Patent | Date |
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Leak Check Method, Leak Check Apparatus, Plating Method, And Plating Apparatus App 20220307938 - Suzuki; Kiyoshi ;   et al. | 2022-09-29 |
Plating method and plating apparatus Grant 11,447,885 - Fujikata , et al. September 20, 2 | 2022-09-20 |
Powder Supply Apparatus And Plating System App 20220243356 - CHANG; Shao Hua ;   et al. | 2022-08-04 |
Leak check method, leak check apparatus, plating method, and plating apparatus Grant 11,385,125 - Suzuki , et al. July 12, 2 | 2022-07-12 |
Method and apparatus for processing a substrate Grant 11,371,155 - Okuzono , et al. June 28, 2 | 2022-06-28 |
Powder supply apparatus and plating system Grant 11,359,304 - Chang , et al. June 14, 2 | 2022-06-14 |
Semiconductor Manufacturing Apparatus, Failure Prediction Method For Semiconductor Manufacturing Apparatus, And Failure Prediction Program For Semiconductor Manufacturing Apparatus App 20220181180 - Fujikata; Jumpei ;   et al. | 2022-06-09 |
Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus Grant 11,315,812 - Fujikata , et al. April 26, 2 | 2022-04-26 |
Method of removing liquid from seal of a substrate holder Grant 11,230,789 - Seki , et al. January 25, 2 | 2022-01-25 |
Device For Measuring Bump Height, Apparatus For Processing Substrate, Method Of Measuring Bump Height, And Storage Medium App 20210285893 - Okuzono; Takahisa ;   et al. | 2021-09-16 |
Paddle, Processing Apparatus Having The Paddle, And Method Of Producing The Paddle App 20210262111 - Masuda; Yasuyuki ;   et al. | 2021-08-26 |
Plating apparatus and plating method Grant 11,047,063 - Fujikata , et al. June 29, 2 | 2021-06-29 |
Paddle, Plating Apparatus Equipped With The Paddle, And Plating Method App 20210154629 - Masuda; Yasuyuki ;   et al. | 2021-05-27 |
Substrate holder, plating apparatus, plating method, and electric contact Grant 10,954,603 - Fujikata March 23, 2 | 2021-03-23 |
Paddle, plating apparatus equipped with the paddle, and plating method Grant 10,946,351 - Masuda , et al. March 16, 2 | 2021-03-16 |
Plating Method And Plating Apparatus App 20210062354 - Fujikata; Jumpei ;   et al. | 2021-03-04 |
Wave absorbing member attachable to paddle and plating apparatus including wave absorbing member Grant 10,914,020 - Chang , et al. February 9, 2 | 2021-02-09 |
Plating apparatus and plating method Grant 10,914,019 - Chang , et al. February 9, 2 | 2021-02-09 |
Device for inspecting a bump height surrounded by resist, device for processing a substrate, method for inspecting a bump height, and storage medium Grant 10,910,334 - Okuzono , et al. February 2, 2 | 2021-02-02 |
Plating method and plating apparatus Grant 10,865,492 - Fujikata , et al. December 15, 2 | 2020-12-15 |
Regulation Plate, Plating Apparatus Equipped With The Same, And Plating Method App 20200270760 - NAKAGAWA; Yoichi ;   et al. | 2020-08-27 |
Substrate-holder Inspection Apparatus, Plating Apparatus Including The Same, And Appearance Inspection Apparatus App 20200255968 - MUKAIYAMA; Yoshitaka ;   et al. | 2020-08-13 |
Electrical contact Grant D892,747 - Suzuki , et al. A | 2020-08-11 |
Leak Check Method, Leak Check Apparatus, Plating Method, And Plating Apparatus App 20200209099 - Suzuki; Kiyoshi ;   et al. | 2020-07-02 |
Method Of Removing Liquid From Seal Of A Substrate Holder App 20200199769 - Seki; Masaya ;   et al. | 2020-06-25 |
Plating device, plating method, substrate holder, resistance measuring module, and substrate holder testing method Grant 10,676,838 - Nagai , et al. | 2020-06-09 |
Copper Oxide Powder For Use In Plating Of A Substrate App 20200165737 - SHIMOYAMA; MASASHI ;   et al. | 2020-05-28 |
Electrical contact Grant D884,650 - Suzuki , et al. | 2020-05-19 |
Plating method and plating apparatus Grant 10,641,677 - Minami , et al. | 2020-05-05 |
Plating apparatus, plating method, and recording medium Grant 10,633,757 - Shimoyama , et al. | 2020-04-28 |
Electrolytic plating apparatus Grant 10,607,842 - Higaki , et al. | 2020-03-31 |
Method And Apparatus For Processing A Substrate App 20200080218 - Okuzono; Takahisa ;   et al. | 2020-03-12 |
Substrate holder, plating apparatus, and method for manufacturing substrate holder Grant 10,577,713 - Miyamoto , et al. | 2020-03-03 |
Plating apparatus and plating method Grant 10,577,714 - Mukaiyama , et al. | 2020-03-03 |
Plating apparatus, substrate holder, plating apparatus controlling method, and storage medium configured to store program for instructing computer to implement plating apparatus controlling method Grant 10,533,262 - Fujikata Ja | 2020-01-14 |
Substrate Holder And Plating Apparatus App 20190390359 - Seki; Masaya ;   et al. | 2019-12-26 |
Feeder capable of feeding anode and plating apparatus Grant 10,508,354 - Fujikata Dec | 2019-12-17 |
Method and apparatus for processing a substrate Grant 10,508,352 - Okuzono , et al. Dec | 2019-12-17 |
Method of adjusting plating apparatus, and measuring apparatus Grant 10,487,415 - Fujikata , et al. Nov | 2019-11-26 |
Device For Inspecting A Bump Height, Device For Processing A Substrate, Method For Inspecting A Bump Height, And Storage Medium App 20190348384 - OKUZONO; Takahisa ;   et al. | 2019-11-14 |
Plating Apparatus, Plating Method, And Recording Medium App 20190309436 - SHIMOYAMA; Masashi ;   et al. | 2019-10-10 |
Plating Method And Plating Apparatus App 20190249325 - MINAMI; Yoshio ;   et al. | 2019-08-15 |
Plating Apparatus And Plating Method App 20190226114 - FUJIKATA; Jumpei ;   et al. | 2019-07-25 |
Substrate Holder, Transport System Capable Of Transporting Substrate In Electronic Device Manufacturing Apparatus, And Electroni App 20190203373 - FUJIKATA; Jumpei | 2019-07-04 |
Powder Supply Apparatus And Plating System App 20190203374 - CHANG; Shao Hua ;   et al. | 2019-07-04 |
Wave Absorbing Member Attachable To Paddle And Plating Apparatus Including Wave Absorbing Member App 20190186038 - CHANG; SHAO HUA ;   et al. | 2019-06-20 |
Plating Apparatus, Substrate Holder, Plating Apparatus Controlling Method, And Storage Medium Configured To Store Program For In App 20190186039 - FUJIKATA; Jumpei | 2019-06-20 |
Plating method and plating apparatus Grant 10,309,030 - Minami , et al. | 2019-06-04 |
Plating apparatus and plating method Grant 10,294,578 - Fujikata , et al. | 2019-05-21 |
Plating Apparatus And Plating Method App 20190127875 - CHANG; Shao Hua ;   et al. | 2019-05-02 |
Plating apparatus, substrate holder, plating apparatus controlling method, and storage medium configured to store program for instructing computer to implement plating apparatus controlling method Grant 10,273,594 - Fujikata | 2019-04-30 |
Method Of Adjusting Plating Apparatus, And Measuring Apparatus App 20180371636 - FUJIKATA; Jumpei ;   et al. | 2018-12-27 |
Method of cleaning substrate holder Grant 10,119,198 - Fujikata , et al. November 6, 2 | 2018-11-06 |
Substrate holder, plating apparatus, and plating method Grant 10,113,246 - Fujikata , et al. October 30, 2 | 2018-10-30 |
Method of adjusting plating apparatus, and measuring apparatus Grant 10,100,424 - Fujikata , et al. October 16, 2 | 2018-10-16 |
Semiconductor Manufacturing Apparatus, Failure Prediction Method For Semiconductor Manufacturing Apparatus, And Failure Prediction Program For Semiconductor Manufacturing Apparatus App 20180294174 - FUJIKATA; Jumpei ;   et al. | 2018-10-11 |
Plating Method And Plating Apparatus App 20180282892 - FUJIKATA; Jumpei ;   et al. | 2018-10-04 |
Substrate Holder, Plating Apparatus, Plating Method, And Electric Contact App 20180230620 - FUJIKATA; Jumpei | 2018-08-16 |
Plating apparatus and plating method Grant 10,047,454 - Araki , et al. August 14, 2 | 2018-08-14 |
Paddle, Plating Apparatus Equipped With The Paddle, And Plating Method App 20180221835 - MASUDA; Yasuyuki ;   et al. | 2018-08-09 |
Plating Device, Plating Method, Substrate Holder, Resistance Measuring Module, And Substrate Holder Testing Method App 20180209062 - NAGAI; Mizuki ;   et al. | 2018-07-26 |
Method And Apparatus For Processing A Substrate App 20180179656 - Okuzono; Takahisa ;   et al. | 2018-06-28 |
Electrolytic Plating Apparatus App 20180166286 - HIGAKI; Takehiko ;   et al. | 2018-06-14 |
Substrate Holder, Plating Apparatus, And Method For Manufacturing Substrate Holder App 20180155847 - MIYAMOTO; Matsutaro ;   et al. | 2018-06-07 |
Substrate cleaning apparatus and substrate cleaning method Grant 9,972,510 - Fujikata May 15, 2 | 2018-05-15 |
Copper Oxide Powder For Use In Plating Of A Substrate, Method Of Plating A Substrate Using The Copper Oxide Powder, And Method Of Managing Plating Solution Using The Copper Oxide Powder App 20180105946 - SHIMOYAMA; Masashi ;   et al. | 2018-04-19 |
Feeder Capable Of Feeding Anode And Plating Apparatus App 20170356098 - FUJIKATA; Jumpei | 2017-12-14 |
Plating Apparatus, Substrate Holder, Plating Apparatus Controlling Method, And Storage Medium Configured To Store Program For Instructing Computer To Implement Plating Apparatus Controlling Method App 20170350033 - FUJIKATA; Jumpei | 2017-12-07 |
Plating Apparatus And Plating Method App 20170298531 - MUKAIYAMA; Yoshitaka ;   et al. | 2017-10-19 |
Apparatus And Method For Supplying Plating Solution To Plating Tank, Plating System, Powder Container, And Plating Method App 20170226656 - DOU; Chunhui ;   et al. | 2017-08-10 |
Plating Method And Plating Apparatus App 20170159203 - MINAMI; Yoshio ;   et al. | 2017-06-08 |
Plating method and plating apparatus Grant 9,611,563 - Minami , et al. April 4, 2 | 2017-04-04 |
Method Of Adjusting Plating Apparatus, And Measuring Apparatus App 20160369422 - FUJIKATA; Jumpei ;   et al. | 2016-12-22 |
Substrate Holder, Plating Apparatus, And Plating Method App 20160348264 - FUJIKATA; Jumpei ;   et al. | 2016-12-01 |
Method Of Cleaning Substrate Holder App 20160265135 - FUJIKATA; Jumpei ;   et al. | 2016-09-15 |
Plating Method And Plating Apparatus App 20160222540 - MINAMI; Yoshio ;   et al. | 2016-08-04 |
Plating apparatus and method of cleaning substrate holder Grant 9,376,760 - Fujikata , et al. June 28, 2 | 2016-06-28 |
Electrical contact for use in a plating apparatus Grant D758,973 - Fujikata , et al. June 14, 2 | 2016-06-14 |
Plating Apparatus And Plating Method App 20160145760 - FUJIKATA; Jumpei ;   et al. | 2016-05-26 |
Plating method and plating apparatus Grant 9,340,891 - Minami , et al. May 17, 2 | 2016-05-17 |
Electroplating method and electroplating apparatus for through-hole Grant 9,297,088 - Shimoyama , et al. March 29, 2 | 2016-03-29 |
Plating Apparatus And Plating Method App 20150354084 - ARAKI; Yuji ;   et al. | 2015-12-10 |
Substrate holder and plating apparatus Grant 9,175,416 - Fujikata November 3, 2 | 2015-11-03 |
Electrical contact for use in a plating apparatus Grant D742,329 - Fujikata , et al. November 3, 2 | 2015-11-03 |
Plating apparatus and plating method Grant RE45,687 - Saito , et al. September 29, 2 | 2015-09-29 |
Electrical contact for use in a plating apparatus Grant D725,600 - Fujikata , et al. March 31, 2 | 2015-03-31 |
Substrate holder and plating apparatus Grant 8,864,965 - Fujikata , et al. October 21, 2 | 2014-10-21 |
Sn ALLOY PLATING APPARATUS AND METHOD App 20140166492 - SHIMOYAMA; Masashi ;   et al. | 2014-06-19 |
Sealing ring Grant D705,280 - Kimura , et al. May 20, 2 | 2014-05-20 |
Electroplating Method And Electroplating Apparatus For Through-hole App 20140042032 - SHIMOYAMA; Masashi ;   et al. | 2014-02-13 |
Plating Apparatus And Method Of Cleaning Substrate Holder App 20140020720 - FUJIKATA; Jumpei ;   et al. | 2014-01-23 |
Plating Method And Plating Apparatus App 20130255360 - MINAMI; Yoshio ;   et al. | 2013-10-03 |
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20130220383 - FUJIKATA; Jumpei | 2013-08-29 |
Substrate Holder And Plating Apparatus App 20130192983 - FUJIKATA; Jumpei | 2013-08-01 |
Plating apparatus and plating method Grant 8,486,234 - Saito , et al. July 16, 2 | 2013-07-16 |
Electrical contact Grant D669,439 - Fujikata , et al. October 23, 2 | 2012-10-23 |
Plating Apparatus And Plating Method App 20120193220 - SAITO; Nobutoshi ;   et al. | 2012-08-02 |
Electroplating Method App 20120160696 - ARAKI; Yuji ;   et al. | 2012-06-28 |
Plating apparatus and plating method Grant 8,177,944 - Saito , et al. May 15, 2 | 2012-05-15 |
Sealing ring Grant D659,175 - Fujikata , et al. May 8, 2 | 2012-05-08 |
Substrate Holder And Plating Apparatus App 20120043200 - FUJIKATA; Jumpei ;   et al. | 2012-02-23 |
Electrical contact for use in a plating apparatus Grant D651,178 - Fujikata , et al. December 27, 2 | 2011-12-27 |
Sealing ring Grant D649,986 - Fujikata , et al. December 6, 2 | 2011-12-06 |
Plating apparatus and plating method App 20090139871 - Saito; Nobutoshi ;   et al. | 2009-06-04 |