GOLUBOVSKY; Edward
Patent Applications and Registrations
Patent applications and USPTO patent grants for GOLUBOVSKY; Edward.The latest application filed is for "pad carrier for horizontal pre-clean module".
- GOLUBOVSKY; Edward - San Jose CA
| Patent | Date |
|---|---|
| Pad Carrier For Horizontal Pre-clean Module App 20220199396 - GOLUBOVSKY; Edward ; et al. | 2022-06-23 |
| Horizontal Buffing Module App 20220134505 - GOLUBOVSKY; Edward ; et al. | 2022-05-05 |
| Replaceable substrate carrier interfacing film Grant D947,802 - Sakata , et al. April 5, 2 | 2022-04-05 |
| Non-contact clean module Grant 11,289,347 - Rangarajan , et al. March 29, 2 | 2022-03-29 |
| Non-contact Clean Module App 20220044946 - RANGARAJAN; Jagan ; et al. | 2022-02-10 |
| Non-contact clean module Grant 11,158,524 - Rangarajan , et al. October 26, 2 | 2021-10-26 |
| High Throughput Polishing Modules And Modular Polishing Systems App 20210323118 - RANGARAJAN; Jagan ; et al. | 2021-10-21 |
| High Throughput Polishing Modules And Modular Polishing Systems App 20210323119 - RANGARAJAN; Jagan ; et al. | 2021-10-21 |
| High Throughput Polishing Modules And Modular Polishing Systems App 20210323117 - RANGARAJAN; Jagan ; et al. | 2021-10-21 |
| Wafer Processing Tools and Methods Thereof App 20200234995 - Rangarajan; Jagan ; et al. | 2020-07-23 |
| Non-contact Rotary Union App 20200086453 - GOLUBOVSKY; Edward | 2020-03-19 |
| Non-contact Clean Module App 20200043756 - RANGARAJAN; Jagan ; et al. | 2020-02-06 |
| Method And Apparatus For Linear Pad Conditioning App 20100130107 - Yilmaz; Alpay ; et al. | 2010-05-27 |
| Ground shield for a PVD chamber Grant 7,713,390 - Golubovsky May 11, 2 | 2010-05-11 |
| Ground shield for a PVD chamber App 20060254904 - Golubovsky; Edward | 2006-11-16 |
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