Fanton; Jeffrey T.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fanton; Jeffrey T..The latest application filed is for "optical metrology device for measuring samples having thin or thick films".

Company Profile

3.28.27

Fanton; Jeffrey T. - Los Altos CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS) Grant 10,859,519 - Pois , et al. December 8, 2	2020-12-08
Optical metrology device for measuring samples having thin or thick films Grant 10,746,530 - Fanton A	2020-08-18
Optical Metrology Device For Measuring Samples Having Thin Or Thick Films App 20200182606 - Fanton; Jeffrey T.	2020-06-11
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs) App 20200088656 - Pois; Heath A. ; et al.	2020-03-19
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) Grant 10,481,112 - Pois , et al. Nov	2019-11-19
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs) App 20190086342 - Pois; Heath A. ; et al.	2019-03-21
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) Grant 10,119,925 - Pois , et al. November 6, 2	2018-11-06
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs) App 20170176354 - Pois; Heath A. ; et al.	2017-06-22
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) Grant 9,588,066 - Pois , et al. March 7, 2	2017-03-07
Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy Grant 9,297,771 - Fanton , et al. March 29, 2	2016-03-29
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs) App 20150204802 - Pois; Heath A. ; et al.	2015-07-23
Methods and Systems for Fabricating Platelets of a Monochromator for X-ray Photoelectron Spectroscopy App 20150052723 - Fanton; Jeffrey T. ; et al.	2015-02-26
System And Method For Characterizing A Film By X-ray Photoelectron And Low-energy X-ray Fluorescence Spectroscopy App 20130077742 - Schueler; Bruno W. ; et al.	2013-03-28
Modulated reflectance measurement system with multiple wavelengths Grant 7,619,741 - Nicolaides , et al. November 17, 2	2009-11-17
Modulated Reflectance Measurement System With Multiple Wavelengths App 20080309943 - Nicolaides; Lena ; et al.	2008-12-18
Modulated reflectance measurement system with multiple wavelengths Grant 7,423,757 - Nicolaides , et al. September 9, 2	2008-09-09
Measurement system with separate optimized beam paths Grant 7,227,637 - Wang , et al. June 5, 2	2007-06-05
Methods for eliminating artifacts in two-dimensional optical metrology App 20070076976 - Uhrich; Craig ; et al.	2007-04-05
Modulated reflectance measurement system with multiple wavelengths App 20060262314 - Nicolaides; Lena ; et al.	2006-11-23
Modulated reflectance measurement system with multiple wavelengths Grant 7,116,424 - Nicolaides , et al. October 3, 2	2006-10-03
Modulated reflectance measurement system with multiple wavelengths Grant 7,106,446 - Nicolaides , et al. September 12, 2	2006-09-12
Measurement system with separate optimized beam paths App 20060180761 - Wang; David Y. ; et al.	2006-08-17
Modulated reflectance measurement system with fiber laser technology Grant 7,079,249 - Nicolaides , et al. July 18, 2	2006-07-18
Measurement system with separate optimized beam paths Grant 7,061,614 - Wang , et al. June 13, 2	2006-06-13
Self-calibrating beam profile ellipsometer Grant 7,054,006 - Wang , et al. May 30, 2	2006-05-30
Modulated reflectance measurement system with multiple wavelengths App 20060092425 - Nicolaides; Lena ; et al.	2006-05-04
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,934,025 - Opsal , et al. August 23, 2	2005-08-23
Sample positioning system to improve edge measurements Grant 6,885,019 - Fanton , et al. April 26, 2	2005-04-26
Self-calibrating beam profile ellipsometer App 20040233436 - Wang, Haiming ; et al.	2004-11-25
Thin film optical measurement system and method with calibrating ellipsometer App 20040207845 - Opsal, Jon ; et al.	2004-10-21
Sample positioning system to improve edge measurements App 20040201839 - Fanton, Jeffrey T. ; et al.	2004-10-14
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,753,962 - Opsal , et al. June 22, 2	2004-06-22
X-ray reflectance measurement system with adjustable resolution Grant 6,744,850 - Fanton , et al. June 1, 2	2004-06-01
Stage rotation system to improve edge measurements Grant 6,707,056 - Fanton , et al. March 16, 2	2004-03-16
Modulated reflectance measurement system with multiple wavelengths App 20030234932 - Nicolaides, Lena ; et al.	2003-12-25
Modulated reflectance measurement system with fiber laser technology App 20030234933 - Nicolaides, Lena ; et al.	2003-12-25
Thin film optical measurement system and method with calibrating ellipsometer App 20030123060 - Opsal, Jon ; et al.	2003-07-03
Measurement system with separate optimized beam paths App 20030071996 - Wang, David Y. ; et al.	2003-04-17
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,515,746 - Opsal , et al. February 4, 2	2003-02-04
Stage rotation system to improve edge measurements App 20020191740 - Fanton, Jeffrey T. ; et al.	2002-12-19
Thin film optical measurement system and method with calibrating ellipsometer App 20020176081 - Opsal, Jon ; et al.	2002-11-28
X-ray reflectance measurement system with adjustable resolution App 20020097837 - Fanton, Jeffrey T. ; et al.	2002-07-25
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,411,385 - Aspnes , et al. June 25, 2	2002-06-25
Thin film optical measurement system and method with calibrating ellipsometer App 20010046049 - Aspnes, David E. ; et al.	2001-11-29
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,304,326 - Aspnes , et al. October 16, 2	2001-10-16
Thin film optical measurement system and method with calibrating ellipsometer Grant 5,900,939 - Aspnes , et al. May 4, 1	1999-05-04
Thin film optical measurement system and method with calibrating ellipsometer Grant 5,798,837 - Aspnes , et al. August 25, 1	1998-08-25
Integrated spectroscopic ellipsometer Grant 5,596,411 - Fanton , et al. January 21, 1	1997-01-21
Method and apparatus for evaluating the thickness of thin films Grant 5,181,080 - Fanton , et al. January 19, 1	1993-01-19

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