| Patent | Date |
|---|
Apparatus For Photoresist Dry Deposition
App 20220308462 - Berney; Butch ; et al. | 2022-09-29 |
Byproduct Removal From Electroplating Solutions
App 20220307152 - Richardson; Joseph ; et al. | 2022-09-29 |
Use Of Vacuum During Transfer Of Substrates
App 20220305601 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-09-29 |
Bake Strategies To Enhance Lithographic Performance Of Metal-containing Resist
App 20220308454 - Weidman; Timothy William ; et al. | 2022-09-29 |
Low Angle Membrane Frame For An Electroplating Cell
App 20220298667 - WILMOT; Frederick Dean ; et al. | 2022-09-22 |
Substantially Carbon-free Molybdenum-containing And Tungsten-containing Films In Semiconductor Device Manufacturing
App 20220298624 - Blakeney; Kyle Jordan ; et al. | 2022-09-22 |
Spatially Tunable Deposition To Compensate Within Wafer Differential Bow
App 20220298632 - Shaikh; Fayaz A. ; et al. | 2022-09-22 |
Bidirectional Indexing Apparatus
App 20220298631 - Vintila; Adriana ; et al. | 2022-09-22 |
Gas Feed System For Surface Modified Depth Controlled Deposition For Plasma Based Deposition
App 20220301866 - Abel; Joseph ; et al. | 2022-09-22 |
Positive Tone Development Of Cvd Euv Resist Films
App 20220299877 - Weidman; Timothy William ; et al. | 2022-09-22 |
Stimulus Responsive Polymer Films And Formulations
App 20220301859 - BLACHUT; Gregory ; et al. | 2022-09-22 |
Plasma Viewport
App 20220301835 - Luo; Bin ; et al. | 2022-09-22 |
Method For Etching Features Using A Targeted Deposition For Selective Passivation
App 20220301853 - LIU; Wenchi ; et al. | 2022-09-22 |
Deposition of self assembled monolayer for enabling selective deposition and etch
Grant 11,450,532 - Lee , et al. September 20, 2 | 2022-09-20 |
Alternative integration for redistribution layer process
Grant 11,450,631 - Oberst , et al. September 20, 2 | 2022-09-20 |
Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials
Grant 11,450,513 - Yang , et al. September 20, 2 | 2022-09-20 |
Metal Deposition
App 20220290300 - Vellanki; Ravi ; et al. | 2022-09-15 |
Thermal Atomic Layer Etch With Rapid Temperature Cycling
App 20220293431 - Panagopoulos; Theodoros ; et al. | 2022-09-15 |
Dynamic Process Control In Semiconductor Manufacturing
App 20220293442 - Kumar; Purushottam ; et al. | 2022-09-15 |
PECVD deposition system for deposition on selective side of the substrate
Grant 11,441,222 - Shaikh , et al. September 13, 2 | 2022-09-13 |
Planar substrate edge contact with open volume equalization pathways and side containment
Grant 11,443,975 - Breiling , et al. September 13, 2 | 2022-09-13 |
Edge Ring Systems For Substrate Processing Systems
App 20220285136 - HAN; Hui Ling ; et al. | 2022-09-08 |
Thermally Controlled Chandelier Showerhead
App 20220282377 - Luo; Bin ; et al. | 2022-09-08 |
Near Netshape Additive Manufacturing Using Low Temperature Plasma Jets
App 20220285134 - RAO; Abhinav Shekhar ; et al. | 2022-09-08 |
High Density, Modulus, And Hardness Amorphous Carbon Films At Low Pressure
App 20220282366 - Weimer; Matthew Scott ; et al. | 2022-09-08 |
Pedestal Setup Using Camera Wafer
App 20220282380 - KULKARNI; Prasanna ; et al. | 2022-09-08 |
Multi-state Rf Pulsing To Control Mask Shape And Breaking Selectivity Versus Process Margin Trade-off
App 20220285130 - Dole; Nikhil ; et al. | 2022-09-08 |
Frequency tuning for a matchless plasma source
Grant 11,437,219 - Long , et al. September 6, 2 | 2022-09-06 |
Semiconductor wafer processing apparatus
Grant D962,881 - Juco September 6, 2 | 2022-09-06 |
Substrate processing system with tandem source activation for CVD
Grant 11,434,567 - LaVoie , et al. September 6, 2 | 2022-09-06 |
Thermal Atomic Layer Deposition Of Silicon-containing Films
App 20220275510 - GUPTA; Awnish ; et al. | 2022-09-01 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20220275504 - SHANBHAG; Damodar Rajaram ; et al. | 2022-09-01 |
Differential Contrast Plating For Advanced Packaging Applications
App 20220275531 - Banik; Stephen J. ; et al. | 2022-09-01 |
In Situ Real-time Sensing And Compensation Of Non-uniformities In Substrate Processing Systems
App 20220277928 - JING; Changyou ; et al. | 2022-09-01 |
Adjustment Of Power And Frequency Based On Three Or More States
App 20220277934 - Valcore, Jr.; John C. ; et al. | 2022-09-01 |
Manifold valve for multiple precursors
Grant 11,427,908 - Shanbhag , et al. August 30, 2 | 2022-08-30 |
Software emulator for hardware components in a gas delivery system of substrate processing system
Grant 11,429,409 - Pust , et al. August 30, 2 | 2022-08-30 |
Two-stage pin lifter for de-chuck operations
Grant 11,430,688 - Tian , et al. August 30, 2 | 2022-08-30 |
Tin Oxide Films In Semiconductor Device Manufacturing
App 20220270877 - Yu; Jengyi ; et al. | 2022-08-25 |
Defect Classification And Source Analysis For Semiconductor Equipment
App 20220270237 - Sawlani; Kapil ; et al. | 2022-08-25 |
Chamber-accumulation Extension Via In-situ Passivation
App 20220267900 - Fang; ZhiYuan ; et al. | 2022-08-25 |
Integrated Hardware-software Computer Vision System For Autonomous Control And Inspection Of Substrate Processing Systems
App 20220270901 - SADEGHI; Hossein ; et al. | 2022-08-25 |
Moveable Edge Rings With Reduced Capacitance Variation For Substrate Processing Systems
App 20220270863 - Kimball; Christopher ; et al. | 2022-08-25 |
Metal liner passivation and adhesion enhancement by zinc doping
Grant 11,424,158 - Dordi , et al. August 23, 2 | 2022-08-23 |
Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment
Grant 11,424,103 - Zhang , et al. August 23, 2 | 2022-08-23 |
Systems And Methods For Reducing Effluent Build-up In A Pumping Exhaust System
App 20220259725 - XAVIER; Antonio ; et al. | 2022-08-18 |
Etching Metal-oxide And Protecting Chamber Components
App 20220258216 - Singhal; Akhil N. ; et al. | 2022-08-18 |
Method For Preventing Line Bending During Metal Fill Process
App 20220262640 - Jandl; Adam ; et al. | 2022-08-18 |
Spindle Assembly For Wafer Transfer In A Multi-station Process Module
App 20220262662 - Borth; Andrew ; et al. | 2022-08-18 |
Systems And Methods For Cleaning An Edge Ring Pocket
App 20220254616 - Hudson; Eric ; et al. | 2022-08-11 |
Integrated Adaptive Positioning Systems And Routines For Automated Wafer-handling Robot Teach And Health Check
App 20220254666 - Sadeghi; Hossein ; et al. | 2022-08-11 |
Chamber Component Cleanliness Measurement System
App 20220252548 - YASSERI; Amir A. ; et al. | 2022-08-11 |
Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves For Semiconductor Processing Equipment
App 20220252183 - Gregor; Mariusch ; et al. | 2022-08-11 |
Atomic Layer Etch And Ion Beam Etch Patterning
App 20220254649 - TAN; Samantha SiamHwa ; et al. | 2022-08-11 |
Rf Pulsing Within Pulsing For Semiconductor Rf Plasma Processing
App 20220254608 - Long; Maolin ; et al. | 2022-08-11 |
Moveable Edge Rings With Reduced Capacitance Variation For Substrate Processing Systems
App 20220254612 - KIMBALL; Christopher ; et al. | 2022-08-11 |
Confinement Ring for Use in a Plasma Processing System
App 20220254614 - Dhindsa; Rajinder ; et al. | 2022-08-11 |
Nucleation-free Tungsten Deposition
App 20220254685 - ERMEZ; Sema ; et al. | 2022-08-11 |
Distance measurement between gas distribution device and substrate support at high temperatures
Grant 11,408,734 - Emerson , et al. August 9, 2 | 2022-08-09 |
Sealant Coating For Plasma Processing Chamber Components
App 20220246404 - HEINE; Benjamin Philip ; et al. | 2022-08-04 |
Photoresist Development With Halide Chemistries
App 20220244645 - Tan; Samantha SiamHwa ; et al. | 2022-08-04 |
Temperature Control Of A Multi-zone Pedestal
App 20220243332 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-08-04 |
Automated Transfer Of Edge Ring Requiring Rotational Alignment
App 20220246408 - Genetti; Damon Tyrone ; et al. | 2022-08-04 |
Use Of Rotation To Correct For Azimuthal Non-uniformities In Semiconductor Substrate Processing
App 20220243323 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-08-04 |
Processing Tool Capable For Forming Carbon Layers On Substrates
App 20220246428 - LEESER; Karl Frederick ; et al. | 2022-08-04 |
Power And Data Transmission To Substrate Support In Plasma Chambers Via Optical Fiber
App 20220247492 - JING; Changyou ; et al. | 2022-08-04 |
Selective deposition using hydrolysis
Grant 11,404,275 - Hausmann , et al. August 2, 2 | 2022-08-02 |
Controlling plating electrolyte concentration on an electrochemical plating apparatus
Grant 11,401,623 - He , et al. August 2, 2 | 2022-08-02 |
Rf Immune Sensor Probe For Monitoring A Temperature Of An Electrostatic Chuck Of A Substrate Processing System
App 20220238360 - TIAN; Siyuan ; et al. | 2022-07-28 |
Doped Or Undoped Silicon Carbide Deposition And Remote Hydrogen Plasma Exposure For Gapfill
App 20220238334 - YUAN; Guangbi ; et al. | 2022-07-28 |
Selective Carbon Deposition
App 20220235464 - GUPTA; Awnish ; et al. | 2022-07-28 |
SixNy AS A NUCLEATION LAYER FOR SiCxOy
App 20220235463 - Yuan; Guangbi ; et al. | 2022-07-28 |
In-situ Control Of Film Properties During Atomic Layer Deposition
App 20220238325 - Agnew; Douglas Walter ; et al. | 2022-07-28 |
Reduced Diameter Carrier Ring Hardware For Substrate Processing Systems
App 20220235459 - MADSEN; Eric | 2022-07-28 |
Showerhead Insert For Uniformity Tuning
App 20220238312 - French; David Michael | 2022-07-28 |
Polymerization Protective Liner For Reactive Ion Etch In Patterning
App 20220238349 - Nagabhirava; Bhaskar ; et al. | 2022-07-28 |
Doped Or Undoped Silicon Carbide Deposition And Remote Hydrogen Plasma Exposure For Gapfill
App 20220238333 - YUAN; Guangbi ; et al. | 2022-07-28 |
Systems And Methods For Compensating For Rf Power Loss
App 20220238307 - Evans; Mathew Dennis ; et al. | 2022-07-28 |
Thermoelectric Cooling Pedestal For Substrate Processing Systems
App 20220238415 - KUMAR; Mrinal ; et al. | 2022-07-28 |
Etching isolation features and dense features within a substrate
Grant 11,398,387 - Shoeb , et al. July 26, 2 | 2022-07-26 |
Voltage And Current Probe
App 20220230850 - MOPIDEVI; Hema Swaroop ; et al. | 2022-07-21 |
Independently Adjustable Flowpath Conductance In Multi-station Semiconductor Processing
App 20220228263 - Roberts; Michael Philip ; et al. | 2022-07-21 |
Electrochemical Deposition System Including Optical Probes
App 20220228287 - PFAU; Andrew James ; et al. | 2022-07-21 |
Variable Inductor Device
App 20220230802 - French; David Michael | 2022-07-21 |
Systems and methods for controlling plasma instability in semiconductor fabrication
Grant 11,393,729 - Sakiyama , et al. July 19, 2 | 2022-07-19 |
Wafer transport assembly with integrated buffers
Grant 11,393,705 - Daugherty , et al. July 19, 2 | 2022-07-19 |
Low Resistivity Films Containing Molybdenum
App 20220223471 - THOMBARE; Shruti Vivek ; et al. | 2022-07-14 |
Substrate Sticking And Breakage Mitigation
App 20220220627 - Berke; Aaron ; et al. | 2022-07-14 |
High Power Electrostatic Chuck With Features Preventing He Hole Light-up/arcing
App 20220223387 - MATYUSHKIN; Alexander ; et al. | 2022-07-14 |
Rapid Tuning Of Critical Dimension Non-uniformity By Modulating Temperature Transients Of Multi-zone Substrate Supports
App 20220223440 - KUMAR; Ravi ; et al. | 2022-07-14 |
Method for conditioning a ceramic coating
Grant 11,384,430 - Shih , et al. July 12, 2 | 2022-07-12 |
Pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 11,387,136 - Konkola , et al. July 12, 2 | 2022-07-12 |
Vapor Accumulator For Corrosive Gases With Purging
App 20220213599 - Lind; Gary Bridger ; et al. | 2022-07-07 |
High Selectivity, Low Stress, And Low Hydrogen Diamond-like Carbon Hardmasks By High Power Pulsed Low Frequency Rf
App 20220216037 - Weimer; Matthew Scott ; et al. | 2022-07-07 |
Atomic Layer Etch And Selective Deposition Process For Extreme Ultraviolet Lithography Resist Improvement
App 20220216050 - Yu; Jengyi ; et al. | 2022-07-07 |
Cooling Of Air Actuated Valve Using Actuating Air
App 20220213979 - Vintila; Adriana ; et al. | 2022-07-07 |
Gold Through Silicon Mask Plating
App 20220216104 - Chua; Lee Peng ; et al. | 2022-07-07 |
Systems And Methods For Multi-level Pulsing In Rf Plasma Tools
App 20220216038 - Wu; Ying ; et al. | 2022-07-07 |
Cooling plate for a semiconductor processing apparatus
Grant D956,705 - Luo , et al. July 5, 2 | 2022-07-05 |
Thermal atomic layer etch with rapid temperature cycling
Grant 11,380,556 - Panagopoulos , et al. July 5, 2 | 2022-07-05 |
Dielectric Gapfill Using Atomic Layer Deposition (ald), Inhibitor Plasma And Etching
App 20220205096 - ABEL; Joseph ; et al. | 2022-06-30 |
Alternating Etch And Passivation Process
App 20220208551 - Heo; Seongjun ; et al. | 2022-06-30 |
Modulated Atomic Layer Deposition
App 20220208543 - Soe; Chan Myae Myae ; et al. | 2022-06-30 |
Foreline Assembly For Quad Station Process Module
App 20220208575 - Vasquez; Miguel Benjamin ; et al. | 2022-06-30 |
Deposition Of Self Assembled Monolayer For Enabling Selective Deposition And Etch
App 20220208555 - LEE; Younghee ; et al. | 2022-06-30 |
Trim And Deposition Profile Control With Multi-zone Heated Substrate Support For Multi-patterning Processes
App 20220205105 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-06-30 |
Protection Of Seed Layers During Electrodeposition Of Metals In Semiconductor Device Manufacturing
App 20220208604 - Zhu; Huanfeng ; et al. | 2022-06-30 |
Data Capture And Transformation To Support Data Analysis And Machine Learning For Substrate Manufacturing Systems
App 20220206996 - HUANG; Chung-Ho ; et al. | 2022-06-30 |
Surface modified depth controlled deposition for plasma based deposition
Grant 11,373,862 - Abel , et al. June 28, 2 | 2022-06-28 |
Electrostatic Chuck With Spatially Tunable Rf Coupling To A Wafer
App 20220199378 - DREWERY; John | 2022-06-23 |
Carbon Based Depositions Used For Critical Dimension Control During High Aspect Ratio Feature Etches And For Forming Protective Layers
App 20220199417 - HENRI; Jon ; et al. | 2022-06-23 |
Extreme Ultraviolet (euv) Lithography Using An Intervening Layer Or A Multi-layer Stack With Varying Mean Free Paths For Secondary Electron Generation
App 20220197147 - LIANG; Andrew ; et al. | 2022-06-23 |
Deposition Of Metal Films
App 20220195598 - Collins; Joshua ; et al. | 2022-06-23 |
Atomic Layer Etching For Subtractive Metal Etch
App 20220199422 - YANG; Wenbing ; et al. | 2022-06-23 |
Dual-frequency, Direct-drive Inductively Coupled Plasma Source
App 20220199365 - Long; Maolin ; et al. | 2022-06-23 |
High Temperature Heating Of A Substrate In A Processing Chamber
App 20220199379 - LEE; James F. ; et al. | 2022-06-23 |
Systems And Methods For Optimizing Power Delivery To An Electrode Of A Plasma Chamber
App 20220199366 - Bhowmick; Ranadeep ; et al. | 2022-06-23 |
Modular-component System For Gas Delivery
App 20220199431 - Stumpf; John Folden ; et al. | 2022-06-23 |
Ex situ coating of chamber components for semiconductor processing
Grant 11,365,479 - Shanbhag , et al. June 21, 2 | 2022-06-21 |
Closed-loop Multiple-output Radio Frequency (rf) Matching
App 20220190854 - Juco; Eller Y. ; et al. | 2022-06-16 |
Turbomolecular Pump And Cathode Assembly For Etching Reactor
App 20220186734 - Lill; Thorsten ; et al. | 2022-06-16 |
Method and System for Automated Frequency Tuning of Radiofrequency (RF) Signal Generator for Multi-Level RF Power Pulsing
App 20220189738 - Evans; Mathew ; et al. | 2022-06-16 |
Friction Stir Welding In Semiconductor Manufacturing Applications
App 20220189817 - Linebarger, Jr.; Nick Ray ; et al. | 2022-06-16 |
Rapid Flush Purging During Atomic Layer Deposition
App 20220186370 - Nannapaneni; Pragna ; et al. | 2022-06-16 |
Bottom And Middle Edge Rings
App 20220189745 - RATHNASINGHE; Hiran Rajitha ; et al. | 2022-06-16 |
Surface Coating Treatment
App 20220186354 - ERICKSON; Ann ; et al. | 2022-06-16 |
Bottom And Middle Edge Rings
App 20220189744 - RATHNASINGHE; Hiran Rajitha ; et al. | 2022-06-16 |
Adjustment of power and frequency based on three or more states
Grant 11,361,942 - Valcore, Jr. , et al. June 14, 2 | 2022-06-14 |
High Etch Selectivity, Low Stress Ashable Carbon Hard Mask
App 20220181147 - XUE; Jun ; et al. | 2022-06-09 |
Electrostatic Chuck For Use In Semiconductor Processing
App 20220181184 - GOMM; Troy Alan | 2022-06-09 |
Electrostatic Chuck System
App 20220181127 - ERICKSON; Ann ; et al. | 2022-06-09 |
Lamellar Ceramic Structure
App 20220181126 - Hollingsworth; Joel Philip ; et al. | 2022-06-09 |
Apparatus For Cleaning Plasma Chambers
App 20220181128 - LAVOIE; Adrien ; et al. | 2022-06-09 |
High Step Coverage Tungsten Deposition
App 20220181158 - Bowes; Michael ; et al. | 2022-06-09 |
Etch Stop Layer
App 20220181141 - van Schravendijk; Bart J. ; et al. | 2022-06-09 |
Thermal imaging for within wafer variability feedforward or feedback information
Grant 11,353,364 - Thompson June 7, 2 | 2022-06-07 |
Method for preventing line bending during metal fill process
Grant 11,355,345 - Jandl , et al. June 7, 2 | 2022-06-07 |
Tin oxide mandrels in patterning
Grant 11,355,353 - Yu , et al. June 7, 2 | 2022-06-07 |
Early Warning Systems And Methods For Determining Capacitor Failures
App 20220172933 - Kapoor; Sunil ; et al. | 2022-06-02 |
Tungsten Feature Fill With Inhibition Control
App 20220172987 - Yang; Tsung-Han ; et al. | 2022-06-02 |
Electrostatic Chuck Heater Resistance Measurement To Approximate Temperature
App 20220172925 - Jing; Changyou ; et al. | 2022-06-02 |
High Density, Controlled Integrated Circuits Factory
App 20220171370 - LILL; Thorsten ; et al. | 2022-06-02 |
Model-based Scheduling For Substrate Processing Systems
App 20220171373 - CHAU; Raymond ; et al. | 2022-06-02 |
Wafer Placement Correction In Indexed Multi-station Processing Chambers
App 20220172967 - Topping; Stephen ; et al. | 2022-06-02 |
Precursors For Deposition Of Molybdenum-containing Films
App 20220170155 - Blakeney; Kyle Jordan | 2022-06-02 |
Etchant composition
Grant 11,345,852 - Hecke , et al. May 31, 2 | 2022-05-31 |
Metal fill process for three-dimensional vertical NAND wordline
Grant 11,348,795 - Schloss , et al. May 31, 2 | 2022-05-31 |
Pecvd Deposition System For Deposition On Selective Side Of The Substrate
App 20220162755 - Shaikh; Fayaz ; et al. | 2022-05-26 |
Process Cooling-water Isolation
App 20220165549 - Sonti; Sreeram | 2022-05-26 |
Systems And Methods For Tuning A Mhz Rf Generator Within A Cycle Of Operation Of A Khz Rf Generator
App 20220165543 - Howald; Arthur M. ; et al. | 2022-05-26 |
Method For Providing Doped Silicon
App 20220165563 - KUMAR; Purushottam ; et al. | 2022-05-26 |
Plasma Etch Tool For High Aspect Ratio Etching
App 20220165546 - Lill; Thorsten ; et al. | 2022-05-26 |
Tin Oxide Films In Semiconductor Device Manufacturing
App 20220165571 - Yu; Jengyi ; et al. | 2022-05-26 |
Pedestals For Modulating Film Properties In Atomic Layer Deposition (ald) Substrate Processing Chambers
App 20220162749 - LAVOIE; Adrien ; et al. | 2022-05-26 |
Pecvd Deposition System For Deposition On Selective Side Of The Substrate
App 20220162753 - Shaikh; Fayaz ; et al. | 2022-05-26 |
Pecvd Deposition System For Deposition On Selective Side Of The Substrate
App 20220162754 - Shaikh; Fayaz ; et al. | 2022-05-26 |
RF pulsing within pulsing for semiconductor RF plasma processing
Grant 11,342,159 - Long , et al. May 24, 2 | 2022-05-24 |
Confinement ring for use in a plasma processing system
Grant 11,342,166 - Dhindsa , et al. May 24, 2 | 2022-05-24 |
Variable depth edge ring for etch uniformity control
Grant 11,342,163 - Angelov , et al. May 24, 2 | 2022-05-24 |
Variable Cycle And Time Rf Activation Method For Film Thickness Matching In A Multi-station Deposition System
App 20220154336 - Karim; Ishtak ; et al. | 2022-05-19 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20220158604 - Kapoor; Sunil ; et al. | 2022-05-19 |
Reducing Roughness Of Extreme Ultraviolet Lithography Resists
App 20220157617 - Zhou; Xiang ; et al. | 2022-05-19 |
Systems and methods for reducing effluent build-up in a pumping exhaust system
Grant 11,332,824 - Xavier , et al. May 17, 2 | 2022-05-17 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber
Grant 11,335,539 - Bhowmick , et al. May 17, 2 | 2022-05-17 |
Selective Silicon Dioxide Removal Using Low Pressure Low Bias Deuterium Plasma
App 20220148852 - Shoeb; Juline ; et al. | 2022-05-12 |
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating With Intermittent Restoration Plasma
App 20220145459 - VARADARAJAN; Bhadri N. ; et al. | 2022-05-12 |
Electrostatic Chuck With Ceramic Monolithic Body
App 20220148903 - WANG; Feng ; et al. | 2022-05-12 |
Measurement System To Measure A Thickness Of An Adjustable Edge Ring For A Substrate Processing System
App 20220146258 - SADEGHI; Hossein | 2022-05-12 |
Mutually Induced Filters
App 20220149801 - Kapoor; Sunil ; et al. | 2022-05-12 |
Showerhead With Configurable Gas Outlets
App 20220136107 - LEE; James F. ; et al. | 2022-05-05 |
Multi-station Semiconductor Processing With Independently Adjustable Pedestals
App 20220136104 - Pasquale; Frank Loren ; et al. | 2022-05-05 |
Apparatuses And Methods For Avoiding Electrical Breakdown From Rf Terminal To Adjacent Non-rf Terminal
App 20220139670 - Kim; Hyungjoon ; et al. | 2022-05-05 |
Macroscopic Texturing For Anodized And Coated Surfaces
App 20220139677 - Peng; Gordon Wen-Yin ; et al. | 2022-05-05 |
Fixture For Automatic Calibration Of Substrate Transfer Robot
App 20220134568 - BLANK; Richard ; et al. | 2022-05-05 |
Multi-channel Liquid Delivery System For Advanced Semiconductor Applications
App 20220139730 - VASQUEZ; Miguel Benjamin ; et al. | 2022-05-05 |
Cooling For A Plasma-based Reactor
App 20220139671 - Drewery; John Stephen ; et al. | 2022-05-05 |
Chuck For Plasma Processing Chamber
App 20220139681 - ERICKSON; Ann ; et al. | 2022-05-05 |
Tin oxide films in semiconductor device manufacturing
Grant 11,322,351 - Yu , et al. May 3, 2 | 2022-05-03 |
Controller for controlling core critical dimension variation using flash trim sequence
Grant 11,322,416 - Agarwal , et al. May 3, 2 | 2022-05-03 |
Ion Beam Etching With Sidewall Cleaning
App 20220131071 - Lill; Thorsten ; et al. | 2022-04-28 |
Electrostatic Chuck With Powder Coating
App 20220130705 - SMITH; Jeremy George ; et al. | 2022-04-28 |
Substrate Location Detection And Adjustment
App 20220126454 - Martin; Michael John ; et al. | 2022-04-28 |
Underlayer for photoresist adhesion and dose reduction
Grant 11,314,168 - Tan , et al. April 26, 2 | 2022-04-26 |
Substrate Processing Tool Capable Of Modulating One Or More Plasma Temporally And/or Spatially
App 20220119954 - CHEN; Lee ; et al. | 2022-04-21 |
Eliminating Yield Impact Of Stochastics In Lithography
App 20220122846 - Shamma; Nader ; et al. | 2022-04-21 |
Selective Etch Using A Sacrificial Mask
App 20220122848 - PETER; Daniel ; et al. | 2022-04-21 |
Removing Bubbles From Plating Cells
App 20220119977 - BANIK; Stephen J. ; et al. | 2022-04-21 |
Automated Process Module Ring Positioning And Replacement
App 20220122878 - Wu; Joanna ; et al. | 2022-04-21 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill
App 20220115244 - LAI; Chiukin Steven ; et al. | 2022-04-14 |
Laminated Aerosol Deposition Coating For Aluminum Components For Plasma Processing Chambers
App 20220115214 - XU; Lin ; et al. | 2022-04-14 |
Conformal Damage-free Encapsulation Of Chalcogenide Materials
App 20220115592 - Sims; James Samuel ; et al. | 2022-04-14 |
Carrier Ring Designs For Controlling Deposition On Wafer Bevel/edge
App 20220115261 - Janicki; Michael J. ; et al. | 2022-04-14 |
Matchless Plasma Source For Semiconductor Wafer Fabrication
App 20220117074 - Long; Maolin ; et al. | 2022-04-14 |
Apparatus for spatial and temporal control of temperature on a substrate
Grant 11,302,556 - Ricci , et al. April 12, 2 | 2022-04-12 |
High density hole pattern dual plenum hole showerhead assembly
Grant D948,658 - Miller , et al. April 12, 2 | 2022-04-12 |
Showerhead Shroud
App 20220110230 - Borth; Andrew ; et al. | 2022-04-07 |
Carrier Ring Designs For Controlling Deposition On Wafer Bevel/edge
App 20220108912 - Janicki; Michael J. ; et al. | 2022-04-07 |
Multi-location Gas Injection To Improve Uniformity In Rapid Alternating Processes
App 20220108875 - THIE; William ; et al. | 2022-04-07 |
Remote-plasma Clean (rpc) Directional-flow Device
App 20220107619 - Janicki; Michael J. ; et al. | 2022-04-07 |
Differential-pressure-based Flow Meters
App 20220107212 - Stumpf; John Folden ; et al. | 2022-04-07 |
Auto-calibration To A Station Of A Process Module That Spins A Wafer
App 20220108902 - Hiester; Jacob L. ; et al. | 2022-04-07 |
Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching
Grant 11,293,098 - Abel , et al. April 5, 2 | 2022-04-05 |
Feature Fill With Nucleation Inhibition
App 20220102208 - Chandrashekar; Anand ; et al. | 2022-03-31 |
Electrodeposition Of Cobalt Tungsten Films
App 20220102209 - Spurlin; Tighe A. ; et al. | 2022-03-31 |
Ion Beam Etching With Gas Treatment And Pulsing
App 20220102624 - YUN; Seokmin ; et al. | 2022-03-31 |
Electrostatic chuck for use in semiconductor processing
Grant 11,289,355 - Gomm March 29, 2 | 2022-03-29 |
Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching
Grant 11,286,560 - Phillips , et al. March 29, 2 | 2022-03-29 |
Ion beam etching utilizing cryogenic wafer temperatures
Grant 11,289,306 - Lill , et al. March 29, 2 | 2022-03-29 |
Showerhead Shroud
App 20220093372 - BORTH; Andrew ; et al. | 2022-03-24 |
Showerhead For Deposition Tools Having Multiple Plenums And Gas Distribution Chambers
App 20220093366 - JANICKI; Michael J. ; et al. | 2022-03-24 |
Textured Silicon Semiconductor Processing Chamber Components
App 20220093370 - XU; Lin ; et al. | 2022-03-24 |
Atomic Layer Treatment Process Using Metastable Activated Radical Species
App 20220093365 - BAO; Xinyu ; et al. | 2022-03-24 |
Designer Atomic Layer Etching
App 20220093413 - Kanarik; Keren Jacobs | 2022-03-24 |
Moving substrate transfer chamber
Grant 11,282,737 - Brown , et al. March 22, 2 | 2022-03-22 |
Removal of electroplating bath additives
Grant 11,280,022 - Spurlin , et al. March 22, 2 | 2022-03-22 |
Systems And Methods For Filtering Radio Frequencies From A Signal Of A Thermocouple And Controlling A Temperature Of An Electrode In A Plasma Chamber
App 20220084776 - BURKHART; Vincent ; et al. | 2022-03-17 |
Metal Atomic Layer Etch And Deposition Apparatuses And Processes With Metal-free Ligands
App 20220084838 - ZHANG; He ; et al. | 2022-03-17 |
Plasma processing system having an inspection tool and controller that interfaces with a tool model
Grant 11,276,564 - Gottscho March 15, 2 | 2022-03-15 |
Integrated Wafer Bow Measurements
App 20220074869 - Arora; Rajan ; et al. | 2022-03-10 |
Vacuum-integrated Hardmask Processes And Apparatus
App 20220075260 - Marks; Jeffrey ; et al. | 2022-03-10 |
Substrate Processing System Including Dual Ion Filter For Downstream Plasma
App 20220076924 - BRAVO; Andrew Stratton ; et al. | 2022-03-10 |
Semiconductor Mask Reshaping Using A Sacrificial Layer
App 20220076962 - Tan; Zhongkui ; et al. | 2022-03-10 |
Cooling System For Processing Chamber
App 20220074627 - FLYNN; Kevin ; et al. | 2022-03-10 |
Apparatus for UV flowable dielectric
Grant 11,270,896 - Mohn , et al. March 8, 2 | 2022-03-08 |
Etching carbon layer using doped carbon as a hard mask
Grant 11,270,890 - Jain , et al. March 8, 2 | 2022-03-08 |
Resistive Random Access Memory With Preformed Filaments
App 20220069218 - YOON; Hyungsuk ; et al. | 2022-03-03 |
Low Stress Films For Advanced Semiconductor Applications
App 20220068636 - Bayati; Reza ; et al. | 2022-03-03 |
Long-life Extended Temperature Range Embedded Diode Design For Electrostatic Chuck With Multiplexed Heaters Array
App 20220068691 - TIAN; Siyuan | 2022-03-03 |
Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
Grant 11,264,207 - Kim , et al. March 1, 2 | 2022-03-01 |
Defect classification and source analysis for semiconductor equipment
Grant 11,263,737 - Sawlani , et al. March 1, 2 | 2022-03-01 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20220059348 - Kang; Hu ; et al. | 2022-02-24 |
Eliminating yield impact of stochastics in lithography
Grant 11,257,674 - Shamma , et al. February 22, 2 | 2022-02-22 |
Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system
Grant 11,255,017 - Qian , et al. February 22, 2 | 2022-02-22 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
Grant 11,258,421 - Kapoor , et al. February 22, 2 | 2022-02-22 |
Mutually induced filters
Grant 11,258,420 - Kapoor , et al. February 22, 2 | 2022-02-22 |
Control Of Wafer Bow In Multiple Stations
App 20220051919 - Augustyniak; Edward ; et al. | 2022-02-17 |
Film Stack Simplification For High Aspect Ratio Patterning And Vertical Scaling
App 20220051938 - Wu; Hui-Jung ; et al. | 2022-02-17 |
Magnetic Shielding For Plasma Sources
App 20220044864 - Mopidevi; Hema Swaroop ; et al. | 2022-02-10 |
Multi zone substrate support for ALD film property correction and tunability
Grant 11,236,422 - Roberts , et al. February 1, 2 | 2022-02-01 |
Conformal damage-free encapsulation of chalcogenide materials
Grant 11,239,420 - Sims , et al. February 1, 2 | 2022-02-01 |
Designer atomic layer etching
Grant 11,239,094 - Kanarik February 1, 2 | 2022-02-01 |
Auto-calibration to a station of a process module that spins a wafer
Grant 11,239,100 - Hiester , et al. February 1, 2 | 2022-02-01 |
Electrostatic chucking pedestal with substrate backside purging and thermal sinking
Grant 11,232,966 - Thomas , et al. January 25, 2 | 2022-01-25 |
Actuator to adjust dynamically showerhead tilt in a semiconductor-processing apparatus
Grant 11,230,765 - Wiltse January 25, 2 | 2022-01-25 |
3D printed plasma arrestor for an electrostatic chuck
Grant 11,227,749 - Kellogg January 18, 2 | 2022-01-18 |
Control of current density in an electroplating apparatus
Grant 11,225,727 - He , et al. January 18, 2 | 2022-01-18 |
Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack
Grant 11,225,712 - Collins , et al. January 18, 2 | 2022-01-18 |
Electrochemical doping of thin metal layers employing underpotential deposition and thermal treatment
Grant 11,225,714 - Venkatraman , et al. January 18, 2 | 2022-01-18 |
Matchless plasma source for semiconductor wafer fabrication
Grant 11,224,116 - Long , et al. January 11, 2 | 2022-01-11 |
Removing bubbles from plating cell
Grant 11,214,887 - Banik , et al. January 4, 2 | 2022-01-04 |
Monitoring surface oxide on seed layers during electroplating
Grant 11,208,732 - Huang , et al. December 28, 2 | 2021-12-28 |
Atomic layer deposition and etch in a single plasma chamber for critical dimension control
Grant 11,211,253 - Zhou , et al. December 28, 2 | 2021-12-28 |
Vacuum-integrated hardmask processes and apparatus
Grant 11,209,729 - Marks , et al. December 28, 2 | 2021-12-28 |
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
Grant 11,195,706 - Marakhtanov , et al. December 7, 2 | 2021-12-07 |
Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
Grant 11,189,452 - Burkhart , et al. November 30, 2 | 2021-11-30 |
Control of wafer bow in multiple stations
Grant 11,183,406 - Augustyniak , et al. November 23, 2 | 2021-11-23 |
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks
Grant 11,183,368 - French , et al. November 23, 2 | 2021-11-23 |
Tin oxide thin film spacers in semiconductor device manufacturing
Grant 11,183,383 - Smith , et al. November 23, 2 | 2021-11-23 |
Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering
Grant 11,181,489 - Thompson , et al. November 23, 2 | 2021-11-23 |
Progressive heating of components of substrate processing systems using TCR element-based heaters
Grant 11,183,400 - Chandrasekharan , et al. November 23, 2 | 2021-11-23 |
Dynamic precursor dosing for atomic layer deposition
Grant 11,180,850 - Kumar , et al. November 23, 2 | 2021-11-23 |
Magnetic shielding for plasma sources
Grant 11,177,067 - Mopidevi , et al. November 16, 2 | 2021-11-16 |
Copper electrodeposition on cobalt lined features
Grant 11,168,407 - Velmurugan , et al. November 9, 2 | 2021-11-09 |
Method for etching an etch layer
Grant 11,171,011 - Hudson , et al. November 9, 2 | 2021-11-09 |
Internal plasma grid for semiconductor fabrication
Grant 11,171,021 - Singh , et al. November 9, 2 | 2021-11-09 |
Atomic layer deposition and etch for reducing roughness
Grant 11,170,997 - Zhou , et al. November 9, 2 | 2021-11-09 |
Semiconductor wafer processing tool
Grant D935,424 - Juco November 9, 2 | 2021-11-09 |
High speed synchronization of plasma source/bias power delivery
Grant 11,158,488 - Radomski , et al. October 26, 2 | 2021-10-26 |
Apparatus for thermal control of tubing assembly and associated methods
Grant 11,131,480 - Leeser September 28, 2 | 2021-09-28 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 11,133,180 - Kang , et al. September 28, 2 | 2021-09-28 |
Ceramic baseplate with channels having non-square corners
Grant 11,133,211 - Wang , et al. September 28, 2 | 2021-09-28 |
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
Grant 11,127,567 - Kang , et al. September 21, 2 | 2021-09-21 |
Peripheral RF feed and symmetric RF return for symmetric RF delivery
Grant 11,127,571 - Nam , et al. September 21, 2 | 2021-09-21 |
Method to selectively pattern a surface for plasma resistant coat applications
Grant 11,124,659 - Yasseri , et al. September 21, 2 | 2021-09-21 |
Split chamber assembly
Grant 11,127,610 - Antolik September 21, 2 | 2021-09-21 |
Systems and methods for UV-based suppression of plasma instability
Grant 11,120,989 - Swaminathan September 14, 2 | 2021-09-14 |
Systems for removing and replacing consumable parts from a semiconductor process module in situ
Grant 11,112,773 - Trussell , et al. September 7, 2 | 2021-09-07 |
Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region
Grant 11,111,581 - Xia , et al. September 7, 2 | 2021-09-07 |
Selective growth of metal-containing hardmask thin films
Grant 11,107,683 - Smith , et al. August 31, 2 | 2021-08-31 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
Grant 11,101,164 - Batzer , et al. August 24, 2 | 2021-08-24 |
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
Grant 11,101,107 - Benjamin , et al. August 24, 2 | 2021-08-24 |
Ultrathin atomic layer deposition film accuracy thickness control
Grant 11,101,129 - Qian , et al. August 24, 2 | 2021-08-24 |
Selective deposition of etch-stop layer for enhanced patterning
Grant 11,094,542 - Shankar , et al. August 17, 2 | 2021-08-17 |
Method to create air gaps
Grant 11,088,019 - Van Cleemput , et al. August 10, 2 | 2021-08-10 |
Optimized low energy / high productivity deposition system
Grant 11024531 - | 2021-06-01 |
Symmetric precursor delivery
Grant 11021792 - | 2021-06-01 |
Electrostatic chuck design for cooling-gas light-up prevention
Grant 11024532 - | 2021-06-01 |
Copper Electrofill On Non-copper Liner Layers
App 20210156045A1 - | 2021-05-27 |
Resist And Etch Modeling
App 20210157228A1 - | 2021-05-27 |
Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
Grant 11015247 - | 2021-05-25 |
Method and Apparatus for Anisotropic Pattern Etching and Treatment
App 20210151290A1 - | 2021-05-20 |
Copper Electrodeposition Sequence For The Filling Of Cobalt Lined Features
App 20210151322A1 - | 2021-05-20 |
Tunable Upper Plasma-exclusion-zone Ring For A Bevel Etcher
App 20210151297A1 - | 2021-05-20 |
Monoenergetic ion generation for controlled etch
Grant 11011351 - | 2021-05-18 |
Systems and methods for performing edge ring characterization
Grant 11011353 - | 2021-05-18 |
Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems
Grant 11008655 - | 2021-05-18 |
Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching
Grant 11011388 - | 2021-05-18 |
Temperature-tuned substrate support for substrate processing systems
Grant 11011355 - | 2021-05-18 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
Grant 11011379 - | 2021-05-18 |
Methods and apparatus for flow isolation and focusing during electroplating
Grant 11001934 - | 2021-05-11 |
Temperature controlled spacer for use in a substrate processing chamber
Grant 11004662 - | 2021-05-11 |
Method of etch model calibration using optical scatterometry
Grant 10997345 - | 2021-05-04 |
Selective deposition with atomic layer etch reset
Grant 10998187 - | 2021-05-04 |
Ion beam etch without need for wafer tilt or rotation
Grant 10998167 - | 2021-05-04 |
Systems and methods for combining optical metrology with mass metrology
Grant 10989652 - | 2021-04-27 |
Apparatus for measuring condition of electroplating cell components and associated methods
Grant 10989747 - | 2021-04-27 |
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
Grant 10991550 - | 2021-04-27 |
Rotational Indexer With Additional Rotational Axes
App 20210118715A1 - | 2021-04-22 |
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
Grant 10982346 - | 2021-04-20 |
Sensor and adjuster for a consumable
Grant 10985078 - | 2021-04-20 |
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
Grant 10984987 - | 2021-04-20 |
Methods for Depositing a Film on a Backside of a Substrate
App 20210108314A1 - | 2021-04-15 |
Plasma Etching Device With Plasma Etch Resistant Coating
App 20210110998A9 - | 2021-04-15 |
Fill process optimization using feature scale modeling
Grant 10977405 - | 2021-04-13 |
One-piece anode for tuning electroplating at an edge of a substrate
Grant 10975489 - | 2021-04-13 |
Substrate holder having integrated temperature measurement electrical devices
Grant 10978323 - | 2021-04-13 |
Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film
Grant 10978302 - | 2021-04-13 |
Thermal Atomic Layer Etch With Rapid Temperature Cycling
App 20210104414A1 - | 2021-04-08 |
Conditioning chamber component
Grant 10967407 - | 2021-04-06 |
High flow multi-way piston valve for deposition systems
Grant 10969036 - | 2021-04-06 |
Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal
Grant 10971388 - | 2021-04-06 |
Auto-calibrated process independent feedforward control for processing substrates
Grant 10971384 - | 2021-04-06 |
Mems-based Coriolis Mass Flow Controller
App 20210096011A1 - | 2021-04-01 |
Selective Processing With Etch Residue-based Inhibitors
App 20210098257A1 - | 2021-04-01 |
Capacitance Measurement Without Disconnecting From High Power Circuit
App 20210098233A1 - | 2021-04-01 |
Electrode for plasma processing chamber
Grant 10964514 - | 2021-03-30 |
Apparatus including metallized-ceramic tubes for radio-frequency and gas delivery
Grant 10964545 - | 2021-03-30 |
Carrier Plate For Use In Plasma Processing Systems
App 20210090936A1 - | 2021-03-25 |
Rf Current Measurement In Semiconductor Processing Tool
App 20210090962A1 - | 2021-03-25 |
Methods and apparatuses for electroplating nickel using sulfur-free nickel anodes
Grant 10954604 - | 2021-03-23 |
Apparatus and method for deposition and etch in gap fill
Grant 10957514 - | 2021-03-23 |
Long-life high-power terminals for substrate support with embedded heating elements
Grant 10957520 - | 2021-03-23 |
Gas delivery system
Grant 10957561 - | 2021-03-23 |
Image based plasma sheath profile detection on plasma processing tools
Grant 10957521 - | 2021-03-23 |
Dual-mode Autonomous Guided Vehicle
App 20210080968A1 - | 2021-03-18 |
Using modeling for identifying a location of a fault in an RF transmission system for a plasma system
Grant 10950421 - | 2021-03-16 |
Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method
Grant 10950454 - | 2021-03-16 |
Electrostatic chuck filter box and mounting bracket
Grant 10944374 - | 2021-03-09 |
Gas distributor and flow verifier
Grant 10943769 - | 2021-03-09 |
Rotary friction welded blank for PECVD heated showerhead
Grant 10941489 - | 2021-03-09 |
Methods and systems for advanced ion control for etching processes
Grant 10943789 - | 2021-03-09 |
Tunable upper plasma-exclusion-zone ring for a bevel etcher
Grant 10937634 - | 2021-03-02 |
Method To Clean Sno2 Film From Chamber
App 20210057208A1 - | 2021-02-25 |
Controlling plating electrolyte concentration on an electrochemical plating apparatus
Grant 10927475 - | 2021-02-23 |
Apparatus with optical cavity for determining process rate
Grant 10930478 - | 2021-02-23 |
Copper electrodeposition sequence for the filling of cobalt lined features
Grant 10930511 - | 2021-02-23 |
Connector For Substrate Support With Embedded Temperature Sensors
App 20210047732A1 - | 2021-02-18 |
Systems For Cooling Rf Heated Chamber Components
App 20210050188A1 - | 2021-02-18 |
Carrier plate for use in plasma processing systems
Grant 10923385 - | 2021-02-16 |
Articulated direct-mount inductor and associated systems and methods
Grant 10923322 - | 2021-02-16 |
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
Grant 10923340 - | 2021-02-16 |
Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure
Grant 10923379 - | 2021-02-16 |
Electrostatically clamped edge ring
Grant 10923380 - | 2021-02-16 |
Manifold Valve For Multiple Precursors
App 20210040611A1 - | 2021-02-11 |
Electrostatic Chuck (esc) Pedestal Voltage Isolation
App 20210043490A1 - | 2021-02-11 |
Monolithic gas distribution manifold and various construction techniques and use cases therefor
Grant 10914003 - | 2021-02-09 |
Active control of radial etch uniformity
Grant 10916409 - | 2021-02-09 |
Feature fill with multi-stage nucleation inhibition
Grant 10916434 - | 2021-02-09 |
Amorphous Carbon Layer Opening Process
App 20210035796A1 - | 2021-02-04 |
Optical Metrology In Machine Learning To Characterize Features
App 20210035833A1 - | 2021-02-04 |
Substrate support with improved process uniformity
Grant 10910195 - | 2021-02-02 |
Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power
Grant 10911081 - | 2021-02-02 |
Modifying Ferroelectric Properties Of Hafnium Oxide With Hafnium Nitride Layers
App 20210028273A1 - | 2021-01-28 |
Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity
Grant 10903050 - | 2021-01-26 |
Substrate processing chamber with showerhead having cooled faceplate
Grant 10900124 - | 2021-01-26 |
Halogen removal module and associated systems and methods
Grant 10903065 - | 2021-01-26 |
Asymmetric wafer bow compensation by chemical vapor deposition
Grant 10903070 - | 2021-01-26 |
Selective deposition of silicon oxide
Grant 10903071 - | 2021-01-26 |
Chamfer-less Via Integration Scheme
App 20210017643A1 - | 2021-01-21 |
In Situ Inverse Mask Patterning
App 20210020441A1 - | 2021-01-21 |
Capping Layer For A Hafnium Oxide-based Ferroelectric Material
App 20210020433A1 - | 2021-01-21 |
Maintenance mode power supply system
Grant 10896808 - | 2021-01-19 |
In-situ chamber clean end point detection systems and methods using computer vision systems
Grant 10895539 - | 2021-01-19 |
Asymmetric wafer bow compensation by physical vapor deposition
Grant 10896821 - | 2021-01-19 |
Ceramic foam for helium light-up suppression
Grant 10896837 - | 2021-01-19 |
Methods For Making Euv Patternable Hard Masks
App 20210013034A1 - | 2021-01-14 |
Electrostatic Chuck With Seal Surface
App 20210013080A1 - | 2021-01-14 |
Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods
Grant 10892179 - | 2021-01-12 |
Edge seal configurations for a lower electrode assembly
Grant 10892197 - | 2021-01-12 |
Atomic Layer Etching And Smoothing Of Refractory Metals And Other High Surface Binding Energy Materials
App 20210005425A1 - | 2021-01-07 |
Selective Deposition Using Hydrolysis
App 20210005460A1 - | 2021-01-07 |
Plasma Etching Chemistries Of High Aspect Ratio Features In Dielectrics
App 20210005472A1 - | 2021-01-07 |
Electrostatic Chucks With Coolant Gas Zones And Corresponding Groove And Monopolar Electrostatic Clamping Electrode Patterns
App 20210005494A1 - | 2021-01-07 |
Wafer Transport Assembly With Integrated Buffers
App 20210005485A1 - | 2021-01-07 |
Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing
Grant 10879044 - | 2020-12-29 |
Flow through line charge volume
Grant 10879048 - | 2020-12-29 |
Fault detection using showerhead voltage variation
Grant 10879092 - | 2020-12-29 |
Temperature controlled substrate support assembly
Grant 10879053 - | 2020-12-29 |
High Energy Atomic Layer Etching
App 20200402770A1 - | 2020-12-24 |
Self-limiting Growth
App 20200402846A1 - | 2020-12-24 |
Eliminating Yield Impact Of Stochastics In Lithography
App 20200402801A1 - | 2020-12-24 |
Controlling showerhead heating via resistive thermal measurements
Grant 10872747 - | 2020-12-22 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
Grant 10870922 - | 2020-12-22 |
Systems and methods for correcting non-uniformities in plasma processing of substrates
Grant 10872748 - | 2020-12-22 |
Apparatus for purging semiconductor process chamber slit valve opening
Grant 10872787 - | 2020-12-22 |
Replaceable And/or Collapsible Edge Ring Assemblies For Plasma Sheath Tuning Incorporating Edge Ring Positioning And Centering Features
App 20200395195A1 - | 2020-12-17 |
Three or more states for achieving high aspect ratio dielectric etch
Grant 10861708 - | 2020-12-08 |
Moving Substrate Transfer Chamber
App 20200381285A1 - | 2020-12-03 |
PECVD deposition system for deposition on selective side of the substrate
Grant 10851457 - | 2020-12-01 |
Connector for substrate support with embedded temperature sensors
Grant 10851458 - | 2020-12-01 |
Systems and methods for tuning an impedance matching network in a step-wise fashion
Grant 10853444 - | 2020-12-01 |
Edge ring assembly for improving feature profile tilting at extreme edge of wafer
Grant 10854492 - | 2020-12-01 |
System And Method For Edge Ring Wear Compensation
App 20200373193A1 - | 2020-11-26 |
Direct drive RF circuit for substrate processing systems
Grant 10847345 - | 2020-11-24 |
Conformality modulation of metal oxide films using chemical inhibition
Grant 10843618 - | 2020-11-24 |
Compensating chamber and process effects to improve critical dimension variation for trim process
Grant 10847352 - | 2020-11-24 |
Method of achieving high selectivity for high aspect ratio dielectric etch
Grant 10847377 - | 2020-11-24 |
Method of feature exaction from time-series of spectra to control endpoint of process
Grant 10847430 - | 2020-11-24 |
Selective atomic layer etching
Grant 10847375 - | 2020-11-24 |
Method for etching features in a stack
Grant 10847374 - | 2020-11-24 |
Substrate processing chamber including conical surface for reducing recirculation
Grant 10840061 - | 2020-11-17 |
Method to clean SnOfilm from chamber
Grant 10840082 - | 2020-11-17 |
Remote plasma based deposition of boron nitride, boron carbide, and boron carbonitride films
Grant 10840087 - | 2020-11-17 |
Surface Modified Depth Controlled Deposition For Plasma Based Deposition
App 20200357636A1 - | 2020-11-12 |
Lower plasma-exclusion-zone rings for a bevel etcher
Grant 10832923 - | 2020-11-10 |
Feedback control system for iterative etch process
Grant 10832979 - | 2020-11-10 |
Substrate support with increasing areal density and corresponding method of fabricating
Grant 10832936 - | 2020-11-10 |
| 