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Dynamic Generation Of Layout Adaptive Packaging
App 20210341849 - HOLLERBACH; Uwe ; et al. | 2021-11-04 |
Resolution enhanced digital lithography with anti-blazed DMD
Grant 10,983,441 - Laidig , et al. April 20, 2 | 2021-04-20 |
Freeform distortion correction
Grant 10,935,892 - Coskun , et al. March 2, 2 | 2021-03-02 |
Half tone scheme for maskless lithography
Grant 10,935,890 - Bencher , et al. March 2, 2 | 2021-03-02 |
Reserving spatial light modulator sections to address field non-uniformities
Grant 10,921,714 - Johnson , et al. February 16, 2 | 2021-02-16 |
Reserving Spatial Light Modulator Sections To Address Field Non-uniformities
App 20200301288 - JOHNSON; Joseph R. ; et al. | 2020-09-24 |
Half Tone Scheme For Maskless Lithography
App 20200264517 - BENCHER; Christopher Dennis ; et al. | 2020-08-20 |
Reserving spatial light modulator sections to address field non-uniformities
Grant 10,705,433 - Johnson , et al. | 2020-07-07 |
Dynamic generation of layout adaptive packaging
Grant 10,678,150 - Hollerbach , et al. | 2020-06-09 |
Dynamic Generation Of Layout Adaptive Packaging
App 20200159132 - HOLLERBACH; Uwe ; et al. | 2020-05-21 |
Shifting of patterns to reduce line waviness
Grant 10,591,815 - Johnson , et al. | 2020-03-17 |
Reserving Spatial Light Modulator Sections To Address Field Non-uniformities
App 20200073253 - JOHNSON; Joseph R. ; et al. | 2020-03-05 |
Half tone scheme for maskless lithography
Grant 10,571,809 - Bencher , et al. Feb | 2020-02-25 |
Shifting Of Patterns To Reduce Line Waviness
App 20200004132 - JOHNSON; Joseph R. ; et al. | 2020-01-02 |
Reserving spatial light modulator sections to address field non-uniformities
Grant 10,503,076 - Johnson , et al. Dec | 2019-12-10 |
Line edge roughness reduction via step size alteration
Grant 10,495,975 - Laidig , et al. De | 2019-12-03 |
Half tone scheme for maskless lithography
Grant 10,495,979 - Bencher , et al. De | 2019-12-03 |
Resolution Enhanced Digital Lithography With Anti-blazed Dmd
App 20190361353 - LAIDIG; Thomas L. ; et al. | 2019-11-28 |
Method to reduce data stream for spatial light modulator
Grant 10,488,762 - Johnson , et al. Nov | 2019-11-26 |
Method to reduce line waviness
Grant 10,416,550 - Johnson , et al. Sept | 2019-09-17 |
Real Time Software And Array Control
App 20190271916 - HOLLERBACH; Uwe ; et al. | 2019-09-05 |
Apparatus and methods for on-the-fly digital exposure image data modification
Grant 10,379,450 - Johnston , et al. A | 2019-08-13 |
Line Edge Roughness Reduction Via Step Size Alteration
App 20190243250 - LAIDIG; Thomas L. ; et al. | 2019-08-08 |
Resolution enhanced digital lithography with anti-blazed DMD
Grant 10,372,042 - Laidig , et al. | 2019-08-06 |
Real time software and array control
Grant 10,331,038 - Hollerbach , et al. | 2019-06-25 |
Line edge roughness reduction via step size alteration
Grant 10,289,003 - Laidig , et al. | 2019-05-14 |
Freeform Distortion Correction
App 20180329310 - COSKUN; Tamer ; et al. | 2018-11-15 |
Active eye-to-eye with alignment by X-Y capacitance measurement
Grant 10,114,297 - Laidig , et al. October 30, 2 | 2018-10-30 |
Method To Reduce Line Waviness
App 20180217491 - JOHNSON; Joseph R. ; et al. | 2018-08-02 |
Resolution Enhanced Digital Lithography With Anti-blazed Dmd
App 20180210346 - LAIDIG; Thomas L. ; et al. | 2018-07-26 |
Apparatus And Methods For On -the-fly Digital Exposure Image Data Modification
App 20180129142 - JOHNSTON; Benjamin M. ; et al. | 2018-05-10 |
Apparatus and methods for on-the-fly digital exposure image data modification
Grant 9,927,723 - Johnston , et al. March 27, 2 | 2018-03-27 |
Method to reduce line waviness
Grant 9,927,696 - Johnson , et al. March 27, 2 | 2018-03-27 |
Active Eye-to-eye With Alignment By X-y Capacitance Measurement
App 20180024436 - LAIDIG; Thomas L. ; et al. | 2018-01-25 |
Frustrated Cube Assembly
App 20180017781 - MARKLE; David ; et al. | 2018-01-18 |
Method To Reduce Line Waviness
App 20180004099 - JOHNSON; Joseph R. ; et al. | 2018-01-04 |
Correction of non-uniform patterns using time-shifted exposures
Grant 9,823,573 - Johnson , et al. November 21, 2 | 2017-11-21 |
Data tuning for fast computation and polygonal manipulation simplification
Grant 9,818,168 - Laidig November 14, 2 | 2017-11-14 |
Method to reduce line waviness
Grant 9,791,786 - Johnson , et al. October 17, 2 | 2017-10-17 |
Method To Reduce Line Waviness
App 20170293232 - JOHNSON; Joseph R. ; et al. | 2017-10-12 |
Line Edge Roughness Reduction Via Step Size Alteration
App 20170068163 - LAIDIG; Thomas L. ; et al. | 2017-03-09 |
Correction Of Non-uniform Patterns Using Time-shifted Exposures
App 20170003598 - JOHNSON; Joseph R. ; et al. | 2017-01-05 |
Real Time Software And Array Control
App 20160282849 - HOLLERBACH; Uwe ; et al. | 2016-09-29 |
Apparatus And Methods For On-the-fly Digital Exposure Image Data Modification
App 20160282728 - JOHNSTON; Benjamin M. ; et al. | 2016-09-29 |
Low-latency High Bandwidth Data Path
App 20160284044 - LAIDIG; Thomas L. ; et al. | 2016-09-29 |
Data Tuning For Fast Computation And Polygonal Manipulation Simplification
App 20160284045 - LAIDIG; Thomas L. | 2016-09-29 |
Optical proximity correction method for intermediate-pitch features using sub-resolution scattering bars on a mask
Grant 5,821,014 - Chen , et al. October 13, 1 | 1998-10-13 |
Method for generating proximity correction features for a lithographic mask pattern
Grant 5,663,893 - Wampler , et al. September 2, 1 | 1997-09-02 |
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