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Image processing apparatus, control method for the same, and storage medium Grant 8,711,265 - Kawamura , et al. April 29, 2 | 2014-04-29 |
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Fabrication method of a semiconductor device and a semiconductor device Grant 8,124,523 - Kawamura , et al. February 28, 2 | 2012-02-28 |
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Substrate for electronic device capable of suppressing fluorine atoms exposed at the surface of insulating film from reacting with water and method for processing same Grant 7,776,736 - Kobayashi , et al. August 17, 2 | 2010-08-17 |
Information processing apparatus that stores a plurality of image data items having different data-formats and communicates with an external apparatus via a network, and method therefor Grant 7,765,466 - Kawamura July 27, 2 | 2010-07-27 |
Gas switching mechanism for plasma processing apparatus Grant 7,717,061 - Ishizaka , et al. May 18, 2 | 2010-05-18 |
Film Forming Method For A Semiconductor App 20100117204 - Matsuoka; Takaaki ;   et al. | 2010-05-13 |
Interlayer Insulation Film, Interconnect Structure, And Methods Of Manufacturing Them App 20100101834 - Ohmi; Tadahiro ;   et al. | 2010-04-29 |
Semiconductor device, method for manufacturing semiconductor device and gas for plasma CVD Grant 7,704,893 - Kobayashi , et al. April 27, 2 | 2010-04-27 |
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Amorphous Carbon Film, Semiconductor Device, Film Forming Method, Film Forming Apparatus And Storage Medium App 20100032838 - Kikuchi; Yoshiyuki ;   et al. | 2010-02-11 |
Fabrication Method Of A Semiconductor Device And A Semiconductor Device App 20100025856 - Kawamura; Kohei ;   et al. | 2010-02-04 |
Modacrylic shrinkable fiber and method for manufacturing the same Grant 7,612,000 - Nishida , et al. November 3, 2 | 2009-11-03 |
Image Processing Apparatus, Control Method For The Same, And Storage Medium App 20090268076 - Kawamura; Kohei ;   et al. | 2009-10-29 |
Method for forming insulation film and apparatus for forming insulation film Grant 7,601,402 - Kashiwagi , et al. October 13, 2 | 2009-10-13 |
Film Forming Method And Film Forming Apparatus App 20090061092 - Kameshima; Takatoshi ;   et al. | 2009-03-05 |
Plasma processing method for forming a film and an electronic component manufactured by the method App 20090026588 - Miyatani; Kotaro ;   et al. | 2009-01-29 |
Film forming method for a semiconductor App 20090029066 - Matsuoka; Takaaki ;   et al. | 2009-01-29 |
Pile Fabric With Height Difference and Method for Manufacturing the Same App 20070298210 - Kawamura; Kohei ;   et al. | 2007-12-27 |
Method for supercritical carbon dioxide processing of fluoro-carbon films Grant 7,307,019 - Kawamura , et al. December 11, 2 | 2007-12-11 |
Modacrylic Shrinkable Fiber and Method for Manufacturing The Same App 20070243377 - Nishida; Sohei ;   et al. | 2007-10-18 |
Processing method App 20070160757 - Ishizaka; Tadahiro ;   et al. | 2007-07-12 |
Acrylic shrinkable fiber App 20070155901 - Kawamura; Kohei ;   et al. | 2007-07-05 |
Plasma process device and plasma process method App 20070131171 - Takatsuki; Koichi ;   et al. | 2007-06-14 |
Acrylic shrinkable fiber and method for production thereof App 20070098982 - Nishida; Sohei ;   et al. | 2007-05-03 |
Step pile fabric and process for producing the same App 20070074353 - Kuroda; Minoru ;   et al. | 2007-04-05 |
Plasma processing method and plasma processing apparatus App 20070077737 - Kobayashi; Yasuo ;   et al. | 2007-04-05 |
Process for producing regenerated collagen fiber and process for setting the same Grant 7,186,806 - Ueda , et al. March 6, 2 | 2007-03-06 |
Semiconductor device, method for manufacturing semiconductor device and gas for plasma cvd App 20060264059 - Kobayashi; Yasuo ;   et al. | 2006-11-23 |
Plasma film-forming method and plasma film-forming apparatus App 20060251828 - Kobayashi; Yasuo ;   et al. | 2006-11-09 |
Processing Manipulation Utilizing Graphical User Interface App 20060238819 - KAWAMURA; KOHEI | 2006-10-26 |
Method for forming film, method for manufacturing semiconductor device, semiconductor device and substrate treatment system App 20060223306 - Kawamura; Kohei ;   et al. | 2006-10-05 |
A Method For Supercritical Carbon Dioxide Processing Of Fluoro-carbon Films App 20060068583 - Kawamura; Kohei ;   et al. | 2006-03-30 |
Thin-film formation in semiconductor device fabrication process and film deposition apparatus App 20060068104 - Ishizaka; Tadahiro ;   et al. | 2006-03-30 |
Processing apparatus and processing method App 20060027167 - Ishizaka; Tadahiro ;   et al. | 2006-02-09 |
Semiconductor device and fabrication method therefor Grant 6,949,829 - Akahori , et al. September 27, 2 | 2005-09-27 |
Information processing system, apparatus and method, storage medium storing a program, which implements the method, in form readable by the information processing apparatus, and the program App 20050002590 - Kawamura, Kohei | 2005-01-06 |
Processing apparatus App 20040250765 - Ishizaka, Tadahiro ;   et al. | 2004-12-16 |
Method for forming insulation film and apparatus for forming insulation film App 20040212114 - Kashiwagi, Yusaku ;   et al. | 2004-10-28 |
Plasma processing device and plasma processing method App 20040127033 - Takatsuki, Koichi ;   et al. | 2004-07-01 |
Substrate treatment device, substrate treatment method, and cleaning method for substrate treatment device App 20040081757 - Ishizaka, Tadahiro ;   et al. | 2004-04-29 |
Process for producing regenrated collagen fiber and process for setting the same App 20040073010 - Ueda, Takashi ;   et al. | 2004-04-15 |
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Plasma processing method in semiconductor processing system Grant 5,958,258 - Ishihara , et al. September 28, 1 | 1999-09-28 |
Plasma film forming method and apparatus and plasma processing apparatus Grant 5,531,834 - Ishizuka , et al. July 2, 1 | 1996-07-02 |
Plasma processing apparatus using vertical gas inlets one on top of another Grant 5,522,934 - Suzuki , et al. June 4, 1 | 1996-06-04 |
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Method and apparatus for processing surface of semiconductor layer Grant 5,308,791 - Horiike , et al. May 3, 1 | 1994-05-03 |
Method of forming dielectric film for semiconductor devices Grant 5,290,609 - Horiike , et al. March 1, 1 | 1994-03-01 |
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Ion generator Grant 5,101,110 - Matsudo , et al. March 31, 1 | 1992-03-31 |
Electron beam excitation ion source Grant 5,089,747 - Koshiishi , et al. February 18, 1 | 1992-02-18 |
Electron beam excited ion source Grant 5,083,061 - Koshiishi , et al. January 21, 1 | 1992-01-21 |
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