| Patent | Date |
|---|
EUV mask blank absorber defect reduction
Grant 11,454,876 - Varghese , et al. September 27, 2 | 2022-09-27 |
Surface Topography Measurement Apparatus And Method
App 20220283100 - Li; Weimin ; et al. | 2022-09-08 |
Surface topography measurement apparatus and method
Grant 11,422,096 - Li , et al. August 23, 2 | 2022-08-23 |
Extreme Ultraviolet Mask Blank Structure
App 20220252971 - Liu; Shuwei ; et al. | 2022-08-11 |
Extreme Ultraviolet Mask Absorber Materials
App 20220236634 - Liu; Shuwei ; et al. | 2022-07-28 |
System and method to control PVD deposition uniformity
Grant 11,390,940 - Xiao , et al. July 19, 2 | 2022-07-19 |
Graded Interface In Bragg Reflector
App 20220221786 - Xiao; Wen ; et al. | 2022-07-14 |
Extreme Ultraviolet Mask Absorber Materials
App 20220221783 - Liu; Shiyu ; et al. | 2022-07-14 |
EUV mask blanks and methods of manufacture
Grant 11,385,536 - Xiao , et al. July 12, 2 | 2022-07-12 |
Multicathode deposition system
Grant 11,387,085 - Bhat , et al. July 12, 2 | 2022-07-12 |
Multi-Chamber Substrate Processing Platform
App 20220197128 - Gautam; Ribhu ; et al. | 2022-06-23 |
System and method to measure refractive index at specific wavelengths
Grant 11,366,059 - Xiao , et al. June 21, 2 | 2022-06-21 |
Extreme ultraviolet mask with embedded absorber layer
Grant 11,366,379 - Xiao , et al. June 21, 2 | 2022-06-21 |
Physical vapor deposition chamber cleaning processes
Grant 11,365,475 - Jindal , et al. June 21, 2 | 2022-06-21 |
Method And Apparatus To Anneal Euv Mask Blank
App 20220187697 - Yoong; Herng Yau ; et al. | 2022-06-16 |
Method And Apparatus To Improve Euv Mask Blank Flatness
App 20220187698 - Jindal; Vibhu ; et al. | 2022-06-16 |
EUV Mask Blank Absorber Defect Reduction
App 20220187696 - Varghese; Binni ; et al. | 2022-06-16 |
Process Kit Conditioning Chamber
App 20220189749 - Gautam; Ribhu ; et al. | 2022-06-16 |
Surface Topography Measurement Apparatus And Method
App 20220170866 - Li; Weimin ; et al. | 2022-06-02 |
Extreme Ultraviolet Mask Blank With Alloy Absorber And Method Of Manufacture
App 20220163882 - Jindal; Vibhu | 2022-05-26 |
Graded interface in bragg reflector
Grant 11,327,394 - Xiao , et al. May 10, 2 | 2022-05-10 |
Extreme ultraviolet mask absorber materials
Grant 11,300,871 - Liu , et al. April 12, 2 | 2022-04-12 |
Extreme ultraviolet mask absorber materials
Grant 11,300,872 - Liu , et al. April 12, 2 | 2022-04-12 |
Deposition System With A Multi-cathode
App 20220106679 - Jindal; Vibhu ; et al. | 2022-04-07 |
Physical Vapor Deposition System And Processes
App 20220107558 - Jindal; Vibhu ; et al. | 2022-04-07 |
Extreme Ultraviolet Mask Absorber Materials
App 20220107556 - Liu; Shuwei ; et al. | 2022-04-07 |
Extreme Ultraviolet Mask Blank With Multilayer Absorber And Method Of Manufacture
App 20220082925 - Jindal; Vibhu | 2022-03-17 |
Extreme ultraviolet mask absorber matertals
Grant 11,275,303 - Liu , et al. March 15, 2 | 2022-03-15 |
Extreme ultraviolet mask absorber materials
Grant 11,275,302 - Liu , et al. March 15, 2 | 2022-03-15 |
Extreme ultraviolet mask absorber matertals
Grant 11,275,304 - Liu , et al. March 15, 2 | 2022-03-15 |
Extreme ultraviolet mask blank defect reduction
Grant 11,275,300 - Abhinand , et al. March 15, 2 | 2022-03-15 |
Extreme ultraviolet mask absorber materials
Grant 11,249,389 - Liu , et al. February 15, 2 | 2022-02-15 |
Extreme ultraviolet mask absorber materials
Grant 11,249,388 - Liu , et al. February 15, 2 | 2022-02-15 |
Extreme ultraviolet mask absorber materials
Grant 11,249,390 - Liu , et al. February 15, 2 | 2022-02-15 |
Extreme ultraviolet mask with backside coating
Grant 11,249,386 - Jindal , et al. February 15, 2 | 2022-02-15 |
Deposition system with shield mount
Grant 11,236,415 - Jindal , et al. February 1, 2 | 2022-02-01 |
Physical vapor deposition system and processes
Grant 11,237,473 - Jindal , et al. February 1, 2 | 2022-02-01 |
Deposition system with a multi-cathode
Grant 11,230,761 - Jindal , et al. January 25, 2 | 2022-01-25 |
Extreme Ultraviolet Mask Absorber Materials
App 20220011663 - Liu; Shuwei ; et al. | 2022-01-13 |
Ta--Cu alloy material for extreme ultraviolet mask absorber
Grant 11,209,727 - Liu , et al. December 28, 2 | 2021-12-28 |
System and Method of Measuring Refractive Index of EUV Mask Absorber
App 20210382398 - Xiao; Wen ; et al. | 2021-12-09 |
System and Method to Measure Refractive Index at Specific Wavelengths
App 20210381967 - Xiao; Wen ; et al. | 2021-12-09 |
Extreme ultraviolet mask absorber and processes for manufacture
Grant 11,194,244 - Liu , et al. December 7, 2 | 2021-12-07 |
Extreme Ultraviolet Mask Absorber Materials
App 20210341828 - Liu; Shiyu ; et al. | 2021-11-04 |
Extreme Ultraviolet Mask Blank Defect Reduction
App 20210333703 - Xiao; Wen ; et al. | 2021-10-28 |
Extreme Ultraviolet Mask Absorber Materials
App 20210325771 - Liu; Shuwei ; et al. | 2021-10-21 |
Extreme Ultraviolet Mask Absorber Materials
App 20210302826 - Liu; Shuwei ; et al. | 2021-09-30 |
Physical Vapor Deposition Processing Systems Target Cooling
App 20210272785 - Bhat; Sanjay ; et al. | 2021-09-02 |
Extreme Ultraviolet Mask Absorber Materials
App 20210232042 - Liu; Shuwei ; et al. | 2021-07-29 |
Extreme Ultraviolet Mask Blank Hard Mask Materials
App 20210232040 - Liu; Shuwei ; et al. | 2021-07-29 |
Extreme Ultraviolet Mask Blank Hard Mask Materials
App 20210232041 - Liu; Shuwei ; et al. | 2021-07-29 |
Extreme Ultraviolet Mask Absorber Materials
App 20210232039 - Liu; Shuwei ; et al. | 2021-07-29 |
Physical vapor deposition processing systems target cooling
Grant 11,037,769 - Bhat , et al. June 15, 2 | 2021-06-15 |
Reticle Processing System
App 20210173295 - Bhat; Sanjay ; et al. | 2021-06-10 |
Multicathode Deposition System And Methods
App 20210172054 - Bhat; Sanjay ; et al. | 2021-06-10 |
Extreme ultraviolet mask blank with multilayer absorber and method of manufacture
Grant 11,022,876 - Jindal June 1, 2 | 2021-06-01 |
Extreme Ultraviolet Mask Blank Defect Reduction Methods
App 20210124253 - Yoong; Herng Yau ; et al. | 2021-04-29 |
Extreme Ultraviolet Mask Blank With Alloy Absorber And Method Of Manufacture
App 20210124256 - Jindal; Vibhu | 2021-04-29 |
Extreme Ultraviolet Mask Blank Defect Reduction Methods
App 20210124252 - Xiao; Wen ; et al. | 2021-04-29 |
EUV Mask Blanks And Methods Of Manufacture
App 20210041781 - Xiao; Wen ; et al. | 2021-02-11 |
Physical Vapor Deposition Chamber Cleaning Processes
App 20210032742 - Jindal; Vibhu ; et al. | 2021-02-04 |
Extreme ultraviolet mask blank with alloy absorber and method of manufacture
Grant 10,877,368 - Jindal December 29, 2 | 2020-12-29 |
Extreme Ultraviolet Mask With Embedded Absorber Layer
App 20200371431 - Xiao; Wen ; et al. | 2020-11-26 |
Extreme Ultraviolet Mask Absorber Materials
App 20200371422 - Liu; Shuwei ; et al. | 2020-11-26 |
Extreme Ultraviolet Mask Absorber Materials
App 20200371423 - Liu; Shuwei ; et al. | 2020-11-26 |
Extreme Ultraviolet Mask Absorber Materials
App 20200371424 - Liu; Shuwei ; et al. | 2020-11-26 |
Extreme Ultraviolet Mask Absorber Materials
App 20200371428 - Liu; Shuwei ; et al. | 2020-11-26 |
Extreme Ultraviolet Mask Absorber Materials
App 20200371430 - Liu; Shuwei ; et al. | 2020-11-26 |
Extreme Ultraviolet Mask Absorber Materials
App 20200371429 - Liu; Shuwei ; et al. | 2020-11-26 |
Extreme Ultraviolet Mask Absorber Materials
App 20200371427 - Liu; Shuwei ; et al. | 2020-11-26 |
System And Method To Control PVD Deposition Uniformity
App 20200335331 - Xiao; Wen ; et al. | 2020-10-22 |
System And Method To Control PVD Deposition Uniformity
App 20200332412 - Xiao; Wen ; et al. | 2020-10-22 |
Graded Interface In Bragg Reflector
App 20200333700 - Xiao; Wen ; et al. | 2020-10-22 |
Extreme Ultraviolet Mask Blank With Multilayer Absorber And Method Of Manufacture
App 20200278603 - Xiao; Wen ; et al. | 2020-09-03 |
Physical Vapor Deposition System And Processes
App 20200277696 - Xiao; Wen ; et al. | 2020-09-03 |
Physical Vapor Deposition System And Processes
App 20200277697 - Bhat; Sanjay ; et al. | 2020-09-03 |
Physical Vapor Deposition System And Processes
App 20200277698 - Jindal; Vibhu ; et al. | 2020-09-03 |
Physical vapor deposition chamber particle reduction apparatus and methods
Grant 10,763,091 - Jindal , et al. Sep | 2020-09-01 |
Physical Vapor Deposition Processing Systems Target Cooling
App 20200266039 - Bhat; Sanjay ; et al. | 2020-08-20 |
Extreme ultraviolet mask blank with multilayer absorber and method of manufacture
Grant 10,747,102 - Jindal A | 2020-08-18 |
Extreme Ultraviolet Mask Absorber Materials
App 20200249557 - Kind Code | 2020-08-06 |
Extreme Ultraviolet Mask Absorber Materials
App 20200249559 - Kind Code | 2020-08-06 |
Extreme Ultraviolet Mask Absorber Materials
App 20200249560 - Kind Code | 2020-08-06 |
Physical Vapor Deposition Target Assembly
App 20200241409 - Xiao; Wen ; et al. | 2020-07-30 |
Extreme Ultraviolet Mask Blank With Multilayer Absorber And Method Of Manufacture
App 20200218145 - Jindal; Vibhu | 2020-07-09 |
Extreme Ultraviolet Mask Absorber And Processes For Manufacture
App 20200201167 - Liu; Shuwei ; et al. | 2020-06-25 |
Physical vapor deposition processing systems target cooling
Grant 10,685,821 - Bhat , et al. | 2020-06-16 |
Extreme Ultraviolet Mask With Backside Coating
App 20200133114 - Jindal; Vibhu ; et al. | 2020-04-30 |
Ta-Cu Alloy Material For Extreme Ultraviolet Mask Absorber
App 20200133111 - Liu; Shuwei ; et al. | 2020-04-30 |
Multicathode Deposition System
App 20200051797 - Bhat; Sanjay ; et al. | 2020-02-13 |
Physical Vapor Deposition Of Doped Transition Metal Oxide And Post-deposition Treatment Thereof For Non-volatile Memory Applicat
App 20200044152 - YU; MINRUI ; et al. | 2020-02-06 |
Extreme Ultraviolet Mask Absorber Materials
App 20200026178 - Jindal; Vibhu ; et al. | 2020-01-23 |
Extreme Ultraviolet Mask Blank Defect Reduction
App 20200012183 - Abhinand; Sai ; et al. | 2020-01-09 |
Deposition System With A Multi-Cathode
App 20190382881 - Jindal; Vibhu ; et al. | 2019-12-19 |
Deposition System With Shield Mount
App 20190382879 - Jindal; Vibhu ; et al. | 2019-12-19 |
Physical vapor deposition chamber with static magnet assembly and methods of sputtering
Grant 10,504,705 - Behara , et al. Dec | 2019-12-10 |
Physical Vapor Deposition Chamber With Static Magnet Assembly And Methods Of Sputtering
App 20190088456 - Behara; Sirisha ; et al. | 2019-03-21 |
Physical Vapor Deposition Chamber Particle Reduction Apparatus And Methods
App 20190057849 - Jindal; Vibhu ; et al. | 2019-02-21 |
Physical Vapor Deposition Processing Systems Target Cooling
App 20190057851 - Bhat; Sanjay ; et al. | 2019-02-21 |
Extreme Ultraviolet Mask Blank With Alloy Absorber And Method Of Manufacture
App 20180031965 - Jindal; Vibhu | 2018-02-01 |
Extreme Ultraviolet Mask Blank With Multilayer Absorber And Method Of Manufacture
App 20180031964 - Jindal; Vibhu | 2018-02-01 |
EUVL process structure fabrication methods
Grant 8,865,376 - Jindal , et al. October 21, 2 | 2014-10-21 |
Euvl Process Structure Fabrication Methods
App 20140255828 - JINDAL; Vibhu ; et al. | 2014-09-11 |
Coating Of Shield Surfaces In Deposition Systems
App 20140242501 - Jindal; Vibhu ; et al. | 2014-08-28 |
Process For Cleaning Shield Surfaces In Deposition Systems
App 20140242500 - Jindal; Vibhu ; et al. | 2014-08-28 |
Extreme Ultraviolet Lithography (euvl) Alternating Phase Shift Mask
App 20140170533 - Sun; Lei ; et al. | 2014-06-19 |
Plasma Shield Surface Protection
App 20140162465 - SPORRE; John R. ; et al. | 2014-06-12 |
Process for cleaning shield surfaces in deposition systems
Grant 8,734,586 - Jindal , et al. May 27, 2 | 2014-05-27 |
Coating of shield surfaces in deposition systems
Grant 8,734,907 - Jindal , et al. May 27, 2 | 2014-05-27 |
Process For Cleaning Shield Surfaces In Deposition Systems
App 20130202991 - Jindal; Vibhu ; et al. | 2013-08-08 |
Coating Of Shield Surfaces In Deposition Systems
App 20130202990 - Jindal; Vibhu ; et al. | 2013-08-08 |
Tools, methods and devices for mitigating extreme ultraviolet optics contamination
Grant 8,399,868 - Jindal , et al. March 19, 2 | 2013-03-19 |
Tools, Methods and Devices for Mitigating Extreme Ultraviolet Optics Contamination
App 20120205558 - Jindal; Vibhu ; et al. | 2012-08-16 |
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