| Patent | Date |
|---|
Method for manufacturing display device
Grant 10,297,797 - Kitano , et al. | 2019-05-21 |
Method For Manufacturing Display Device
App 20180261803 - Kitano; Naomu ; et al. | 2018-09-13 |
Electronic component manufacturing method and electrode structure
Grant 9,437,702 - Matsuo , et al. September 6, 2 | 2016-09-06 |
Electronic Component Manufacturing Method And Electrode Structure
App 20140319676 - MATSUO; Akira ; et al. | 2014-10-30 |
Electronic component manufacturing method including step of embedding metal film
Grant 8,835,296 - Wakayanagi , et al. September 16, 2 | 2014-09-16 |
Metal nitride film, semiconductor device using the metal nitride film, and manufacturing method of semiconductor device
Grant 8,786,031 - Nakagawa , et al. July 22, 2 | 2014-07-22 |
Semiconductor device and manufacturing method thereof
Grant 8,669,624 - Kitano , et al. March 11, 2 | 2014-03-11 |
Semiconductor Device And Manufacturing Method Thereof
App 20130285158 - Kitano; Naomu ; et al. | 2013-10-31 |
Methods for manufacturing dielectric films
Grant 8,524,617 - Nakagawa , et al. September 3, 2 | 2013-09-03 |
Method and apparatus for manufacturing semiconductor device
Grant 8,481,382 - Kitano , et al. July 9, 2 | 2013-07-09 |
Semiconductor device and method of manufacturing the same
Grant 8,415,753 - Nakagawa , et al. April 9, 2 | 2013-04-09 |
Method And Apparatus For Manufacturing Semiconductor Device
App 20130071975 - KITANO; Naomu ; et al. | 2013-03-21 |
Nonvolatile storage element and manufacturing method thereof
Grant 8,324,608 - Nakagawa , et al. December 4, 2 | 2012-12-04 |
Method of manufacturing hafnium-containing and silicon-containing metal oxynitride dielectric film
Grant 8,288,234 - Seino , et al. October 16, 2 | 2012-10-16 |
Nonvolatile Storage Element And Manufacturing Method Thereof
App 20120248397 - Nakagawa; Takashi ; et al. | 2012-10-04 |
Semiconductor Device And Method Of Manufacturing The Same
App 20120199919 - Nakagawa; Takashi ; et al. | 2012-08-09 |
Dielectric film manufacturing method
Grant 8,232,189 - Ono , et al. July 31, 2 | 2012-07-31 |
Electronic Component Manufacturing Method Including Step Of Embedding Metal Film
App 20120161322 - Wakayanagi; Shunichi ; et al. | 2012-06-28 |
Dielectric film with hafnium aluminum oxynitride film
Grant 8,178,934 - Kitano , et al. May 15, 2 | 2012-05-15 |
Method for forming dielectric films
Grant 8,148,275 - Fukuchi , et al. April 3, 2 | 2012-04-03 |
Semiconductor Device And Method Of Manufacturing The Same
App 20120043617 - Nakagawa; Takashi ; et al. | 2012-02-23 |
Methods For Manufacturing Dielectric Films
App 20120021612 - Nakagawa; Takashi ; et al. | 2012-01-26 |
Semiconductor manufacturing apparatus and method
Grant 8,088,678 - Kitano , et al. January 3, 2 | 2012-01-03 |
Substrate Processing Method And Substrate Processing Apparatus
App 20110312179 - Nakagawa; Takashi ; et al. | 2011-12-22 |
Dielectric film and semiconductor device using dielectric film including hafnium, aluminum or silicon, nitrogen, and oxygen
Grant 8,053,311 - Nakagawa , et al. November 8, 2 | 2011-11-08 |
Dielectric film and semiconductor device using dielectric film including hafnium, aluminum or silicon, nitrogen, and oxygen
Grant 8,030,694 - Nakagawa , et al. October 4, 2 | 2011-10-04 |
Semiconductor element and manufacturing method thereof
Grant 8,026,143 - Kitano , et al. September 27, 2 | 2011-09-27 |
Process for forming dielectric films
Grant 8,012,822 - Kitano , et al. September 6, 2 | 2011-09-06 |
Metal Nitride Film, Semiconductor Device Using The Metal Nitride Film, And Manufacturing Method Of Semiconductor Device
App 20110210405 - Nakagawa; Takashi ; et al. | 2011-09-01 |
Dielectric Film Manufacturing Method
App 20110156128 - ONO; Junko ; et al. | 2011-06-30 |
Method of forming dielectric films
Grant 7,923,360 - Kitagawa , et al. April 12, 2 | 2011-04-12 |
Dielectric Film With Metallic Oxynitride
App 20110064642 - Kitano; Naomu ; et al. | 2011-03-17 |
Dielectric Film, Method Of Manufacutring Semiconductor Device Using Dielectric Film, And Semiconductor Manufacturing Apparatus
App 20110027979 - Seino; Takuya ; et al. | 2011-02-03 |
Method of manufacturing dielectric film that has hafnium-containing and aluminum-containing oxynitride
Grant 7,867,847 - Kitano , et al. January 11, 2 | 2011-01-11 |
Dielectric Film And Semiconductor Device Using Dielectric Film
App 20100330813 - Nakagawa; Takashi ; et al. | 2010-12-30 |
Sputtering film forming method, electronic device manufacturing method, and sputtering system
Grant 7,857,946 - Kitano , et al. December 28, 2 | 2010-12-28 |
Dielectric Film And Semiconductor Device Using Dielectric Film
App 20100244192 - Nakagawa; Takashi ; et al. | 2010-09-30 |
Method Of Manufacturing Dielectric Film
App 20100221885 - Kitano; Naomu ; et al. | 2010-09-02 |
Sputtering Method And Sputtering Apparatus
App 20100133092 - Mashimo; Kimiko ; et al. | 2010-06-03 |
Semiconductor Manufacturing Apparatus And Method
App 20100120238 - Kitano; Naomu ; et al. | 2010-05-13 |
Method for depositing a metal gate on a high-k dielectric film
Grant 7,655,549 - Sunil , et al. February 2, 2 | 2010-02-02 |
Substrate Treating System For Depositing A Metal Gate On A High-k Dielectric Film And Improving High-k Dielectric Film And Metal Gate Interface
App 20090178621 - Sunil; Wickramanayaka ; et al. | 2009-07-16 |
Semiconductor Element And Manufacturing Method Thereof
App 20090170300 - Kitano; Naomu ; et al. | 2009-07-02 |
Process For Forming Dielectric Films
App 20090170341 - Kitano; Naomu ; et al. | 2009-07-02 |
Method For Forming Dielectric Films
App 20090170344 - Fukuchi; Yusuke ; et al. | 2009-07-02 |
Method Of Forming Dielectric Films
App 20090170340 - Kitagawa; Hideo ; et al. | 2009-07-02 |
Semiconductor Element And Manufacturing Method Thereof
App 20080305597 - Kitano; Naomu ; et al. | 2008-12-11 |
Sputtering Film Forming Method, Electronic Device Manufacturing Method, And Sputtering System
App 20080264775 - Kitano; Naomu ; et al. | 2008-10-30 |
Method for depositing a metal gate on a high-k dielectric film and improving high-k dielectric film and metal gate interface, and a substrate treating system
App 20060194396 - Sunil; Wickramanayaka ; et al. | 2006-08-31 |
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