchant compositions and methods of fabricating a semiconductor device using the same Grant 10,155,903 - Lee , et al. Dec	2018-12-18
Cleaning Apparatus, Chemical Mechanical Polishing System Including The Same, Cleaning Method After Chemical Mechanical Polishing, And Method Of Manufacturing Semiconductor Device Including The Same App 20180315613 - KIM; Chae Lyoung ; et al.	2018-11-01
Cleaning Composition, Cleaning Apparatus, And Method For Manufacturing Semiconductor Device App 20180151395 - PARK; MIHYUN ; et al.	2018-05-31
Manufacturing method and fluid supply system for treating substrate Grant 9,941,110 - Oh , et al. April 10, 2	2018-04-10
Substrate Treating Apparatus App 20180096856 - KIM; Kyoung Hwan ; et al.	2018-04-05
Method and apparatus for purifying cleaning agent Grant 9,934,959 - Cho , et al. April 3, 2	2018-04-03
Substrate treating apparatus and method of treating substrate Grant 9,852,921 - Kim , et al. December 26, 2	2017-12-26
Method for treating substrate Grant 9,831,081 - Jeong , et al. November 28, 2	2017-11-28
Cleaning Apparatus And Substrate Processing System Including The Same App 20170297164 - KIM; Tae-Hong ; et al.	2017-10-19
Cleaning Apparatus, Chemical Mechanical Polishing System Including The Same, Cleaning Method After Chemical Mechanical Polishing, And Method Of Manufacturing Semiconductor Device Including The Same App 20170301553 - KIM; Chae Lyoung ; et al.	2017-10-19
Etching composition Grant 9,677,002 - Bae , et al. June 13, 2	2017-06-13
Apparatus and Methods for Treating a Substrate App 20170084469 - Lee; Hyosan ; et al.	2017-03-23
Apparatus and methods for manufacturing semiconductor devices and treating substrates Grant 9,595,434 - Kim , et al. March 14, 2	2017-03-14
Method For Treating Substrate App 20170069485 - JEONG; Jihoon ; et al.	2017-03-09
Manufacturing Method And Fluid Supply System For Treating Substrate App 20170062208 - Oh; Jung-Min ; et al.	2017-03-02
Substrate Treating Apparatus And Method Of Treating Substrate App 20170062287 - KIM; Kyoung Hwan ; et al.	2017-03-02
Apparatus and methods for treating a substrate Grant 9,534,839 - Lee , et al. January 3, 2	2017-01-03
Liquid Chemical Supplying System, Substrate Processing System, And Substrate Processing Method App 20160368030 - KIM; Ingi ; et al.	2016-12-22
Manufacturing method and fluid supply system for treating substrate Grant 9,524,864 - Oh , et al. December 20, 2	2016-12-20
Metal Etchant Compositions And Methods Of Fabricating A Semiconductor Device Using The Same App 20160204001 - Lee; Hyosan ; et al.	2016-07-14
Etching Composition App 20160032185 - BAE; Sang Won ; et al.	2016-02-04
Apparatus And Methods For Manufacturing Semiconductor Devices And Treating Substrates App 20160027637 - KIM; KYOUNGSEOB ; et al.	2016-01-28
Metal Etchant Compositions And Methods Of Fabricating A Semiconductor Device Using The Same App 20150368557 - Lee; Hyosan ; et al.	2015-12-24
Apparatus And Methods For Treating Substrates App 20150343495 - KIM; Kyoungseob ; et al.	2015-12-03
Etching composition and method of manufacturing semiconductor device using the same Grant 9,165,759 - Bae , et al. October 20, 2	2015-10-20
Method Of Rinsing And Drying Semiconductor Device And Method Of Manufacturing Semiconductor Device Using The Same App 20150287590 - OH; Jung-Min ; et al.	2015-10-08
Methods of manufacturing a three-dimensional semiconductor device Grant 9,153,597 - Kim , et al. October 6, 2	2015-10-06
Method And Apparatus For Purifying Cleaning Agent App 20150157955 - CHO; Yong-Jhin ; et al.	2015-06-11
Etching Composition And Method Of Manufacturing Semiconductor Device Using The Same App 20140141616 - BAE; Sang Won ; et al.	2014-05-22
Manufacturing Method And Fluid Supply System For Treating Substrate App 20130199051 - Oh; Jung-Min ; et al.	2013-08-08
Apparatus And Methods For Treating A Substrate App 20130145640 - Lee; Hyosan ; et al.	2013-06-13
Methods of Manufacturing a Three-Dimensional Semiconductor Device App 20130078776 - Kim; Young-Hoo ; et al.	2013-03-28
Methods of Forming Semiconductor Devices App 20120214296 - Hyun; Sangjin ; et al.	2012-08-23
Methods of forming semiconductor devices Grant 8,183,141 - Hyun , et al. May 22, 2	2012-05-22
Method of fabricating nonvolatile memory device Grant 8,076,198 - Lee , et al. December 13, 2	2011-12-13
Method of fabricating nonvolatile memory device App 20100178755 - Lee; Hyosan ; et al.	2010-07-15
Methods of Forming Semiconductor Devices App 20100099245 - Hyun; Sangjin ; et al.	2010-04-22
Apparatus and method for removing photoresist from a substrate App 20090065032 - Han; Donggyun ; et al.	2009-03-12
Apparatus and method for removing photoresist from a substrate Grant 7,431,855 - Han , et al. October 7, 2	2008-10-07

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