Kedlaya; Diwakar N.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kedlaya; Diwakar N..The latest application filed is for "methods for modifying photoresist profiles and tuning critical diimensions".

Company Profile

10.6.11

Kedlaya; Diwakar N. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods for modifying photoresist profiles and tuning critical dimensions Grant 11,456,173 - Gupta , et al. September 27, 2	2022-09-27
Film formation via pulsed RF plasma Grant 11,443,919 - Nittala , et al. September 13, 2	2022-09-13
Precursor delivery system and methods related thereto Grant 11,009,455 - Huang , et al. May 18, 2	2021-05-18
Methods For Modifying Photoresist Profiles And Tuning Critical Diimensions App 20200321210 - GUPTA; Meenakshi ; et al.	2020-10-08
Lid Assembly Apparatus And Methods For Substrate Processing Chambers App 20200291522 - PANAVALAPPIL KUMARANKUTTY; Hanish Kumar ; et al.	2020-09-17
Method Of Processing A Substrate App 20200266064 - NARAYANAN; Rajaram ; et al.	2020-08-20
Film Formation Via Pulsed Rf Plasma App 20200258720 - A1	2020-08-13
Heated Pedestal Design For Improved Heat Transfer And Temperature Uniformity App 20200234932 - PARIMI; Venkata Sharat Chandra ; et al.	2020-07-23
Methods For Forming Films Containing Silicon Boron With Low Leakage Current App 20200211834 - YANG; Chuanxi ; et al.	2020-07-02
Precursor Delivery System And Methods Related Thereto App 20200041407 - HUANG; Zubin ; et al.	2020-02-06
Cvd Based Spacer Deposition With Zero Loading App 20200043722 - CHENG; Rui ; et al.	2020-02-06
Fiber array line generator Grant 10,537,965 - Holmgren , et al. Ja	2020-01-21
Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials Grant 10,373,823 - Srinivasan , et al.	2019-08-06
Rotating substrate laser anneal Grant 10,256,005 - Ranish , et al.	2019-04-09
Deployment Of Light Energy Within Specific Spectral Bands In Specific Sequences For Deposition, Treatment And Removal Of Materials App 20180350595 - SRINIVASAN; Swaminathan T. ; et al.	2018-12-06
Rotating Substrate Laser Anneal App 20170032865 - RANISH; Joseph M. ; et al.	2017-02-02
Fiber Array Line Generator App 20150165551 - HOLMGREN; Douglas E. ; et al.	2015-06-18

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