| Patent | Date |
|---|
Microfluidic Device for Processing and Aliquoting a Sample Liquid, Method and Controller for Operating a Microfluidic Device, and Microfluidic System for Carrying Out an Analysis of a Sample Liquid
App 20220305493 - Knapp; Michael ; et al. | 2022-09-29 |
Method for Obtaining a Breath Sample of a Test Person and Device
App 20210315483 - Laermer; Franz | 2021-10-14 |
Electrochemical sequencing of DNA using an edge electrode
Grant 11,131,646 - Johnson , et al. September 28, 2 | 2021-09-28 |
Process for Producing a Base of an Analysis Cell for Analyzing a Biochemical Material, and Analysis Cell
App 20210238029 - Laermer; Franz | 2021-08-05 |
Method for Producing a Sequencing Unit for Sequencing a Biochemical Material and Sequencing Unit
App 20210229982 - Laermer; Franz | 2021-07-29 |
Blood pressure and cardiac monitoring system and method thereof
Grant 11,051,705 - Yee , et al. July 6, 2 | 2021-07-06 |
Microfluidic Device and Method for the Nanostructure Sequencing of Nucleotide Strands
App 20210138465 - Laermer; Franz | 2021-05-13 |
Device and Method for Preparing Sample Material
App 20210114024 - Laermer; Franz ; et al. | 2021-04-22 |
Fluorophore multiplexing via PH modulation
Grant 10,948,413 - Fomina , et al. March 16, 2 | 2021-03-16 |
Integration of electrochemical pH modulation with lab on a chip technologies
Grant 10,843,192 - Fomina , et al. November 24, 2 | 2020-11-24 |
Mold Detecting Device Using Sensor To Measure Electrical Properties
App 20200209178 - YEE; Seow Yuen ; et al. | 2020-07-02 |
Mold Detecting Device Using Electromagnetic Waves
App 20200209137 - YEE; Seow Yuen ; et al. | 2020-07-02 |
Device For Detecting Mold
App 20200209136 - YEE; Seow Yuen ; et al. | 2020-07-02 |
Mold Detecting Device Using Sensor To Measure Ph Of A Surface
App 20200209161 - YEE; Seow Yuen ; et al. | 2020-07-02 |
Mold Detecting Device Using Pressure Waves
App 20200209138 - Yee; Seow Yuen ; et al. | 2020-07-02 |
System And Method For Operating A Mold Detecting Device
App 20200209266 - YEE; Seow Yuen ; et al. | 2020-07-02 |
Device for anisotropically etching a substrate, and method for operating a device for anisotropically etching a substrate
Grant 10,497,543 - Laermer De | 2019-12-03 |
Method for masking a surface comprising silicon oxide
Grant 10,490,403 - Laermer Nov | 2019-11-26 |
Fluorophore Multiplexing Via Ph Modulation
App 20190195796 - Fomina; Nadezda ; et al. | 2019-06-27 |
Method and device for producing a microfluidic analysis cartridge
Grant 10,295,441 - Laermer , et al. | 2019-05-21 |
Electrochemical Sequencing Of Dna Using An Edge Electrode
App 20190137435 - Johnson; Christopher ; et al. | 2019-05-09 |
Integration Of Electrochecmical Ph Modulation With Lab On A Chip Technologies
App 20180318834 - Fomina; Nadezda ; et al. | 2018-11-08 |
Method and device for preparing a sample of biological material containing target cells and accompanying cells for extracting nucleic acids of the target cells
Grant 10,072,258 - Faltin , et al. September 11, 2 | 2018-09-11 |
MEMS structure with graphene component
Grant 10,053,358 - Yama , et al. August 21, 2 | 2018-08-21 |
Blood Pressure and Cardiac Monitoring System and Method Thereof
App 20180192888 - Yee; Seow Yuen ; et al. | 2018-07-12 |
Blood Pressure and Cardiac Monitoring System and Method Thereof
App 20180092533 - Yee; Seow Yuen ; et al. | 2018-04-05 |
MEMS Structure with Graphene Component
App 20180057351 - Yama; Gary ; et al. | 2018-03-01 |
Device for Anisotropically Etching a Substrate, and Method for Operating a Device for Anisotropically Etching a Substrate
App 20170221732 - Laermer; Franz | 2017-08-03 |
Normally closed valve for microfluidic components of a polymeric layer system and method
Grant 9,664,304 - Laermer , et al. May 30, 2 | 2017-05-30 |
Electronic sensor apparatus for detecting chemical or biological species, microfluidic apparatus comprising such a sensor apparatus, and method for producing the sensor apparatus and method for producing the microfluidic apparatus
Grant 9,515,159 - Bischopink , et al. December 6, 2 | 2016-12-06 |
Analysis Unit for Carrying Out a Polymerase Chain Reaction, Analysis Device, Method for Operating such an Analysis Unit, and Method for Producing such an Analysis Unit
App 20160251698 - Laermer; Franz ; et al. | 2016-09-01 |
Method and Device for Processing a Sample of Biological Material Containing Target Cells and Companion Cells in Order to Extract Nucleic Acids of the Target Cells
App 20160186167 - Faltin; Bernd ; et al. | 2016-06-30 |
Method and Device for Preparing a Sample of Biological Material Containing Target Cells and Accompanying Cells for Extracting Nucleic Acids of the Target Cells
App 20160177291 - Faltin; Bernd ; et al. | 2016-06-23 |
Method and device for controlling a drive unit of a vehicle
Grant 9,358,985 - Pitzal , et al. June 7, 2 | 2016-06-07 |
Method for Masking a Surface Comprising Silicon Oxide
App 20160035570 - Laermer; Franz | 2016-02-04 |
Micro-dosing pump having a rotatable valve disk driven by a magnetized actuator disk
Grant 9,194,388 - Laermer , et al. November 24, 2 | 2015-11-24 |
Method for manufacturing at least one mechanical-electrical energy conversion system
Grant 9,032,608 - Laermer , et al. May 19, 2 | 2015-05-19 |
Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
Grant 8,986,256 - Scholten , et al. March 24, 2 | 2015-03-24 |
Microphone Assembly Having At Least Two Mems Microphone Components
App 20150035094 - LAERMER; Franz ; et al. | 2015-02-05 |
Method for etching a layer on a silicon semiconductor substrate
Grant 8,946,090 - Becker , et al. February 3, 2 | 2015-02-03 |
Component having a micromechanical microphone structure, and method for operating such a microphone component
Grant 8,885,849 - Arias-Drake , et al. November 11, 2 | 2014-11-11 |
Method and Device for Producing a Microfluidic Analysis Cartridge
App 20140322100 - Laermer; Franz ; et al. | 2014-10-30 |
Microphone component and method for operating same
Grant 8,861,765 - Buck , et al. October 14, 2 | 2014-10-14 |
component having a micromechanical microphone structure
App 20140291786 - Zoellin; Jochen ; et al. | 2014-10-02 |
Normally Closed Valve for Microfluidic Components of a Polymeric Layer System and Method
App 20140291558 - Laermer; Franz ; et al. | 2014-10-02 |
Electronic Sensor Apparatus For Detecting Chemical Or Biological Species, Microfluidic Apparatus Comprising Such A Sensor Apparatus, And Method For Producing The Sensor Apparatus And Method For Producing The Microfluidic Apparatus
App 20140077315 - Bischopink; Georg ; et al. | 2014-03-20 |
Piezoelectric generator
Grant 8,671,746 - Laermer , et al. March 18, 2 | 2014-03-18 |
Component having a micromechanical microphone structure, and method for its production
Grant 8,637,945 - Reichenbach , et al. January 28, 2 | 2014-01-28 |
Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
Grant 8,629,011 - Diamond , et al. January 14, 2 | 2014-01-14 |
Method for manufacturing a micropump and micropump
Grant 8,607,450 - Cassemeyer , et al. December 17, 2 | 2013-12-17 |
Microneedles to be placed in the skin for the transdermal application of pharmaceuticals
Grant 8,506,530 - Laermer , et al. August 13, 2 | 2013-08-13 |
Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination
Grant 8,501,516 - Laermer , et al. August 6, 2 | 2013-08-06 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
Grant 8,492,850 - Lammel , et al. July 23, 2 | 2013-07-23 |
Micro-dosing Pump And Method For Producing A Micro-dosing Pump
App 20130183170 - Laermer; Franz | 2013-07-18 |
Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom
Grant 8,466,042 - Laermer , et al. June 18, 2 | 2013-06-18 |
Method For Producing A Capping Wafer For A Sensor
App 20130061674 - REICHENBACH; Frank ; et al. | 2013-03-14 |
Device and method for producing chlorine trifluoride and system for etching semiconductor substrates using this device
Grant 8,382,940 - Laermer February 26, 2 | 2013-02-26 |
Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof
Grant 8,377,315 - Scholten , et al. February 19, 2 | 2013-02-19 |
Method for producing porous microneedles and their use
Grant 8,354,033 - Scholten , et al. January 15, 2 | 2013-01-15 |
Epitaxial Silicon Cmos-mems Microphones And Method For Manufacturing
App 20120319219 - Diamond; Brett M. ; et al. | 2012-12-20 |
Method for detecting the state of a tire
Grant 8,332,092 - Laermer , et al. December 11, 2 | 2012-12-11 |
Method for producing a capping wafer for a sensor
Grant 8,329,555 - Reichenbach , et al. December 11, 2 | 2012-12-11 |
Method For Manufacturing A Semiconductor Structure, And A Corresponding Semiconductor Structure
App 20120132925 - Lammel; Gerhard ; et al. | 2012-05-31 |
Method for etching a layer on a substrate
Grant 8,182,707 - Laermer , et al. May 22, 2 | 2012-05-22 |
Microstructure component
Grant 8,164,174 - Laermer April 24, 2 | 2012-04-24 |
Component Having A Micromechanical Microphone Structure, And Method For Its Production
App 20120091544 - Reichenbach; Frank ; et al. | 2012-04-19 |
Bending transducer device for generating electrical energy from deformations and circuit module
Grant 8,154,174 - Laermer , et al. April 10, 2 | 2012-04-10 |
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure
Grant 8,148,234 - Lammel , et al. April 3, 2 | 2012-04-03 |
Microphone Component And Method For Operating Same
App 20120076339 - Buck; Thomas ; et al. | 2012-03-29 |
Component Having A Micromechanical Microphone Structure, And Method For Operating Such A Microphone Component
App 20120057721 - Arias-Drake; Alberto ; et al. | 2012-03-08 |
Method For Producing Micromechanical Patterns Having A Relief-like Sidewall Outline Shape Or An Adjustable Angle Of Inclination
App 20120018779 - Laermer; Franz ; et al. | 2012-01-26 |
Hypodermic Needle
App 20110306930 - Moersch; Gilbert ; et al. | 2011-12-15 |
Piezoelectric Generator
App 20110296906 - Laermer; Franz ; et al. | 2011-12-08 |
Method For Manufacturing Porous Microstructures, Porous Microstructures Manufactured According To This Method, And The Use Thereof
App 20110281102 - Scholten; Dick ; et al. | 2011-11-17 |
Bending transducer for generating electrical energy from mechanical deformations
Grant 8,040,023 - Laermer , et al. October 18, 2 | 2011-10-18 |
Method For Manufacturing At Least One Mechanical-electrical Energy Conversion System, And Mechanical-electrical Energy Conversion System
App 20110248604 - Laermer; Franz ; et al. | 2011-10-13 |
Method For Manufacturing Separated Micromechanical Components Situated On A Silicon Substrate And Components Manufactured Therefrom
App 20110163398 - Laermer; Franz ; et al. | 2011-07-07 |
Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
App 20110137254 - Scholten; Dick ; et al. | 2011-06-09 |
Microelectromechanical systems encapsulation process
Grant 7,898,046 - Ulm , et al. March 1, 2 | 2011-03-01 |
Method For Manufacturing A Micropump And Micropump
App 20110034873 - Cassemeyer; Julia ; et al. | 2011-02-10 |
Method for producing a capping wafer for a sensor
App 20110012248 - Reichenbach; Frank ; et al. | 2011-01-20 |
Layer system comprising a silicon layer and a passivation layer, method for production a passivation layer on a silicon layer and the use of said system and method
Grant 7,872,333 - Laermer , et al. January 18, 2 | 2011-01-18 |
Plasma system and method for anisotropically etching structures into a substrate
Grant 7,855,150 - Laermer , et al. December 21, 2 | 2010-12-21 |
Micromechanical component and corresponding method for its manufacture
Grant 7,834,409 - Reichenbach , et al. November 16, 2 | 2010-11-16 |
Device and method for etching a substrate using an inductively coupled plasma
Grant 7,811,941 - Becker , et al. October 12, 2 | 2010-10-12 |
Method of etching structures into an etching body using a plasma
Grant 7,785,486 - Urban , et al. August 31, 2 | 2010-08-31 |
Method For Etching A Layer On A Silicon Semiconductor Substrate
App 20100203739 - Becker; Volker ; et al. | 2010-08-12 |
Micromechanical Component Having An Anti-adhesive Layer
App 20100127339 - Laermer; Franz ; et al. | 2010-05-27 |
Structural element having a porous region at least regionally provided with a cover layer and its use as well as method for setting the thermal conductivity of a porous region
Grant 7,709,933 - Artmann , et al. May 4, 2 | 2010-05-04 |
Bending Transducer For Generating Electrical Energy From Mechanical Deformations
App 20100033060 - Laermer; Franz ; et al. | 2010-02-11 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
App 20100035068 - Lammel; Gerhard ; et al. | 2010-02-11 |
Plasma etching equipment
Grant 7,648,611 - Laermer , et al. January 19, 2 | 2010-01-19 |
Bending transducer device for generating electrical energy from deformations and circuit module
App 20100007246 - Laermer; Franz ; et al. | 2010-01-14 |
Method for Treating a Material Having Nanoscale Pores
App 20100009077 - Laermer; Franz ; et al. | 2010-01-14 |
Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof
Grant 7,642,545 - Urban , et al. January 5, 2 | 2010-01-05 |
Microelectromechanical Systems Encapsulation Process
App 20090278214 - Ulm; Markus ; et al. | 2009-11-12 |
Method for Manufacturing a Semiconductor Structure, and a Corresponding Semiconductor Structure
App 20090236610 - Lammel; Gerhard ; et al. | 2009-09-24 |
Microelectromechanical systems encapsulation process with anti-stiction coating
Grant 7,582,514 - Vancura , et al. September 1, 2 | 2009-09-01 |
Method for Detecting the State of a Tire
App 20090210111 - Laermer; Franz ; et al. | 2009-08-20 |
Method for Producing Porous Microneedles and their Use
App 20090200262 - Scholten; Dick ; et al. | 2009-08-13 |
Microelectromechanical systems encapsulation process
Grant 7,563,633 - Ulm , et al. July 21, 2 | 2009-07-21 |
Method and Device for Controlling a Drive Unit of a Vehicle
App 20090171524 - Pitzal; Volker ; et al. | 2009-07-02 |
Microstructured component and method for its manufacture
Grant 7,531,229 - Gomez , et al. May 12, 2 | 2009-05-12 |
Micromechanical component and corresponding method for its manufacture
App 20090026561 - Reichenbach; Frank ; et al. | 2009-01-29 |
Method for Etching a Layer on a Substrate
App 20080311751 - Laermer; Franz ; et al. | 2008-12-18 |
SOI component comprising margins for separation
Grant 7,398,588 - Stoll , et al. July 15, 2 | 2008-07-15 |
Microneedles to be placed in the skin for the transdermal application of pharhmaceuticals
App 20080167601 - Laermer; Franz ; et al. | 2008-07-10 |
Micromechanical component having a monolithically integrated circuit and method for manufacturing a component
App 20080093690 - Reichenbach; Frank ; et al. | 2008-04-24 |
Method for etching structures in an etching body by means of a plasma
Grant 7,361,287 - Laermer April 22, 2 | 2008-04-22 |
Device for storing and transporting microneedles and a method for delivering active substances with the aid of such a device
App 20080051723 - Laermer; Franz ; et al. | 2008-02-28 |
Microelectromechanical Systems Encapsulation Process with Anti-Stiction Coating
App 20080050861 - Vancura; Cyril ; et al. | 2008-02-28 |
Microelectromechanical systems encapsulation process
App 20080050845 - Ulm; Markus ; et al. | 2008-02-28 |
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device
Grant 7,321,156 - Fischer , et al. January 22, 2 | 2008-01-22 |
Micromechanical component and method for producing same
Grant 7,312,553 - Laermer December 25, 2 | 2007-12-25 |
Device and method for anisotropic plasma etching of a substrate, particularly a silicon element
Grant 7,288,485 - Breitschwerdt , et al. October 30, 2 | 2007-10-30 |
Device and method for anisotropic plasma etching of a substrate, a silicon body in particular
Grant 7,285,228 - Laermer , et al. October 23, 2 | 2007-10-23 |
Apparatus for noninvasive blood pressure measurement
App 20070142730 - Laermer; Franz ; et al. | 2007-06-21 |
Method for removing defects from silicon bodies by a selective etching process
Grant 7,201,852 - Spitz , et al. April 10, 2 | 2007-04-10 |
Methods for plasma etching of silicon
Grant 7,166,536 - Laermer , et al. January 23, 2 | 2007-01-23 |
Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate
Grant 7,149,070 - Breitschwerdt , et al. December 12, 2 | 2006-12-12 |
Device and method for etching a substrate by using an inductively coupled plasma
Grant 7,094,706 - Breitschwerdt , et al. August 22, 2 | 2006-08-22 |
Soi component comprising margins for separation
App 20060154448 - Stoll; Oliver ; et al. | 2006-07-13 |
Plasma system and method for anisotropically etching structures into a substrate
App 20060141794 - Laermer; Franz ; et al. | 2006-06-29 |
Method for processing silicon using etching processes
Grant 7,052,623 - Becker , et al. May 30, 2 | 2006-05-30 |
Layer system comprising a silicon layer and a passivation layer, method for production a passivation layer on a silicon layer and the use of said system and method
App 20060108576 - Laermer; Franz ; et al. | 2006-05-25 |
Layer system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof
App 20060068510 - Urban; Andrea ; et al. | 2006-03-30 |
Device and method for the production of chlorotriflouride and system for etching semiconductor substrates using said device
App 20060006057 - Laermer; Franz | 2006-01-12 |
Method and device for providing a semiconductor etching end point and for detecting the end point
Grant 6,974,709 - Breitschwerdt , et al. December 13, 2 | 2005-12-13 |
Method for producing integrated microsystems
Grant 6,960,536 - Frey , et al. November 1, 2 | 2005-11-01 |
Plasma etching method having pulsed substrate electrode power
Grant 6,926,844 - Laermer , et al. August 9, 2 | 2005-08-09 |
Device and method for determining the lateral undercut of a structured surface layer
Grant 6,911,348 - Becker , et al. June 28, 2 | 2005-06-28 |
Device and method for anisotropically plasma etching of a substrate, particularly a silicon body
App 20050126710 - Laermer, Franz ; et al. | 2005-06-16 |
Device and method for etching a substrate using an inductively coupled plasma
Grant 6,899,817 - Becker , et al. May 31, 2 | 2005-05-31 |
Retaining device, especially for fixing a semiconductor wafer in a plasma etching device, and method for supply heat to or discharging heat from a substrate
App 20050083634 - Breitschwerdt, Kalus ; et al. | 2005-04-21 |
Method of avoiding or eliminating deposits in the exhaust area of a vacuum system
Grant 6,874,511 - Kutsch , et al. April 5, 2 | 2005-04-05 |
Micromechanical component and method for producing same
App 20050052092 - Laermer, Franz | 2005-03-10 |
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device
App 20050029607 - Fischer, Frank ; et al. | 2005-02-10 |
Structural element having a porous region and its use as well as method for setting the thermal conductivity of a porous region
App 20040188808 - Artmann, Hans ; et al. | 2004-09-30 |
Method for etching structures in an etching body by means of a plasma
App 20040173571 - Laermer, Franz | 2004-09-09 |
Device and method for etching a substrate by using an inductively coupled plasma
App 20040149388 - Breitschwerdt, Klaus ; et al. | 2004-08-05 |
Device and method for anisotropic plasma etching of a substrate, particularly a silicon element
App 20040134615 - Breitschwerdt, Klaus ; et al. | 2004-07-15 |
Method of etching structures into an etching body using a plasma
App 20040124177 - Urban, Andrea ; et al. | 2004-07-01 |
Method for producing integrated microsystems
App 20040127008 - Frey, Wilhelm ; et al. | 2004-07-01 |
Microstructure component
App 20040112937 - Laermer, Franz | 2004-06-17 |
Microstructured component and method for its manufacture
App 20040081809 - Gomez, Udo-Martin ; et al. | 2004-04-29 |
Electrochemical etching cell
Grant 6,726,815 - Artmann , et al. April 27, 2 | 2004-04-27 |
Device And Method For The High-frequency Etching Of A Substrate Using A Plasma Etching Installation And Device And Method For Igniting A Plasma And For Pulsing The Plasma Out Put Or Adjusting The Same Upwards
Grant 6,720,273 - Becker , et al. April 13, 2 | 2004-04-13 |
Method for anisotropic plasma etching of semiconductors
Grant 6,720,268 - Laermer , et al. April 13, 2 | 2004-04-13 |
Device and method for etching a substrate by using an inductively coupled plasma
Grant 6,709,546 - Breitschwerdt , et al. March 23, 2 | 2004-03-23 |
Plasma etching equipment
App 20040014325 - Laermer, Franz ; et al. | 2004-01-22 |
Method for manufacturing breakaway layers for detaching deposited layer systems
Grant 6,677,249 - Laermer , et al. January 13, 2 | 2004-01-13 |
Method for etching a semiconductor element, its use for etching end point detection and a device for carrying it out
App 20030224539 - Breitschwerdt, Klaus ; et al. | 2003-12-04 |
Method for the production of a field-effect structure
Grant 6,645,800 - Frey , et al. November 11, 2 | 2003-11-11 |
Integrated detonating or firing element, and use thereof
App 20030183109 - Rudhard, Joachim ; et al. | 2003-10-02 |
Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate
Grant 6,592,664 - Frey , et al. July 15, 2 | 2003-07-15 |
Micromechanical component and method of manufacturing a micromechanical component
App 20030104648 - Rudhard, Joachim ; et al. | 2003-06-05 |
Method of manufacturing micromechanical surface structures by vapor-phase etching
Grant 6,558,559 - Becker , et al. May 6, 2 | 2003-05-06 |
Method of anisotropic etching of silicon
Grant 6,531,068 - Laermer , et al. March 11, 2 | 2003-03-11 |
Method for the production of a field-effect structure and field-effect structure
App 20030045040 - Frey, Wilhelm ; et al. | 2003-03-06 |
Method of avoiding or eliminating deposits in the exhaust area of a vacuum system
App 20030019506 - Kutsch, Bernd ; et al. | 2003-01-30 |
Plasma etching system
App 20020179015 - Laermer, Franz ; et al. | 2002-12-05 |
Method Of Anisotropic Etching Of Silicon
App 20020144974 - LAERMER, FRANZ ; et al. | 2002-10-10 |
Sensor element
Grant 6,462,566 - Schoefthaler , et al. October 8, 2 | 2002-10-08 |
Device and method for etching a substrate by using an inductively coupled plasma
App 20020046987 - Breitschwerdt, Klaus ; et al. | 2002-04-25 |
Method of producing a radiation sensor
Grant 6,372,656 - Laermer , et al. April 16, 2 | 2002-04-16 |
Method for applying a protecting lacquer on a wafer
Grant 6,340,644 - Becker , et al. January 22, 2 | 2002-01-22 |
Method For Manufacturing Breakaway Layers For Detaching Deposited Laye
App 20010055881 - LAERMER, FRANZ ; et al. | 2001-12-27 |
Anisotropic, fluorine-based plasma etching method for silicon
Grant 6,303,512 - Laermer , et al. October 16, 2 | 2001-10-16 |
Method for anisotropic etching of silicon
Grant 6,284,148 - Laermer , et al. September 4, 2 | 2001-09-04 |
Method and apparatus for anisotropic etching of substrates
Grant 6,214,161 - Becker , et al. April 10, 2 | 2001-04-10 |
Method for detecting the transition between different materials in semiconductor structures
Grant 6,200,822 - Becker , et al. March 13, 2 | 2001-03-13 |
Process for anisotropic plasma etching of different substrates
Grant 6,127,273 - Laermer , et al. October 3, 2 | 2000-10-03 |
Method for manufacturing a rate-of-rotation sensor
Grant 6,117,701 - Buchan , et al. September 12, 2 | 2000-09-12 |
Process for making micromechanical structures
Grant 6,008,138 - Laermer , et al. December 28, 1 | 1999-12-28 |
Acceleration sensing device
Grant 5,996,409 - Funk , et al. December 7, 1 | 1999-12-07 |
Sensor and method for manufacturing a sensor
Grant 5,756,901 - Kurle , et al. May 26, 1 | 1998-05-26 |
Method of manufacturing sensor
Grant 5,616,523 - Benz , et al. April 1, 1 | 1997-04-01 |
Method of producing micromechanical structures
Grant 5,595,940 - Trah , et al. January 21, 1 | 1997-01-21 |
Force sensor and a method for manufacturing a force sensor
Grant 5,553,506 - Benz , et al. September 10, 1 | 1996-09-10 |
Method for manufacturing micro-mechanical components using selective anodization of silicon
Grant 5,542,558 - Benz , et al. August 6, 1 | 1996-08-06 |
Method of anisotropically etching silicon
Grant 5,501,893 - Laermer , et al. March 26, 1 | 1996-03-26 |
Method for anisotropic plasma etching of substrates
Grant 5,498,312 - Laermer , et al. March 12, 1 | 1996-03-12 |
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