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Plasma processing method and etching apparatus
Grant 11,217,454 - Shinoda , et al. January 4, 2 | 2022-01-04 |
Plasma Etching Method And Plasma Processing Apparatus
App 20210358760 - FUJISAKI; Sumiko ; et al. | 2021-11-18 |
Plasma Processing Method And Etching Apparatus
App 20210242030 - SHINODA; Kazunori ; et al. | 2021-08-05 |
Frozen Gyoza And Method For Producing Same
App 20210112817 - HIRAE; Shogo ; et al. | 2021-04-22 |
Plasma etching method and plasma etching apparatus
Grant 10,872,779 - Miyoshi , et al. December 22, 2 | 2020-12-22 |
Integrated type ion shield for semiconductor manufacturing apparatus
Grant D901,407 - Kouzuma , et al. November 10, 2 | 2020-11-10 |
Ion shield plate for semiconductor manufacturing apparatus
Grant D900,760 - Kouzuma , et al. November 3, 2 | 2020-11-03 |
Plasma Etching Method And Plasma Etching Apparatus
App 20200006079 - MIYOSHI; Nobuya ; et al. | 2020-01-02 |
Etching method and etching apparatus
Grant 10,418,254 - Shinoda , et al. Sept | 2019-09-17 |
Placing bed structure, treating apparatus using the structure, and method for using the apparatus
Grant 10,388,557 - Kawamura , et al. A | 2019-08-20 |
Soup Base
App 20190183157 - HIRAE; Shogo ; et al. | 2019-06-20 |
Etching Method And Etching Apparatus
App 20190067032 - SHINODA; Kazunori ; et al. | 2019-02-28 |
Fiber For Artificial Hair And Hair Ornament Product Including Same
App 20180343945 - Yorizane; Mika ; et al. | 2018-12-06 |
Film Forming Method, Semiconductor Device Manufacturing Method, And Semiconductor Device
App 20170092588 - Miyatani; Kotaro ; et al. | 2017-03-30 |
Polyester-based fiber for artificial hair and hair ornament product including the same, and method for producing the same
Grant 9,560,891 - Higami , et al. February 7, 2 | 2017-02-07 |
Method For Forming Insulating Film And Method For Manufacturing Semiconductor Device
App 20160240374 - KASAI; Shigeru ; et al. | 2016-08-18 |
Polyester-based fiber for artificial hair and hair ornament product including the same
Grant 9,315,922 - Hashimoto , et al. April 19, 2 | 2016-04-19 |
Fiber For Artificial Hair And Hair Ornament Product Including Same
App 20160088888 - Yorizane; Mika ; et al. | 2016-03-31 |
Placing Bed Structure, Treating Apparatus Using The Structure, And Method For Using The Apparatus
App 20160020135 - KAWAMURA; Kohei ; et al. | 2016-01-21 |
Placing bed structure, treating apparatus using the structure, and method for using the apparatus
Grant 9,177,846 - Kawamura , et al. November 3, 2 | 2015-11-03 |
Polyester-based Fiber For Artificial Hair And Hair Ornament Product Including The Same
App 20150141559 - Hashimoto; Tomomichi ; et al. | 2015-05-21 |
Polyester-based Fiber For Artificial Hair And Hair Ornament Product Including The Same, And Method For Producing The Same
App 20150126644 - Higami; Tomokazu ; et al. | 2015-05-07 |
Image processing apparatus, control method for the same, and storage medium
Grant 8,711,265 - Kawamura , et al. April 29, 2 | 2014-04-29 |
Film forming method for a semiconductor
Grant 8,435,882 - Matsuoka , et al. May 7, 2 | 2013-05-07 |
Plasma process device and plasma process method
Grant 8,394,231 - Takatsuki , et al. March 12, 2 | 2013-03-12 |
Film forming method for a semiconductor
Grant 8,197,913 - Matsuoka , et al. June 12, 2 | 2012-06-12 |
Fabrication method of a semiconductor device and a semiconductor device
Grant 8,124,523 - Kawamura , et al. February 28, 2 | 2012-02-28 |
Plasma processing method for forming a film and an electronic component manufactured by the method
Grant 8,021,975 - Miyatani , et al. September 20, 2 | 2011-09-20 |
Plasma processing method and plasma processing apparatus
Grant 8,017,197 - Kobayashi , et al. September 13, 2 | 2011-09-13 |
Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same
Grant 7,923,819 - Ohmi , et al. April 12, 2 | 2011-04-12 |
Film forming method and film forming apparatus
Grant 7,897,205 - Kameshima , et al. March 1, 2 | 2011-03-01 |
Placing Bed Structure, Treating Apparatus Using The Structure, And Method For Using The Apparatus
App 20100264115 - Kawamura; Kohei ; et al. | 2010-10-21 |
Substrate for electronic device capable of suppressing fluorine atoms exposed at the surface of insulating film from reacting with water and method for processing same
Grant 7,776,736 - Kobayashi , et al. August 17, 2 | 2010-08-17 |
Information processing apparatus that stores a plurality of image data items having different data-formats and communicates with an external apparatus via a network, and method therefor
Grant 7,765,466 - Kawamura July 27, 2 | 2010-07-27 |
Gas switching mechanism for plasma processing apparatus
Grant 7,717,061 - Ishizaka , et al. May 18, 2 | 2010-05-18 |
Film Forming Method For A Semiconductor
App 20100117204 - Matsuoka; Takaaki ; et al. | 2010-05-13 |
Interlayer Insulation Film, Interconnect Structure, And Methods Of Manufacturing Them
App 20100101834 - Ohmi; Tadahiro ; et al. | 2010-04-29 |
Semiconductor device, method for manufacturing semiconductor device and gas for plasma CVD
Grant 7,704,893 - Kobayashi , et al. April 27, 2 | 2010-04-27 |
Interlayer Insulating Film, Wiring Structure And Electronic Device And Methods Of Manufacturing The Same
App 20100032844 - Ohmi; Tadahiro ; et al. | 2010-02-11 |
Amorphous Carbon Film, Semiconductor Device, Film Forming Method, Film Forming Apparatus And Storage Medium
App 20100032838 - Kikuchi; Yoshiyuki ; et al. | 2010-02-11 |
Fabrication Method Of A Semiconductor Device And A Semiconductor Device
App 20100025856 - Kawamura; Kohei ; et al. | 2010-02-04 |
Modacrylic shrinkable fiber and method for manufacturing the same
Grant 7,612,000 - Nishida , et al. November 3, 2 | 2009-11-03 |
Image Processing Apparatus, Control Method For The Same, And Storage Medium
App 20090268076 - Kawamura; Kohei ; et al. | 2009-10-29 |
Method for forming insulation film and apparatus for forming insulation film
Grant 7,601,402 - Kashiwagi , et al. October 13, 2 | 2009-10-13 |
Film Forming Method And Film Forming Apparatus
App 20090061092 - Kameshima; Takatoshi ; et al. | 2009-03-05 |
Plasma processing method for forming a film and an electronic component manufactured by the method
App 20090026588 - Miyatani; Kotaro ; et al. | 2009-01-29 |
Film forming method for a semiconductor
App 20090029066 - Matsuoka; Takaaki ; et al. | 2009-01-29 |
Pile Fabric With Height Difference and Method for Manufacturing the Same
App 20070298210 - Kawamura; Kohei ; et al. | 2007-12-27 |
Method for supercritical carbon dioxide processing of fluoro-carbon films
Grant 7,307,019 - Kawamura , et al. December 11, 2 | 2007-12-11 |
Modacrylic Shrinkable Fiber and Method for Manufacturing The Same
App 20070243377 - Nishida; Sohei ; et al. | 2007-10-18 |
Processing method
App 20070160757 - Ishizaka; Tadahiro ; et al. | 2007-07-12 |
Acrylic shrinkable fiber
App 20070155901 - Kawamura; Kohei ; et al. | 2007-07-05 |
Plasma process device and plasma process method
App 20070131171 - Takatsuki; Koichi ; et al. | 2007-06-14 |
Acrylic shrinkable fiber and method for production thereof
App 20070098982 - Nishida; Sohei ; et al. | 2007-05-03 |
Step pile fabric and process for producing the same
App 20070074353 - Kuroda; Minoru ; et al. | 2007-04-05 |
Plasma processing method and plasma processing apparatus
App 20070077737 - Kobayashi; Yasuo ; et al. | 2007-04-05 |
Process for producing regenerated collagen fiber and process for setting the same
Grant 7,186,806 - Ueda , et al. March 6, 2 | 2007-03-06 |
Semiconductor device, method for manufacturing semiconductor device and gas for plasma cvd
App 20060264059 - Kobayashi; Yasuo ; et al. | 2006-11-23 |
Plasma film-forming method and plasma film-forming apparatus
App 20060251828 - Kobayashi; Yasuo ; et al. | 2006-11-09 |
Processing Manipulation Utilizing Graphical User Interface
App 20060238819 - KAWAMURA; KOHEI | 2006-10-26 |
Method for forming film, method for manufacturing semiconductor device, semiconductor device and substrate treatment system
App 20060223306 - Kawamura; Kohei ; et al. | 2006-10-05 |
A Method For Supercritical Carbon Dioxide Processing Of Fluoro-carbon Films
App 20060068583 - Kawamura; Kohei ; et al. | 2006-03-30 |
Thin-film formation in semiconductor device fabrication process and film deposition apparatus
App 20060068104 - Ishizaka; Tadahiro ; et al. | 2006-03-30 |
Processing apparatus and processing method
App 20060027167 - Ishizaka; Tadahiro ; et al. | 2006-02-09 |
Semiconductor device and fabrication method therefor
Grant 6,949,829 - Akahori , et al. September 27, 2 | 2005-09-27 |
Information processing system, apparatus and method, storage medium storing a program, which implements the method, in form readable by the information processing apparatus, and the program
App 20050002590 - Kawamura, Kohei | 2005-01-06 |
Processing apparatus
App 20040250765 - Ishizaka, Tadahiro ; et al. | 2004-12-16 |
Method for forming insulation film and apparatus for forming insulation film
App 20040212114 - Kashiwagi, Yusaku ; et al. | 2004-10-28 |
Plasma processing device and plasma processing method
App 20040127033 - Takatsuki, Koichi ; et al. | 2004-07-01 |
Substrate treatment device, substrate treatment method, and cleaning method for substrate treatment device
App 20040081757 - Ishizaka, Tadahiro ; et al. | 2004-04-29 |
Process for producing regenrated collagen fiber and process for setting the same
App 20040073010 - Ueda, Takashi ; et al. | 2004-04-15 |
Semiconductor device and fabrication method therefor
App 20040041266 - Akahori, Takashi ; et al. | 2004-03-04 |
Plasma processing method in semiconductor processing system
Grant 5,958,258 - Ishihara , et al. September 28, 1 | 1999-09-28 |
Plasma film forming method and apparatus and plasma processing apparatus
Grant 5,531,834 - Ishizuka , et al. July 2, 1 | 1996-07-02 |
Plasma processing apparatus using vertical gas inlets one on top of another
Grant 5,522,934 - Suzuki , et al. June 4, 1 | 1996-06-04 |
Etching apparatus and method therefor
Grant 5,476,182 - Ishizuka , et al. December 19, 1 | 1995-12-19 |
Method and apparatus for processing surface of semiconductor layer
Grant 5,308,791 - Horiike , et al. May 3, 1 | 1994-05-03 |
Method of forming dielectric film for semiconductor devices
Grant 5,290,609 - Horiike , et al. March 1, 1 | 1994-03-01 |
Plasma processing apparatus
Grant 5,252,892 - Koshiishi , et al. * October 12, 1 | 1993-10-12 |
Ion generator
Grant 5,101,110 - Matsudo , et al. March 31, 1 | 1992-03-31 |
Electron beam excitation ion source
Grant 5,089,747 - Koshiishi , et al. February 18, 1 | 1992-02-18 |
Electron beam excited ion source
Grant 5,083,061 - Koshiishi , et al. January 21, 1 | 1992-01-21 |
Electron beam excitation ion source
Grant 5,028,791 - Koshiishi , et al. July 2, 1 | 1991-07-02 |
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