U.S. patent number D948,658 [Application Number D/745,033] was granted by the patent office on 2022-04-12 for high density hole pattern dual plenum hole showerhead assembly. This patent grant is currently assigned to LAM RESEARCH CORPORATION. The grantee listed for this patent is Lam Research Corporation. Invention is credited to Rachel E. Batzer, Aaron Durbin, Vivekanandan Krishnaswamy, Aaron Blake Miller.
United States Patent | D948,658 |
Miller , et al. | April 12, 2022 |
Inventors: | Miller; Aaron Blake (West Linn, OR), Batzer; Rachel E. (Tualatin, OR), Durbin; Aaron (Portland, OR), Krishnaswamy; Vivekanandan (Bangalore, IN) | ||||||||||
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Applicant: |
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Assignee: | LAM RESEARCH CORPORATION
(Fremont, CA) |
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Appl. No.: | D/745,033 | ||||||||||
Filed: | August 3, 2020 |
Current U.S. Class: | D23/200 |
Current International Class: | 2301 |
Field of Search: | ;D23/206-261 |
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