| Patent | Date |
|---|
Mold and device for marking work pieces
Grant 11,225,001 - Dietrich , et al. January 18, 2 | 2022-01-18 |
Mold and Device for Marking Work Pieces
App 20190329465 - Dietrich; Klaus ; et al. | 2019-10-31 |
Vertical interconnect structure, memory device and associated production method
Grant 9,177,995 - Gutsche , et al. November 3, 2 | 2015-11-03 |
Vertical interconnect structure, memory device and associated production method
Grant 8,420,526 - Gutsche , et al. April 16, 2 | 2013-04-16 |
Vertical Interconnect Structure, Memory Device And Associated Production Method
App 20120305873 - Gutsche; Martin ; et al. | 2012-12-06 |
Process for producing sublithographic structures
Grant 8,084,190 - Gutsche , et al. December 27, 2 | 2011-12-27 |
Method for producing a dielectric material on a semiconductor device and semiconductor device
Grant 8,049,264 - Seidl , et al. November 1, 2 | 2011-11-01 |
Vertical Interconnect Structure, Memory Device And Associated Production Method
App 20110248234 - Gutsche; Martin ; et al. | 2011-10-13 |
Vertical interconnect structure, memory device and associated production method
Grant 7,998,858 - Gutsche , et al. August 16, 2 | 2011-08-16 |
Process For Producing Sublithographic Structures
App 20100006983 - Gutsche; Martin ; et al. | 2010-01-14 |
Process for producing sublithographic structures
Grant 7,605,090 - Gutsche , et al. October 20, 2 | 2009-10-20 |
Stacked capacitor array and fabrication method for a stacked capacitor array
Grant 7,456,461 - Gutsche , et al. November 25, 2 | 2008-11-25 |
Method for fabricating memory cells for a memory device
Grant 7,361,549 - Bruchhaus , et al. April 22, 2 | 2008-04-22 |
Ferroelectric memory arrangement
Grant 7,348,619 - Bruchhaus , et al. March 25, 2 | 2008-03-25 |
Method of producing a microelectronic electrode structure, and microelectronic electrode structure
Grant 7,317,201 - Gutsche , et al. January 8, 2 | 2008-01-08 |
Fabrication method for a trench capacitor having an insulation collar
Grant 7,316,951 - Gutsche , et al. January 8, 2 | 2008-01-08 |
Fabrication method for a semiconductor structure having integrated capacitors
Grant 7,312,115 - Gutsche , et al. December 25, 2 | 2007-12-25 |
Method of fabricating dielectric mixed layers and capacitive element and use thereof
Grant 7,303,970 - Gutsche , et al. December 4, 2 | 2007-12-04 |
Memory chip having a memory cell with low-temperature layers in the memory trench and fabrication method
App 20070134871 - Temmler; Dietmar ; et al. | 2007-06-14 |
Vertical interconnect structure, memory device and associated production method
App 20070105333 - Gutsche; Martin ; et al. | 2007-05-10 |
Integrated conductor arrangement and corresponding production method
App 20070052069 - Gutsche; Martin ; et al. | 2007-03-08 |
Charge-trapping memory device and method for production
Grant 7,186,607 - Seidl , et al. March 6, 2 | 2007-03-06 |
Method of forming electrodes
App 20070037349 - Gutsche; Martin ; et al. | 2007-02-15 |
Method and configuration for reinforcement of a dielectric layer at defects by self-aligning and self-limiting electrochemical conversion of a substrate material
Grant 7,176,514 - Hecht , et al. February 13, 2 | 2007-02-13 |
Capacitor with electrodes made of ruthenium and method for patterning layers made of ruthenium or ruthenium
Grant 7,170,125 - Seidl , et al. January 30, 2 | 2007-01-30 |
Barrier layer and a method for suppressing diffusion processes during the production of semiconductor devices
Grant 7,157,371 - Hecht , et al. January 2, 2 | 2007-01-02 |
Capacitor arrangement with capacitors arranged one in the other
Grant 7,138,677 - Gutsche , et al. November 21, 2 | 2006-11-21 |
Method for fabricating a memory cell
Grant 7,122,423 - Gutsche , et al. October 17, 2 | 2006-10-17 |
Memory cell with nanocrystals or nanodots
Grant 7,119,395 - Gutsche , et al. October 10, 2 | 2006-10-10 |
Method for fabricating a stacked capacitor array having a regular arrangement of a plurality of stacked capacitors
Grant 7,112,487 - Gutsche , et al. September 26, 2 | 2006-09-26 |
Process for producing sublithographic structures
App 20060204898 - Gutsche; Martin ; et al. | 2006-09-14 |
Charge-trapping memory device and method for production
App 20060186480 - Seidl; Harald ; et al. | 2006-08-24 |
Method of fabricating an oxide collar for a trench capacitor
Grant 7,087,485 - Seidl , et al. August 8, 2 | 2006-08-08 |
Method for producing a dielectric material on a semiconductor device and semiconductor device
App 20060172489 - Seidl; Harald ; et al. | 2006-08-03 |
Nonvolatile integrated semiconductor memory
Grant 7,084,454 - Pinnow , et al. August 1, 2 | 2006-08-01 |
Method for fabricating memory cells and memory cell array
Grant 7,081,383 - Gutsche , et al. July 25, 2 | 2006-07-25 |
Method for fabricating a trench capacitor having an insulation collar, which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory cell
Grant 7,074,689 - Gutsche , et al. July 11, 2 | 2006-07-11 |
Method of producing a microelectronic electrode structure, and microelectronic electrode structure
App 20060125108 - Gutsche; Martin ; et al. | 2006-06-15 |
Device and method for determining an edge coverage during coating processes
App 20060094233 - Gutsche; Martin ; et al. | 2006-05-04 |
Switching or amplifier device, in particular transistor
App 20060071244 - Gutsche; Martin ; et al. | 2006-04-06 |
Ferroelectric memory arrangement
App 20060049440 - Bruchhaus; Rainer ; et al. | 2006-03-09 |
Method for fabricating memory cells for a memory device
App 20060046317 - Bruchhaus; Rainer ; et al. | 2006-03-02 |
Fabrication method for a trench capacitor having an insulation collar
App 20060035430 - Gutsche; Martin ; et al. | 2006-02-16 |
Process for the self-aligning production of a transistor with a U-shaped gate
App 20060019447 - Gutsche; Martin ; et al. | 2006-01-26 |
Fabrication method for a semiconductor structure having integrated capacitors and corresponding semicomductor structure
App 20060001067 - Gutsche; Martin ; et al. | 2006-01-05 |
Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it
Grant 6,977,405 - Lutzen , et al. December 20, 2 | 2005-12-20 |
Method for fabricating dielectric mixed layers and capacitive element and use thereof
App 20050258510 - Gutsche, Martin ; et al. | 2005-11-24 |
Stacked capacitor array and fabrication method for a stacked capacitor array
App 20050245022 - Gutsche, Martin ; et al. | 2005-11-03 |
Method for fabricating a stacked capacitor array having a regular arrangement of a plurality of stacked capacitors
App 20050245027 - Gutsche, Martin ; et al. | 2005-11-03 |
Method for patterning ceramic layers
Grant 6,953,722 - Seidl , et al. October 11, 2 | 2005-10-11 |
Method for producing vertical patterned layers made of silicon dioxide
Grant 6,949,269 - Seidl , et al. September 27, 2 | 2005-09-27 |
Method for fabricating a memory cell
App 20050191806 - Gutsche, Martin ; et al. | 2005-09-01 |
Multiple deposition of metal layers for the fabrication of an upper capacitor electrode of a trench capacitor
Grant 6,916,704 - Gutsche , et al. July 12, 2 | 2005-07-12 |
Method for fabricating memory cells and memory cell array
App 20050095780 - Gutsche, Martin ; et al. | 2005-05-05 |
Memory chip with low-temperature layers in the trench capacitor
App 20050090053 - Temmler, Dietmar ; et al. | 2005-04-28 |
Trench capacitor and method for fabricating a trench capacitor
App 20050079679 - Seidl, Harald ; et al. | 2005-04-14 |
Method for fabricating a trench capacitor having an insulation collar, which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory cell
App 20050070066 - Gutsche, Martin ; et al. | 2005-03-31 |
Nonvolatile integrated semiconductor memory
App 20050067634 - Pinnow, Cay-Uwe ; et al. | 2005-03-31 |
Memory cell with nanocrystals or nanodots
App 20050067659 - Gutsche, Martin ; et al. | 2005-03-31 |
Method of fabricating an oxide collar for a trench capacitor
App 20050037565 - Seidl, Harald ; et al. | 2005-02-17 |
Method for fabricating a hard mask
Grant 6,852,640 - Gutsche February 8, 2 | 2005-02-08 |
Removal of post-rie polymer on A1/CU metal line
Grant 6,849,153 - Ramachandran , et al. February 1, 2 | 2005-02-01 |
Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes
Grant 6,835,417 - Saenger , et al. December 28, 2 | 2004-12-28 |
Capacitor arrangement for obtaining increased capacitance, and method for fabricating the same
App 20040228067 - Gutsche, Martin ; et al. | 2004-11-18 |
Process for the ALD coating of substrates and apparatus suitable for carrying out the process
App 20040216670 - Gutsche, Martin ; et al. | 2004-11-04 |
Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it
App 20040201055 - Lutzen, Jorn ; et al. | 2004-10-14 |
Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide
Grant 6,774,005 - Gutsche , et al. August 10, 2 | 2004-08-10 |
Capacitor with electrodes made of ruthenium and method for patterning layers made of ruthenium or ruthenium(IV) oxide
App 20040152255 - Seidl, Harald ; et al. | 2004-08-05 |
Method for producing vertical patterned layers made of silicon dioxide
App 20040146655 - Seidl, Harald ; et al. | 2004-07-29 |
Etching method and etching signal layer for processing semiconductor wafers
App 20040087045 - Hecht, Thomas ; et al. | 2004-05-06 |
Barrrier layer and a method for suppressing diffusion processes during the production of semiconductor devices
App 20040082166 - Hecht, Thomas ; et al. | 2004-04-29 |
Method for fabricating a semiconductor configuration
App 20040063321 - Goebel, Bernd ; et al. | 2004-04-01 |
Method of fabricating a trench-structure capacitor device
Grant 6,693,016 - Gutsche , et al. February 17, 2 | 2004-02-17 |
Method for patterning ceramic layers
App 20040029343 - Seidl, Harald ; et al. | 2004-02-12 |
Method and configuration for reinforcement of a dielectric layer at defects by self-aligning and self-limiting electrochemical conversion of a substrate material
App 20030224584 - Hecht, Thomas ; et al. | 2003-12-04 |
Method of providing trench walls by using two-step etching processes
Grant 6,653,185 - Gutsche , et al. November 25, 2 | 2003-11-25 |
Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes
App 20030175423 - Saenger, Annette ; et al. | 2003-09-18 |
Method for fabricating a semiconductor component
App 20030114018 - Gutsche, Martin ; et al. | 2003-06-19 |
Method for fabricating capacitor electrodes
Grant 6,559,005 - Gutsche , et al. May 6, 2 | 2003-05-06 |
Method of fabricating a trench-structure capacitor device
App 20030045068 - Gutsche, Martin ; et al. | 2003-03-06 |
Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide
App 20030022457 - Gutsche, Martin ; et al. | 2003-01-30 |
Method and installation for fabricating one-sided buried straps
App 20030003652 - Gobel, Bernd ; et al. | 2003-01-02 |
Trench capacitor of a dram memory cell with a metallic collar region and a non-metallic buried strap to a selection transistor
App 20020190298 - Alsmeier, Johann ; et al. | 2002-12-19 |
Multiple deposition of metal layers for the fabrication of an upper capacitor electrode of a trench capacitor
App 20020187605 - Gutsche, Martin ; et al. | 2002-12-12 |
Method for fabricating a hard mask
App 20020173163 - Gutsche, Martin | 2002-11-21 |
Semiconductor component and corresponding fabrication method
App 20020149011 - Gutsche, Martin ; et al. | 2002-10-17 |
Method for fabricating a trench capacitor
App 20020072171 - Forster, Matthias ; et al. | 2002-06-13 |
Method for fabricating capacitor electrodes
App 20020022316 - Gutsche, Martin ; et al. | 2002-02-21 |
Trench capacitor with isolation collar and corresponding method of production
App 20020014647 - Seidl, Harald ; et al. | 2002-02-07 |
Memory cell with a stacked capacitor
App 20020004278 - Gutsche, Martin | 2002-01-10 |
Method Of Plasma Etching Thin Films Of Difficult To Dry Etch Materials
App 20010053610 - ATHAVALE, SATISH D. ; et al. | 2001-12-20 |
Method of producing electrodes of a micromechanical or microelectronic device
App 20010041406 - Goebel, Bernd ; et al. | 2001-11-15 |
Removal Of Post-rie Polymer On A1/cu Metal Line
App 20010006166 - RAMACHANDRAN, RAVIKUMAR ; et al. | 2001-07-05 |
Metallization etching techniques for reducing post-etch corrosion of metal lines
Grant 6,177,353 - Gutsche , et al. January 23, 2 | 2001-01-23 |
Stacked capacitator memory cell and method of fabrication
Grant 6,136,660 - Shen , et al. October 24, 2 | 2000-10-24 |
Dual damascene structure
Grant 6,033,977 - Gutsche , et al. March 7, 2 | 2000-03-07 |
Removal of post-RIE polymer on Al/Cu metal line
Grant 5,980,770 - Ramachandran , et al. November 9, 1 | 1999-11-09 |
Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching
Grant 5,935,873 - Spuler , et al. August 10, 1 | 1999-08-10 |
Method for forming metallization in semiconductor devices with a self-planarizing material
Grant 5,854,126 - Tobben , et al. December 29, 1 | 1998-12-29 |
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