| Patent | Date |
|---|
Lithography system with an embedded cleaning module
Grant 11,378,894 - Chien , et al. July 5, 2 | 2022-07-05 |
Method of making a FinFET device
Grant 11,081,394 - Shieh , et al. August 3, 2 | 2021-08-03 |
Method of Semiconductor Integrated Circuit Fabrication
App 20200286782 - Shieh; Ming-Feng ; et al. | 2020-09-10 |
Method of semiconductor integrated circuit fabrication
Grant 10,672,656 - Shieh , et al. | 2020-06-02 |
Lithography System With An Embedded Cleaning Module
App 20200064747 - Chien; Shang-Chieh ; et al. | 2020-02-27 |
Method of forming source/drain contact
Grant 10,522,413 - Kuo , et al. Dec | 2019-12-31 |
Lithography system with an embedded cleaning module
Grant 10,459,353 - Chien , et al. Oc | 2019-10-29 |
Method of Forming Source/Drain Contact
App 20190115262 - Kuo; Ming-Jhih ; et al. | 2019-04-18 |
Method of Making a FinFET Device
App 20190051564 - Shieh; Ming-Feng ; et al. | 2019-02-14 |
Method of forming source/drain contact
Grant 10,163,720 - Kuo , et al. Dec | 2018-12-25 |
Lithography method with surface modification layer
Grant 10,101,659 - Chen , et al. October 16, 2 | 2018-10-16 |
Method of making a FinFET device
Grant 10,096,519 - Shieh , et al. October 9, 2 | 2018-10-09 |
System and method for lithography alignment
Grant 9,996,011 - Lin , et al. June 12, 2 | 2018-06-12 |
Method of making a FinFET device
Grant 9,929,153 - Shieh , et al. March 27, 2 | 2018-03-27 |
Method of Forming Source/Drain Contact
App 20180061715 - Kuo; Ming-Jhih ; et al. | 2018-03-01 |
Integrated circuit structure and method forming trenches with different depths
Grant 9,905,471 - Lo , et al. February 27, 2 | 2018-02-27 |
Lithography Method with Surface Modification Layer
App 20180047561 - Chen; Shu-Fang ; et al. | 2018-02-15 |
Method of forming a photoresist layer
Grant 9,875,892 - Chang , et al. January 23, 2 | 2018-01-23 |
Lithography alignment marks
Grant 9,823,574 - Chen , et al. November 21, 2 | 2017-11-21 |
Integrated Circuit Structure And Method Forming Trenches With Different Depths
App 20170316983 - Lo; Yuan-Yen ; et al. | 2017-11-02 |
Method of lithography process with inserting scattering bars
Grant 9,805,154 - Ho , et al. October 31, 2 | 2017-10-31 |
Method of forming source/drain contact
Grant 9,799,567 - Kuo , et al. October 24, 2 | 2017-10-24 |
Lithography process on high topology features
Grant 9,791,775 - Chang , et al. October 17, 2 | 2017-10-17 |
Semiconductor method with wafer edge modification
Grant 9,711,367 - Chien , et al. July 18, 2 | 2017-07-18 |
Two-dimensional process window improvement
Grant 9,703,918 - Ho , et al. July 11, 2 | 2017-07-11 |
Film portion at wafer edge
Grant 9,651,869 - Chang , et al. May 16, 2 | 2017-05-16 |
Lithography Alignment Marks
App 20170090299 - Chen; Ching-Huang ; et al. | 2017-03-30 |
Method Of Making A Finfet Device
App 20160379889 - Shieh; Ming-Feng ; et al. | 2016-12-29 |
Method of Lithography Process with Inserting Scattering Bars
App 20160335385 - Ho; Irene ; et al. | 2016-11-17 |
Two-dimensional Process Window Improvement
App 20160274455 - Wei-De; Ho ; et al. | 2016-09-22 |
Method of making a FinFET device
Grant 9,443,768 - Shieh , et al. September 13, 2 | 2016-09-13 |
Method of making a FinFET device
Grant 9,437,497 - Shieh , et al. September 6, 2 | 2016-09-06 |
System And Method For Lithography Alignment
App 20160216613 - Lin; Yu-Hsien ; et al. | 2016-07-28 |
Lithography Process on High Topology Features
App 20160195807 - Chang; Chun-Wei ; et al. | 2016-07-07 |
Film portion at wafer edge
Grant 9,372,406 - Chang , et al. June 21, 2 | 2016-06-21 |
Thickening phase for spin coating process
Grant 9,360,755 - Chang , et al. June 7, 2 | 2016-06-07 |
Test structure placement on a semiconductor wafer
Grant 9,349,662 - Wu , et al. May 24, 2 | 2016-05-24 |
Method of Forming Source/Drain Contact
App 20160118303 - Kuo; Ming-Jhih ; et al. | 2016-04-28 |
System and method for lithography alignment
Grant 9,304,403 - Lin , et al. April 5, 2 | 2016-04-05 |
Lithography process on high topology features
Grant 9,285,677 - Chang , et al. March 15, 2 | 2016-03-15 |
Clip For Clamping Electronic Component
App 20160073549 - LIU; Hsi-An ; et al. | 2016-03-10 |
Cross quadrupole double lithography method using two complementary apertures
Grant 9,280,041 - Wang , et al. March 8, 2 | 2016-03-08 |
Method of Semiconductor Integrated Circuit Fabrication
App 20160027692 - Shieh; Ming-Feng ; et al. | 2016-01-28 |
Method and apparatus for drying a wafer
Grant 9,176,387 - Huang , et al. November 3, 2 | 2015-11-03 |
Method of overlay prediction
Grant 9,158,209 - Chen , et al. October 13, 2 | 2015-10-13 |
Method and system for repairing wafer defects
Grant 9,158,884 - Chang , et al. October 13, 2 | 2015-10-13 |
Method of semiconductor integrated circuit fabrication
Grant 9,153,483 - Shieh , et al. October 6, 2 | 2015-10-06 |
Method of Making a FinFET Device
App 20150249039 - Shieh; Ming-Feng ; et al. | 2015-09-03 |
Method Of Forming A Photoresist Layer
App 20150243500 - Chang; Chun-Wei ; et al. | 2015-08-27 |
Film Portion At Wafer Edge
App 20150212420 - CHANG; Chun-Wei ; et al. | 2015-07-30 |
Method of patterning a semiconductor device having improved spacing and shape control and a semiconductor device
Grant 9,070,688 - Chen , et al. June 30, 2 | 2015-06-30 |
Method Of Making a FinFET Device
App 20150147867 - Shieh; Ming-Feng ; et al. | 2015-05-28 |
Method of making a FinFET device
Grant 9,034,723 - Shieh , et al. May 19, 2 | 2015-05-19 |
Method of forming a photoresist layer
Grant 9,028,915 - Chang , et al. May 12, 2 | 2015-05-12 |
Method and System for Repairing Wafer Defects
App 20150128098 - Chang; Shih-Ming ; et al. | 2015-05-07 |
Method Of Semiconductor Integrated Circuit Fabrication
App 20150118837 - Shieh; Ming-Feng ; et al. | 2015-04-30 |
Method Of Making A FinFET Device
App 20150108551 - Shieh; Ming-Feng ; et al. | 2015-04-23 |
Method Of Making A FinFET Device
App 20150111362 - Shieh; Ming-Feng ; et al. | 2015-04-23 |
Integrated circuit layout and method with double patterning
Grant 8,987,008 - Shieh , et al. March 24, 2 | 2015-03-24 |
Design Structure For Chip Extension
App 20150082265 - Huang; Chin-Min ; et al. | 2015-03-19 |
Method of making a FinFET device
Grant 8,975,129 - Shieh , et al. March 10, 2 | 2015-03-10 |
Method For Integrated Circuit Patterning
App 20150064916 - Shieh; Ming-Feng ; et al. | 2015-03-05 |
Structure for chip extension
Grant 8,972,912 - Huang , et al. March 3, 2 | 2015-03-03 |
Integrated Circuit Layout And Method With Double Patterning
App 20150056724 - Shieh; Ming-Feng ; et al. | 2015-02-26 |
Metal grid in backside illumination image sensor chips and methods for forming the same
Grant 8,940,574 - Wang , et al. January 27, 2 | 2015-01-27 |
Method of making a lithography mask
Grant 8,916,482 - Lee , et al. December 23, 2 | 2014-12-23 |
Method of semiconductor integrated circuit fabrication
Grant 8,883,403 - Chen , et al. November 11, 2 | 2014-11-11 |
Lithography System with an Embedded Cleaning Module
App 20140268074 - Chien; Shang-Chieh ; et al. | 2014-09-18 |
Lithography Process on High Topology Features
App 20140272715 - Chang; Chun-Wei ; et al. | 2014-09-18 |
Thickening Phase For Spin Coating Process
App 20140272704 - Chang; Chun-Wei ; et al. | 2014-09-18 |
Method and Apparatus for Drying a Wafer
App 20140190634 - Huang; Wei-Chieh ; et al. | 2014-07-10 |
Manufacturing techniques for workpieces with varying topographies
Grant 8,771,534 - Chen , et al. July 8, 2 | 2014-07-08 |
System And Method For Lithography Alignment
App 20140185025 - Lin; Yu-Hsien ; et al. | 2014-07-03 |
Test Structure Placement on a Semiconductor Wafer
App 20140151699 - Wu; Chuan-Ling ; et al. | 2014-06-05 |
Method Of Overlay Prediction
App 20140111779 - Chen; Li-Jui ; et al. | 2014-04-24 |
Method and apparatus for drying a wafer
Grant 8,703,403 - Huang , et al. April 22, 2 | 2014-04-22 |
Semiconductor devices and manufacturing methods thereof
Grant 8,692,296 - Chen , et al. April 8, 2 | 2014-04-08 |
Method Of Semiconductor Integrated Circuit Fabrication
App 20140080067 - Chen; Chun-Chang ; et al. | 2014-03-20 |
Method of Forming a Photoresist Layer
App 20140065843 - Chang; Chun-Wei ; et al. | 2014-03-06 |
Method Of Patterning A Semiconductor Device Having Improved Spacing And Shape Control And A Semiconductor Device
App 20140035149 - CHEN; Jhun Hua ; et al. | 2014-02-06 |
Photomask and photomask substrate with reduced light scattering properties
Grant 8,624,345 - Wu , et al. January 7, 2 | 2014-01-07 |
Manufacturing techniques to limit damage on workpiece with varying topographies
Grant 8,623,229 - Chen , et al. January 7, 2 | 2014-01-07 |
Method Of Removing Residue During Semiconductor Device Fabrication
App 20130302985 - Wu; Chun-Chang ; et al. | 2013-11-14 |
Method of patterning a semiconductor device having improved spacing and shape control and a semiconductor device
Grant 8,580,637 - Chen , et al. November 12, 2 | 2013-11-12 |
Film Portion At Wafer Edge
App 20130273740 - CHANG; Chun-Wei ; et al. | 2013-10-17 |
Metal Grid in Backside Illumination Image Sensor Chips and Methods for Forming the Same
App 20130270667 - Wang; Chih-Chien ; et al. | 2013-10-17 |
Method Of Making A Lithography Mask
App 20130260573 - Lee; Hsin-Chang ; et al. | 2013-10-03 |
Semiconductor Devices and Manufacturing Methods Thereof
App 20130207163 - Chen; Chun-Chang ; et al. | 2013-08-15 |
Double Dipole Lithography Method For Semiconductor Device Fabrication
App 20130188164 - Wang; Hsien-Cheng ; et al. | 2013-07-25 |
Manufacturing Techniques for Workpieces with Varying Topographies
App 20130181320 - Chen; Chun-Chang ; et al. | 2013-07-18 |
Method And Apparatus For Drying A Wafer
App 20130164685 - Huang; Wei-Chieh ; et al. | 2013-06-27 |
Method Of Patterning A Semiconductor Device Having Improved Spacing And Shape Control And A Semiconductor Device
App 20130154100 - CHEN; Jhun Hua ; et al. | 2013-06-20 |
Methods of forming semiconductor structures
Grant 8,466,070 - Chou , et al. June 18, 2 | 2013-06-18 |
Manufacturing Techniques To Limit Damage On Workpiece With Varying Topographies
App 20130137266 - Chen; Chun-Chang ; et al. | 2013-05-30 |
Cross quadrupole double lithography method and apparatus for semiconductor device fabrication using two apertures
Grant 8,416,393 - Wang , et al. April 9, 2 | 2013-04-09 |
Fan Assembly Structure
App 20130084178 - HSIEH; Hung-Chang ; et al. | 2013-04-04 |
Planarization method for high wafer topography
Grant 8,409,456 - Lan , et al. April 2, 2 | 2013-04-02 |
Methods Of Forming Semiconductor Structures
App 20120309197 - CHOU; Hsing-Fei ; et al. | 2012-12-06 |
Methods and Systems for Lithography Alignment
App 20120293782 - Lu; Hsiao-Tzu ; et al. | 2012-11-22 |
Double patterning method using metallic compound mask layer
Grant 8,313,889 - Yu , et al. November 20, 2 | 2012-11-20 |
Planarization System For High Wafer Topography
App 20120266810 - LAN; Shun-Wei ; et al. | 2012-10-25 |
Planarization Method For High Wafer Topography
App 20120270398 - LAN; Shun-Wei ; et al. | 2012-10-25 |
Photomask And Photomask Substrate With Reduced Light Scattering Properties
App 20120237861 - Wu; Ken ; et al. | 2012-09-20 |
Methods and systems for lithography alignment
Grant 8,236,579 - Lu , et al. August 7, 2 | 2012-08-07 |
Method for forming a robust mask with reduced light scattering
Grant 8,198,118 - Wu , et al. June 12, 2 | 2012-06-12 |
Photolithography Process For Semiconductor Device
App 20120082940 - Yu; Vincent ; et al. | 2012-04-05 |
Exposure apparatus and method for photolithography process
Grant 8,098,364 - Yu , et al. January 17, 2 | 2012-01-17 |
System and method for manufacturing a mask for semiconductor processing
Grant 7,999,910 - Chen , et al. August 16, 2 | 2011-08-16 |
Electrical connector having latching mechanism
Grant 7,972,163 - Chen , et al. July 5, 2 | 2011-07-05 |
Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask
Grant 7,897,297 - Ke , et al. March 1, 2 | 2011-03-01 |
Double Patterning Method Using Metallic Compound Mask Layer
App 20100279234 - YU; Vincent ; et al. | 2010-11-04 |
Heat-dissipating And Fixing Mechanism Of Electronic Component And Process For Assembling Same
App 20100271785 - Hsieh; Hung-Chang ; et al. | 2010-10-28 |
Lithography Method And Apparatus For Semiconductor Device Fabrication
App 20100255679 - Wang; Hsien-Cheng ; et al. | 2010-10-07 |
Composite connector assembly and power supply apparatus having such composite connector assembly
Grant 7,780,481 - Chen , et al. August 24, 2 | 2010-08-24 |
Critical dimension (CD) control by spectrum metrology
Grant 7,759,136 - Hung , et al. July 20, 2 | 2010-07-20 |
Method and apparatus for compensated illumination for advanced lithography
Grant 7,697,114 - Chang , et al. April 13, 2 | 2010-04-13 |
Electrical Connector Having Latching Mechanism
App 20100003844 - Chen; Hung-Chuan ; et al. | 2010-01-07 |
Aperture design for improving critical dimension accuracy and electron beam lithography throughput
Grant 7,642,532 - Chen , et al. January 5, 2 | 2010-01-05 |
Novel Treatment For Mask Surface Chemical Reduction
App 20090258159 - Su; Yih-Chen ; et al. | 2009-10-15 |
Assembled structure of power semiconductor device and heat sink
Grant 7,589,970 - Hsieh September 15, 2 | 2009-09-15 |
Exposure Apparatus And Method For Photolithography Process
App 20090103068 - Yu; Vincent ; et al. | 2009-04-23 |
System and method for inspecting errors on a wafer
Grant 7,469,057 - Hung , et al. December 23, 2 | 2008-12-23 |
Circuit protecting structure of electronic device
Grant 7,431,592 - Hsieh , et al. October 7, 2 | 2008-10-07 |
Methods and Systems For Lithography Alignment
App 20080233661 - Lu; Hsiao-Tzu ; et al. | 2008-09-25 |
Double-Decker Pellicle-Mask Assembly
App 20080199783 - Chang; Shih-Ming ; et al. | 2008-08-21 |
Method And Apparatus For Cleaning A Substrate
App 20080156346 - Wang; Hsien-Cheng ; et al. | 2008-07-03 |
Composite Connector Assembly And Power Supply Apparatus Having Such Composite Connector Assembly
App 20080139022 - Chen; Hung-Chuan ; et al. | 2008-06-12 |
System and method for examining mask pattern fidelity
Grant 7,383,530 - Wang , et al. June 3, 2 | 2008-06-03 |
Circuit Protecting Structure Of Electronic Device
App 20080124953 - Hsieh; Hung-Chang ; et al. | 2008-05-29 |
Method for forming a robust mask with reduced light scattering
App 20080102379 - Wu; Ken ; et al. | 2008-05-01 |
Assembled Structure Of Power Semiconductor Device And Heat Sink
App 20080080140 - Hsieh; Hung-Chang | 2008-04-03 |
Electrical connector having latching mechanism
Grant 7,335,048 - Chen , et al. February 26, 2 | 2008-02-26 |
Electrical Connector Having Latching Mechanism
App 20080032539 - Chen; Hung-Chuan ; et al. | 2008-02-07 |
Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask
App 20070292771 - Ke; Chih-Ming ; et al. | 2007-12-20 |
Method And System For Optimizing Intra-field Critical Dimension Uniformity Using A Sacrificial Twin Mask
App 20070292774 - Ke; Chih-Ming ; et al. | 2007-12-20 |
Method And Apparatus For Compensated Illumination For Advanced Lithography
App 20070291244 - CHANG; Shih-Ming ; et al. | 2007-12-20 |
Power Supply Apparatus Having Multiple Power Output Devices
App 20070270003 - Lin; Wen-Hsiang ; et al. | 2007-11-22 |
System and method for examining mask pattern fidelity
App 20070250805 - Wang; Wen-Chuan ; et al. | 2007-10-25 |
Method of preventing photoresist residues
Grant 7,279,428 - Lin , et al. October 9, 2 | 2007-10-09 |
Novel Critical Dimension (cd) Control By Spectrum Metrology
App 20070231935 - HUNG; Chang-Cheng ; et al. | 2007-10-04 |
New aperture design for improving critical dimension accuracy and electron beam lithography throughput
App 20070172744 - Chen; Chia-Jen ; et al. | 2007-07-26 |
In-situ overlay alignment
Grant 7,218,400 - Ho , et al. May 15, 2 | 2007-05-15 |
Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
App 20070012336 - Su; Yih-Chen ; et al. | 2007-01-18 |
Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
App 20070012335 - Chang; Hsiao Chih ; et al. | 2007-01-18 |
System and method for manufacturing a mask for semiconductor processing
App 20060246357 - Chen; Chia-Jen ; et al. | 2006-11-02 |
Method to improve photomask critical dimension uniformity and photomask fabrication process
Grant 7,060,400 - Wang , et al. June 13, 2 | 2006-06-13 |
Heat-dissipating fan module of electronic apparatus
Grant 6,995,979 - Hsieh , et al. February 7, 2 | 2006-02-07 |
In-situ overlay alignment
App 20050195397 - Ho, Grace H. ; et al. | 2005-09-08 |
Heat-dispersing module of electronic device
Grant 6,930,883 - Hsieh , et al. August 16, 2 | 2005-08-16 |
Method of preventing photoresist residues
App 20050106889 - Lin, Shang Wei ; et al. | 2005-05-19 |
Method to prevent side lobe on seal ring
Grant 6,858,354 - Hsieh , et al. February 22, 2 | 2005-02-22 |
Method to improve photomask critical dimension uniformity and photomask fabrication process
App 20050031966 - Wang, Wen-Chuan ; et al. | 2005-02-10 |
Heat-dispersing module of electronic device
App 20040252457 - Hsieh, Hung-Chang ; et al. | 2004-12-16 |
System and method for examining mask pattern fidelity
App 20040225488 - Wang, Wen-Chuan ; et al. | 2004-11-11 |
Heat-dispersing fan module of electronic apparatus
App 20040218360 - Hsieh, Hung-Chang ; et al. | 2004-11-04 |
System and method for inspecting errors on a wafer
App 20040165761 - Hung, Chang-Cheng ; et al. | 2004-08-26 |
Method and apparatus for placing identifying mark on semiconductor wafer
Grant 6,570,642 - Huang , et al. May 27, 2 | 2003-05-27 |
Dual damascene method employing sacrificial via fill layer
Grant 6,362,093 - Jang , et al. March 26, 2 | 2002-03-26 |
Method and apparatus for placing identifying mark on semiconductor wafer
App 20010048508 - Huang, Yung-Sheng ; et al. | 2001-12-06 |
Dual damascene approach for small geometry dimension
Grant 6,319,821 - Liu , et al. November 20, 2 | 2001-11-20 |
Method for placing identifying mark on semiconductor wafer
Grant 6,312,876 - Huang , et al. November 6, 2 | 2001-11-06 |
Deep-submicron integrated circuit package for improving bondability
Grant 6,242,813 - Huang , et al. June 5, 2 | 2001-06-05 |
Method of patterning narrow gate electrode
Grant 6,174,818 - Tao , et al. January 16, 2 | 2001-01-16 |
Method for improving bondability for deep-submicron integrated circuit package
Grant 6,110,816 - Huang , et al. August 29, 2 | 2000-08-29 |
Method of in line intra-field correction of overlay alignment
Grant 5,894,350 - Hsieh , et al. April 13, 1 | 1999-04-13 |
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