Huang; Zubin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Huang; Zubin.The latest application filed is for "controlling concentration profiles for deposited films using machine learning".

Company Profile

16.6.24

Huang; Zubin - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods for modifying photoresist profiles and tuning critical dimensions Grant 11,456,173 - Gupta , et al. September 27, 2	2022-09-27
Controlling Concentration Profiles For Deposited Films Using Machine Learning App 20220285232 - Baryshnikov; Anton V. ; et al.	2022-09-08
Methods To Eliminate Of Deposition On Wafer Bevel And Backside App 20220199373 - Parimi; Venkata Sharat Chandra ; et al.	2022-06-23
Multiple spacer patterning schemes Grant 11,315,787 - Yang , et al. April 26, 2	2022-04-26
Modular Zone Control For A Processing Chamber App 20220108891 - Huang; Zubin ; et al.	2022-04-07
Boron Concentration Tunability In Boron-silicon Films App 20220108892 - Yang; Yi ; et al.	2022-04-07
Bevel Backside Deposition Elimination App 20220108872 - Huang; Zubin ; et al.	2022-04-07
Radiation Shield For Removing Backside Deposition At Lift Pin Locations App 20220093371 - Huang; Zubin ; et al.	2022-03-24
Hydrogen Management In Plasma Deposited Films App 20220020583 - Cheng; Rui ; et al.	2022-01-20
Systems And Methods For Substrate Support Temperature Control App 20210320027 - Huang; Zubin ; et al.	2021-10-14
Surface Profiling And Texturing Of Chamber Components App 20210183657 - GROECHEL; DAVID W. ; et al.	2021-06-17
Apparatus And Methods For Improving Thermal Chemical Vapor Deposition (cvd) Uniformity App 20210147981 - CHENG; Rui ; et al.	2021-05-20
Precursor delivery system and methods related thereto Grant 11,009,455 - Huang , et al. May 18, 2	2021-05-18
Gas Delivery Systems And Methods App 20210143029 - Kedlaya; Diwakar ; et al.	2021-05-13
Systems And Methods For Substrate Support Temperature Control App 20210130960 - Huang; Zubin ; et al.	2021-05-06
Remote Capacitively Coupled Plasma Deposition Of Amorphous Silicon App 20210040617 - HUANG; Zubin ; et al.	2021-02-11
Multiple Spacer Patterning Schemes App 20200335339 - YANG; Tzu-shun ; et al.	2020-10-22
Multiple Spacer Patterning Schemes App 20200335338 - YANG; Tzu-Shun ; et al.	2020-10-22
Methods For Modifying Photoresist Profiles And Tuning Critical Diimensions App 20200321210 - GUPTA; Meenakshi ; et al.	2020-10-08
Lid Assembly Apparatus And Methods For Substrate Processing Chambers App 20200291522 - PANAVALAPPIL KUMARANKUTTY; Hanish Kumar ; et al.	2020-09-17
Heated Pedestal Design For Improved Heat Transfer And Temperature Uniformity App 20200234932 - PARIMI; Venkata Sharat Chandra ; et al.	2020-07-23
Methods For Forming Films Containing Silicon Boron With Low Leakage Current App 20200211834 - YANG; Chuanxi ; et al.	2020-07-02
Surface acoustic wave sensors in semiconductor processing equipment Grant 10,656,100 - Gopalan , et al.	2020-05-19
Cvd Based Spacer Deposition With Zero Loading App 20200043722 - CHENG; Rui ; et al.	2020-02-06
Precursor Delivery System And Methods Related Thereto App 20200041407 - HUANG; Zubin ; et al.	2020-02-06
Chemical mechanical polishing smart ring Grant 10,513,008 - Huang , et al. Dec	2019-12-24
Surface Acoustic Wave Sensors In Semiconductor Processing Equipment App 20190137415 - GOPALAN; Ramesh ; et al.	2019-05-09
Surface acoustic wave sensors in semiconductor processing equipment Grant 10,094,788 - Gopalan , et al. October 9, 2	2018-10-09
Chemical Mechanical Polishing Smart Ring App 20180071889 - HUANG; Zubin ; et al.	2018-03-15
Surface Acoustic Wave Sensors In Semiconductor Processing Equipment App 20170176349 - GOPALAN; Ramesh ; et al.	2017-06-22

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