Kaim; Robert

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kaim; Robert.The latest application filed is for "carbon materials for carbon implantation".

Company Profile

2.34.39

Kaim; Robert - Brookline MA
- unknown

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Silicon implantation in substrates and provision of silicon precursor compositions therefor Grant 11,062,906 - Tang , et al. July 13, 2	2021-07-13
Carbon Materials For Carbon Implantation App 20200051819 - SWEENEY; Joseph D. ; et al.	2020-02-13
Carbon materials for carbon implantation Grant 10,497,569 - Sweeney , et al. De	2019-12-03
Energy harvesting power-assist system and method for light vehicles Grant 10479443 -	2019-11-19
Ion source cleaning in semiconductor processing systems Grant 9,991,095 - Sweeney , et al. June 5, 2	2018-06-05
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System App 20170330756 - Kaim; Robert ; et al.	2017-11-16
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Grant 9,754,786 - Kaim , et al. September 5, 2	2017-09-05
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 9,685,304 - Kaim , et al. June 20, 2	2017-06-20
Carbon Materials For Carbon Implantation App 20170069499 - Sweeney; Joseph D. ; et al.	2017-03-09
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Grant 9,455,147 - Olander , et al. September 27, 2	2016-09-27
Silicon Implantation In Substrates And Provision Of Silicon Precursor Compositions Therefor App 20160211137 - Tang; Ying ; et al.	2016-07-21
Medium current ribbon beam for ion implantation Grant 9,269,528 - Kaim , et al. February 23, 2	2016-02-23
Enriched Silicon Precursor Compositions And Apparatus And Processes For Utilizing Same App 20160046849 - Mayer; James J. ; et al.	2016-02-18
Fluid Storage And Dispensing System Including Dynamic Fluid Monitoring Of Fluid Storage And Dispensing Vessel App 20160041136 - Dietz; James ; et al.	2016-02-11
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20160013018 - Kaim; Robert ; et al.	2016-01-14
Ion Implantation System And Method App 20150357152 - Jones; Edward E. ; et al.	2015-12-10
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel Grant 9,170,246 - Dietz , et al. October 27, 2	2015-10-27
Enriched silicon precursor compositions and apparatus and processes for utilizing same Grant 9,171,725 - Mayer , et al. October 27, 2	2015-10-27
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 9,142,387 - Kaim , et al. September 22, 2	2015-09-22
Ion implantation system and method Grant 9,111,860 - Jones , et al. August 18, 2	2015-08-18
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System App 20150228486 - Kaim; Robert ; et al.	2015-08-13
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Grant 9,012,874 - Kaim , et al. April 21, 2	2015-04-21
Medium Current Ribbon Beam For Ion Implantation App 20150102233 - KAIM; Robert ; et al.	2015-04-16
Ion Implantation System And Method App 20140342538 - Jones; Edward E. ; et al.	2014-11-20
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System App 20140326896 - Kaim; Robert ; et al.	2014-11-06
Enriched Silicon Precursor Compositions And Apparatus And Processes For Utilizing Same App 20140322903 - Mayer; James J. ; et al.	2014-10-30
Ion implantation system and method Grant 8,796,131 - Jones , et al. August 5, 2	2014-08-05
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Grant 8,785,889 - Kaim , et al. July 22, 2	2014-07-22
Enriched silicon precursor compositions and apparatus and processes for utilizing same Grant 8,779,383 - Mayer , et al. July 15, 2	2014-07-15
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20140090598 - Kaim; Robert ; et al.	2014-04-03
Fluid Storage And Dispensing System Including Dynamic Fluid Monitoring Of Fluid Storage And Dispensing Vessel App 20140041440 - DIETZ; James ; et al.	2014-02-13
Cleaning of semiconductor processing systems Grant 8,603,252 - Dimeo , et al. December 10, 2	2013-12-10
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,598,022 - Kaim , et al. December 3, 2	2013-12-03
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel Grant 8,555,705 - Dietz , et al. October 15, 2	2013-10-15
Enriched Silicon Precursor Compositions And Apparatus And Processes For Utilizing Same App 20130264492 - Mayer; James J. ; et al.	2013-10-10
Ion Implanter System Including Remote Dopant Source, And Method Comprising Same App 20130251913 - Olander; W. Karl ; et al.	2013-09-26
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System App 20130206788 - Kaim; Robert ; et al.	2013-08-15
Boron Ion Implantation Using Alternative Fluorinated Boron Precursors, And Formation Of Large Boron Hydrides For Implantation App 20130137250 - Olander; W. Karl ; et al.	2013-05-30
Carbon Materials For Carbon Implantation App 20130078790 - Sweeney; Joseph D. ; et al.	2013-03-28
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Grant 8,399,865 - Kaim , et al. March 19, 2	2013-03-19
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Grant 8,389,068 - Olander , et al. March 5, 2	2013-03-05
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System App 20120313047 - Kaim; Robert ; et al.	2012-12-13
Ion Implantation System And Method App 20120252195 - Jones; Edward E. ; et al.	2012-10-04
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Grant 8,237,134 - Kaim , et al. August 7, 2	2012-08-07
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System App 20120142174 - KAIM; Robert ; et al.	2012-06-07
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20120108044 - Kaim; Robert ; et al.	2012-05-03
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,138,071 - Kaim , et al. March 20, 2	2012-03-20
Ion Source Cleaning In Semiconductor Processing Systems App 20120058252 - Sweeney; Joseph D. ; et al.	2012-03-08
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,062,965 - Kaim , et al. November 22, 2	2011-11-22
Ion Source Cleaning In Semiconductor Processing Systems App 20110259366 - Sweeney; Joseph D. ; et al.	2011-10-27
Fluid Storage And Dispensing System Including Dynamic Fluid Monitoring Of Fluid Storage And Dispensing Vessel App 20110252883 - Dietz; James ; et al.	2011-10-20
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20110159671 - KAIM; Robert ; et al.	2011-06-30
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel Grant 7,966,879 - Dietz , et al. June 28, 2	2011-06-28
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Grant 7,943,204 - Olander , et al. May 17, 2	2011-05-17
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20110097882 - Kaim; Robert ; et al.	2011-04-28
Boron Ion Implantation Using Alternative Fluorinated Boron Precursors, And Formation Of Large Boron Hydrides For Implantation App 20110065268 - Olander; W. Karl ; et al.	2011-03-17
Carbon Materials For Carbon Implantation App 20110021011 - SWEENEY; Joseph D. ; et al.	2011-01-27
Methods for cleaning ion implanter components Grant 7,819,981 - DiMeo, Jr. , et al. October 26, 2	2010-10-26
Cleaning Of Semiconductor Processing Systems App 20100154835 - Dimeo; Frank ; et al.	2010-06-24
Method Of Forming Ultra-shallow Junctions For Semiconductor Devices App 20100112795 - KAIM; Robert ; et al.	2010-05-06
Novel Methods For Cleaning Ion Implanter Components App 20090095713 - Dimeo, Jr.; Frank ; et al.	2009-04-16
Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel App 20080280380 - Dietz; James ; et al.	2008-11-13
Boron Ion Implantation Using Alternative Fluorinated Boron Precursors, and Formation of Large Boron Hydrides for Implanation App 20080248636 - Olander; W. Karl ; et al.	2008-10-09
Delivery of Low Pressure Dopant Gas to a High Voltage Ion Source App 20080220596 - Olander; W. Karl ; et al.	2008-09-11
Novel methods for cleaning ion implanter components App 20060086376 - Dimeo; Frank JR. ; et al.	2006-04-27
Titanium nitride and multilayers formed by chemical vapor deposition of titanium halides Grant 5,595,784 - Kaim , et al. January 21, 1	1997-01-21

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